Manufacturing method for switching equipment based on process characteristics

Abstract

This invention proposes a manufacturing method for switching equipment based on process characteristics, comprising registering a physical equipment identification code and a virtual equipment identification code for a process equipment, performing path logic binding, binding the products to one of the physical equipment identification code and the virtual equipment identification code according to the process characteristics of each product, and a manufacturing execution system assigning the corresponding process equipment to the product according to the physical equipment identification code or the virtual equipment identification code bound to the product.

Claims

1. A manufacturing method for switching equipment based on process characteristics, comprising: providing a process equipment responsible for performing a process at a process station in a semiconductor plant; registering a physical equipment identifier in a manufacturing execution system (MAS), the physical equipment identifier corresponding to the process equipment; generating a virtual machine identifier in the MAS through virtual mapping, the virtual machine identifier corresponding to the process equipment, wherein the MAS can switch the identifier of the process equipment to either the physical equipment identifier or the virtual machine identifier; performing path logic binding, binding each product to either the physical equipment identifier or the virtual machine identifier according to the process characteristics of each product to be processed at the process station; when a product is to be processed, assigning the corresponding process equipment to the product according to the physical equipment identifier or the virtual machine identifier bound to the product; and performing the process on the product at the assigned process equipment.

2. The manufacturing method for switching equipment according to process characteristics as described in claim 1, wherein both the physical equipment identification code and the virtual equipment identification code have an available state and a disabled state. When the physical equipment identification code of the process equipment is in an available state, the manufacturing execution system sets the virtual equipment identification code to the disabled state. When the virtual equipment identification code of the process equipment is in an available state, the manufacturing execution system sets the physical equipment identification code to the disabled state.

3. The manufacturing method for switching machines according to process characteristics as described in claim 2, wherein the available state includes production state, standby state, and preventive maintenance state.

4. The manufacturing method for switching machines according to process characteristics as described in claim 2, wherein the shutdown state includes a non-scheduled shutdown state or a testing state.

5. The manufacturing method for switching machines according to process characteristics as described in claim 1, wherein the products include a first product and a second product, and both the physical machine identification code and the virtual machine identification code have an available state and an unavailable state, further comprising: when the work-in-process quantity of the first product exceeds the work-in-process quantity of the second product by a preset value, the manufacturing execution system sets the physical machine identification code to an available state and the virtual machine identification code to an unavailable state; and when the work-in-process quantity of the second product exceeds the work-in-process quantity of the first product by a preset value, the manufacturing execution system sets the virtual machine identification code to an available state and the physical machine identification code to an unavailable state.

6. The manufacturing method for switching machines according to process nature as described in claim 1, wherein the process nature includes non-copper process and copper process, and the non-copper process product and the copper process product are respectively bound to the physical machine identification code and the virtual machine identification code.

7. The manufacturing method for switching machines according to process characteristics as described in claim 1, wherein the path logic binding sets a physical product path or a virtual product path for the products, the physical product path pointing only to the physical machine identification code, and the virtual product path pointing only to the virtual machine identification code.

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