Axisymmetric heating assembly layout with double ended lamp

Abstract

This document describes an apparatus for heating a substrate within a substrate processing chamber. More specifically, a lamp module that may be used within the substrate processing chamber is described. The lamp module includes a reflector body. The reflector body is made of a reflective material. The reflector body includes grooves disposed in its surface and configured to direct radiant energy to the substrate. Each ring includes a plurality of grooves with different cross-sections to allow radiant energy to be directed from the same ring to different radial locations on the substrate. The grooves may be curved grooves or linear grooves.

Description

[Technical Field]

[0001] Specific embodiments of this disclosure generally relate to apparatus and methods for manufacturing semiconductor devices. More specifically, the apparatus disclosed herein relates to lamp holders and reflector assemblies within a semiconductor processing chamber. [Previous Technology]

[0002] Semiconductor substrates are processed for a wide range of applications, including the production of integrated devices and microdevices. During processing, the substrate is positioned on a base within a processing chamber. The base is supported by a support shaft that can rotate about a central axis. Precise control of the heating source is preferred to uniformly heat the substrate within tight tolerances. The temperature of the substrate affects the uniformity of the material deposited on it.

[0003] The ability to precisely control substrate temperature within the processing chamber has a significant impact on throughput and yield. Traditional processing chambers struggle to meet the temperature control standards required for manufacturing next-generation devices, while simultaneously satisfying the growing demand for improved yield and faster throughput. Traditional processing chambers also exploit the non-uniform power distribution on the substrate. The substrate temperature cycling caused by this non-uniform power distribution can damage or distort the substrate, and also increases the likelihood of different lamps burning out over a wider timeframe.

[0004] Therefore, there is a need for improved processing chambers and lamp module equipment that can uniformly heat the substrate, reduce temperature cycling, and increase lamp life. [Summary of the Invention]

[0005] This disclosure generally relates to apparatus for substrate processing, such as lamp assemblies for heating a substrate during a deposition process. In one specific embodiment, a lamp module for substrate processing is described. The lamp module includes a reflector body, one or more first grooves disposed within a first surface of the reflector body, and one or more second grooves disposed within the first surface of the reflector body. Each first groove is configured to receive a lamp. Each second groove is also configured to receive a lamp. The one or more first grooves and the one or more second grooves form a first groove ring. The cross-sectional shape of the one or more first grooves differs from the cross-sectional shape of the one or more second grooves.

[0006] In another specific embodiment, a different lamp module for substrate processing is described. The lamp module includes a reflector body, one or more first grooves disposed in a first surface of the reflector body, one or more second grooves disposed in the first surface of the reflector body, one or more third grooves disposed in the first surface of the reflector body, and one or more fourth grooves disposed in the first surface of the reflector body. Each first groove is configured to receive one or more linear lamps. Each second groove is configured to receive one or more linear lamps. The one or more first grooves and the one or more second grooves are oriented to form at least a portion of a first ring, while the one or more third grooves and the one or more fourth grooves are oriented to form at least a portion of a second ring surrounding the first ring.

[0007] In another specific embodiment, a different lamp module for substrate processing is described. The lamp module includes a reflector body, one or more first grooves disposed in a first surface of the reflector body, one or more second grooves disposed in the first surface of the reflector body, one or more third grooves disposed in the first surface of the reflector body, and one or more fourth grooves disposed in the first surface of the reflector body. The one or more first grooves and the one or more second grooves are oriented to form at least a portion of a first ring. The one or more third grooves and the one or more fourth grooves are oriented to form at least a portion of a second ring surrounding the first ring. The one or more first grooves have a different cross-sectional shape than the one or more second grooves.

Implementation Method

[0025] This disclosure relates to lamp and reflector assemblies within a semiconductor processing chamber. More specifically, the semiconductor processing chamber is a deposition chamber or an epitaxial deposition chamber. Lamp and reflector assemblies as described herein include linear or curved lamps arranged in an axisymmetric layout. Different lamp layouts and reflector configurations are described herein that advantageously reduce temperature cycling on the substrate being processed within the processing chamber, further adjust and improve temperature uniformity of the fixed chamber components, and achieve better window cooling. By arranging linear lamps in a circular pattern, temperature cycling on the substrate can be reduced because heating can be performed almost continuously at similar radial locations on the substrate. In arrangements where heating is discontinuous along the same radial locations, the lamps and reflectors are arranged to reduce the number of heated zones traversed at each location on the substrate.

[0026] FIG1 is a schematic diagram of a deposition chamber 100 according to a specific embodiment of the present disclosure. The deposition chamber 100 is an epitaxial deposition chamber. The deposition chamber 100 is used to grow an epitaxial film on a substrate (e.g., substrate 102). The deposition chamber 100 generates a precursor crossflow across the top surface 150 of the substrate 102.

[0027] The deposition chamber 100 includes an upper body 156, a lower body 148 disposed below the upper body 156, and a flow module 112 disposed between the upper body 156 and the lower body 148. The upper body 156, the flow module 112, and the lower body 148 form a chamber body. Disposed within the chamber body are a substrate support 106, an upper window 108, a lower window 110, a plurality of upper lamps 141, and a plurality of lower lamps 143. As shown, a controller 120 communicates with the deposition chamber 100 and controls the processing, such as the processing described herein. The substrate support 106 is disposed between the upper window 108 and the lower window 110. A plurality of upper lamps 141 are disposed between the upper window 108 and a cover 154. The plurality of upper lamps 141 form part of an upper lamp module 155. The cover 154 may include a plurality of sensors (not shown) disposed therein for measuring the temperature within the deposition chamber 100. A plurality of lower lights 143 are disposed between the lower window 110 and the floor 152. The plurality of lower lights 143 form part of a lower light module 145. The upper window 108 is an upper dome and is formed of an energy transmission material such as quartz. The lower window 110 is a lower dome and is formed of an energy transmission material such as quartz.

[0028] A processing space 136 is formed between the upper window 108 and the lower window 110. The processing space 136 has a substrate support 106 disposed therein. The substrate support 106 includes a top surface on which a substrate 102 is disposed. The substrate support 106 is attached to a shaft 118. The shaft is connected to a motion assembly 121. The motion assembly 121 includes one or more actuators and / or adjustment devices that provide movement and / or adjustment of the shaft 118 and / or the substrate support 106 within the processing space 136. The motion assembly 121 includes a rotary actuator 122 that rotates the shaft 118 and / or the substrate support 106 about a longitudinal axis A of the deposition chamber 100. The motion assembly 121 also includes a vertical actuator 124 to raise and lower the substrate support 106 in the z-direction. The motion assembly includes a tilt adjustment device 126 for adjusting the planar orientation of the substrate support 106, and a lateral adjustment device 128 for adjusting the position of the axis 118 and the substrate support 106 left and right in the processing space 136.

[0029] The substrate support 106 may include a lifting pin hole 107 disposed therein. The lifting pin hole 107 is sized to receive a lifting pin 132 for lifting the substrate 102 from the substrate support 106 before or after performing the deposition process. When the substrate support 106 descends from the processing position to the transport position, the lifting pin 132 may rest on the lifting pin stop 134.

[0030] The flow module 112 includes a plurality of process gas inlets 114, a plurality of purge gas inlets 164, and one or more exhaust gas outlets 116. The plurality of process gas inlets 114 and the plurality of purge gas inlets 164 are disposed on one side of the flow module 112 opposite to the one or more exhaust gas outlets 116. One or more flow deflectors 146 are disposed below the plurality of process gas inlets 114 and the one or more exhaust gas outlets 116. The flow deflectors 146 are disposed above the purge gas inlets 164. A liner 163 is disposed on the inner surface of the flow module 112 and protects the flow module 112 from the reactive gases used during the deposition process. The process gas inlets 114 and the purge gas inlets 164 are positioned to allow gas flow parallel to the top surface 150 of the substrate 102 disposed within the processing space 136. The process gas inlets 114 are fluidly connected to a process gas source 151. The purge gas inlet 164 is fluidly connected to the purge gas source 162. One or more exhaust outlets 116 are fluidly connected to the exhaust pump 157.

[0031] FIG. 2A illustrates a bottom view of a first specific embodiment of the upper lamp module 155a. The upper lamp module 155a includes a reflector body 200 and a plurality of upper lamps 141 (FIG. 1). The reflector body 200 includes a plurality of grooves formed in a bottom surface 202. The bottom surface 202 can be described as a first surface of the reflector body 200. A top surface 203 (FIG. 2B) is disposed opposite to the bottom surface 202 and can be described as a second surface. The top surface 203 is parallel to the bottom surface 202. The bottom surface 202 includes a plurality of grooves 206a-206h.

[0032] Each of the plurality of recesses 206a-206h is configured to hold a horizontal lamp extending along the direction of each of the recesses 206a-206h. The wall 216 of each of the plurality of recesses 206a-206h has a generally elliptical, circular, parabolic or oval cross-section and is configured to direct the energy emitted by the lamp to a substrate within the deposition chamber 100.

[0033] In some embodiments, the reflector body 200 is formed of a reflective material, such as aluminum or steel. In some embodiments, the reflector body 200 is formed of a first material such as aluminum or steel and plated with a second material. The second material can be any of copper, nickel, brass, bronze, silver, gold, aluminum, or alloys thereof. The second material can be polished to increase reflectivity. In some embodiments, the entire reflector body 200 is formed of the second material. For wavelengths between about 700 nm and about 15000 nm, for example, about 700 nm to about 1000 nm or about 1000 nm to about 15000 nm, the bottom surface 202 can have a reflectivity greater than about 90%, for example, greater than about 98%. The bottom surface 202 is made of or coated with the second material.

[0034] A plurality of grooves 206a-206h are arranged to form a concentric ring along the bottom surface 202. In the specific embodiment of FIG. 2A, the first groove 206a and the second groove 206b form a first ring. The third groove 206c and the fourth groove 206d form a second ring. The fifth groove 206e and the sixth groove 206f form a third ring. The seventh groove 206g and the eighth groove 206h form a fourth ring. The second ring surrounds the first ring and is concentric with the first ring. The third ring is external to the second ring and is concentric with the second ring. The fourth ring is external to the third ring and is concentric with the third ring. As shown herein, each of the plurality of grooves 206a-206h forms a semicircle, such that the first groove 206a forms a first semicircle, the second groove 206b forms a second semicircle, the third groove 206c forms a third semicircle, the fourth groove 206d forms a fourth semicircle, and so on. In alternative embodiments, each of the plurality of grooves 206a-206h does not form a complete semicircle, but rather forms a circle of less than 50%, for example, an arc extending less than 180 degrees around a central axis. Each of the plurality of grooves 206a-206h may also form a circle of less than 40%, for example, an arc extending less than approximately 145 degrees around a central axis. Each of the plurality of grooves 206a-206h may also form a circle of approximately 30% to approximately 35%, for example, an arc extending approximately 105 to approximately 130 degrees around a central axis. Each of the plurality of grooves 206a-206h may also form a circle of less than approximately 30%, for example, an arc extending less than 105 degrees around a central axis. Each of the plurality of grooves 206a-206h may also form an arc of approximately 20% to approximately 29%, for example, an arc extending approximately 70 to approximately 100 degrees around a central axis. Each of the plurality of grooves 206a-206h is a curved groove and extends along the curved length.

[0035] Each recess 206a-206h has at least one through-hole 208. The hole 208 extends from the bottom of one of the recesses 206a-206h to the top surface 203 and allows an electrical connection for a lamp to be disposed therethrough. As shown herein, each of the recesses 206a-206h includes at least two holes 208, for example, two holes 208. Each hole 208 is located near the distal end of the recess 206a-206h, such that one hole 208 is located at one distal end of one of the recesses 206a-206h, and a second hole 208 is located at the opposite distal end of the same recess 206a-206h. In addition to providing electrical support, the holes 208 can also be used to allow mechanical support for the lamps arranged within each recess 206a-206h. Each lamp within the recesses 206a-206h includes a filament 205 (four are shown in dashed lines for clarity). The filament 205 is shown in some of the grooves 206a-206h in this document, and the position of the linear filament relative to each of the grooves 206a-206h is shown. The filament 205 is disposed between two holes 208 formed in the grooves 206a-206h.

[0036] The grooves 206a-206h are divided into at least two parts. As shown in FIG2A, the grooves 206a-206h are divided into two halves across the first cross-section S1. Separating the grooves 206a-206h allows the grooves on both sides of the first cross-section S1 to have different cross-sectional shapes and is configured to direct energy from the lamp to different radial positions on the substrate. A separator 210 is disposed between the front half and the rear half. The front half is composed of the first groove 206a, the third groove 206c, the fifth groove 206e, and the seventh groove 206g. The rear half is composed of the second groove 206b, the fourth groove 206d, the sixth groove 206f, and the eighth groove 206h. The separator 210 is a plane between the two halves. The separator 210 may protrude from the bottom surface 202 or be in line with the bottom surface 202. The separator 210 may have one or more holes or openings disposed therethrough for one or more of a pyrometer, a spot heating device, a cooling gas passage, or a heating gas passage. The separator 210 extends across the length of the bottom surface 202, and also allows the pyrometer aperture to be used to measure the temperature at a plurality of locations along the substrate or substrate support 106.

[0037] Additional sections S2, S3, and S4 are provided through the reflector body 200. The additional sections S2, S3, and S4 are shown to illustrate additional locations where a separator similar to the separator 210 can be positioned, and to separate the grooves 206a-206h to form smaller grooves. The second section S2 is set at an angle between approximately 30 degrees and approximately 70 degrees to the first section S1. The third section S3 is set at an angle between approximately 90 degrees to the first section S1. The fourth section S4 is set at an angle between approximately -30 degrees and approximately -70 degrees to the first section S1. If the grooves 206a-206h are separated by crossing the third section S3 in addition to crossing the first section S1, then the grooves 206a-206h form a quarter circle, or a curve smaller than a quarter circle. The grooves 206a-206h may be further separated across the second section S2 and the fourth section S4. The grooves 206a-206h can thus be separated to form a circle smaller than 13%, for example, a 1 / 8 circle. Sections S1, S2, S3 and S4 thus divide the reflector body 200 into segments 212, each of which is fan-shaped or disc-shaped.

[0038] In some embodiments, each of the grooves 206a-206h includes an additional sub-groove portion, such that each of one or more grooves 206a-206h includes a plurality of sub-parts, such as one groove sub-part, two groove sub-parts, three groove sub-parts, four groove sub-parts, or five groove sub-parts. The number of individual grooves or groove sub-parts including each of the first groove 206a, second groove 206b, third groove 206c, fourth groove 206d, fifth groove 206e, sixth groove 206f, seventh groove 206g, or eighth groove 206h varies depending on the desired radiation distribution on the substrate. In some embodiments, the individual grooves forming the grooves 206a-206h are connected to form a single groove, but the cross-section of the groove changes along the cross-section line, for example, one of a first cross-section S1, a second cross-section S2, a third cross-section S3, or a fourth cross-section S4. In this specific embodiment, the plurality of individual grooves forming grooves 206a-206h are still referred to as individual grooves, but in fact they are single continuous grooves with varying cross-sections.

[0039] Figure 2B shows a cross-sectional view of a first specific embodiment of the upper lamp module 155a. This cross-section is taken along plane 2B-2B and divides the reflector body 200 into two halves. Each of the grooves 206a-206h is centered on axis A. Each of the grooves 206a-206h is configured to guide radiant energy to different portions of the substrate 102. Although the first groove 206a and the second groove 206b form a first ring, the first groove 206a and the second groove 206b have different cross-sectional shapes such that lamps disposed within each of the first groove 206a and the second groove 206b can be oriented toward different radial positions on the substrate 102. The wall 216 of each groove 206a-206h forms the cross-sectional shape of the groove 206a-206h. The wall 216 of each of the grooves 206a-206h forms at least a portion of an elliptical, circular, elliptical, parabolic, elliptical, hyperbolic, or other suitable curved shape.

[0040] The wall 216 of the first groove 206a has a different cross-sectional shape than the wall 216 of the second groove 206b, such that the first groove 206a and the second groove 206b guide radiant energy in different directions and / or in directions that are not mirror images of each other. The wall 216 of the third groove 206c has a different cross-sectional shape than the wall 216 of the fourth groove 206d. The wall 216 of the fifth groove 206e has a different cross-sectional shape than the wall 216 of the sixth groove 206f. The wall 216 of the seventh groove 206g has a different cross-sectional shape than the wall 216 of the eighth groove 206h.

[0041] The cross-section of the first groove 206a focuses light in a first direction, which has a first angle θ1 relative to the vertical plane and the vertical plane is parallel to axis A. The cross-section of the second groove 206b focuses light in a second direction, which has a second angle θ2 relative to the vertical plane. The cross-section of the third groove 206c focuses light in a third direction, which has a third angle θ3 relative to the vertical plane. The cross-section of the fourth groove 206d focuses light in a fourth direction, which has a fourth angle θ4 relative to the vertical plane. The cross-section of the fifth groove 206e focuses light in a fifth direction, which has a fifth angle θ5 relative to the vertical plane. The cross-section of the sixth groove 206f focuses light in a sixth direction, which has a sixth angle θ6 relative to the vertical plane. The cross-section of the seventh groove 206g focuses light in a seventh direction, which has a seventh angle θ7 relative to the vertical plane. The cross-section of the eighth groove 206h focuses light in an eighth direction, which has an eighth angle θ8 relative to the vertical plane.

[0042] The first angle θ1 is different from the second angle θ2. The third angle θ3 is different from the fourth angle θ4. The fifth angle θ5 is different from the sixth angle θ6. The seventh angle θ7 is different from the eighth angle θ8.

[0043] Because each group of grooves 206a-206h within each ring is shaped to direct energy to different radial locations along the wafer, a high degree of thermal control is achieved. Grooves 206a-206h can be grouped so that a controller can simultaneously control some grooves 206a-206h. Each of the individual grooves within the first groove 206a is controlled together. Each of the individual grooves within the second groove 206b is controlled together. Each of the individual grooves within the third groove 206c is controlled together. Each of the individual grooves within the fourth groove 206d is controlled together. Each of the individual grooves within the fifth groove 206e is controlled together. Each of the individual grooves within the sixth groove 206f is controlled together. Each of the individual grooves within the seventh groove 206g is controlled together. Each of the individual grooves within the eighth groove 206h is controlled together.

[0044] FIG. 3A shows a plan view of a first specific embodiment of the lower lamp module 145a. The lower lamp module 145a includes a reflector body 300 and a plurality of lower lamps 143 (FIG. 1). The reflector body 300 includes a plurality of grooves formed in a top surface 302. The top surface 302 can be described as a first surface of the reflector body 300. A bottom surface 303 (FIG. 3B) is disposed opposite to the top surface 302 and can be described as a second surface. The bottom surface 303 is parallel to the top surface 302. The top surface 302 includes a plurality of grooves 306a-306h.

[0045] Each of the plurality of recesses 306a-306h is configured to hold a horizontal lamp extending along the direction of each of the recesses 306a-306h. The wall 316 of each of the plurality of recesses 306a-306h has a generally elliptical, circular, parabolic or oval cross-section and is configured to direct the energy emitted by the lamp to a substrate within the deposition chamber 100.

[0046] In some embodiments, the reflector body 300 is formed of a reflective material, such as aluminum or steel. In some embodiments, the reflector body 300 is formed of a first material such as aluminum or steel and plated with a second material. The second material can be any of copper, nickel, brass, bronze, silver, gold, aluminum, or alloys thereof. The second material can be polished to increase reflectivity. In some embodiments, the entire reflector body 300 is formed of the second material. For wavelengths between about 700 nm and about 15000 nm, for example, about 700 nm to about 1000 nm or about 1000 nm to about 15000 nm, the top surface 302 can have a reflectivity greater than about 90%, for example, greater than about 98%. The top surface 302 is made of or coated with the second material.

[0047] A plurality of grooves 306a-306h are arranged to form a concentric ring along the top surface 302. In the specific embodiment of FIG. 2A, the first groove 306a and the second groove 306b form a first ring. The third groove 306c and the fourth groove 306d form a second ring. The fifth groove 306e and the sixth groove 306f form a third ring. The seventh groove 306g and the eighth groove 306h form a fourth ring. The second ring surrounds the first ring and is concentric with the first ring. The third ring is external to the second ring and is concentric with the second ring. The fourth ring is external to the third ring and is concentric with the third ring. As shown herein, each of the plurality of grooves 306a-306h forms a semicircle, such that the first groove 306a forms a first semicircle, the second groove 306b forms a second semicircle, the third groove 306c forms a third semicircle, the fourth groove 306d forms a fourth semicircle, and so on. In alternative embodiments, each of the plurality of grooves 306a-306h does not form a complete semicircle, but rather forms a circle of less than 50%, for example, an arc extending less than 180 degrees around a central axis. Each of the plurality of grooves 306a-306h may also form a circle of less than 40%, for example, an arc extending less than approximately 145 degrees around a central axis. Each of the plurality of grooves 306a-306h may also form a circle of approximately 30% to approximately 35%, for example, an arc extending approximately 105 to approximately 130 degrees around a central axis. Each of the plurality of grooves 306a-306h may also form a circle of less than approximately 30%, for example, an arc extending less than 105 degrees around a central axis. Each of the plurality of grooves 306a-306h may also form an arc of approximately 20% to approximately 29%, for example, an arc extending approximately 70 to approximately 100 degrees around a central axis. Each of the plurality of grooves 306a-306h is a curved groove and extends along the curved length.

[0048] Each recess 306a-306h has at least one through-hole 308. Each hole 308 extends from the top of one of the recesses 306a-306h to the bottom surface 303 and allows an electrical connection for a lamp to be disposed therethrough. As shown herein, each of the recesses 306a-306h includes at least two holes 308, for example, two holes 308. Each hole 308 is located near the distal end of the recess 306a-306h, such that one hole 308 is located at one distal end of one of the recesses 306a-306h, and a second hole 308 is located at the opposite distal end of the same recess 306a-306h. In addition to providing electrical support, the holes 308 can also be used to allow mechanical support for the lamps arranged within each recess 306a-306h. Each lamp within the recesses 306a-306h includes a filament 305 (four are shown in dashed lines for clarity). The filament 305 is shown in some of the grooves 306a-306h herein, and the position of the linear filament relative to each of the grooves 306a-306h is shown. The filament 305 is disposed between two holes 308 formed in the grooves 306a-306h.

[0049] The grooves 306a-306h are divided into at least two parts. As shown in Figure 2A, the grooves 306a-306h span the first cross section S5 and are divided into two halves. The front half is composed of the first groove 306a, the third groove 306c, the fifth groove 306e, and the seventh groove 306g. The rear half is composed of the second groove 306b, the fourth groove 306d, the sixth groove 306f, and the eighth groove 306h.

[0050] An opening 310 is formed through the reflector body 300. The opening 310 is a channel extending from the top surface 302 to the bottom surface 303 of the reflector body 300. The opening 310 allows the shaft 118 of the substrate support 106 to pass through it. The opening is located inside the first recessed ring, for example, between the first recess 306a and the second recess 306b. The opening 310 passes through the center of the reflector body 300 and is positioned around axis A.

[0051] Additional sections S6, S7, and S8 are provided through the reflector body 300. The additional sections S6, S7, and S8 are shown to illustrate additional locations where grooves 306a-306h can be separated to form smaller grooves. The second section S6 is set at approximately a 90-degree angle to the first section S1. The third section S7 is set at an angle between approximately -30 degrees and approximately -70 degrees to the first section S5. The fourth section S8 is set at an angle between approximately 30 degrees and approximately 70 degrees to the first section S5. If grooves 306a-306h are separated by crossing both the first section S5 and the third section S7, then grooves 306a-306h form a quarter circle, or a curve smaller than a quarter circle. Grooves 306a-306h can also be separated across the second section S6 and the fourth section S8. Grooves 306a-306h can therefore be separated to form circles smaller than 13%, such as 1 / 8 circle. Sections S5, S6, S7 and S8 thus divide the reflector body 300 into portions 312, each portion 312 being fan-shaped or disc-shaped.

[0052] In some embodiments, each of the grooves 306a-306h includes an additional sub-groove portion, such that each of one or more grooves 306a-306h includes multiple objects, such as one groove sub-part, two groove sub-parts, three groove sub-parts, four groove sub-parts, or five groove sub-parts. The number of individual grooves or groove sub-parts including each of the first groove 306a, second groove 306b, third groove 306c, fourth groove 306d, fifth groove 306e, sixth groove 306f, seventh groove 306g, or eighth groove 306h varies depending on the desired radiation distribution on the substrate. In some embodiments, the individual grooves forming the grooves 306a-306h are connected to form a single groove, but the cross-section of the groove changes along a cross-section line, for example, a fifth cross-section S5, a sixth cross-section S6, a seventh cross-section S7, or an eighth cross-section S8. In this specific embodiment, the plurality of individual grooves forming grooves 306a-306h are still referred to as individual grooves, but in fact they are single continuous grooves with varying cross-sections.

[0053] Figure 3B shows a cross-sectional view of a first specific embodiment of the lower lamp module 145a. This cross-section is taken along plane 3B-3B and divides the reflector body 300 into two halves. Each of the grooves 306a-306h is centered on axis A. Each of the grooves 306a-306h is configured to guide radiant energy to different portions of the substrate 102 or substrate support 106. Although the first groove 306a and the second groove 306b form a first ring, the first groove 306a and the second groove 306b have different cross-sectional shapes such that lamps disposed within each of the first groove 306a and the second groove 306b can be oriented toward different radial positions on the substrate 102. The wall 316 of each groove 306a-306h forms the cross-sectional shape of the groove 306a-306h. The wall 316 of each of the grooves 306a-306h forms at least a portion of an elliptical, circular, elliptical, parabolic, elliptical, hyperbolic, or other suitable curved shape.

[0054] The wall 316 of the first groove 306a has a different cross-sectional shape than the wall 316 of the second groove 306b. The wall 316 of the third groove 306c has a different cross-sectional shape than the wall 316 of the fourth groove 306d. The wall 316 of the fifth groove 306e has a different cross-sectional shape than the wall 316 of the sixth groove 306f. The wall 316 of the seventh groove 306g has a different cross-sectional shape than the wall 316 of the eighth groove 306h.

[0055] The cross-section of the first groove 306a focuses light in a first direction, which has a first angle θ9 relative to the vertical plane and the vertical plane is parallel to axis A. The cross-section of the second groove 306b focuses light in a second direction, which has a second angle θ10 relative to the vertical plane. The cross-section of the third groove 306c focuses light in a third direction, which has a third angle θ11 relative to the vertical plane. The cross-section of the fourth groove 306d focuses light in a fourth direction, which has a fourth angle θ12 relative to the vertical plane. The cross-section of the fifth groove 306e focuses light in a fifth direction, which has a fifth angle θ13 relative to the vertical plane. The cross-section of the sixth groove 306f focuses light in a sixth direction, which has a sixth angle θ14 relative to the vertical plane. The cross-section of the seventh groove 306g focuses light in a seventh direction, which has a seventh angle θ15 relative to the vertical plane. The cross-section of the eighth groove 306h focuses light in an eighth direction, which has an eighth angle θ16 relative to the vertical plane.

[0056] The first angle θ9 is different from the second angle θ10. The third angle θ11 is different from the fourth angle θ12. The fifth angle θ13 is different from the sixth angle θ14. The seventh angle θ15 is different from the eighth angle θ16.

[0057] Because each group of grooves 306a-306h within each ring is shaped to direct energy to different radial locations along the wafer, a high degree of thermal control is achieved. Grooves 306a-306h can be grouped so that a controller can simultaneously control some grooves 306a-306h. Each of the individual grooves within the first groove 306a is controlled together. Each of the individual grooves within the second groove 306b is controlled together. Each of the individual grooves within the third groove 306c is controlled together. Each of the individual grooves within the fourth groove 306d is controlled together. Each of the individual grooves within the fifth groove 306e is controlled together. Each of the individual grooves within the sixth groove 306f is controlled together. Each of the individual grooves within the seventh groove 306g is controlled together. Each of the individual grooves within the eighth groove 306h is controlled together.

[0058] FIG. 4A illustrates a bottom view of a second specific embodiment of the upper lamp module 155b. The upper lamp module 155b includes a reflector body 400 and a plurality of upper lamps 141 (FIG. 1). The reflector body 400 includes a plurality of grooves formed in a bottom surface 402. The bottom surface 402 can be described as a first surface of the reflector body 400. A top surface 403 (FIG. 4B) is disposed opposite to the bottom surface 402 and can be described as a second surface. The top surface 403 is parallel to the bottom surface 402. The bottom surface 402 includes a plurality of grooves 406a-406h.

[0059] Each of the plurality of recesses 406a-406h is configured to hold a horizontal lamp extending along the direction of each of the recesses 406a-406h. The wall 416 of each of the plurality of recesses 406a-406h has a generally elliptical, circular, parabolic or oval cross-section and is configured to direct the energy emitted by the lamp to a substrate support within the deposition chamber 100.

[0060] In some embodiments, the reflector body 400 is formed of a reflective material, such as aluminum or steel. In some embodiments, the reflector body 400 is formed of a first material such as aluminum or steel and plated with a second material. The second material can be any of copper, nickel, brass, bronze, silver, gold, aluminum, or alloys thereof. The second material can be polished to increase reflectivity. In some embodiments, the entire reflector body 400 is formed of the second material. For wavelengths between about 700 nm and about 15000 nm, for example, about 700 nm to about 1000 nm or about 1000 nm to about 15000 nm, the bottom surface 402 can have a reflectivity greater than about 90%, for example, greater than about 98%. The bottom surface 402 is made of or coated with the second material.

[0061] A plurality of grooves 406a-406h are arranged to form a concentric ring along the bottom surface 402. In the specific embodiment of FIG. 2A, one or more first grooves 406a and one or more second grooves 406b form a first ring. One or more third grooves 406c and one or more fourth grooves 406d form a second ring. One or more fifth grooves 406e and one or more sixth grooves 406f form a third ring. One or more seventh grooves 406g and one or more eighth grooves 406h form a fourth ring. The second ring surrounds the first ring and is concentric with the first ring. The third ring connects to the second ring and is concentric with the second ring. The fourth ring connects to the third ring and is concentric with the third ring. As shown herein, each of the plurality of grooves 406a-406h forms a semicircle, such that one or more first grooves 406a form a first semicircle, one or more second grooves 406b form a second semicircle, one or more third grooves 406c form a third semicircle, one or more fourth grooves 406d form a fourth semicircle, and so on. In an alternative embodiment, each of the plurality of grooves 406a-406h does not form a complete semicircle, but rather forms a circle less than 50%, for example, an arc extending less than 180 degrees around a central axis. Each of the plurality of grooves 406a-406h may also form a circle less than 40%, for example, an arc extending less than about 145 degrees around a central axis. Each of the plurality of grooves 406a-406h may also form a circle of about 30% to about 35%, for example, an arc extending about 105 degrees to about 130 degrees around a central axis. Each of the plurality of grooves 406a-406h may also form a circle of less than about 30%, for example, an arc extending less than 105 degrees around a central axis. Each of the plurality of grooves 406a-406h may also form an arc of about 20% to about 29%, for example, an arc extending about 70 degrees to about 100 degrees around a central axis.

[0062] Each of the plurality of recesses 406a-406h is formed by a plurality of individual recesses 420. Each individual recess 420 is a linear recess and is configured to accommodate a linear lamp therein. The linear length of each individual recess 420 is from about 35 mm to about 175 mm, for example from about 50 mm to about 150 mm. The linear length of each of the individual recesses 420 is selected to enable uniform heating within a predetermined annular hole in the substrate, while also reducing the number of lamps in the upper lamp module 155b. Reducing the number of lamps in the upper lamp module 155b reduces costs, simplifies maintenance, and reduces the number of holes 408 formed through the reflector body 400.

[0063] Each individual recess 420 within the plurality of recesses 406a-406h has at least one hole 408 formed therethrough. The hole 408 extends from the bottom of one of the recesses 406a-406h to the top surface 403 and allows an electrical connection for a lamp to be disposed therethrough. As shown herein, each individual recess 420 of the recesses 406a-406h includes at least two holes 408, for example, two holes 408. Each hole 408 is located near the distal end of the recesses 406a-406h, such that one hole 408 is located at one distal end of one of the individual recesses 420, and a second hole 408 is located at the opposite distal end of the same individual recess 420. In addition to providing electrical support, the holes 408 can also be used to allow mechanical support for the lamps arranged within each recess 406a-406h. Each linear lamp within the individual recess 420 includes a filament 405 (seven are shown in dashed lines for clarity). The filament 405 is shown in some of the individual recesses 420 herein, and the position of the linear filament relative to each of the individual recesses 420 is shown. The filament 405 is disposed between two holes 408 formed in the recesses 406a-406i.

[0064] The grooves 406a-406h are divided into at least two parts. As shown in Figure 4A, the grooves 406a-406h are divided into two halves across the first cross section S1. The front half is composed of the first groove 406a, the third groove 406c, the fifth groove 406e, and the seventh groove 406g. The rear half is composed of the second groove 406b, the fourth groove 406d, the sixth groove 406f, and the eighth groove 406h. A flat surface 410 is disposed in the middle of the grooves 406a-406h and passes through the central axis A of the reflector body 400. The flat surface 410 may protrude from the bottom surface 402 or be in a straight line with the bottom surface 402.

[0065] There may be 2-10 individual grooves 420, forming each of the first groove 406a, second groove 406b, third groove 406c, fourth groove 406d, fifth groove 406e, sixth groove 406f, seventh groove 406g, and eighth groove 406h. There may be 2-5 individual grooves 420, forming each of the first groove 406a, second groove 406b, third groove 406c, fourth groove 406d, fifth groove 406e, sixth groove 406f, seventh groove 406g, and eighth groove 406h. The number of individual grooves 420, including each of the first groove 406a, second groove 406b, third groove 406c, fourth groove 406d, fifth groove 406e, sixth groove 406f, seventh groove 406g, or eighth groove 406h, varies depending on the desired radiation distribution on the substrate. In some specific embodiments, the individual grooves forming grooves 406a-406h are connected to form a single groove, but the cross-section of the groove changes at a section line, for example, a first section plane S1 or another section plane (not shown). In this specific embodiment, the plurality of individual grooves forming grooves 406a-406h are still referred to as individual grooves, but are actually a single continuous groove with a varying cross-section.

[0066] Figure 4B shows a cross-sectional view of a second specific embodiment of the upper lamp module 155b. This cross-section is taken along plane 4B-4B and divides the reflector body 400 in two halves. Each of the grooves 406a-406h is centered on axis A. Each of the grooves 406a-406h is configured to guide radiant energy to different portions of the substrate 102. Although one or more first grooves 406a and one or more second grooves 406b form a first ring, the one or more first grooves 406a and one or more second grooves 406b have different cross-sectional shapes so that the lamp disposed in each of the one or more first grooves 406a and one or more second grooves 406b can be oriented toward different radial positions on the substrate 102. The wall 416 of each groove 406a-406h forms the cross-sectional shape of the groove 406a-406h. The wall 416 of each of the grooves 406a-406h forms at least a portion of an elliptical, circular, elliptical, parabolic, elliptical, hyperbolic or other suitable curved shape.

[0067] The wall 416 of one or more first grooves 406a has a different cross-sectional shape than the wall 416 of one or more second grooves 406b. The wall 416 of one or more third grooves 406c has a different cross-sectional shape than the wall 416 of fourth groove 406d. The wall 416 of one or more fifth grooves 406e has a different cross-sectional shape than the wall 416 of one or more sixth grooves 206f. The wall 216 of one or more seventh grooves 406g has a different cross-sectional shape than the wall 416 of one or more eighth grooves 406h.

[0068] The cross-section of one or more first grooves 406a focuses light in a first direction, the first direction having a first angle θ1 relative to a vertical plane and the vertical plane being parallel to axis A. The cross-section of one or more second grooves 406b focuses light in a second direction, the second direction having a second angle θ2 relative to a vertical plane. The cross-section of one or more third grooves 406c focuses light in a third direction, the third direction having a third angle θ3 relative to a vertical plane. The cross-section of a fourth groove 406d focuses light in a fourth direction, the fourth direction having a fourth angle θ4 relative to a vertical plane. The cross-section of one or more fifth grooves 406e focuses light in a fifth direction, the fifth direction having a fifth angle θ5 relative to a vertical plane. The cross-section of one or more sixth grooves 406f focuses light in a sixth direction, the sixth direction having a sixth angle θ6 relative to a vertical plane. The cross-section of one or more seventh grooves 206g focuses light in a seventh direction, the seventh direction having a seventh angle θ7 relative to a vertical plane. The cross-section of one or more eighth grooves 206h allows light to be focused in the eighth direction, which has an eighth angle θ8 relative to the vertical plane.

[0069] The first angle θ1 is different from the second angle θ2. The third angle θ3 is different from the fourth angle θ4. The fifth angle θ5 is different from the sixth angle θ6. The seventh angle θ7 is different from the eighth angle θ8. In some specific embodiments, the individual grooves within the plurality of grooves 406a-406h can be oriented in different directions and have a cross-sectional shape different from that of adjacent grooves within the same groove 406a-406h.

[0070] Because each group of grooves 406a-406h within each ring is shaped to direct energy to different radial locations along the wafer, a high degree of thermal control is achieved. Grooves 406a-406h can be grouped such that a controller can simultaneously control some grooves 406a-406h. Each individual groove 420 within the first groove 406a is controlled together. Each individual groove 420 within the second groove 406b is controlled together. Each individual groove 420 within the third groove 406c is controlled together. Each individual groove 420 within the fourth groove 406d is controlled together. Each individual groove 420 within the fifth groove 406e is controlled together. Each individual groove 420 within the sixth groove 406f is controlled together. Each individual groove 420 within the seventh groove 406g is controlled together. Each individual groove 420 within the eighth groove 406h is controlled together.

[0071] FIG. 5A shows a plan view of a second specific embodiment of the lower lamp module 145b. The lower lamp module 145b includes a reflector body 500 and a plurality of lower lamps 143 (FIG. 1). The reflector body 500 includes a plurality of grooves formed in a top surface 502. The top surface 502 can be described as a first surface of the reflector body 500. A bottom surface 503 (FIG. 5B) is disposed opposite to the top surface 502 and can be described as a second surface. The bottom surface 503 is parallel to the top surface 502. The top surface 502 includes a plurality of grooves 506a-506h.

[0072] Each of the plurality of recesses 506a-506h is configured to hold a horizontal lamp extending along the direction of each of the recesses 506a-506h. The wall 516 of each of the plurality of recesses 506a-506h has a generally elliptical, circular, parabolic or oval cross-section and is configured to direct the energy emitted by the lamp to a substrate within the deposition chamber 100.

[0073] In some embodiments, the reflector body 500 is formed of a reflective material, such as aluminum or steel. In some embodiments, the reflector body 500 is formed of a first material such as aluminum or steel and plated with a second material. The second material can be any of copper, nickel, brass, bronze, silver, gold, aluminum, or alloys thereof. The second material can be polished to increase reflectivity. In some embodiments, the entire reflector body 500 is formed of the second material. For wavelengths between about 700 nm and about 15000 nm, for example, about 700 nm to about 1000 nm or about 1000 nm to about 15000 nm, the top surface 502 can have a reflectivity greater than about 90%, for example, greater than about 98%. The top surface 502 is made of or coated with the second material.

[0074] A plurality of grooves 506a-506h are arranged to form a concentric ring along the top surface 502. In the specific embodiment of FIG. 5A, one or more first grooves 506a and one or more second grooves 506b form a first ring. One or more third grooves 506c and one or more fourth grooves 506d form a second ring. One or more fifth grooves 506e and one or more sixth grooves 506f form a third ring. One or more seventh grooves 506g and one or more eighth grooves 506h form a fourth ring. The second ring surrounds the first ring and is concentric with the first ring. The third ring is external to the second ring and is concentric with the second ring. The fourth ring is external to the third ring and is concentric with the third ring. As shown herein, each of the plurality of grooves 506a-506h forms a semicircle, such that one or more first grooves 506a form a first semicircle, one or more second grooves 506b form a second semicircle, one or more third grooves 506c form a third semicircle, one or more fourth grooves 506d form a fourth semicircle, and so on. In an alternative embodiment, each of the plurality of grooves 506a-506h does not form a complete semicircle, but rather forms a circle less than 50%, for example, an arc extending less than 180 degrees around a central axis. Each of the plurality of grooves 506a-506h may also form a circle less than 40%, for example, an arc extending less than about 145 degrees around a central axis. Each of the plurality of grooves 506a-506h may also form a circle of about 30% to about 35%, for example, an arc extending about 105 degrees to about 130 degrees around a central axis. Each of the plurality of grooves 506a-506h may also form a circle of less than approximately 30%, for example, an arc extending less than 105 degrees around a central axis. Each of the plurality of grooves 506a-506h may also form an arc of approximately 20% to approximately 29%, for example, an arc extending approximately 70 degrees to approximately 100 degrees around a central axis. Each of the plurality of grooves 506a-506h is formed by a plurality of individual grooves 520.

[0075] Each individual recess 520 is a linear recess and is configured to accommodate a linear lamp therein. The linear length of each individual recess 520 is from about 35 mm to about 175 mm, for example from about 50 mm to about 150 mm. The linear length of each of the individual recesses 520 is selected to enable uniform heating within a predetermined annular space of the substrate, while also reducing the number of lamps in the lower lamp module 145b. Reducing the number of lamps in the lower lamp module 145b reduces costs, simplifies maintenance, and reduces the number of holes 508 formed through the reflector body 500.

[0076] Each individual recess 520 within the plurality of recesses 506a-506h has at least one hole 508 formed therethrough. The hole 508 extends from the bottom of one of the recesses 506a-506h to the bottom surface 503 and allows an electrical connection for a lamp to be disposed therethrough. As shown herein, each individual recess 520 among the recesses 506a-506h includes at least two holes 508, for example, two holes 508. Each hole 508 is located near the distal end of the recess 506a-506h, such that one hole 508 is located at one distal end of one of the individual recesses 520, and a second hole 508 is located at the opposite distal end of the same individual recess 520. In addition to providing electrical support, the holes 508 can also be used to allow mechanical support for the lamps arranged within each recess 506a-506h. Each linear lamp within the individual recess 520 includes a filament 505 (seven are shown in dashed lines for clarity). The filament 505 is shown in some of the individual recesses 520 herein, and the position of the linear filament relative to each of the individual recesses 520 is shown. The filament 505 is disposed between two holes 508 formed in the recesses 506a-506i.

[0077] The grooves 506a-506h are divided into at least two parts. As shown in Figure 5A, the grooves 506a-506h span the first cross section S5 and are divided into two halves. The front half is composed of the first groove 506a, the third groove 506c, the fifth groove 506e, and the seventh groove 506g. The rear half is composed of the second groove 506b, the fourth groove 506d, the sixth groove 506f, and the eighth groove 506h.

[0078] An opening 510 is provided between the grooves 506a-506h and the reflector body 500. The opening 510 is a channel extending from the top surface 502 to the bottom surface 503 of the reflector body 500. The opening 510 allows the shaft 118 of the substrate support 106 to pass through it. The opening 510 is located inside the first groove ring, for example, between the first groove 506a and the second groove 506b. The opening 510 passes through the center of the reflector body 500 and is provided around axis A.

[0079] There may be 2-10 individual grooves 520, forming each of the first groove 506a, second groove 506b, third groove 506c, fourth groove 506d, fifth groove 506e, sixth groove 506f, seventh groove 506g, and eighth groove 506h. There may be 2-5 individual grooves 520, forming each of the first groove 506a, second groove 506b, third groove 506c, fourth groove 506d, fifth groove 506e, sixth groove 506f, seventh groove 506g, and eighth groove 506h. The number of individual grooves 520, including each of the first groove 506a, second groove 506b, third groove 506c, fourth groove 506d, fifth groove 506e, sixth groove 506f, seventh groove 506g, or eighth groove 506h, varies depending on the desired radiation distribution on the substrate. In some embodiments, the individual grooves 520 forming grooves 506a-506h are connected to form a single groove, but the cross-section of the groove changes along a cross-section line, for example, a fifth cross-section plane S5 or another cross-section plane (not shown). In this embodiment, the plurality of individual grooves 520 forming grooves 506a-506h are still referred to as individual grooves 520, but are actually a single continuous groove with a varying cross-section.

[0080] Figure 5B shows a cross-sectional view of a second specific embodiment of the lower lamp module 145b. This cross-section is taken along plane 5B-5B and divides the reflector body 500 in two halves. Each of the grooves 506a-506h is centered on axis A. Each of the grooves 506a-506h is configured to guide radiant energy to different portions of the substrate 102 or substrate support 106. Although one or more first grooves 506a and one or more second grooves 506b form a first ring, the one or more first grooves 506a and one or more second grooves 506b have different cross-sectional shapes so that the lamp disposed in each of the one or more first grooves 506a and one or more second grooves 506b can be oriented toward different radial positions on the substrate 102. The wall 516 of each groove 506a-506h forms the cross-sectional shape of the groove 506a-506h. The wall 516 of each of the grooves 506a-506h forms at least a portion of an elliptical, circular, elliptical, parabolic, elliptical, hyperbolic or other suitable curved shape.

[0081] The wall 516 of one or more first grooves 506a has a different cross-sectional shape than the wall 516 of one or more second grooves 506b. The wall 516 of one or more third grooves 506c has a different cross-sectional shape than the wall 516 of fourth groove 506d. The wall 516 of one or more fifth grooves 506e has a different cross-sectional shape than the wall 516 of one or more sixth grooves 506f. The wall 516 of one or more seventh grooves 506g has a different cross-sectional shape than the wall 516 of one or more eighth grooves 506h.

[0082] The cross-section of one or more first grooves 506a focuses light in a first direction, the first direction having a first angle θ9 relative to a vertical plane and the vertical plane being parallel to axis A. The cross-section of one or more second grooves 506b focuses light in a second direction, the second direction having a second angle θ10 relative to a vertical plane. The cross-section of one or more third grooves 506c focuses light in a third direction, the third direction having a third angle θ11 relative to a vertical plane. The cross-section of a fourth groove 506d focuses light in a fourth direction, the fourth direction having a fourth angle θ12 relative to a vertical plane. The cross-section of one or more fifth grooves 506e focuses light in a fifth direction, the fifth direction having a fifth angle θ13 relative to a vertical plane. The cross-section of one or more sixth grooves 506f focuses light in a sixth direction, the sixth direction having a sixth angle θ14 relative to a vertical plane. The cross-section of one or more seventh grooves 506g focuses light in a seventh direction, the seventh direction having a seventh angle θ15 relative to a vertical plane. The cross-section of one or more eighth grooves 506h allows light to be focused in the eighth direction, which has an eighth angle θ16 relative to the vertical plane.

[0083] The first angle θ9 is different from the second angle θ10. The third angle θ11 is different from the fourth angle θ12. The fifth angle θ13 is different from the sixth angle θ14. The seventh angle θ15 is different from the eighth angle θ16. In some specific embodiments, the individual grooves within the plurality of grooves 506a-506h can be oriented in different directions and have a cross-sectional shape different from that of adjacent grooves within the same groove 506a-506h.

[0084] Because each group of grooves 506a-506h within each ring is shaped to direct energy to different radial locations along the wafer, a high degree of thermal control is achieved. Grooves 506a-506h can be grouped such that a controller can simultaneously control some grooves 506a-506h. Each individual groove 520 within the first groove 506a is controlled together. Each individual groove 520 within the second groove 506b is controlled together. Each individual groove 520 within the third groove 506c is controlled together. Each individual groove 520 within the fourth groove 506d is controlled together. Each individual groove 520 within the fifth groove 406e is controlled together. Each individual groove 520 within the sixth groove 506f is controlled together. Each individual groove 520 within the seventh groove 506g is controlled together. Each individual groove 520 within the eighth groove 506h is controlled together.

[0085] FIG. 6A shows a bottom view of a third specific embodiment of the upper lamp module 155c. The upper lamp module 155c includes a reflector body 600 and a plurality of upper lamps 141 (FIG. 1). The reflector body 600 includes a plurality of grooves 606a-606i formed in a bottom surface 602. The bottom surface 602 can be described as a first surface of the reflector body 600. A top surface 603 (FIG. 6B) is disposed opposite to the bottom surface 602 and can be described as a second surface. The top surface 603 is parallel to the bottom surface 602. The bottom surface 602 includes a plurality of grooves 606a-606i.

[0086] Each of the plurality of recesses 606a-606i is configured to hold a horizontal lamp extending along the direction of each of the recesses 606a-606i. The wall 616 of each of the plurality of recesses 606a-606i has a generally elliptical, circular, parabolic or oval cross-section and is configured to direct the energy emitted by the lamp to a substrate within the deposition chamber 100.

[0087] In some embodiments, the reflector body 600 is formed of a reflective material, such as aluminum or steel. In some embodiments, the reflector body 600 is formed of a first material such as aluminum or steel and plated with a second material. The second material can be any of copper, nickel, brass, bronze, silver, gold, aluminum, or alloys thereof. The second material can be polished to increase reflectivity. In some embodiments, the entire reflector body 600 is formed of the second material. For wavelengths between about 700 nm and about 15000 nm, for example, about 700 nm to about 1000 nm or about 1000 nm to about 15000 nm, the bottom surface 602 can have a reflectivity greater than about 90%, for example, greater than about 98%. The bottom surface 602 is made of or coated with the second material.

[0088] A plurality of grooves 606a-606i are arranged to form a concentric ring along the bottom surface 602. A first ring is formed by a plurality of first grooves 606a and a plurality of second grooves 606b. A second ring is formed by a plurality of third grooves 606c and a plurality of fourth grooves 606d. A third ring is formed by a plurality of fifth grooves 606e and a plurality of sixth grooves 606f. A fourth ring is formed by a plurality of seventh grooves 606g, a plurality of eighth grooves 606h, and a plurality of ninth grooves 606i. Each of the plurality of grooves 606a-606i is formed by a plurality of individual grooves 620. Each individual groove 620 is a linear groove and is configured to have a linear lamp disposed therein. The linear length of each individual groove 620 is from about 35 mm to about 175 mm, for example, from about 50 mm to about 150 mm. The linear length of each of the individual recesses 620 is selected to enable uniform heating within the predetermined annular holes of the substrate, while also reducing the number of lamps in the upper lamp module 155c. Reducing the number of lamps in the upper lamp module 155c lowers costs, simplifies maintenance, and reduces the number of holes 608 formed through the reflector body 600.

[0089] Each individual recess 620 within the plurality of recesses 606a-606i has at least one hole 608 formed therethrough. The hole 608 extends from the top of one of the recesses 606a-606i to the top surface 603 and allows an electrical connection for a lamp to be disposed therethrough. As shown herein, each individual recess 620 of the recesses 606a-606i includes at least two holes 608, for example, two holes 608. Each hole 608 is located near the distal end of the recesses 606a-606i, such that one hole 608 is located at one distal end of one of the individual recesses 620, and a second hole 608 is located at the opposite distal end of the same individual recess 620. In addition to providing electrical support, the holes 608 can also be used to allow mechanical support for a lamp disposed within each recess 606a-606i.

[0090] Each linear lamp within an individual recess 620 includes a filament 605 (six are shown in dashed lines for clarity). The filaments 605 are shown in some of the individual recesses 620 herein, and the position of the linear filaments relative to each of the individual recesses 620 is shown. The filaments 605 are disposed between two holes 608 formed in recesses 606a-606i.

[0091] A flat surface 610 is disposed in the middle of the grooves 606a-606i and passes through the central axis A of the reflector body 600. The flat surface 610 may protrude from the bottom surface 602 or be in a straight line with the bottom surface 602. The flat surface 610 is disposed in the center of the grooves 606a-606i, for example, between a plurality of first grooves 606a and a plurality of second grooves 606b.

[0092] There may be 2-10 individual grooves 620, which form each of a plurality of first grooves 606a, a plurality of second grooves 606b, a plurality of third grooves 606c, a plurality of fourth grooves 606d, a plurality of fifth grooves 606e, a plurality of sixth grooves 606f, a plurality of seventh grooves 606g, a plurality of eighth grooves 606h, and a plurality of ninth grooves 606i. There may be 2-5 individual grooves 620, which form each of a plurality of first grooves 606a, a plurality of second grooves 606b, a plurality of third grooves 606c, a plurality of fourth grooves 606d, a plurality of fifth grooves 606e, a plurality of sixth grooves 606f, a plurality of seventh grooves 606g, a plurality of eighth grooves 606h, and a plurality of ninth grooves 606i. The number of individual grooves 620, including each of the first groove 606a, the second groove 606b, the third groove 606c, the fourth groove 606d, the fifth groove 606e, the sixth groove 606f, the seventh groove 606g, the eighth groove 606h, or the ninth groove 606i, varies according to the desired radiation distribution on the substrate.

[0093] The pattern / position of each individual groove 620 in grooves 606a-606i enables good thermal control within the deposition chamber 100. Grooves 606a-606i are symmetrically distributed on a plane, for example, the first cross-section S1. Grooves 606a-606i may also be symmetrical on other planes passing through the reflector body 600.

[0094] The first groove 606a and the second groove 606b are positioned such that the first groove 606a forms a generally semicircle, and the second groove 606b forms a second generally semicircle. The ends of the two semicircles are aligned to form a first ring. Although shown as each of the first groove 606a comprising two separate grooves 620 and the second groove 606b comprising two separate grooves 620, other numbers of first grooves 606a and second grooves 606b are also conceivable.

[0095] In some specific embodiments, each of the plurality of third grooves 606c and the plurality of ninth grooves 606i is aligned along the same axis such that a straight plane passes through each of the third grooves 606c and the ninth grooves 606i. The deposition chamber 100 may be oriented such that the third grooves 606c and the ninth grooves 606i are aligned along the airflow direction through the processing space 136.

[0096] A fourth groove 606d is disposed between aligned third grooves 606c, such that one or more individual grooves 620 are disposed on either side of the third groove 606c and form a second ring. In the specific embodiment shown in FIG6A, two independent grooves 620 in the fourth groove 606d are disposed between each third groove 606c, such that a total of four fourth grooves 606d are arranged as groups of two independent grooves 620.

[0097] The fifth groove 606e and the sixth groove 606f alternately form a third ring, such that between each individual groove 620 of the fifth groove 606e, there is an individual groove 620 of the sixth groove 606f. The number of fifth grooves 606e and sixth grooves 606f are equal, for example, four of each of the fifth grooves 606e and four of each of the sixth grooves 606f.

[0098] The seventh groove 606g and the eighth groove 606h also alternate within the fourth ring. The seventh groove 606g and the eighth groove 606h are located on both sides of the ninth groove 606i. There are four seventh grooves 606g and four eighth grooves 606h.

[0099] In some specific embodiments, there may be other arrangements of the grooves 606a-606i, such that there are more or fewer groups of grooves 606a-606i or the number of individual grooves 620 in each group of grooves 606a-606i is changed.

[0100] Figure 6B shows a cross-sectional view of a third specific embodiment of the upper lamp module 155c. This cross-section is taken along plane 6B-6B and divides the reflector body 600 in two halves. Each of the recesses 606a-606i is centered on axis A. Each of the recesses 606a-606i is configured to direct radiant energy to different portions of the substrate 102. Although one or more first recesses 606a and one or more second recesses 606b form a first ring, the one or more first recesses 606a and one or more second recesses 606b have different cross-sectional shapes so that the lamp disposed in each of the one or more first recesses 606a and one or more second recesses 606b can be oriented toward different radial positions on the substrate 102. The wall 616 of each recess 606a-606i forms the cross-sectional shape of the recess 606a-606i. The wall 616 of each of the grooves 606a-606i forms at least a portion of an elliptical, circular, elliptical, parabolic, elliptical, hyperbolic or other suitable curved shape.

[0101] The wall 616 of one or more first grooves 606a has a different cross-sectional shape than the wall 616 of one or more second grooves 606b. The wall 616 of one or more third grooves 606c has a different cross-sectional shape than the wall 616 of fourth groove 606d. The wall 616 of one or more fifth grooves 606e has a different cross-sectional shape than the wall 616 of one or more sixth grooves 606f. The wall 616 of one or more seventh grooves 606g has a different cross-sectional shape than the wall 616 of one or more eighth grooves 606h. Similarly, the wall 616 of one or more ninth grooves 606i has a different cross-sectional shape than any wall 616 of the seventh groove 606g or the eighth groove 606h.

[0102] The cross-section of one or more first grooves 606a focuses light in a first direction, the first direction having a first angle θ17 relative to a vertical plane and the vertical plane being parallel to axis A. The cross-section of one or more second grooves 606b focuses light in a second direction, the second direction having a second angle θ18 relative to a vertical plane. The cross-section of one or more third grooves 606c focuses light in a third direction, the third direction having a third angle θ19 relative to a vertical plane. The cross-section of one or more fourth grooves 606d focuses light in a fourth direction, the fourth direction having a fourth angle (not shown) relative to a vertical plane. The cross-section of one or more fifth grooves 606e focuses light in a fifth direction, the fifth direction having a fifth angle θ20 relative to a vertical plane. The cross-section of one or more sixth grooves 606f focuses light in a sixth direction, the sixth direction having a sixth angle θ21 relative to a vertical plane. The cross-section of one or more seventh grooves 606g focuses light in a seventh direction, the seventh direction having a seventh angle (not shown) relative to a vertical plane. The cross-section of one or more eighth grooves 606h focuses light in an eighth direction, which has an eighth angle (not shown) relative to the vertical plane. The cross-section of one or more ninth grooves 606i focuses light in a ninth direction, which has a ninth angle θ22 relative to the vertical plane.

[0103] The first angle θ17 is different from the second angle θ18. The third angle θ19 is different from the fourth angle (not shown). The fifth angle θ20 is different from the sixth angle θ21. The seventh angle (not shown) is different from the eighth angle (not shown) and the ninth angle θ22. In some specific embodiments, the individual grooves within the plurality of grooves 606a-606i are oriented in different directions and have a different cross-sectional shape than the adjacent grooves 606a-606i.

[0104] Because each group of grooves 606a-606i within each ring is shaped to direct energy to different radial locations along the wafer, a high degree of thermal control is achieved. Grooves 606a-606i can be grouped such that a controller can simultaneously control some grooves 606a-606i. Each individual groove 620 within the first groove 606a is controlled together. Each individual groove 620 within the second groove 606b is controlled together. Each individual groove 620 within the third groove 606c is controlled together. Each individual groove 620 within the fourth groove 606d is controlled together. Each individual groove 620 within the fifth groove 606e is controlled together. Each individual groove 620 within the sixth groove 606f is controlled together. Each individual groove 620 within the seventh groove 606g is controlled together. Each individual groove 620 within the eighth groove 606h is controlled together. Each individual groove 620 within the ninth groove 606i is controlled together. The third groove 606c and the ninth groove 606i are controlled together and shaped to guide radiative energy to similar radial positions on the substrate 102.

[0105] FIG. 7A shows a plan view of a third specific embodiment of the lower lamp module 145c. The lower lamp module 145c includes a reflector body 700 and a plurality of lower lamps 143 (FIG. 1). The reflector body 700 includes a plurality of grooves 706a-706i formed in a top surface 702. The top surface 702 can be described as a first surface of the reflector body 700. A bottom surface 703 (FIG. 7B) is disposed opposite to the top surface 702 and can be described as a second surface. The bottom surface 703 is parallel to the top surface 702. The top surface 702 includes a plurality of grooves 706a-706i.

[0106] Each of the plurality of recesses 706a-706i is configured to hold a horizontal lamp extending along the direction of each of the recesses 706a-706i. The wall 716 of each of the plurality of recesses 706a-706i has a generally elliptical, circular, parabolic or oval cross-section and is configured to direct the energy emitted by the lamp to a substrate within the deposition chamber 100.

[0107] In some embodiments, the reflector body 700 is formed of a reflective material, such as aluminum or steel. In some embodiments, the reflector body 700 is formed of a first material such as aluminum or steel and plated with a second material. The second material can be any of copper, nickel, brass, bronze, silver, gold, aluminum, or alloys thereof. The second material can be polished to increase reflectivity. In some embodiments, the entire reflector body 700 is formed of the second material. For wavelengths between about 700 nm and about 15000 nm, for example, about 700 nm to about 1000 nm or about 1000 nm to about 15000 nm, the top surface 702 can have a reflectivity greater than about 90%, for example, greater than about 98%. The top surface 702 is made of or coated with the second material.

[0108] A plurality of grooves 706a-706i are arranged to form a concentric ring along the top surface 702. A first ring is formed by a plurality of first grooves 706a and a plurality of second grooves 706b. A second ring is formed by a plurality of third grooves 706c and a plurality of fourth grooves 706d. A third ring is formed by a plurality of fifth grooves 706e and a plurality of sixth grooves 706f. A fourth ring is formed by a plurality of seventh grooves 706g, a plurality of eighth grooves 706h, and a plurality of ninth grooves 706i. Each of the plurality of grooves 706a-706i is formed by a plurality of individual grooves 720. Each individual groove 720 is a linear groove and is configured to have a linear lamp disposed therein. The linear length of each individual groove 720 is approximately 35 mm to approximately 175 mm, for example, approximately 50 mm to approximately 150 mm. The linear length of each of the individual recesses 720 is selected to enable uniform heating within the predetermined annular space of the substrate, while also reducing the number of lamps in the lower lamp module 145c. Reducing the number of lamps in the lower lamp module 145c lowers costs, simplifies maintenance, and reduces the number of holes 708 formed through the reflector body 700.

[0109] Each individual recess 720 within the plurality of recesses 706a-706i has at least one hole 708 formed therethrough. The hole 708 extends from the top of one of the recesses 706a-706i to the bottom surface 703 and allows for the placement of an electrical connection for a lamp therethrough. As shown herein, each individual recess 720 among the recesses 706a-706i includes at least two holes 708, for example, two holes 708. Each of the holes 708 is located at a distal end of the individual recess 720 near the recesses 706a-706i, such that one hole 708 is located at one distal end of one of the individual recesses 720 and a second hole 708 is located at the opposite distal end of the same individual recess 720. In addition to providing electrical support, the holes 708 can also be used to allow for mechanical support of lamps arranged within each recess 706a-706i.

[0110] Each linear lamp within an individual recess 720 includes a filament 705 (eight are shown in dashed lines for clarity). The filaments 705 are shown in some of the individual recesses 720 herein, and the position of the linear filaments relative to the respective individual recesses 720 is shown. The filaments 705 are disposed between two holes 708 formed in recesses 706a-706i.

[0111] An opening 710 is provided between the grooves 706a-706i and the reflector body 700. The opening 710 is a channel extending from the top surface 702 to the bottom surface 703 of the reflector body 700. The opening 710 allows the shaft 118 of the substrate support 106 to pass through it. The opening 710 is located inside the first groove ring, for example, between the first groove 706a and the second groove 706b. The opening 710 passes through the center of the reflector body 700 and is provided around axis A.

[0112] There may be 2 to 10 individual grooves 720, which form each of a plurality of first grooves 706a, a plurality of second grooves 706b, a plurality of third grooves 706c, a plurality of fourth grooves 706d, a plurality of fifth grooves 706e, a plurality of sixth grooves 706f, a plurality of seventh grooves 706g, a plurality of eighth grooves 706h, and a plurality of ninth grooves 706i. There may be 2 to 5 individual grooves 720, which form each of a plurality of first grooves 706a, a plurality of second grooves 706b, a plurality of third grooves 706c, a plurality of fourth grooves 706d, a plurality of fifth grooves 706e, a plurality of sixth grooves 706f, a plurality of seventh grooves 706g, a plurality of eighth grooves 706h, and a plurality of ninth grooves 706i. The number of individual grooves 720, including each of the first groove 706a, the second groove 706b, the third groove 706c, the fourth groove 706d, the fifth groove 706e, the sixth groove 706f, the seventh groove 706g, the eighth groove 706h, or the ninth groove 706i, varies according to the desired radiation distribution on the substrate.

[0113] The pattern / position of each individual groove 720 in grooves 706a-706i enables good thermal control within the deposition chamber 100. Grooves 706a-706i are symmetrically distributed on a plane, for example, the first cross-section S5. Grooves 706a-706i may also be symmetrical on other planes passing through the reflector body 700.

[0114] The first groove 706a and the second groove 706b are positioned such that the first groove 706a forms a generally semicircle, and the second groove 706b forms a second generally semicircle. The ends of the two semicircles are aligned to form a first ring. Although shown as each of the first groove 706a comprising two separate grooves 720 and the second groove 706b comprising two separate grooves 720, other numbers of first grooves 706a and second grooves 706b are also conceivable.

[0115] In some specific embodiments, each of the plurality of third grooves 706c and the plurality of ninth grooves 706i is aligned along the same axis such that a straight plane passes through each of the third grooves 706c and the ninth grooves 706i. The deposition chamber 100 may be oriented such that the third grooves 706c and the ninth grooves 706i are aligned along the airflow direction through the processing space 136.

[0116] A fourth groove 706d is disposed between aligned third grooves 706c, such that one or more individual grooves 720 are disposed on either side of the third groove 706c and form a second ring. In the specific embodiment shown in FIG7A, two independent grooves 720 in the fourth groove 706d are disposed between each third groove 706c, such that a total of four fourth grooves 706d are arranged as groups of two independent grooves 720.

[0117] The fifth groove 706e and the sixth groove 706f alternately form a third ring, such that between each individual groove 720 of the fifth groove 706e, there is an individual groove 720 of the sixth groove 706f. The number of fifth grooves 706e and sixth grooves 706f are equal, for example, four of each of the fifth grooves 706e and four of each of the sixth grooves 706f.

[0118] The seventh groove 706g and the eighth groove 706h also alternate within the fourth ring. The seventh groove 706g and the eighth groove 706h are located on both sides of the ninth groove 706i. There are four seventh grooves 706g and four eighth grooves 706h.

[0119] In some specific embodiments, there may be other arrangements of the grooves 706a-706i, such that there are more or fewer groove groups 706a-706i or the number of individual grooves 720 in each group of grooves 706a-706i is changed.

[0120] Figure 7B shows a cross-sectional view of a third specific embodiment of the lower lamp module 145c. This cross-section is taken along plane 7B-7B and divides the reflector body 700 in two halves. Each of the recesses 706a-706i is centered on axis A. Each of the recesses 706a-706i is configured to guide radiant energy to different portions of the substrate 102. Although one or more first recesses 706a and one or more second recesses 706b form a first ring, the one or more first recesses 706a and one or more second recesses 706b have different cross-sectional shapes, allowing lamps to be disposed within each recess or oriented toward different radial positions on the substrate 102 by a plurality of first recesses 706a and one or more second recesses 706b. The wall 716 of each recess 706a-706i forms the cross-sectional shape of the recess 706a-706i. The wall 716 of each of the grooves 706a-706i forms at least a portion of an elliptical, circular, elliptical, parabolic, elliptical, hyperbolic or other suitable curved shape.

[0121] The wall 716 of one or more first grooves 706a has a different cross-sectional shape than the wall 716 of one or more second grooves 706b. The wall 706 of one or more third grooves 706c has a different cross-sectional shape than the wall 716 of the fourth groove 706d. The wall 716 of one or more fifth grooves 706e has a different cross-sectional shape than the wall 716 of one or more sixth grooves 706f. The wall 716 of one or more seventh grooves 706g has a different cross-sectional shape than the wall 716 of one or more eighth grooves 706h. Similarly, the wall 716 of one or more ninth grooves 706i has a different cross-sectional shape than any wall 716 of the seventh groove 706g or the eighth groove 706h.

[0122] The cross-section of one or more first grooves 706a focuses light in a first direction, the first direction having a first angle θ23 relative to a vertical plane and the vertical plane being parallel to axis A. The cross-section of one or more second grooves 706b focuses light in a second direction, the second direction having a second angle θ24 relative to a vertical plane. The cross-section of one or more third grooves 706c focuses light in a third direction, the third direction having a third angle θ25 relative to a vertical plane. The cross-section of one or more fourth grooves 706d focuses light in a fourth direction, the fourth direction having a fourth angle (not shown) relative to a vertical plane. The cross-section of one or more fifth grooves 706e focuses light in a fifth direction, the fifth direction having a fifth angle θ26 relative to a vertical plane. The cross-section of one or more sixth grooves 706f focuses light in a sixth direction, the sixth direction having a sixth angle θ27 relative to a vertical plane. The cross-section of one or more seventh grooves 706g focuses light in a seventh direction, the seventh direction having a seventh angle (not shown) relative to a vertical plane. The cross-section of one or more eighth grooves 706h focuses light in an eighth direction, which has an eighth angle (not shown) relative to the vertical plane. The cross-section of one or more ninth grooves 706i focuses light in a ninth direction, which has a ninth angle θ28 relative to the vertical plane.

[0123] The first angle θ23 is different from the second angle θ24. The third angle θ25 is different from the fourth angle (not shown). The fifth angle θ26 is different from the sixth angle θ27. The seventh angle (not shown) is different from the eighth angle (not shown) and the ninth angle θ28. In some specific embodiments, the individual grooves within the plurality of grooves 706a-706i are oriented in different directions and have a different cross-sectional shape than the adjacent grooves 706a-706i.

[0124] Because each group of grooves 706a-706i within each ring is shaped to direct energy to different radial locations along the wafer, a high degree of thermal control is achieved. Grooves 706a-706i can be grouped such that a controller can simultaneously control some grooves 706a-706i. Each individual groove 720 within the first groove 706a is controlled together. Each individual groove 720 within the second groove 706b is controlled together. Each individual groove 720 within the third groove 706c is controlled together. Each individual groove 720 within the fourth groove 706d is controlled together. Each individual groove 720 within the fifth groove 706e is controlled together. Each individual groove 720 within the sixth groove 706f is controlled together. Each individual groove 720 within the seventh groove 706g is controlled together. Each individual groove 720 within the eighth groove 706h is controlled together. Each individual groove 720 within the ninth groove 706i is controlled together. The third groove 706c and the ninth groove 706i are controlled together and shaped to guide radiative energy to similar radial positions on the substrate 102.

[0125] Although each of the upper lamp modules 155a-c and lower lamp modules 145a-c described herein has four recessed rings, other numbers of rings are also conceivable. In some specific embodiments, only three rings, five rings, or six rings are used. Furthermore, the radial position of each ring can be adjusted to provide good heat distribution on the substrate.

[0126] Figure 8A illustrates a linear lamp 800a for use within the deposition chamber 100 of Figure 1. The linear lamp 800a can be used in any of the specific embodiments shown in Figures 4A-7B. The linear lamp 800a includes a linear bulb 802, one or more arms 804, and one or more electrical connections 806. The linear lamp 800a is an infrared (IR) halogen lamp. The linear bulb 802 is a cylindrical bulb in which a filament (not shown) is disposed. The linear bulb 802 is configured to emit radiant energy, such as IR light, toward the substrate 102 when positioned within the deposition chamber 100.

[0127] One or more arms 804 extend from the linear bulb 802. As shown in FIG8A, there are two arms 804, and one arm extends from each distal end of the linear bulb 802. The two arms 804 extend in a direction perpendicular to the extension direction of the linear bulb 802. The two arms 804 extend in the same direction and are configured to pass through holes 408, 508, 608, and 708. At the end of each arm 804 is an electrical connection 806. The electrical connection 806 is configured to be inserted into or coupled to a socket or other power source. The electrical connection 806 is electrically coupled to the filament within the linear bulb 802 and enables the linear bulb 800a to be powered.

[0128] Figure 8B illustrates an arc lamp 800b for use in the deposition chamber of Figure 1. The arc lamp 800b can be used in any of the specific embodiments of Figures 2A-3B. The arc lamp 800b includes an arc bulb 808, one or more arms 810, and one or more electrical connections 812. The arc bulb 808 is a tubular bulb whose shape forms at least a partial ring; for example, an arc shape. The arc bulb 808 includes a filament (not shown) disposed therein. The arc bulb 808 is configured to emit radiant energy toward the substrate 102 when located within the deposition chamber 100.

[0129] One or more arms 810 extend from the curved bulb 808. As shown in FIG8B, there are two arms 810, one arm extending perpendicularly to the plane of the curved bulb 808 from each distal end of the curved bulb 808. The two arms 810 extend in a direction perpendicular to the direction of extension of the curved bulb 808. The two arms 810 extend in the same direction and are configured to pass through holes 208, 308. At the end of each arm 810 is an electrical connection 812. The electrical connection 812 is configured to be inserted into or coupled to a socket or other power source. The electrical connection 812 is electrically coupled to the filament within the curved bulb 808 and enables the curved lamp 800b to be powered.

[0130] The specific embodiments described herein enable more controlled heating of the substrate with fewer thermal cycles and longer lamp life. Each groove ring having multiple regions allows for better control of irradiance peaks across different radial locations on the substrate. The distribution of the grooves and the subsequent lamps disposed therein are further configured to reduce thermal cycling at locations on the substrate. Compared to other linear lamp arrangements, reduced thermal cycling lowers the frequency and intensity of hot / cold spots on the substrate.

[0131] Although the foregoing content relates to a specific embodiment of the present disclosure, other and further specific embodiments may be conceived without departing from the scope of the foregoing content, and the scope of the foregoing content is determined by the following claims. [Simplified Explanation of the Diagram]

[0008] The above-briefly summarized features of this disclosure can be described in more detail by referring to a plurality of specific embodiments, some of which are illustrated in the accompanying drawings. However, it should be noted that the accompanying drawings are merely exemplary embodiments and should not be construed as limiting the scope of the embodiments, and other equivalent embodiments may be acknowledged.

[0009] Figure 1 is a schematic diagram of a deposition chamber according to a specific embodiment of the present disclosure.

[0010] Figure 2A illustrates a bottom view of a first embodiment of an upper lamp module according to a specific embodiment of the present disclosure.

[0011] FIG2B shows a cross-sectional view of a first embodiment of the upper lamp module according to a specific embodiment of the present disclosure.

[0012] Figure 3A shows a plan view of a first embodiment of a lower lamp module according to a specific embodiment of the present disclosure.

[0013] FIG3B shows a cross-sectional view of a first embodiment of a lower lamp module according to a specific embodiment of the present disclosure.

[0014] FIG4A illustrates a bottom view of a second embodiment of the upper lamp module according to a specific embodiment of the present disclosure.

[0015] FIG4B shows a cross-sectional view of a second embodiment of the upper lamp module according to a specific embodiment of the present disclosure.

[0016] Figure 5A shows a plan view of a second embodiment of the lower lamp module according to a specific embodiment of the present disclosure.

[0017] FIG5B shows a cross-sectional view of a second embodiment of the lower lamp module according to a specific embodiment of the present disclosure.

[0018] Figure 6A illustrates a bottom view of a third embodiment of the upper lamp module according to a specific embodiment of the present disclosure.

[0019] Figure 6B shows a cross-sectional view of a third embodiment of the upper lamp module according to a specific embodiment of the present disclosure.

[0020] Figure 7A shows a plan view of a third embodiment of the lower lamp module according to a specific embodiment of the present disclosure.

[0021] FIG7B shows a cross-sectional view of a third embodiment of the lower lamp module according to a specific embodiment of the present disclosure.

[0022] FIG8A illustrates a linear lamp for the deposition chamber of FIG1 according to a specific embodiment of the present disclosure.

[0023] FIG8B illustrates a linear lamp for the deposition chamber of FIG1 according to a specific embodiment of the present disclosure.

[0024] To aid understanding, the same component symbols have been used as much as possible to identify common components in the drawings. It is understood that the components and features of one embodiment may be beneficially incorporated into other embodiments without further description. [Biomaterial Storage]

[0133] Domestic storage information (please note in order of storage institution, date, and number): None. International storage information (please note in order of storage country, institution, date, and number): None.

Claims

1. A lamp module assembly suitable for semiconductor substrate processing, the lamp module assembly comprising: A reflector body; One or more first grooves are disposed within a first surface of the reflector body, each of the first grooves being configured to receive a linear lamp; and one or more second grooves are disposed within the first surface of the reflector body, each of the second grooves being configured to receive a linear lamp, the one or more first grooves and the one or more second grooves forming a first groove ring around a central axis, wherein each of the first grooves and the second grooves extends around the central axis along an arc of less than 180 degrees, and wherein a cross-sectional shape of the one or more first grooves is different from a cross-sectional shape of the one or more second grooves.

2. The lamp module as claimed in claim 1, the lamp module further comprising one or more third grooves disposed radially outside the one or more first grooves and the one or more second grooves, the one or more third grooves forming at least a portion of a second ring.

3. The lamp module as described in claim 1, wherein each of the first grooves and the second grooves is a linear groove.

4. The lamp module as described in claim 1, wherein there are 2 to 10 first recesses.

5. The lamp module as claimed in claim 1, wherein the reflector body comprises one or a combination of copper, nickel, brass, bronze, silver, gold, or aluminum.

6. The lamp module as claimed in claim 1, wherein each of the first recesses has a linear recess length of 35 mm to 175 mm.

7. The lamp module as claimed in claim 1, wherein each of the first recesses and the second recesses includes at least one hole, each of the holes extending from a recess wall to a second surface of the reflector body opposite the first surface.

8. The lamp module as claimed in claim 1, the lamp module further comprising an opening through the reflector body, the opening extending from the first surface to a second surface and disposed within the first groove ring.

9. A lamp module assembly suitable for semiconductor substrate processing, the lamp module assembly comprising: A reflector body; One or more first grooves are disposed within a first surface of the reflector body, each of the first grooves being configured to receive one or more linear lamps; one or more second grooves are disposed within the first surface of the reflector body, each of the second grooves being configured to receive one or more linear lamps; one or more third grooves are disposed within the first surface of the reflector body; and one or more fourth grooves are disposed within the first surface of the reflector body, wherein the one or more first grooves and the one or more second grooves are oriented to form at least a portion of a first ring, and the one or more third grooves and the one or more fourth grooves are oriented to form at least a portion of a second ring surrounding the first ring, wherein the one or more first grooves have a cross-sectional shape different from the one or more second grooves. Each of the one or more first grooves and each of the one or more second grooves comprises a plurality of individual grooves arranged along an arc about a central axis, wherein each individual groove extends about the central axis along a bending length of less than 180 degrees, and wherein each individual groove includes at least two holes extending from a groove wall to a second surface of the reflector body opposite the first surface, the at least two holes being located at a proximal end and a distal end of the individual groove.

10. The lamp module as claimed in claim 9, wherein the one or more third recesses have a cross-sectional shape different from the one or more fourth recesses.

11. The lamp module as claimed in claim 9, wherein for each individual recess, the holes are formed by exactly two holes located at the two opposite distal ends of the individual recess.

12. The lamp module as claimed in claim 9, wherein the one or more first grooves form a first semicircle, and the one or more second grooves form a second semicircle.

13. The lamp module as claimed in claim 9, wherein the first surface of the reflector body has a reflectivity greater than 90%.

14. The lamp module as claimed in claim 9, wherein a portion of each of the one or more first recesses and the one or more second recesses has a linear length.

15. The lamp module as claimed in claim 9, wherein each of the one or more first grooves and the one or more second grooves of the first ring is disposed in a region having an annular radius of less than 30 mm.

16. A lamp module assembly suitable for semiconductor substrate processing, the lamp module assembly comprising: A reflector body; One or more first grooves are disposed within a first surface of the reflector body; one or more second grooves are disposed within the first surface of the reflector body; one or more third grooves are disposed within the first surface of the reflector body; and one or more fourth grooves are disposed within the first surface of the reflector body, wherein the one or more first grooves and the one or more second grooves are oriented to form at least a portion of a first ring, the one or more third grooves and the one or more fourth grooves are oriented to form at least a portion of a second ring surrounding the first ring, and the one or more first grooves have a cross-sectional shape different from the one or more second grooves, wherein each of the one or more first grooves and the one or more second grooves is a curved groove extending about a central axis along an arc of less than 180 degrees.

17. The lamp module as claimed in claim 16, wherein each of the one or more third recesses and the one or more fourth recesses is a curved recess.

18. The lamp module as claimed in claim 16, wherein the one or more first recesses are connected to the one or more second recesses.

19. The lamp module as claimed in claim 16, wherein each of the first recesses and the second recesses includes at least one hole, each of the holes extending from a recess wall to a second surface of the reflector body opposite the first surface.

20. The lamp module as claimed in claim 16, wherein the first surface of the reflector body has a reflectivity greater than 90%.

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