System and method for connection of a holding element to an optical element by using a connecting material, and a microlithographic optical assembly produced thereof

Abstract

The present invention relates to a method for connecting a retaining element (1) to an optical element (2) by means of a connecting material (3), particularly a rotationally symmetric optical element. The method includes: disposing the connecting material (3) between the retaining element (1) and the optical element (2); and curing the connecting material (3), wherein, for curing, the connecting material (3) is irradiated with radiation (4) to cure the connecting material (3). The object of the present invention is to provide a reliable and cost-effective method for connecting a retaining element to an optical element to achieve flexible optical design. The method further includes the radiation (4) of the bonding material (3) being coupled into the bonding material (3) by a deflection device (5) for deflecting the radiation (4); wherein the radiation (4) is incident on a deflection element (5a) of the deflection device (5) before entering the optical element (2); wherein the radiation (4) is deflected laterally through the optical element (2) by the deflection element (5a), particularly towards the bonding material (3) or another deflection element (5b).

Description

[Technical Field]

[0001] This invention relates to a method for connecting a retaining element to an optical element using a connecting material, the method comprising the steps of: disposing the connecting material between the retaining element and the optical element, and curing the connecting material, wherein, for curing, the connecting material is irradiated with radiation to cure the connecting material. This invention further relates to a retaining element for connecting to an optical element using a connecting material, and a system for connecting the retaining element to the optical element using a connecting material, particularly for implementing the method according to the invention. [Previous Technology]

[0002] As is known from the prior art, lens elements are incorporated into mounting bases and tightly joined using adhesives. For example, general-purpose optical components are used in lighting systems and projection lenses for structuring and process control in lithography. Adhesives that can be cured using UV light have proven particularly advantageous for permanent bonding.

[0003] In known methods, UV adhesive is applied to a predetermined bonding joint between a lens element and a mounting base through an incident channel, and then cured by irradiation with a UV light source. For this purpose, the UV light source is manually oriented relative to the bonding joint so that the focal point of the UV light source is projected onto the edge cylinder of the lens element through the upper optical surface, thereby directly irradiating the bonding joint. In this case, various lens element geometries will accept different ranges of incident angles to introduce light into the bonding gap. In particular, convex optical surfaces are especially unsuitable for inputting coupled light to activate the adhesive, because total internal reflection is more likely to occur on convex surfaces. The known methods therefore limit the implementation of optical designs.

[0004] Manual positioning can cause deviations in the position and angle of the UV light source, leading to drastic fluctuations in irradiation intensity and dosage, which in turn affects the reliability of adhesive curing. This results in the risk of adhesive strength fluctuations, which in turn can cause positional drift of the lens element. Therefore, the known method also increases process risk. [Summary of the Invention]

[0005] The object of the present invention is to provide a method for connecting a retaining element to an optical element using a connecting material, which overcomes the disadvantages of the prior art. Specifically, the object is to provide a method that enables reliable connection of a retaining element to an optical element, achieving flexible optical design and cost-effectiveness. Another object of the present invention is to provide a retaining element connected to an optical element using a connecting material, and a system for connecting a retaining element to an optical element using a connecting material, particularly for implementing the method according to the present invention.

[0006] According to a first aspect of the present invention, the above-mentioned object is to provide a method for connecting a retaining element to an optical element using a connecting material, comprising the steps of: disposing the connecting material between the retaining element and the optical element, and curing the connecting material, wherein, for curing, radiation used to cure the connecting material is used to irradiate the connecting material, by using a deflection device for deflecting radiation to couple the radiation used for curing the connecting material into the connecting material. This method is particularly suitable for tightly connecting a retaining element to an optical element. This method can be used to achieve a permanent connection between the retaining element and the optical element. Therefore, this method is particularly suitable for producing an optical assembly containing a retaining element and an optical element connected to the retaining element. This optical assembly is particularly suitable for use in lithography equipment, such as the exposure and / or projection system of a lithography equipment.

[0007] This holding element is suitable for connecting fiber optic components. The holding element can be a lithography holding element. The holding element can be, for example, a mounting base, particularly a lens element mounting base. Alternatively, the holding element can be, for example, a socket, particularly a mirror socket for connecting a mirror. The holding element allows optical elements to be positioned in an optical system, such as a projection system of a lithography exposure apparatus. The holding element is particularly useful for positioning optical elements, for example, positioning them on the optical axis of an optical system. The material of the holding element includes, for example, metals and / or ceramics. In the case of a socket, particularly a mirror socket for connecting a mirror, the socket can be metal. Furthermore, the socket can form a defined interface between the support structure, actuator system, and mirror substrate. The socket can be used to distribute gravity and operating forces to reduce deformation and stress. Furthermore, the socket can be used to isolate parasitic forces and torques, as a generating interface, and / or to ensure the substantial interchangeability of the interface.

[0008] The optical element may be a lithography optical element. Specifically, the optical element is at least partially transparent. The optical element comprises, for example, a transparent substrate. The substrate of the optical element particularly comprises a material that is radiosensitive to the spectral range suitable for curing bonding materials. The substrate of the optical element is particularly transmissive in the ultraviolet spectral range. For this purpose, the substrate of the optical element may comprise a material that is transparent to wavelengths in the ultraviolet spectral range. For example, the substrate may comprise quartz glass, calcium fluoride, magnesium fluoride, barium fluoride, strontium fluoride, germanium dioxide glass and / or any other type of glass, such as FK5, LLF1 or LF5. The materials that can be used depend on, for example, the wavelength used by the device, particularly the wavelength used by the projection exposure device using the optical element. The optical element may be a lens element, for example, a lens element having at least one convex optical surface and / or a concave optical surface. It is also conceivable that the optical element is a flat plate, a mirror, a Mangin mirror, or a transmission diffraction optical element. Specifically, in this document, the optical element may be a mirror with a concave reflective surface. The reflector may have one or more polished areas to enable or improve the entry and / or exit of radiation used to cure bonding material into the reflector substrate.

[0009] The optical element is connected to the holding element using a connecting material (particularly a curable connecting material). The connecting material is suitable for tightly connecting the optical element to the holding element. The connecting material is, for example, an adhesive, particularly a radiation-activated adhesive. This adhesive can be cured using ultraviolet light (particularly ultraviolet light with a specific spectral distribution). For example, an epoxy-based adhesive that can be cured using UV light with the Hg-I line is considered. Adhesives that can be cured by radiation in a different spectral range are also considered.

[0010] The connecting material is disposed between the retaining element and the optical element. The connecting material disposal between the retaining element and the optical element may include applying the connecting material to at least one connection point between the retaining element and the optical element. For example, the connecting material may be applied to the retaining element and / or the optical element.

[0011] To achieve a tight connection between the retaining element and the optical element, a bonding material is cured. The cured bonding material is particularly useful for achieving a permanent connection between the retaining element and the optical element. For curing, the bonding material is irradiated with radiation to cure it. In this case, the radiation source can be selected based on the compatibility of the radiation source with the selected bonding material. For example, UV radiation irradiation of the bonding material can be considered. UV radiation can be provided by a UV radiation source (especially a UV concentrator). Radiation from other spectral ranges can also be considered for irradiation of the bonding material. To cure the bonding material, radiation is at least partially coupled into the bonding material.

[0012] Radiation for curing the bonding material is coupled into the bonding material using a deflection device. The deflection device is adapted to deflect the radiation for curing the bonding material. Specifically, the deflection device is configured to deflect the radiation for curing the bonding material along the direction of the bonding material. For example, the deflection device can be a single deflection element or a plurality of cooperating deflection elements. In this document, various examples of deflection elements are particularly reflective elements or light guides. By means of the deflection device, the radiation for curing the bonding material can, for example, be deflected from a first direction to a second direction. The deflection device is specifically configured such that radiation incident on the deflection device and / or radiation coupled into the deflection device and intended to cure the bonding material is coupled into the bonding material between the holding element and the optical element using the deflection device. The deflection device can, for example, be disposed near the optical element.

[0013] It has been shown that radiation for curing bonding material can be coupled into the bonding material using a deflection device to indirectly irradiate the bonding material. Indirect irradiation can be understood as meaning that the radiation source does not directly irradiate the bonding material, but rather irradiates at least one deflection device, which then guides the radiation along the direction of the bonding material. Therefore, this method can cure the bonding material without direct irradiation. Thus, it is advantageous to largely decouple the positioning of the radiation source from the design of the optical element. In contrast, the present invention can uniformly couple radiation into the bonding material regardless of the geometry of the optical element. This is particularly advantageous because the geometry of the optical design can follow other higher boundary conditions, which are particularly caused by the desired function of the optical components, such as the user requirements of lithography equipment.

[0014] According to a second aspect of the invention, the purpose of the retaining element connected to the optical element using a connecting material is achieved, wherein the retaining element includes at least one deflection device for deflecting radiation intended to cure the connecting material, wherein the deflection device is formed, and the radiation incident on the deflection device and intended to cure the connecting material is coupled to the connecting material between the retaining element and the optical element via the deflection device. The retaining element for connecting the optical element using a connecting material is particularly suitable for implementing the method according to the first aspect. This retaining element is particularly suitable for lithography equipment, such as the exposure and / or projection system of a lithography equipment.

[0015] According to a third embodiment of the invention, the system for connecting a retaining element to an optical element via a connecting material achieves the objective of the system, comprising: an optical element; and a retaining element for connecting to the optical element, wherein the system includes at least one deflection device for deflecting radiation to cure the connecting material, wherein the deflection device is formed, and wherein radiation incident on the deflection device and intended to cure the connecting material is coupled into the connecting material between the retaining element and the optical element via the deflection device. The system for connecting a retaining element to an optical element using a connecting material is particularly suitable for implementing the method according to the first embodiment. The retaining element for connecting to the optical element is particularly a retaining element according to the second embodiment.

[0016] According to a fourth embodiment of the present invention, the purpose of the lithography optical assembly is achieved, the lithography optical assembly comprising: an optical element and a retaining element, wherein the retaining element is connected to the optical element, wherein the optical assembly includes at least one deflection device for deflecting radiation to cure a bonding material, wherein the deflection device is formed, and wherein radiation incident on the deflection device and intended to cure the bonding material is coupled to the bonding material between the retaining element and the optical element via the deflection device. The optical assembly is particularly manufactured by the method according to the first embodiment. The optical assembly particularly includes a retaining element according to the second embodiment.

[0017] The advantageous configurations of the invention are specifically described in the appendix and will be described in detail below.

[0018] According to a first advantageous configuration of the invention, radiation for curing the bonding material is deflected by a deflection device for deflecting the radiation laterally through the optical element along the direction of the bonding material. The deflection device for deflecting the radiation is specifically configured to laterally deflect the radiation for curing the bonding material through the optical element along the direction of the bonding material. For example, the deflection device may be configured such that radiation incident on the deflection device and intended to cure the bonding material is deflected by the deflection device, wherein the radiation is coupled into the optical element and guided along the direction of the bonding material. The optical element may particularly function as a light guide. The radiation can then be guided through the optical element along the direction of the bonding material. Specifically, the radiation for curing the bonding material can be guided through the optical element to the connection point where the bonding material is applied. The radiation for curing the bonding material can then be at least partially coupled into the bonding material to cure the bonding material. Since the radiation for curing the bonding material is laterally deflected through the optical element by the deflection device, the radiation can be particularly laterally coupled into the bonding material, regardless of the shape of the optical element. For example, before entering the optical element, the radiation may first be incident on a deflection element of the deflection device, whereby the radiation is laterally deflected through the optical element, particularly along the direction of the connecting material or another deflection element. Specifically, the radiation can be laterally deflected through the optically usable area of ​​the optical element by the deflection element. The optically usable area can be understood as the area through which the radiation passes as intended when the optical element is used.

[0019] According to a further advantageous configuration of the invention, the optical element has at least one optical surface and a side surface. The optical element typically has a front surface, a rear surface, and a side surface. An optical surface can be understood as a surface through which radiation passes during the use of the optical element, for example, during the operation of an optical system containing the optical element. Typically, no radiation passes through the side surface of the optical element. Instead, the side surface defines the side surface of the optical element. The side surface of a rotationally symmetric optical element (such as a lens element) can be particularly understood as the edge cylinder of the optical element. The axis of the edge cylinder of the optical element is generally parallel to the axis of rotation of the optical element. In the case of a lens element, the radiation used first passes through the front surface and then through the rear surface, the front and rear surfaces forming the optical surface. The optical element is joined, particularly bonded, for example, by means of a side surface attached to a holding element.

[0020] Preferably, the radiation for curing the bonding material is coupled into the optical element via a deflection device for deflecting the radiation, input through the side of the optical element. Specifically, the deflection device can be configured such that the radiation for curing the bonding material is coupled into the optical element via a deflection device, input through the side of the optical element. For example, the deflection device can be positioned near the optical element, particularly on the side of the optical element. Since the radiation is coupled into the optical element via a deflection device, the radiation for curing the bonding material can be coupled into the optical element regardless of the shape of the optical surface of the optical element. In particular, the positioning of the radiation source can be independent of the geometry of the optical surface of the optical element. It has been shown that indirect irradiation, unaffected by the shape of the optical element, can provide greater power. In particular, for biconvex lens elements, for example, at the same input power of the radiation source, the power is about 15 times higher than that of bonding methods known in the prior art. The present invention provides additional degrees of freedom in process design and optical design. Due to the higher efficiency, the exposure duration can also be shorter.

[0021] The deflection device is configured, for example, at an angle of approximately at least 45° to the side of the optical element. For example, it can be considered that radiation used to cure the bonding material is guided at least substantially vertically to the side of the optical element by the deflection device. Specifically, the deflection device is at a 45° angle to the line of sight of the connection point. The side may have a certain roughness. For example, radiation incident on the side may be randomly scattered. In the optical element, the number of reflections on the optical surface can be increased, especially total internal reflection, so the optical element acts as a light guide. Therefore, the light is focused on the opposite side of the optical element.

[0022] According to a further advantageous configuration of the invention, a bonding material is applied to at least one connection point between the holding element and the optical element. For example, the bonding material is applied to the optical element and / or the holding element. For example, the bonding material can be applied regionally to at least one connection point, particularly to the optical element and / or the holding element. The bonding material can be used to create a tight bond at at least one connection point between the optical element and the holding element. A deflection device for deflecting the radiation used to cure the bonding material is preferably configured at at least substantially opposite positions at at least one connection point between the holding element and the optical element. This is particularly advantageous for optical elements designed as lens elements, because symmetry causes a self-focusing effect, specifically, a tendency to concentrate on opposing bonding members, particularly opposing adhesive gaps. In the case of other optical elements, other positions may be more advantageous. The deflection device is particularly configured on one side of the optical element, said side being at least substantially opposite the connection point. Specifically, the deflection device is used to guide the radiation of the cured bonding material to the entry point of the optical element, said entry point being at least substantially located at the relative position of the connection point.

[0023] Preferably, the connecting material is applied to a plurality of connection points between the holding element and the optical element. Herein, "a plurality of connection points" specifically means two or more connection points. Preferably, the connecting material is applied to at least three connection points between the holding element and the optical element. Preferably, a deflection device for deflecting the radiation used to cure the connecting material is disposed on at least substantially opposite surfaces of each of the plurality of connection points, particularly on substantially opposite sides of the optical element. For example, it is conceivable to apply the connecting material to six connection points between the holding element and the optical element, wherein six substantially oppositely arranged deflection devices are provided. This deflection device can be used to laterally couple the radiation used to cure the connecting material into the connection points. For example, it is also conceivable to apply the connecting material to three connection points while also providing three substantially oppositely arranged deflection devices. This creates symmetry, thus enabling a degree of self-focusing of the radiation coupled into the optical element. Self-focusing is primarily based on the shape of the optical surface of the optical element, particularly the top and bottom sides. Specifically, when radiation enters an optical element, multiple total internal reflections on the optical surface and random scattering on the sides of the optical element result in increased intensity on opposite sides. Random scattering is particularly dependent on the roughness of the sides. Due to the statistics of multiple scattered rays, the roughness makes the radiation intensity on opposite sides more uniform. This makes it possible to obtain uniform illumination, which is beneficial for the bonding of materials. The sides of rotationally symmetric optical elements (such as lens elements) can be specifically understood as the edge cylinders of the optical element. In the case of lens elements, the side surface facing the direction of the light ray is at least substantially circular. The radiation path may, for example, pass through the center of the optical element, which may result in higher intensity at the bonding point.

[0024] According to a further advantageous configuration of the invention, the deflection device is at least partially configured to reflect radiation used for curing the bonding material. For example, the deflection device may reflect radiation used for curing the bonding material toward the bonding material. The deflection device particularly includes at least one reflective element. The reflective element is particularly configured to at least partially reflect radiation. For example, the reflective element can be understood as a reflective mirror or a tool having a reflective mirror. The reflective element particularly has a form and / or direction that can provide the highest possible light output and / or the most uniform illumination at the bonding point. The reflective element particularly has a high reflectivity for excitation radiation. Specifically, the deflection device is substantially formed as a reflector, particularly for a spectral range in the electromagnetic spectrum, particularly for a spectral range suitable for bonding materials.

[0025] According to a further advantageous configuration of the invention, the deflecting device comprises at least one reflective element in the form of a planar reflective mirror. At least one side of the planar reflective mirror may have a straight cut. Such reflective mirrors are readily manufactured. Specifically, the planar reflective mirror may have opposing straight cuts on all four sides, for example, by virtue of the planar reflective mirror having a rectangular cut overall. Such reflective mirrors are particularly easy to manufacture.

[0026] According to a further advantageous configuration of the invention, the deflection device comprises at least one reflective element in the form of a concave reflective mirror. The curvature of the concave reflective mirror is adjustable to the cutout of the optical element. In this way, perpendicular incident light on the optical element (particularly its sides) can be achieved and the luminous flux can be increased.

[0027] According to a further advantageous configuration of the invention, the deflection device comprises at least one reflective element in the form of a convex surface. This makes it possible to at least partially broaden the radiation beam to solidify the bonding material.

[0028] According to a further advantageous configuration of the invention, the deflection device comprises at least one reflective element in the form of a reflective prism. The reflective prism may have a light incident surface, a light exit surface, and a light deflection surface. For example, radiation for curing bonding materials may enter the reflective prism via the light incident surface, be reflected on the light deflection surface, and exit the reflective prism via the light exit surface. The light exit surface may be planar or curved, particularly concave. Curvature (particularly concave curvature) can increase luminous flux; however, planar surfaces are easier to generate. The light deflection surface may have a reflective coating. Alternatively or additionally, total internal reflection may occur on the light deflection surface. For this purpose, the light deflection surface may form a boundary surface from the medium of the reflective prism (e.g., glass) having a higher refractive index to an adjacent medium (e.g., a gas, such as air) having a lower refractive index. Using reflective prisms as reflective elements makes them both easy to manufacture and handle, for example, when producing holding elements or tooling elements that incorporate reflective prisms as part of a deflection mechanism. Furthermore, the possibility of total internal reflection allows for particularly low losses from radiation coupling into the bonding material.

[0029] According to a further advantageous configuration of the invention, the deflection device includes at least one light guide for deflecting radiation used to cure the bonding material. For example, the light guide can be understood as a transparent fiber that transmits radiation, particularly glass fiber, a tube, or a cable. In this case, light is guided particularly through reflection at the boundary surface of the light guide, and due to the low refractive index of the medium surrounding the light guide, light is guided through total internal reflection, through the reflection effect of the boundary surface, and / or an appropriate refractive gradient. The light guide is particularly flexible in deflecting radiation used to cure the bonding material. For example, it is conceivable that at least one light guide is at least partially bent. For instance, the light guide is bent at approximately 90° to input-couple radiation from a radiation source disposed above or below the optical element and / or holding element, laterally entering the bonding point, particularly via the side of the optical element. One end of the light guide may, for example, be adjacent to the side of the optical element to input-couple radiation laterally through the optical element to the bonding point. For example, it is conceivable that one end of the light guide located on the side of the optical element opposite to the bonding point is adjacent to the side of the optical element. The other end of the light guide may, for example, be adjacent to the radiation source. Alternatively, the retaining element may have an opening through which the light guide extends at least partially. Thus, one end of the light guide may, for example, be adjacent to or in contact with the side of the optical element. The light guide may be, in particular, a rigid light guide, such as a light rod.

[0030] According to a further advantageous configuration of the invention, the deflection device for deflecting radiation is detachably connected to the holding element. For example, a deflection device for deflecting radiation used to cure the connecting member can be provided temporarily. A deflection device for radiation used to cure the connecting material is particularly suitable for curing the irradiation duration of the connecting member. For example, it can be considered that the deflection device is detachably connected to the holding element. Thus, the deflection device is detachably connected to the holding element, for example, for the duration of irradiation of the connecting member. A reflective element, such as a reflective mirror, can be temporarily introduced during the curing of the connecting material, particularly as a tool opposite the connection point.

[0031] According to a further advantageous configuration of the invention, the deflection device for deflecting radiation is detachably connected to the holding element by means of a deflection device fixed to a tool element and a tool element detachably connected to the holding element. This makes it possible to simplify the temporary configuration of the deflection device. Preferably, the tool element may have a basic ring form and include a plurality of deflection devices. For example, the number of deflection devices on the tool element may be a multiple of 3. Specifically, the tool element may contain three or six deflection devices. As mentioned in another point, this produces symmetry, thus enabling a degree of self-focusing of the radiation coupled into the optical element. Preferably, when the tool element is connected to the holding element, the holding element may have cutouts to receive the deflection devices. Specifically, the forms of these cutouts may be complementary to form the deflection devices. This simplifies the connection between the tool element and the holding element.

[0032] According to a further advantageous configuration of the invention, the tool element includes two or more pin elements for securing the tool element in complementary holes of the retaining element. This allows the tool element to be form-fitted to the retaining element in a positionally and rotationally fixed manner. For example, the tool element may include three such pin elements. For example, the two or more pin elements may have a gap in the complementary holes of the retaining element to compensate for manufacturing tolerances.

[0033] According to a further advantageous configuration of the invention, the tool element includes at least one planar metal surface for controlling the focusing of a radiating beam used to cure the bonding material. For example, the diameter of the at least one planar metal surface is at least the same as the diameter of the radiating beam used to cure the bonding material. For example, the number of planar metal surfaces may correspond to the number of deflection devices on the tool element, and the planar metal surfaces may be arranged in a peripheral direction between the deflection devices. This allows the focusing of the radiating beam used to cure the bonding material to be controlled in a simple manner by first rotating the tool element, such that a fixed beam is incident on at least one planar metal surface. Then, for example, the focusing of the beam is controlled based on the sharpness of the cut projected onto the at least one planar metal surface. Subsequently, the tool element may be rotated such that the beam is incident on the at least one deflection device.

[0034] According to a further advantageous configuration of the invention, the deflection device for deflecting radiation is part of the holding element. The holding element permanently has the aforementioned deflection device for deflecting radiation. For example, the deflection device can be conceived as a reflective mirror on the holding element. The deflection device can, for example, be non-detachably connected to the holding element.

[0035] According to a further advantageous configuration of the invention, the deflection device for deflecting radiation includes a first deflection element and a second deflection element. In this case, the second deflection element may be part of the holding element or part of the optical element. The first deflection element is detachably connected to the holding element or becomes part of the holding element. Total internal reflection can occur at the second deflection element, particularly when the second deflection element is part of the optical element. The first and second deflection elements provide more possibilities for guiding radiation for curing the bonding material. Since the second deflection element is part of the optical element, it can be implemented in a simpler manner because, for example, a reflective surface is easier to create on the optical element than on the holding element. Furthermore, the possibility of total internal reflection allows for particularly low losses in the radiation coupling input to the bonding material for curing the bonding material.

[0036] According to a further advantageous configuration of the invention, the retaining element is a mounting base for receiving the optical element. The mounting base may, for example, at least partially correspond to the shape of the optical element to enable precise fitting of the optical element. Connecting the mounting base to the optical element via a connecting material may, for example, involve positioning the optical element within the mounting base. A gap is formed between the side surface of the optical element, for example, and the inner surface of the mounting base, into which the connecting material is introduced. When the optical element is oriented in the mounting base, the connecting material is applied to the connection point, for example, through the gap. The gap may, for example, form an incident channel for the connecting material.

[0037] According to a further advantageous configuration of the invention, the retaining element is a socket for connection to the optical element. Connecting the socket to the optical element via a connecting material may, for example, involve positioning the optical element relative to the socket.

[0038] According to a further advantageous configuration of the invention, the radiation system for curing the bonding material is at least partially scattered and / or diffracted. Scattering and / or diffracting may occur when radiation is coupled into the bonding material. Alternatively or additionally, scattering and / or diffracting may occur before radiation is coupled into the bonding material, for example, when radiation enters an optical element. For example, for this purpose, the optical element may have a rough surface through which light enters the optical element and is scattered by the rough surface. The rough surface of the optical element may be particularly the side surface of the optical element. Alternatively or additionally, due to the possibility of scattering and / or diffracting between the deflection device and the bonding material, at least one radiation-opaque element having at least one notch is positioned in the beam path of the radiation beam for curing the bonding material. Due to the radiation-opaque element, at least a portion of the radiation beam may be absorbed before being coupled into the bonding material. However, due to the presence of the notch, scattering may occur, for example, due to the surface roughness at the notch profile, so the radiation for curing the bonding material may be at least partially deflected before and / or during coupling into the bonding material. Alternatively or additionally, depending on the wavelength of the radiation and the size of the cut, diffraction may also occur, thus the radiation used to cure the bonding material may be at least partially deflected before and / or during coupling input to the bonding material. At least one radiation-opaque element may be, for example, a radiation-opaque element for fastening and / or receiving optical elements, such as as part of a holding element. Specifically, the radiation-opaque element may be a holding ring for optical elements, said holding ring having multiple cuts. Generally, scattering and / or diffraction of the radiation used to cure the bonding material can increase the luminous flux.

[0039] According to a further advantageous configuration of the invention, the system further includes: a spherical counterweight for positioning the optical element and the holding element relative to each other. The spherical counterweight is particularly used for positioning the optical element and the mounting base relative to each other. For example, it can be considered that the holding element is stably held, and the optical element can be moved relative to the holding element by means of the spherical counterweight. The spherical counterweight preferably has at least one slit formed such that radiation for curing the bonding material passes through the slit in the spherical counterweight to a deflection device for deflecting the radiation for curing the bonding material. For example, the spherical counterweight can be positioned above the optical element in such a way that at least one slit in the spherical counterweight is located above at least one deflection device for deflecting the radiation for curing the bonding material. For example, radiation passes through the slit in the spherical counterweight to reach the deflection device. The spherical counterweight particularly has a plurality of slits corresponding to the number of deflection devices, such that an opening can be positioned, for example, above each deflection device. Alternatively, the spherical counterweight may have at least one slit formed such that a deflection device for deflecting radiation to solidify the bonding material extends at least partially through the slit in the spherical counterweight. Specifically, the deflection device may include at least one light guide for deflecting radiation, the light guide extending at least partially through the slit in the spherical counterweight to guide radiation through the slit.

[0040] The system may also include a radiation source for providing radiation for curing the bonding material. The radiation source is, for example, a UV radiation source, preferably a UV concentrator. The use of radiation sources in other spectral ranges is also considered. For example, curing of the bonding material can be achieved by rotation of optical components and / or the system. In this case, focused illumination can be used. It is also contemplated that ring illumination can be used to achieve curing of the bonding material. This preference allows for simultaneous exposure (especially curing) of multiple bonding points (especially all bonding points).

[0041] The system may further include a connector and / or a multi-prong connector, particularly a three-prong connector, for positioning the optical element and / or the retaining element. For example, it is conceivable that the optical element can be moved by means of a spherical counterweight in the multi-prong connector and / or that the retaining element can be moved laterally on the connector. The multi-prong connector may include multiple support elements having multiple support surfaces on which the optical element can be disposed. For example, it may be a three-prong connector with three support elements. For example, it is conceivable that during irradiation, the retaining element, the optical element, the connector, and / or the multi-prong connector rotate on a gas bearing about the optical axis of the optical element, such that the plurality of connection points can be uniformly irradiated.

[0042] The system may further include a measuring system for determining the position of the holding element and the optical element relative to each other. For example, the measuring system may be used to determine the position of the optical element in the coordinate system of the holding element formed as a mounting base.

[0043] The exemplary configurations of the present invention described above in this specification should also be understood as being disclosed in all possible combinations thereof. In each case, individual features of each state can be combined with any desired or all feature pairs of other states. Further configurations and advantages of the invention will be explained in conjunction with embodiments of some exemplary embodiments of the invention.

Implementation Method

[0045] Figure 1 illustrates a prior art known system 10' for connecting a lens element mounting base 1' to a lens element 2'. The lens element 2' is bonded to the lens element mounting base 1' at an adhesive joint 6' by a UV-curable adhesive 3', and UV light 4' from a UV light source (not shown) radiates onto the adhesive joint 6' to cure the adhesive 3'. After the lens element 2' is positioned in the lens element mounting base 1', the UV light source is positioned, wherein the UV light 4' is coupled into the lens element 2' through the upper optical surface 2a' of the lens element 2', and the focal point of the UV light source is mapped onto the side surface 2c' of the lens element 2'. Manual positioning of the UV light source may result in deviations in position and angle.

[0046] As shown in Figure 2, different lens element geometries accept incident angles α' and β' of different size ranges to couple UV light 4' to the adhesive 3' at the bonding joint 6'. For example, lens elements with convex optical surfaces 2a and 2b are particularly unsuitable for inputting coupled light 4' to cure the adhesive. Therefore, methods known in the prior art may limit the implementation of optical designs and may cause variations in the strength of the adhesive 3'. This can lead to positional drift of the optical elements, thereby hindering the actual function of the product.

[0047] FIG3 illustrates an exemplary embodiment of a system 10 according to the present invention for connecting a retaining element 1 formed as a mounting base 1a to an optical element 2 via a connecting material 3. The system 10 includes a mounting base 1a and a transparent optical element 2, which is formed as a biconvex lens element. The optical element 2 is received in the mounting base 1a. The optical element 2 has two opposing convex optical surfaces 2a, 2b and a side surface 2c. In order to connect the optical element 2 to the retaining element 1, a connecting material 3 (here, a UV-curable adhesive) is applied to the connection point 6 between the side surface 2c of the optical element 2 and the inner surface of the mounting base 1a. For curing, the connecting material 3 is irradiated with radiation 4 to cure the connecting material 3. The radiation 4 for curing the connecting material 3 is provided by a radiation source 14.

[0048] To solidify the bonding material 3, radiation 4 from the radiation source 14 is coupled into the optical element 2 via a deflection device 5 for deflecting the radiation 4 through the side 2c of the optical element 2, laterally deflected through the optical element 2 along the direction of the bonding material 3, and coupled into the bonding material 3 to solidify the bonding material 3. The holding element 1 for connecting the optical element 2 through the bonding material 3 includes a deflection device 5 for deflecting the radiation 4 to solidify the bonding material 3. In this case, the deflection device 5 is formed as a reflective element 7, particularly a reflective mirror, which is part of the holding element 1. The deflection device 5 is configured and formed at least substantially relative to the connection point 6, wherein radiation 4 incident on the deflection device 5 and intended for solidifying the bonding material 3 is coupled into the bonding material 3 between the holding element 1 and the optical element 2 through the deflection device 5. It has been shown that indirect irradiation, regardless of the form of the optical element 2, can provide greater power. In particular, for biconvex lens elements, for example, with the same input power of the radiation source 14, approximately 15 times greater power is provided than in connection methods known in the prior art. Because of its higher efficiency, it can also achieve shorter exposure durations.

[0049] The system 10 can be used to generate a lithography optical assembly 11, which includes an optical element 2; a holding element 1 connected to the optical element 2; and a deflection device 5 configured to deflect radiation 4 for curing the bonding material 3.

[0050] Figure 4 illustrates another exemplary embodiment of a system 10 according to the present invention for connecting a retaining element 1 to an optical element 2 via a connecting material 3. In addition to the transparent optical element 2 and the retaining element 1 for connecting the optical element 2, the system 10 includes a deflection device 5 for deflecting radiation 4 intended for curing the connecting material 3. The deflection device 5 is formed such that radiation 4 incident on the deflection device 5 and intended for curing the connecting material 3 is laterally deflected through the deflection device 5, passes through the optical element 2, and is coupled into the connecting material 3 between the retaining element 1 and the optical element 2. In this case, the optical element 2 functions as a light guide 15. Total internal reflection occurs on the optical surface of the optical element 2. Therefore, a focal point is generated on the opposite side of the optical element 2. The deflection device 5 is temporarily introduced into the system 10 as a tool only for the duration of irradiation of the connecting material 3. The deflection device 5 can, for example, be released from the retaining element 1 and removed again after irradiation of the connecting material 3. Curing of the connecting material 3 can be achieved through rotation of the system 10. As an alternative, ring lighting could be used to cure the bonding materials.

[0051] Figures 5a and 5b illustrate another exemplary embodiment of a system 10 according to the present invention for connecting a retaining element 1 to an optical element 2 via a connecting material 3. The system 10 includes a retaining element 1 configured to receive a mounting base 1a for the optical element 2. The optical element 2 is received in the mounting base 1a. In this case, the side surface 2c of the optical element 2 forms a gap 12 together with the inner surface of the mounting base 1a, allowing the connecting material 3 to be introduced into the gap 12. A deflection device 5 for deflecting radiation 4 to solidify the connecting material 3 is disposed on the side of the optical element 2 substantially opposite to the gap 12.

[0052] The position of the optical element 2 in the coordinate system of the mounting base 1a is determined by a measuring system (not shown). Furthermore, a connecting socket 13 for positioning the holding element 1 and a multi-pin socket 16 for positioning the optical element 2 are provided. The multi-pin socket 16 has multiple support elements distributed around the optical element 2 and multiple support surfaces for supporting the optical element 2 in the mounting base 1a. A spherical counterweight 9 is also provided to position the optical element 2 and the mounting base 1a relative to each other. The spherical counterweight 9 allows the optical element 2 to move within the multi-pin socket 16, and the holding element 1 to move laterally on the connecting socket 13. When the optical element 2 and the mounting base 1a are approximately aligned, a connecting material 3 can be applied to the connection point 6 through the gap 12 forming the incident channel.

[0053] After the position of the optical element 2 is finely adjusted again, the radiation source 14 (formed herein as a UV concentrator) provides radiation 4 to cure the bonding material 3. The spherical counterweight 9 has a cutout 9a, which is positioned above the deflection device 5 to deflect the radiation 4 used to cure the bonding material 3. As a result, the radiation 4 from the radiation source 14 passes through the cutout 9a in the spherical counterweight 9 to reach the deflection device 5. The deflection device 5 is configured as a reflective element 7 to reflect the radiation 4 used to cure the bonding material 3, wherein the radiation 4 from the radiation source 14 passes laterally through the optical element 2 to reach the connection point 6.

[0054] Figures 6a and 6b illustrate another exemplary embodiment of the system 10 for connecting the retaining element 1 to the optical element 2 via the connecting material 3. In each case, a plurality of connection points 6 are provided between the retaining element 1 and the optical element 2, wherein, relative to each of these connection points 6, a deflection device 5 for deflecting radiation 4 used to cure the connecting material 3 is disposed on at least one substantially opposite side of the optical element 2. In Figure 6a, three deflection devices 5 are provided for deflecting radiation 4 along the directions of three respectively opposite connection points 6. This creates symmetry, resulting in a degree of self-focusing of the input coupled radiation 4. In Figure 6b, six deflection devices 5 are provided for deflecting radiation 4 along six respectively substantially opposite connection points 6. Thus, the optical element 2 can be connected to the mounting base 1a at a plurality of connection points 6 along the side 2c of the optical element 2. The connecting material 3 used may be, for example, a UV-curable adhesive, which is cured by irradiation with UV radiation 4 from a UV radiation source 14.

[0055] Figures 7a and 7b illustrate another exemplary embodiment of a system 10 for connecting a retaining element 1 to an optical element 2 via a connecting material 3. Three connection points 6 are provided between the retaining element 1 and the optical element 2. One end 8a of a light guide 8 is positioned opposite each of these connection points 6. The light guide 8 is used to deflect radiation from a radiation source (not shown) at an angle of approximately 90° and couple it into the optical element 2 opposite to the connection point 6. The light guide 8 extends at least partially through a cutout 1b in the retaining element 1. Thus, the end 8a of the light guide 8 reaches near the edge cylinder of the optical element 2. The light guide 8 also extends at least partially through a cutout 17a in an openwork ring 17, which predefines the configuration of the light guide 8.

[0056] FIG8 illustrates another exemplary embodiment of the system 10 according to the invention for connecting a retaining element 1, formed as a mounting base 1a, to a transparent optical element 2 via a connecting material 3. To connect the optical element 2 to the retaining element 1, the connecting material 3 is applied between the optical element 2 and the retaining element 1. Radiation 4 for curing the connecting material 3 is provided by a radiation source (not shown). The radiation 4 is deflected through a light guide 8 onto a reflective element 7, specifically formed as a mirror surface, and laterally coupled into the optical element 2 via the side of the optical element 2 through the reflective element 7, and finally coupled into the connecting material 3. The light guide 8 is, for example, a rigid light guide, particularly a light rod. It is conceivable that multiple light guides 8 and correspondingly configured reflective elements 7 are provided to couple radiation into a corresponding number of connection points 6. Alternatively, for example, it is conceivable to provide only one light guide 8, which rotates to guide radiation onto multiple reflective elements 7, which in turn deflect this radiation along the direction of the connection points 6.

[0057] FIG9 illustrates another exemplary embodiment of a system 10 for connecting a retaining element 1 to an optical element 2 via a connecting material 3. In this case, the retaining element 1 is a mirror socket 1, and the optical element 2 is a mirror 2. The mirror socket 1 and the mirror 2 (only a portion of each is shown in each case) are connected to each other at a plurality of adhesive joints via a UV-curable adhesive, which serves as the connecting material 3. The adhesive joints are located on the contact surface between the mirror 2 and the mirror socket 1, between a plurality of cutouts 19 on the side of the mirror socket 1. For curing, radiation 4 provided by a radiation source (not shown) is used to irradiate the connecting material 3.

[0058] To solidify the bonding material 3, radiation 4 from the radiation source is coupled into the bonding material 3 through a deflection device for deflecting the radiation 4. The deflection device includes a first deflection element 5a and a second deflection element 5b. In this case, the first deflection element 5a is a reflecting prism 5a, which reflects the incident radiation 4 onto the light deflection surface through total internal reflection, thus deflecting it for the first time. For this purpose, the light deflection surface is polished, and an air gap (not shown) is provided behind the light deflection surface along the beam direction. After leaving the reflecting prism 5a, the radiation 4 is incident on the polished surface 18 of the reflector 2 and enters the substrate of the reflector 2 from there.

[0059] Subsequently, radiation 4 is incident on the second deflecting element 5b, which in this case is formed as the convex curved boundary surface 5b of the reflector 2, providing total internal reflection and thus forming part of the reflector 2. Since the convex curved boundary surface 5b is also polished, and since the air position is behind the convex curved boundary surface 5b in the beam direction, total internal reflection also occurs here. This second deflection of radiation 4 finally results in it being incident on the bonding material 3, i.e., on the UV-cured adhesive on the bonding surface. Thereupon, radiation 4 is coupled into the bonding material 3, thus curing the adhesive and tightly connecting the reflector socket 1 to the reflector 2.

[0060] In the exemplary embodiment shown in FIG9, the radiation source (not shown) for generating radiation 4 of the cured bonding material 3 may be annular, that is, a hemispherical and annular radiation source temporarily surrounding the reflector 2 and the reflector socket 1. Alternatively or additionally, the first deflection element 5a may extend in an annular manner.

[0061] The following embodiments are also disclosed:

[0062] A method for connecting a retaining element to an optical element using a connecting material, comprising the following steps: - disposing the connecting material between the retaining element and the optical element; and - curing the connecting material, wherein, for curing, the connecting material is irradiated with radiation to cure the connecting material, wherein the radiation for curing the connecting material is coupled into the connecting material through a deflection device for deflecting radiation.

[0063] According to the method of Example 1, the radiation used to cure the bonding material is deflected laterally through the optical element by a deflection device for deflecting the radiation along the direction of the bonding material.

[0064] According to the method of embodiment 1 or 2, the optical element has at least one optical surface and one side surface, wherein radiation for curing the bonding material is coupled into the optical element through a deflection device for deflecting radiation via the side of the optical element.

[0065] According to any one of Embodiments 1 to 3, the connecting material is applied to at least one connection point between the holding element and the optical element, wherein a deflection device for deflecting radiation used to cure the connecting material is at least substantially disposed opposite to at least one connection point between the holding element and the optical element.

[0066] According to the method of embodiment 4, the connecting material is applied to a plurality of connection points between the holding element and the optical element, wherein a deflection device for deflecting radiation used to solidify the connecting material is provided at least substantially opposite each of the connection points.

[0067] According to any one of the embodiments 1 to 5, the deflection device at least partially forms for reflecting radiation used to solidify the bonding material, and in particular includes at least one reflective element.

[0068] The method according to any one of Embodiments 1 to 6, wherein the deflection device includes at least one light guide for deflecting radiation used to cure the bonding material.

[0069] A retaining element for connecting an optical element through a connecting material, particularly for use in the method according to any one of embodiments 1 to 7, wherein the retaining element includes at least one deflection device for deflecting radiation intended for curing the connecting material, wherein the deflection device is formed, and the radiation incident on the deflection device and intended for curing the connecting material is coupled into the connecting material between the retaining element and the optical element through the deflection device.

[0070] According to the retaining element of Embodiment 8, the deflection device for deflecting radiation is releasably connected to the retaining element.

[0071] The holding element according to Embodiment 8, wherein the deflection device for deflecting radiation is part of the holding element.

[0072] The retaining element according to any one of embodiments 8 to 10, wherein the retaining element is a mounting base for receiving the optical element.

[0073] A system for connecting a retaining element to an optical element via a connecting material, particularly a system for implementing the method according to any one of embodiments 1 to 7, comprising: an optical element; and a retaining element, particularly a mounting base, for connecting the optical element, particularly the retaining element according to any one of embodiments 8 to 11, wherein the system includes at least one deflection device for deflecting radiation intended for curing the connecting material, wherein the deflection device is formed, and wherein radiation incident on the deflection device and intended for curing the connecting material is coupled into the connecting material between the retaining element and the optical element through the deflection device.

[0074] The system according to Embodiment 12 further includes: a spherical counterweight for positioning the optical element and the holding element (in particular the mounting base) relative to each other, wherein the spherical counterweight has at least one cutout through which radiation for curing the bonding material passes to a deflection device for deflecting radiation for curing the bonding material and / or the deflection device for deflecting radiation for curing the bonding material extends at least partially through the cutout in the spherical counterweight.

[0075] A lithography optical assembly, particularly generated according to the method of any one of Embodiments 1 to 7, comprises: an optical element; and a retaining element, particularly a retaining element according to any one of Embodiments 8 to 11, wherein the retaining element is connected to the optical element, wherein the optical assembly includes at least one deflection device for deflecting radiation intended for curing the bonding material, wherein the deflection device is formed, and wherein radiation incident on the deflection device and intended for curing the bonding material is coupled into the bonding material between the retaining element and the optical element through the deflection device. [Simplified Explanation of the Diagram]

[0044] Exemplary embodiments and variations of the present invention will now be explained in more detail based on the accompanying drawings. Various aspects of the present invention can be better understood from the following embodiments taken in conjunction with the accompanying drawings. These drawings are schematic and simplified; only detailed information is shown to enhance understanding of the scope of the claims, while other detailed information is omitted. The same reference numerals denote the same or corresponding parts throughout. In each case, individual features of each aspect can be combined with any or all desired features of other aspects. These and other aspects, features, and / or technical effects are apparent from and illustrated by the drawings described below, in which: Figure 1 shows a schematic diagram of a system for connecting a lens element mount to a lens element according to the prior art. Figure 2 shows the acceptance of UV light incident angles depending on various lens element geometries according to the prior art. Figure 3 shows a schematic diagram of an exemplary embodiment of a system according to a third aspect. Figure 4 shows a schematic diagram of another exemplary embodiment of a system according to a third aspect. Figures 5a and 5b show schematic diagrams of another exemplary embodiment of a system according to a third aspect. Figures 6a and 6b show schematic top views of another exemplary embodiment of a system according to a third aspect. Figures 7a and 7b show schematic top and perspective views of another exemplary embodiment of the system according to the third state. Figure 8 shows a schematic diagram of another exemplary embodiment of the system according to the third state; and Figure 9 shows a schematic diagram of another exemplary embodiment of the system according to the third state.

Claims

1. A method for connecting a retaining element (1) to an optical element (2) by means of a connecting material (3), the optical element being particularly a rotationally symmetric optical element, the method comprising: The connecting material (3) is disposed between the retaining element (1) and the optical element (2); And to cure the connecting material (3), wherein, for curing, radiation (4) is used to irradiate the connecting material (3) to cure the connecting material (3); wherein the radiation (4) for curing the connecting material (3) is coupled into the connecting material (3) by a deflection device (5) for deflecting the radiation (4); wherein the radiation (4) is incident on a deflection element (5a) of the deflection device (5) before entering the optical element (2); wherein the radiation (4) is deflected laterally through the optical element (2) by the deflection element (5a), which is specifically deflected toward the connecting material (3) or another deflection element (5b).

2. The method as described in claim 1, wherein the optical element (2) has at least one optical surface (2a, 2b) and a side surface (2c), and the radiation (4) of the bonding material (3) is coupled into the optical element (2) by means of the deflection device (5) for deflecting the radiation (4) and via the side surface (2c) of the optical element (2).

3. The method as described in claim 1 or 2, wherein the connecting material (3) is applied to at least one connection point (6) between the retaining element (1) and the optical element (2), and the deflection device (5) for deflecting the radiation (4) of the connecting material (3) is at least substantially disposed opposite to the at least one connection point (6) between the retaining element (1) and the optical element (2).

4. The method as described in claim 3, wherein the connecting material (3) is applied to a plurality of connection points (6) between the holding element (1) and the optical element (2), and the deflection device (5) for deflecting the radiation (4) of the bonding material (3) is disposed at least substantially opposite to the connection points (6).

5. The method as described in claim 1 or 2, wherein the deflection device (5) at least partially forms the radiation (4) for reflecting the curing of the bonding material (3), and the deflection device particularly includes at least one reflective element (7).

6. The method as described in claim 1 or 2, wherein the deflection device (5) includes at least one light guide (8) for deflecting the radiation (4) of the bonding material (3) being cured.

7. A retaining element (1) connected to an optical element (2) by a connecting material (3), the optical element being particularly rotationally symmetric (2), wherein the retaining element is particularly used for the method described in any one of claims 1-6; wherein the retaining element (1) includes at least one deflection device (5) for deflecting radiation (4) that cures the connecting material (3); wherein the deflection device (5) is formed such that radiation incident on the deflection device (5) and used for curing the connecting material (3) is... Radiation (4) from the connecting material (3) is coupled into the connecting material (3) between the holding element (1) and the optical element (2) by the deflection device (5); wherein the radiation (4) is incident on a deflection element (5a) of the deflection device (5) before entering the optical element (2); wherein the radiation (4) is deflected laterally through the optical element (2) by the deflection element (5a), and is specifically deflected toward the connecting material (3) or another deflection element (5b).

8. The holding element (1) as claimed in claim 7, wherein the deflection device (5) for deflecting the radiation is releasably connected to the holding element (1).

9. The holding element (1) as claimed in claim 7, wherein the deflection device (5) for deflecting the radiation (4) is part of the holding element (1).

10. The retaining element (1) as described in any one of claims 7-9, wherein the retaining element (1) is a mounting base (1a) for receiving the optical element (2).

11. A system (10) for connecting a retaining element (1) to an optical element (2) by means of a connecting material (3), the optical element being particularly rotationally symmetric, wherein the system is particularly used for performing the method as described in any one of claims 1-6; wherein the system comprises: A rotationally symmetric optical element (2); a retaining element (1), which is specifically a mounting base (1a), for connection to the optical element (2), which is specifically a retaining element (1) as described in any one of claims 7 to 10; and at least one deflection device (5) for deflecting radiation (4) for curing the connecting material (3); wherein the deflection device (5) is formed such that the radiation (4) incident on the deflection device (5) and used for curing the connecting material (3) is coupled into the connecting material (3) between the retaining element (1) and the optical element (2) by means of the deflection device (5).

12. The system (10) as claimed in claim 11, wherein the system (10) further comprises a spherical counterweight (9) for positioning the optical element (2) and the retaining element (1) relative to each other, the retaining element being specifically the mounting base (1a); wherein the spherical counterweight (9) has at least one cut (9a) formed such that the radiation (4) for curing the bonding material (3) passes through the cut (9a) in the spherical counterweight (9) to the deflection device (5) for deflecting the radiation (4) for curing the bonding material (3), and / or such that the deflection device (5) for deflecting the radiation (4) for curing the bonding material (3) extends at least partially through the cut (9a) in the spherical counterweight (9).

13. A lithography optical assembly (11), specifically manufactured by the method described in any one of claims 1 to 6, comprising: An optical element (2), which is particularly a rotationally symmetric optical element (2); and a retaining element (1), which is particularly a retaining element (1) as described in any one of claims 7 to 10, wherein the retaining element (1) is connected to the optical element (2); wherein the lithography optical assembly (11) includes at least one deflection device (5) for deflecting the radiation (4) for curing the bonding material (3), the deflection device (5) being formed such that the radiation (4) incident on the deflection device (5) and used for curing the bonding material (3) is coupled into the bonding material (3) between the retaining element (1) and the optical element (2) by means of the deflection device (5).

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