Pre-cleaning system for wafer container

Abstract

A pre-cleaning system for wafer containers includes a body, a shielding cover, a first actuation module, a carrier plate, a second actuation module, a plurality of first nozzles, and at least one second nozzle. The wafer container includes a housing and a cover. The body includes a top plate and has a processing chamber and a first opening and a second opening formed on the top plate. The cover is fixed to the carrier plate. The housing is placed at the second opening. The first actuation module is controlled to actuate the carrier plate to tilt and lower, causing the cover and carrier plate to be placed together in the processing chamber with the cover facing at least one second nozzle. The second actuation module is controlled to actuate the plurality of first nozzles into the housing. The plurality of first nozzles eject a first gas to clean the interior of the housing. The at least one second nozzle ejects a second gas to clean the inner surface of the cover.

Claims

1. A pre-cleaning system for a wafer container, the pre-cleaning system being used to perform a pre-cleaning procedure on the wafer container, the wafer container including a housing and a lid, the housing having a first opening, the pre-cleaning system comprising: a body including a top plate and having a processing chamber, a second opening and a third opening, the second opening and the third opening being formed on the top plate; a shielding cover actuated to cover the second opening; a first actuation module disposed within the processing chamber; a support plate configured to pass through the second opening and fixed to the first actuation module; a second actuation module disposed within the processing chamber; a plurality of first nozzles fixed to the second actuation module; and at least one second nozzle mounted within the processing chamber; wherein the pre-cleaning system performs the following steps to perform the pre-cleaning procedure: actuating the shielding cover to open the second opening; controlling the first actuation module to actuate the support plate through the second opening and to a horizontal position. The container is positioned above the second opening; the lid is fixed to the support plate with one inner surface of the lid facing upwards; the container is placed at the third opening with the first opening of the container surrounding the third opening; the first actuation module is controlled to actuate the support plate to tilt and lower it so that the lid and the support plate are placed together in the processing chamber with the inner surface of the lid facing the at least one second nozzle; the shielding cover is actuated to cover the second opening; the second actuation module is controlled to actuate the plurality of first nozzles through the third opening and into the container; the plurality of first nozzles are driven to spray a first gas to clean the interior of one of the containers; and the at least one second nozzle is driven to spray a second gas to clean the inner surface of the lid.

2. The pre-cleaning system as claimed in claim 1, wherein the first actuation module comprises: a first lifting device disposed within the processing chamber; a first connecting member fixed to the first lifting device; a second connecting member fixed to a bottom surface of the support plate and rotatably fixed to the first connecting member; and a telescopic device pivotally connected to the bottom surface of the support plate and the first connecting member, respectively; wherein during the pre-cleaning process, the pre-cleaning system performs the following steps: raising the first lifting device to a first position and controlling the telescopic device to extend so that the support plate passes through the second opening and is in the horizontal state and above the second opening; controlling the telescopic device to retract so that the support plate is in the inclined state; and lowering the first lifting device to a second position so that the lid and the support plate are placed together in the processing chamber and the inner surface of the lid faces the at least one second nozzle.

3. The pre-cleaning system as claimed in claim 2, wherein the second actuation module comprises: a support member configured to pass through the third opening, wherein the plurality of first nozzles are fixed to the support member; and a second lifting device disposed within the processing chamber, wherein the support member is fixed to the second lifting device; wherein during the pre-cleaning procedure, the pre-cleaning system performs the following steps: raising the second lifting device to a third position so that the support member passes through the third opening and is placed within the housing.

4. The pre-cleaning system as described in claim 3, wherein the telescopic device is controlled to retract so that the support plate tilts toward the third opening at a predetermined angle.

5. The pre-cleaning system as described in claim 3, wherein the jet direction of each of the first nozzles is different.

6. The pre-cleaning system as claimed in claim 3, wherein when the plurality of first nozzles are driven to spray the first gas to clean the interior of the housing, the second lifting device drives the support member and the plurality of first nozzles to move up and down reciprocally.

7. The pre-cleaning system as claimed in claim 3 further includes an auxiliary positioning member formed on the top plate and surrounding the third opening, the auxiliary positioning member being used to assist the housing in being placed at the third opening.

8. The pre-cleaning system as claimed in claim 3, wherein the body further includes a base plate, and the pre-cleaning system further includes an air pump disposed outside the body and connected to the base plate, wherein when the plurality of first nozzles are driven to spray the first gas to clean the interior of the housing and the at least one second nozzle is driven to spray the second gas to clean the inner surface of the housing cover, the air pump simultaneously extracts one of the dust particles from the body.

9. The pre-cleaning system as described in claim 8 further includes a filter unit installed within the air pump for collecting the dust.

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