Control system of flattening process based on artificial intelligence

Abstract

This invention provides an artificial intelligence-based planarization process control system. According to embodiments of the invention, after determining the planarization area, the planarization conditions, and the planarization path for each planarization area using an artificial intelligence model, the efficiency of the planarization operation can be maximized by controlling the operation of an automatic precision planarization device according to the determined planarization conditions and planarization path.

Claims

1. A planarization process control system based on artificial intelligence, wherein, include: A workbench holds a heating block with a built-in heating wire; an automatic precision flattening device includes an oil tank, a motor, a piston, a cylinder, an inflow line, an outflow line, and a flattening tool. The oil tank is located on the workbench and stores hydraulic oil. The motor is connected to the upper end of the oil tank to discharge the hydraulic oil from the tank. The piston is connected to the lower end of the oil tank and moves up and down repeatedly using the pressure of the hydraulic oil discharged from the tank. The cylinder houses the piston. The inflow line allows the hydraulic oil discharged from the tank to flow into the cylinder. The outflow line allows the hydraulic oil flowing into the cylinder to be discharged from the cylinder and transferred to the oil tank. The flattening tool is located at the lower end of the piston and flattens the deformation occurring on the outer part of the heating wire by repeatedly moving up and down with the piston. An optical device measures the shape and first flatness of the heating block; and a control device determines one or more planarization areas on the surface of the heating block based on a set artificial intelligence model, determines the planarization conditions and planarization paths for each planarization area, and controls the operation of the automatic precision planarization device according to the determined planarization conditions and planarization paths. After the automatic precision planarization device performs the planarization operation under the control of the control device, the optical device measures the second flatness of the heating block and then inputs the second flatness into the artificial intelligence model.

2. As in request item 1, the AI-based planarization process control system, wherein, The control device defines the area on the surface of the heating block where the first flatness is less than a set reference value as the flattened object area, and dynamically changes the reference value used to define the flattened object area according to the shape of the heating block.

3. As in request item 2, the AI-based planarization process control system, wherein, The aforementioned automatic precision leveling device further includes a throttle valve for regulating the flow rate of the hydraulic oil discharged from the aforementioned oil tank. The leveling conditions include the time for performing the leveling operation and the flow rate of the hydraulic oil discharged from the aforementioned oil tank per unit time during the time for performing the leveling operation. The aforementioned control device controls the operation of the aforementioned throttle valve according to the determined leveling conditions.

4. As in request item 3, the AI-based planarization process control system, wherein, It also includes a drive unit, which is formed by an X-axis drive unit, a Y-axis drive unit, and a Z-axis drive unit. The X-axis drive unit is connected to one side of the worktable and is used to move the automatic precision planarization device in the X-axis direction. The Y-axis drive unit is used to move the automatic precision planarization device in the Y-axis direction. The Z-axis drive unit is used to move the automatic precision planarization device in the Z-axis direction. The control unit considers the position of each of the planarized object areas and the time for each of the different planarized object areas included in the planarization conditions to perform the planarization operation to determine the planarization path, and controls the operation of the drive unit and the operation of the throttle valve according to the planarization path.

5. As in request item 4, the AI-based planarization process control system, wherein, The artificial intelligence model compares the second flatness of each of the above-mentioned flattened object regions with the reference value, and after filtering out the flattened object regions in each of the above-mentioned flattened object regions whose second flatness is less than the reference value, it formulates a modification plan for the flattening conditions of the filtered flattened object regions.

6. As in request item 5, the AI-based planarization process control system, wherein, The artificial intelligence model generates the modification plan in the direction that the greater the difference between the second flatness and the benchmark value, the more the time for performing the flattening operation under the flattening conditions and the flow rate of the hydraulic oil discharged from the tank per unit time during the time for performing the flattening operation both increase. The model dynamically changes the relative ratio between the first increase in the time for performing the flattening operation and the second increase in the flow rate of the hydraulic oil discharged from the tank per unit time during the time for performing the flattening operation, taking into account the shape of the heating block.

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