Load port, abnormal state determination method, and storage medium

Abstract

This invention provides a loading port and an abnormality determination method that can more accurately determine the installation abnormality of a cover with a simple structure. The loading port 1 disclosed herein includes: a placement part 20 for placing a container 10 that holds a substrate W; a plate 30 having an opening 31 for the substrate to enter and exit; a port gate 40 for opening and closing the opening 31 and having an engaging part 411 for engaging with the engaging part of the cover 13 of the container 10; a drive mechanism 50 for moving the port gate 40; a detection part 60; and a control part 70 for controlling the operation of each part. The control part 70 moves the port gate 40 from an installation position A close to the plate 30 to a detection position B between a retraction position C separated from the plate 30. When the port gate 40 stops at the detection position B, the detection part 60 detects whether the port gate 40 is holding the cover 13, and the presence or absence of an abnormality related to the installation state of the cover 13 is determined based on the detection result of the detection part 60.

Claims

1. A loading port, characterized by comprising: a mounting portion for mounting a container holding a substrate; a plate, in a state adjacent to the container and having an opening for the substrate to enter and exit; a port gate for opening and closing the opening, and having an engaging portion that engages with an engaging portion of a lid of the container to hold the lid; a drive mechanism for moving the port gate to a mounting position close to the plate, a retracted position separated from the plate, and a detection position between the mounting position and the retracted position; a detection portion for detecting at least the lid; and a control portion for controlling the operation of each portion, wherein the engaging portion protrudes from a holding surface of the port gate, the protrusion amount of the engaging portion being less than the thickness dimension of the held lid, and the lid having a second surface on the side opposite to a first surface facing the port gate. When the control unit moves the port from the installation position to the detection position and the port stops at the detection position, it determines whether the installation state of the cover is normal or abnormal based on the detection result of the detection unit. The detection position is the position where the detection area of ​​the detection unit overlaps with the area between the front end of the engaging part and the second surface of the cover when the first surface of the cover is in contact with the holding surface of the port.

2. As in the loading port of request item 1, wherein the detection unit is disposed on the plate, the control unit sets the position of the port gate when the area overlaps with the detection area as the detection position and moves the port gate to determine the installation state of the cover installed on the container.

3. As requested in item 1 or 2, wherein the control unit moves the port gate from the installation position to the detection position based on an instruction value input to the input unit, and stops the port gate once the detection position is reached, wherein the instruction value is either or a combination of the distance and time of movement from the installation position to the detection position.

4. As requested in item 1 or 2, wherein the detection unit is composed of an optical sensor having a light-emitting part and a light-receiving part, wherein the light-emitting part and the light-receiving part are arranged vertically and vertically between the opening and the transverse center of the plate.

5. As in request item 1 or 2, wherein the control unit, when determining that the installation of the cover is normal, moves the port door, which is stopped at the detection position, from the detection position to the installation position, and, when determining that an abnormal situation is occurring, issues an alarm while the port door is stopped at the detection position.

6. As requested in item 1 or 2, wherein the detection unit further detects the substrate flying out of the container, and the control unit determines the state of the substrate flying out of the container while keeping the port door of the cover in the retraction position.

7. As in the loading port of request item 1, wherein "normal" refers to the state in which the detection unit detects that there is no object in the detection area when the port is located in the detection position, and "abnormal" refers to the state in which the detection unit detects that there is an object in the detection area when the port is located in the detection position.

8. An anomaly determination method, characterized in that, in a loading port having the following components: a placement portion for placing a container housing a substrate; a plate adjacent to the container and having an opening for the substrate to enter and exit; a port gate for opening and closing the opening and having an engaging portion for engaging with an engaging portion of the container's lid; a drive mechanism for moving the port gate to a position close to the plate's mounting position, a retracted position separated from the plate, and a detection position between the mounting position and the retracted position; a detection unit for detecting at least the lid; and a control unit for controlling the operation of each component, wherein the engaging portion protrudes from the holding surface of the port gate, the protrusion amount of the engaging portion being less than the thickness dimension of the held lid, and the lid having a second surface opposite to a first surface facing the port gate, the anomaly determination method having: The detection step involves detecting the state of the cover installed on the container by the detection unit while the port is moved from the installation position to the detection position and the port is stopped at the detection position; and the determination step involves determining whether the installation state of the cover is normal or abnormal based on the detection result of the detection unit. The detection step includes a movement step, which involves moving the drive mechanism to a position where the detection area of ​​the detection unit overlaps with the area between the front end of the engaging portion and the second surface of the cover when the first surface of the cover is in contact with the holding surface of the port.

9. The anomaly determination method as described in claim 8, wherein in the determination step, when the installation status of the cover is determined to be normal, the port that is stopped at the detection position is moved from the detection position to the installation position.

10. A memory medium whose memory causes the control unit to execute a program of the exception determination method as requested in item 8 or 9.

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