Substrate fixing device and its clamping module

Abstract

A substrate fixing device and its clamping module are disclosed. The clamping module includes a base, a rotating member, and an elastic element. The base has a first pivot portion and a second pivot portion facing each other. The rotating member includes a pivot, a pressing portion, and a driven portion. The pivot is pivotally connected between the first pivot portion and the second pivot portion. The pressing portion and the driven portion are located on both sides of the pivot. The rotating member is configured to rotate relative to the base between a release position and a clamping position. The elastic element is disposed on the base and configured to pre-press against the driven portion to position the rotating member in the clamping position. In this way, the clamping module can maintain the rotating member in the clamping position by means of the elastic element when no external force is applied, and allow the rotating member to rotate to the release position when external force is applied, thereby cooperating with the support frame of the substrate fixing device to clamp and fix or release the substrate.

Description

Substrate fixing device and its clamping module Technical Field

[0001] This work relates to a fixing structure, particularly a substrate fixing device and its clamping module. Prior Technology

[0002] In substrate manufacturing processes such as circuit boards and wafers, substrates often need to be transferred for different processing steps. As electronic technology moves towards high efficiency and thinness, the size of substrates is also shrinking, and it is necessary to avoid damage to the substrates during the transfer process. Therefore, how to stably transfer one or more substrates is an urgent problem to be solved.

[0003] In view of this, the creator has devoted himself to researching and applying theoretical principles to address the shortcomings of the existing technology, and has made every effort to solve the above-mentioned problems, which has become the creator's goal for improvement. Summary of the Invention

[0004] The invention aims to enable the clamp module to maintain the rotating part in the clamp position through an elastic element when no external force is applied, and to rotate the rotating part to the release position when the clamp module is subjected to external force, thereby cooperating with the support frame to clamp and fix or release the substrate.

[0005] In one embodiment of this invention, a clamp module is provided, including a base, a rotating member, and an elastic element. The base has a first pivot portion and a second pivot portion opposite to each other. The rotating member includes a pivot, a pressing portion, and a driven portion. The pivot is pivotally connected between the first pivot portion and the second pivot portion. The pressing portion and the driven portion are located on both sides of the pivot. The rotating member is configured to rotate relative to the base between a release position and a clamping position. The elastic element is disposed on the base and is configured to pre-press against the driven portion to position the rotating member in the clamping position.

[0006] In one embodiment of this invention, a linkage is also included. The linkage is movably disposed on the base and pivotally connected to the driven part. The two ends of the elastic element elastically abut against the base and the linkage, respectively.

[0007] In one embodiment of this invention, the base also has a pair of limiting posts, and the linkage is configured to restrict sliding between the limiting posts.

[0008] In one embodiment of this invention, each limiting post has a limiting groove, and a positioning protrusion is formed on each side of the linkage, and each positioning protrusion is slidably accommodated in the limiting groove.

[0009] In one embodiment of this invention, the linkage has a push rod, and the driven part has a groove, in which the push rod is slidably accommodated to drive the rotating member to rotate relative to the base.

[0010] In one embodiment of this invention, the elastic element is a compression spring.

[0011] In one embodiment of this invention, the linkage has a protrusion, the base has a groove, one end of the elastic element is sleeved on the protrusion, and the other end of the elastic element is accommodated in the groove.

[0012] In one embodiment of this invention, the elastic element is a torsion spring.

[0013] In one embodiment of this invention, the rotating member further includes a connecting sleeve that is fitted onto the pivot, the pressing part and the driven part are respectively connected to both sides of the connecting sleeve, the elastic element is fitted onto the pivot and located on the side of the connecting sleeve, and the connecting sleeve and the elastic element are located between the first pivot part and the second pivot part.

[0014] In one embodiment of this invention, the base has a stop block, one end of the elastic element elastically abuts against the moving part, and the other end of the elastic element elastically abuts against the stop block.

[0015] In one embodiment of this invention, a substrate fixing device is also provided for clamping and fixing a substrate. The substrate fixing device includes a support frame and two clamping modules as described above. The support frame includes a carrier plate with a placement area for placing the substrate. Each clamping module is disposed on the support frame and is located on both sides of the placement area. Each pressing part faces the placement area. When each rotating member is in the clamping position, each pressing part presses against the periphery of the substrate and clamps and fixes the substrate together with the carrier plate. When each rotating member is in the release position, each pressing part disengages from the substrate to release the substrate.

[0016] In one embodiment of this invention, the supporting frame also has two pairs of limiting seats corresponding to each clamp module, with the opposite sides of each clamp module restricted between the corresponding two limiting seats.

[0017] In one embodiment of this invention, the support frame also has two elastic hooks, each base has a snap-fit ​​groove, and each elastic hook engages with the snap-fit ​​groove to fix each clamp module to the support frame.

[0018] In one embodiment of this invention, the supporting frame also has two relief grooves corresponding to each elastic hook, each relief groove being U-shaped and surrounding the corresponding elastic hook.

[0019] In one embodiment of this invention, each clamp module is symmetrically located on opposite sides of the placement area.

[0020] In one embodiment of this invention, each clamp module is located at a diagonal position of the placement area.

[0021] In one embodiment of this invention, the supporting frame further includes a plurality of guide posts, each guide post being disposed on the carrier plate and surrounding the placement area, and each guide post having a guide ramp.

[0022] In one embodiment of this invention, the carrier plate has a plurality of support bosses, each of which is located within a placement area to collectively support the substrate.

[0023] In one embodiment of this invention, the support frame further includes a surrounding frame, which is disposed on the carrier plate, and each clamp module and placement area are located within the surrounding frame.

[0024] In one embodiment of this invention, the frame has a plurality of positioning sleeves and a plurality of positioning pins. Some of the positioning sleeves and some of the positioning pins are located on one side of the frame, and the remaining positioning sleeves and the remaining positioning pins are located on the opposite side of the frame. The position of one of the positioning sleeves on any side of the frame corresponds to the position of one of the positioning pins on the other side.

[0025] In one embodiment of this invention, a plurality of clamp modules are included. The carrier plate has a plurality of placement areas arranged in a matrix. Each clamp module is set on the support frame in pairs corresponding to each placement area. Each clamp module corresponding to each placement area is located on both sides of the placement area.

[0026] In one embodiment of the present invention, the support frame further includes two guide posts, each clamp module is located at one of the two opposite corners of the placement area, and each guide post is located at the other two opposite corners of the placement area and corresponds to each clamp module. Each guide post has a push plate that moves away from the carrier plate.

[0027] The substrate fixing device and its clamping module of this invention are pivotally connected between the first pivot and the second pivot via the pivot of the rotating member. The pressing part and the driven part of the rotating member are located on both sides of the pivot. The elastic element is pre-pressed against the driven part. Each clamping module is mounted on the support frame and is located on both sides of the placement area. Therefore, when no external force is applied, the clamping module can keep the rotating member in the clamping position to clamp and fix the substrate together with the carrier plate through the elastic element. When the clamping module is subjected to external force, the rotating member is rotated to the release position to release the substrate. Simple Explanation of the Diagram

[0028] Figure 1 is a perspective view of the first embodiment of the substrate fixing device of this invention.

[0029] Figure 2 is an exploded perspective view of the first embodiment of the clamp module of this invention.

[0030] Figure 3 is a partial exploded perspective view of the first embodiment of the substrate fixing device of this invention.

[0031] Figure 4 is a partial perspective view of the first embodiment of the substrate fixing device of this invention.

[0032] Figure 5 is a partial cross-sectional side view of the first embodiment of the substrate fixing device of this invention in the release position.

[0033] Figure 6 is a partial cross-sectional side view of the first embodiment of the substrate fixing device of this invention located in the clamp position.

[0034] Figure 7 is an exploded perspective view of the second embodiment of the clamp module of this invention.

[0035] Figure 8 is a three-dimensional view of the second embodiment of the clamp module of this invention.

[0036] Figure 9 is a partial exploded perspective view of the second embodiment of the substrate fixing device of this invention.

[0037] Figure 10 is a partial perspective view of the second embodiment of the substrate fixing device of this invention.

[0038] Figure 11 is a partial cross-sectional side view of the second embodiment of the substrate fixing device of this invention in the release position.

[0039] Figure 12 is a partial cross-sectional side view of the second embodiment of the substrate fixing device of this invention in the clamp position.

[0040] Figure 13 is a three-dimensional exploded view of the two substrate fixing devices of this creation before they are stacked.

[0041] Figure 14 is a partial enlarged view of Figure 13.

[0042] Figure 15 is a cross-sectional side view of the two substrate fixing devices of this invention before they are stacked.

[0043] Figure 16 is a cross-sectional side view of the two substrate fixing devices of this invention after they are stacked.

[0044] Figure 17 is a cross-sectional side view of the two substrate fixing devices of this invention separated. Implementation

[0045] In the description of this work, it should be understood that the terms "front," "rear," "left," "right," "front end," "rear end," "end," "longitudinal," "lateral," "vertical," "top," and "bottom," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this work and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting conditions of this work.

[0046] As used herein, terms such as "first," "second," "third," "fourth," and "fifth" describe various elements, components, regions, hierarchies, and / or parts, which should not be limited by these terms. These terms are used only to distinguish one element, component, region, hierarchy, or part from another. Unless the context clearly indicates otherwise, the use of terms such as "first," "second," "third," "fourth," and "fifth" herein does not imply order or sequence.

[0047] Unless otherwise defined, terms such as "substantially" and "approximately" are used to describe and narrate small changes. When combined with an event or situation, the term may include the exact moment the event or situation occurred, or an approximate point in time. For example, when combined with a numerical value, the term may include a range of variation less than or equal to ±10% of the value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%.

[0048] The detailed description and technical content of this work will be explained in conjunction with the following illustrations. However, the illustrations are for illustrative purposes only and are not intended to limit this work.

[0049] As shown in Figure 1, this invention provides a substrate fixing device 100 and its clamping module 200. The substrate fixing device 100 is used to clamp and fix at least one substrate A, and the substrate fixing device 100 includes a support frame 110 and at least two clamping modules 200 disposed on the support frame 110. The structure of the clamping module 200 will be described below. Please refer to Figures 2 and 4 to 6, which show the first embodiment of the clamping module 200 of this invention, which mainly includes a base 210, a rotating member 220 and an elastic element 230.

[0050] The base 210 mainly comprises a base plate 211 and a first pivot portion 212 and a second pivot portion 213. In this embodiment, the base plate 211 is rectangular, but this invention is not limited thereto. The first pivot portion 212 and the second pivot portion 213 are disposed opposite to each other on the top surface of the base plate 211. The first pivot portion 212 and the second pivot portion 213 each have a pivot hole 214 coaxially arranged. Specifically, the first pivot portion 212 and the second pivot portion 213 are symmetrically arranged on the base plate 211.

[0051] The rotating component 220 includes a pivot 221, a connecting sleeve 222, a pressing part 223, and a driven part 224. The pivot 221 is pivotally connected between the first pivot part 212 and the second pivot part 213. More specifically, both ends of the pivot 221 are pivotally connected within the pivot holes 214 of the first pivot part 212 and the second pivot part 213, respectively, thereby enabling it to pivot relative to the base 210. The connecting sleeve 222 is sleeved and secured to the pivot 221 to rotate with the pivot 221. The pressing part 223 and the driven part 224 are respectively connected to both sides of the connecting sleeve 222 and located on both sides of the pivot 221. In this embodiment, the included angle between the pressing part 223 and the driven part 224 is approximately 180°, but in other embodiments it can also be equal to 180°. Therefore, the rotating member 220 is configured to rotate relative to the base 210 between a release position P1 and a clamping position P2. As shown in FIG5, when the rotating member 220 is in the clamping position P2, the pressing part 223 is tilted downward, while the driven part 224 is tilted upward. As shown in FIG6, when the rotating member 220 is in the release position P1, the pressing part 223 is tilted upward, while the driven part 224 is tilted downward.

[0052] The elastic element 230 is disposed on the base 210. The elastic element 230 is configured to preload and push against the driven part 224, thereby keeping the rotating member 220 in the clamping position P2 when no external force is applied. More specifically, the elastic element 230 can elastically push against the driven part 224 through its own elastic force, thereby keeping the rotating member 220 in the clamping position P2 when no external force is applied. When the driven part 224 is subjected to an external force, it can drive the rotating member 220 to rotate relative to the base 210 to lift the pressing part 223, thereby rotating the rotating member 220 to the release position P1, and after the external force is removed, the elastic element 230 itself will return the rotating member 220 to the clamping position P2. In this embodiment, the elastic element 230 is a compression spring, but this invention is not limited to this.

[0053] Further explanation: the clamp module 200 in this embodiment also includes a linkage 240. In this embodiment, the linkage 240 is generally T-shaped, but this invention is not limited to this. The linkage 240 is movably disposed on the base 210 and is pivotally connected to the driven part 224. Specifically, the base 210 also has a pair of limiting posts 215, each limiting post 215 being disposed at a distance from each other on the top surface of the base plate 211, and the linkage 240 is configured to be restricted to sliding between the limiting posts 215 to drive the driven part 224 to actuate. In this embodiment, each limiting post 215 has a limiting groove 216 facing another limiting post 215, and a positioning protrusion 241 is formed on each side of the T-shaped linkage 240. Each positioning protrusion 241 is slidably accommodated in the limiting groove 216 to stably drive the entire linkage 240 to slide along the vertical (up and down) direction of the base 210. Furthermore, as shown in FIG2, the linkage 240 has a push rod 242, and the driven part 224 has a groove 225. Specifically, the push rod 242 extends from the end of the T-shaped linkage 240 to both sides, while the driven part 224 has two beaks (not labeled) to jointly form the groove 225 for accommodating the two ends of the push rod 242. The push rod 242 is slidably housed in the slide groove 225 so that when the linkage 240 moves up and down, the push rod 242 drives the rotating member 220 to rotate relative to the base 210, thereby switching between the release position P1 and the clamping position P2.

[0054] The two ends of the elastic element 230 elastically abut against the base 210 and the linkage 240, respectively. Specifically, the bottom of the linkage 240 has a protrusion 243, and the top surface of the bottom plate 211 of the base 210 has a groove 217. One end of the elastic element 230 is sleeved on the protrusion 243 and elastically abuts against the bottom surface of the linkage 240, while the other end of the elastic element 230 is accommodated in the groove 217 and elastically abuts against the bottom surface of the groove 217. In this way, the elastic element 230 can elastically push the linkage 240 upward with its own elastic force, so that the push rod 242 lifts the driven part 224 so that the pressing part 223 tilts downward, thereby keeping the rotating part 220 in the clamping position P2 when no external force is applied. When the user presses the linkage 240, the linkage 240 compresses the elastic element 230 and pulls down the driven part 224 via the push rod 242, causing the pressing part 223 to tilt upwards, thereby rotating the rotating part 220 to the release position P1. Furthermore, when the user releases the linkage 240, the elastic element 230 can use its own elastic force to push the linkage 240 upwards, thereby resetting the rotating part 220 to the clamp position P2.

[0055] Please refer to Figures 7, 8, and 10 to 12, which show the second embodiment of the clamp module 200 of this invention. The main differences between the second embodiment and the first embodiment are the form of the elastic element 230, the structure of the driven part 224, and the structure of the base 210. In addition, the clamp module 200 of the second embodiment does not include the linkage 240, which is described in detail below.

[0056] In this embodiment, the elastic element 230 is a torsion spring. The elastic element 230 has a body 231, a fixed end 232, and a force-applying end 233. The body 231 of the elastic element 230 is sleeved on the pivot 221 and located on the side of the connecting sleeve 222. Both the connecting sleeve 222 and the body 231 of the elastic element 230 are located between the first pivot portion 212 and the second pivot portion 213 of the base 210. Furthermore, the bottom plate 211 of the base 210 has a stop 218 at its top. The force-applying end 233 of the elastic element 230 elastically abuts against the bottom of the driven portion 224, while the fixed end 232 of the elastic element 230 abuts and is restricted between the stop 218 and the second pivot portion 213.

[0057] In this way, the elastic element 230 can use the elastic force of its body 231 to elastically push the driven part 224 through the force-applying end 233, thereby rotating the rotating member 220 and tilting the pressing part 223 downward, so that the rotating member 220 is held in the clamping position P2 when no external force is applied. When the user presses the driven part 224, the driven part 224 will push the force-applying end 233 of the elastic element 230 to rotate and compress the body 231 of the elastic element 230, and at the same time drive the pressing part 223 to tilt up, so that the rotating member 220 rotates to the release position P1. In addition, when the user releases the driven part 224, the elastic element 230 can rely on the elastic force of its body 231 to push the driven part 224 through the force-applying end 233, thereby returning the rotating member 220 to the clamping position P2.

[0058] Referring again to Figure 1, the substrate fixing device 100 will be described in detail below.

[0059] The support frame 110 mainly includes a carrier plate 111 and at least one surrounding frame 112 disposed on the carrier plate 111. The carrier plate 111 has at least one placement area 113 for placing the substrate A. Two clamping modules 200 are disposed on the support frame 110 and are located on both sides of the placement area 113, and each clamping module 200 and the placement area 113 are located within the surrounding frame 112. Each pressing part 223 of each clamping module 200 faces the placement area 113. Thus, as shown in Figures 6 and 12, when each rotating member 220 of each clamping module 200 is in the clamping position P2, each pressing part 223 of each clamping module 200 presses against the periphery of the top surface of the substrate A, thereby clamping and fixing the substrate A together with the carrier plate 111. As shown in Figures 5 and 11, when each rotating member 220 of each clamp module 200 is in the release position P1, each pressing part 223 of each clamp module 200 disengages from the substrate A to release the substrate A.

[0060] In this embodiment, the substrate fixing device 100 includes a plurality of clamp modules 200, the carrier plate 111 has a plurality of placement areas 113 arranged in a matrix for placing a plurality of substrates A, and the support frame 110 includes a plurality of surrounding frames 112 disposed on the carrier plate 111 corresponding to each placement area 113, but this invention is not limited thereto. Each clamp module 200 is disposed on the support frame 110 in pairs corresponding to each placement area 113, and each clamp module 200 corresponding to each placement area 113 is located on both sides of the placement area 113. In this way, the support frame 110 can simultaneously support and fix multiple substrates A, thereby achieving the effect of batch transfer of multiple substrates A. It should be noted that, for ease of description, the following description only refers to a single placement area 113 and its corresponding two clamp modules 200, and is not intended to limit this invention, as stated above.

[0061] Further explanation is provided in Figures 3, 4, 9, and 10. The supporting frame 110 also has at least two pairs of limiting seats 114 corresponding to each clamp module 200. In this embodiment, each clamp module 200 is disposed on the carrier plate 111, and therefore each limiting seat 114 is also disposed on the carrier plate 111. However, in other embodiments, each clamp module 200 and each limiting seat 114 may be disposed on the corresponding frame 112. The opposite sides of each clamp module 200 are restricted between the corresponding two limiting seats 114. Specifically, each limiting seat 114 has a limiting groove 115. The left and right sides of the base plate 211 of the clamp module 200 are engaged in the limiting grooves 115 of each limiting seat 114, thereby restricting the clamp module 200 from moving laterally (left-right direction) and vertically (up-down direction) and only allowing it to move longitudinally (front-back direction) on the carrier plate 111.

[0062] Furthermore, the support frame 110 also has at least two elastic hooks 116, and the base plate 211 of the base 210 of each clamp module 200 has a latching groove 219. Each elastic hook 116 is respectively engaged with the latching groove 219 to fix each clamp module 200 to the support frame 110. Specifically, each elastic hook 116 extends toward the corresponding placement area 113 and forms a barb 1161 at its end, and the base plate 211 of each clamp module 200 also has a latching groove 219 formed on the side facing the corresponding placement area 113 for the barb 1161 to engage, thereby further restricting the longitudinal direction of the clamp module 200 and making it completely fixed to the support frame 110. In this embodiment, each elastic hook 116 is disposed on the carrier plate 111, but in other embodiments, each elastic hook 116 may also be disposed on the frame 112. Furthermore, to facilitate the smooth engagement of each elastic hook 116 during the installation of each clamp module 200, the carrier plate 111 of the supporting frame 110 also has two clearance grooves 1111 corresponding to each elastic hook 116, and the barb 1161 of each elastic hook 116 forms a guide surface 1162. Each clearance groove 1111 is U-shaped and surrounds the corresponding elastic hook 116, thereby avoiding interference between the elastic hook 116 and the carrier plate 111 when it elastically deforms. In addition, when the base 210 of the clamp module 200 is pushed into the limiting grooves 115 of each limiting seat 114, the guide surface 1162 allows the base plate 211 to smoothly push downward against the barb 1161 of the elastic hook 116, so that the elastic hook 116 undergoes elastic deformation without interference or jamming.

[0063] Referring again to Figure 1, in this embodiment, each clamping module 200 is located at a diagonal position of the placement area 113, thereby securely clamping and fixing the corresponding substrate A together with the carrier plate 111. However, in other embodiments, each clamping module 200 may also be symmetrically located on opposite sides of the placement area 113 and facing each other. Furthermore, referring again to Figures 4 and 10, the support frame 110 also includes a plurality of guide posts 118. Each guide post 118 is disposed on the carrier plate 111 and surrounds the placement area 113. The top of each guide post 118 has a guide ramp 1181 on the side facing the placement area 113. Therefore, when the substrate A is placed in the placement area 113 of the carrier plate 111, the substrate A can be positioned around its perimeter by the guide slopes 1181 of each guide post 118, thereby preventing misalignment or tilting and ensuring that each pressing part 223 of each clamping module 200 can press against the top surface of the substrate A in the clamping position P2. Furthermore, referring to Figures 4 to 6 and Figures 10 to 12, the top surface of the carrier plate 111 also has a plurality of support protrusions 117. Each support protrusion 117 is located within the placement area 113 to collectively support the corresponding substrate A, thereby reducing the contact area between the carrier plate 111 and the substrate A, and thus reducing the possibility of the substrate A tilting due to flatness issues.

[0064] Further explanation: In the first embodiment, the number of guide posts 118 corresponds to the number of clamp modules 200, and each guide post 118 is correspondingly arranged with each clamp module 200, but this invention is not limited thereto. Specifically, since each clamp module 200, which is a group of two, is located at two opposite corners of the placement area 113, the corresponding two guide posts 118 are located at the other two opposite corners of the placement area 113, thus corresponding to each clamp module 200. In other words, two guide posts 118 and two clamp modules 200 are arranged on opposite sides of the placement area 113, and the two guide posts 118 and two clamp modules 200 are arranged alternately in a clockwise direction. Each guide post 118 has a push plate 1182 that moves away from the carrier plate 111, that is, the push plate 1182 extends upward from the top of the guide post 118. Therefore, please refer to Figures 13 to 17. When two substrate fixing devices 100 of this invention are stacked and their respective placement areas 113 are opposite each other, the push plates 1182 of each guide post 118 of the upper substrate fixing device 100 can push the linkages 240 of each clamping module 200 of the lower substrate fixing device 100 downwards, and at the same time, the push plates 1182 of each guide post 118 of the lower substrate fixing device 100 can push the linkages 240 of each clamping module 200 of the upper substrate fixing device 100 upwards, thereby causing the clamping modules 200 of the two substrate fixing devices 100 to move to the release position P1.

[0065] In other words, this invention can simultaneously flip batches of substrates A using two substrate fixing devices 100. Specifically, after placing substrates A in the placement areas 113 of one substrate fixing device 100 and clamping them with clamping modules 200, the substrate fixing device 100 is rotated 90 degrees so that the placement areas 113 face down, causing all substrates A to rotate 90 degrees together. Then, the substrate fixing devices 100 are stacked on another substrate fixing device 100 that does not have substrates A installed, so that the push plates 1182 of the two substrate fixing devices 100 push against the linkages 240 (or the driven parts 224 if the clamping modules 200 of the second embodiment are used), causing the clamping modules 200 to move to the release position P1, thereby causing each substrate A to fall from the upper substrate fixing device 100 onto the placement areas 113 of the lower substrate fixing device 100. In this way, since each substrate A has been detached from the upper substrate fixing device 100 and is located on the placement area 113 of the lower substrate fixing device 100, when the upper substrate fixing device 100 is lifted, the push plates 1182 of the two substrate fixing devices 100 will disengage from the linkage 240 respectively, so that each clamping module 200 is actuated to the clamping position P2, thereby allowing each substrate A to be clamped and fixed by each clamping module 200 of the lower substrate fixing device 100.

[0066] Furthermore, the frame 112 has a plurality of positioning sleeves 1121 and a plurality of positioning pins 1122. Some of the positioning sleeves 1121 and some of the positioning pins 1122 are located on one side of the top of the frame 112, while the remaining positioning sleeves 1121 and the remaining positioning pins 1122 are located on the opposite side of the top of the frame 112. Specifically, the position of one positioning sleeve 1121 on any side of the frame 112 corresponds to the position of one positioning pin 1122 on the other side. That is, when the substrate fixing device 100 of this invention is rotated 90 degrees and stacked on another substrate fixing device 100, the positioning pins 1122 of the two substrate fixing devices 100 can be inserted into the respective positioning sleeves 1121, thereby achieving the effect of positioning and support.

[0067] The substrate fixing device and its clamping module 200 of this invention are pivotally connected between the first pivot part 212 and the second pivot part 213 via the pivot 221 of the rotating member 220. The pressing part 223 and the driven part 224 of the rotating member 220 are located on both sides of the pivot 221. The elastic element 230 is pre-pressed against the driven part 224. Each clamping module 200 is disposed on the support frame 110 and is located on both sides of the placement area 113. Therefore, when no external force is applied, the clamping module 200 can keep the rotating member 220 in the clamping position P2 through the elastic element 230 to clamp and fix the substrate A together with the carrier plate 111. When the clamping module 200 is subjected to external force, the rotating member 220 is rotated to the release position P1 to release the substrate A.

[0068] In summary, the foregoing disclosure of this invention is intended to enable those skilled in the art to clearly understand the technical content of this invention and implement it accordingly, and is not intended to limit the scope of patent protection of this invention. In addition, this invention may naturally have other embodiments not listed. Without departing from the spirit and essence of this invention, those skilled in the art should be able to devise various corresponding changes and modifications based on this invention, but all such changes and modifications should fall within the scope of protection of the patent application filed for this invention.

[0069] 100: Substrate fixing device 110: Load-bearing frame 111: Carrier board 1111: Clearance Slot 112: Enclosure 1121: Positioning sleeve 1122: Positioning pin 113: Placement Area 114: Limiting seat 115: Limiting groove 116: Flexible Hook 1161: Barbed Hook 1162: Guiding Surface 117: Support Boss 118: Guide column 1181: Guide ramp 1182: Push-off plate 200: Clamp Module 210: Base 211: Base Plate 212: First pivot section 213: Second pivot section 214: Pivot 215: Limiting post 216: Limiting groove 217: Groove 218: Stop 219: Snap-in groove 220: Rotating component 221: Pivot 222: Connecting sleeve 223: Suppression Department 224: Passive Part 225: Slide 230: Elastic element 231:Ontology 232: Fixed end 233: Force application end 240: Linkage component 241: Positioning bump 242: Putter 243: Convex column A:Substrate P1: Release position P2: Clamp position

Claims

1. A clamp module, comprising: A base having a first pivot portion and a second pivot portion opposite to each other; a rotating member including a pivot, a pressing portion and a driven portion, the pivot being pivotally connected between the first pivot portion and the second pivot portion, the pressing portion and the driven portion being located on opposite sides of the pivot, the rotating member being configured to rotate relative to the base between a released position and a clamping position; and an elastic element disposed on the base, the elastic element being configured to pre-press against the driven portion to position the rotating member in the clamping position.

2. The clamp module as described in claim 1 further includes a linkage member movably disposed on the base and pivotally connected to the driven part, wherein the two ends of the elastic element elastically abut against the base and the linkage member, respectively.

3. The clamp module as described in claim 2, wherein the base further has a pair of limiting posts, and the linkage is configured to limit sliding between the limiting posts.

4. The clamp module as described in claim 3, wherein each of the limiting posts has a limiting groove, and a positioning protrusion is formed on each side of the linkage, and each positioning protrusion is slidably accommodated in the respective limiting groove.

5. The clamp module as claimed in claim 2, wherein the linkage has a push rod, the driven part has a groove, and the push rod is slidably received in the groove to drive the rotating member to rotate relative to the base.

6. The clamp module as described in claim 2, wherein the elastic element is a compression spring.

7. The clamp module as claimed in claim 6, wherein the linkage has a protrusion, the base has a groove, one end of the elastic element is sleeved on the protrusion, and the other end of the elastic element is received in the groove.

8. The clamp module as described in claim 1, wherein the elastic element is a torsion spring.

9. The clamp module as claimed in claim 8, wherein the rotating member further includes a connecting sleeve fitted onto the pivot, the pressing part and the moving part are respectively connected to both sides of the connecting sleeve, the elastic element is fitted onto the pivot and located on the side of the connecting sleeve, and the connecting sleeve and the elastic element are located between the first pivot and the second pivot.

10. The clamp module as claimed in claim 8, wherein the base has a stop, one end of the elastic element elastically abuts against the driven part, and the other end of the elastic element elastically abuts against the stop.

11. A substrate fixing device for clamping and fixing a substrate, the substrate fixing device comprising: A support frame includes a carrier plate having a placement area for placing the substrate; And a clamping module as described in any one of claims 1 to 10, disposed on the support frame and located on both sides of the placement area, with each pressing part facing the placement area; wherein when each of the rotating members is in the clamping position, each of the pressing parts presses against the periphery of the substrate and clamps and fixes the substrate together with the carrier plate; wherein when each of the rotating members is in the release position, each of the pressing parts disengages from the substrate to release the substrate.

12. The substrate fixing device as claimed in claim 11, wherein the support frame further has two pairs of limiting seats corresponding to each of the clamp modules, and the opposite sides of each clamp module are restricted between the corresponding pairs of limiting seats.

13. The substrate fixing device as claimed in claim 11, wherein the support frame further has two elastic hooks, each of the bases has a latching groove, and each elastic hook engages with the latching groove to fix each of the clamping modules to the support frame.

14. The substrate fixing device as claimed in claim 13, wherein the support frame further has two relief grooves corresponding to each of the elastic hooks, each relief groove being U-shaped and surrounding the corresponding elastic hook.

15. The substrate fixing device as claimed in claim 11, wherein each of the clamp modules is symmetrically located on opposite sides of the placement area.

16. The substrate fixing device as claimed in claim 11, wherein each of the clamp modules is located at a diagonal position of the placement area.

17. The substrate fixing device as claimed in claim 11, wherein the support frame further includes a plurality of guide posts disposed on the carrier plate and surrounding the placement area, each guide post having a guide ramp.

18. The substrate fixing device as claimed in claim 11, wherein the carrier plate has a plurality of support bosses, each of the support bosses being located within the placement area to collectively support the substrate.

19. The substrate fixing device as claimed in claim 11, wherein the support frame further includes a surrounding frame disposed on the carrier plate, and each of the clamp modules and the placement area is located within the surrounding frame.

20. The substrate fixing device as claimed in claim 19, wherein the frame has a plurality of positioning sleeves and a plurality of positioning pins, some of the positioning sleeves and some of the positioning pins being located on one side of the frame, and the remaining positioning sleeves and the remaining positioning pins being located on the opposite side of the frame, wherein the position of one of the positioning sleeves on any side of the frame corresponds to the position of one of the positioning pins on the other side.

21. The substrate fixing device as claimed in claim 11, comprising a plurality of clamping modules as claimed in any one of claims 1 to 10, the carrier having a plurality of placement areas arranged in a matrix, each clamping module being disposed on the support frame in pairs corresponding to each placement area, each clamping module corresponding to each placement area being located on both sides of the placement area.

22. The substrate fixing device as claimed in claim 11, wherein the support frame further includes two guide posts, each of the clamping modules being located at two opposite corners of the placement area, and each guide post being located at the other two opposite corners of the placement area and corresponding to each of the clamping modules, each guide post having a push plate moving away from the carrier plate.

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