Magnetron assemblies and magnetron sputtering equipment

Abstract

This invention discloses a magnetron assembly and a magnetron sputtering device. The magnetron assembly includes: a backplate; a first magnetic post disposed on the backplate; a plurality of second magnetic posts disposed on the backplate and surrounding the outer periphery of the first magnetic posts; and a fixing assembly located at the top of the second magnetic posts to fix them. The fixing assembly includes: a plurality of fastening components arranged in a ring around the second magnetic posts; each fastening component includes an inner ring fastener and an outer ring fastener; the top of the second magnetic post is located between the inner ring fastener and the outer ring fastener and is clamped and fixed by them; the inner ring fastener and the outer ring fastener are fixedly connected to the backplate to clamp and fix the second magnetic post axially. This invention enables easy installation / removal of the magnetron and reduces costs.

Description

Magnetron assemblies and magnetron sputtering equipment Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to a magnetron assembly and a magnetron sputtering device. Prior Technology

[0002] Magnetron sputtering equipment is a device that uses the collision of particles in plasma with a target to deposit material sputtered from the target onto a workpiece to form a thin film. In practical applications, to improve sputtering efficiency and target utilization, a magnetron assembly is installed on the back of the target. The magnetic field generated by the magnetron in the magnetron assembly extends the trajectory of electrons, increasing the probability of electrons colliding with process gases (such as argon), thereby increasing plasma density and thus improving sputtering efficiency and target utilization.

[0003] Existing magnetron installation methods primarily involve using two back plates, one above the other, to clamp the magnetron in the middle. The magnetron can be either discrete small magnetic pillars or a single, ring-shaped magnet. While this method can achieve a certain degree of fixation and positioning of the magnetron, it has several drawbacks. Due to the strong magnetism of the small magnetic pillars, adjacent pillars easily attract or repel each other during installation, leading to installation difficulties. Furthermore, if a continuous, ring-shaped magnet is used, if any part is damaged or needs to be replaced with a different type of magnet, the entire magnet must be disassembled and replaced, which not only increases the operational difficulty but also results in unnecessary cost waste. Summary of the Invention

[0004] The purpose of this invention is to provide a magnetron assembly and magnetron sputtering equipment that enables easy installation or replacement of the magnetron while reducing costs.

[0005] To achieve the above objectives, this work is accomplished using the following technical solution:

[0006] A magnetron assembly includes: a back plate; a first magnetic post disposed on the back plate; a plurality of second magnetic posts disposed on the back plate and surrounding the outer periphery of the first magnetic post; and a fixing assembly located at the top of the second magnetic posts to fix the second magnetic posts; the fixing assembly includes: a plurality of fastening components arranged in a ring; each fastening component includes an inner ring fastener and an outer ring fastener; the top of the second magnetic post is located between the inner ring fastener and the outer ring fastener and is clamped and fixed by both; the inner ring fastener and the outer ring fastener are fixedly connected to the back plate to clamp and fix the second magnetic post in the axial direction.

[0007] Optionally, the inner ring fastener and the outer ring fastener are provided with a plurality of partial holes on their opposite sides. When the inner ring fastener and the outer ring fastener are arranged radially opposite to each other, a plurality of complete magnetic post fixing holes are formed. The top end of the second magnetic post matches the magnetic post fixing hole and is clamped in the magnetic post fixing hole.

[0008] Optionally, each of the fastening components further includes a plurality of posts, which are circumferentially spaced on the back plate; the inner ring fastener is fixed to the top of the posts by a first connector;

[0009] The outer ring fastener is fixed to the back plate by a second connector; the second magnetic post is located between two adjacent posts.

[0010] Optionally, the first connector includes a first screw hole on the inner ring fastener and a first threaded hole on the top of the column; a first screw that passes through the first screw hole and stops in the first threaded hole; the second connector includes a second screw hole on the outer ring fastener and a second threaded hole on the back plate; a second screw that passes through the second screw hole and stops in the second threaded hole.

[0011] Optionally, each of the second magnetic pillars has a first protrusion structure and a second protrusion structure extending outward along its axial direction at its top and bottom ends, respectively; the first protrusion structure matches the magnetic pillar fixing hole and is clamped in the magnetic pillar fixing hole; the second protrusion structure is disposed on the back plate.

[0012] Optionally, the second protrusion structure is inserted into the back plate.

[0013] Optionally, the second protrusion structure is threadedly connected to the back plate.

[0014] Optionally, the backplate and the fixing assembly are made of magnetically conductive materials.

[0015] Optionally, the backplate and the fixing assembly are made of non-magnetic materials.

[0016] Optionally, the back plate is provided with a mounting groove that matches the bottom end of the first magnetic post, and the first magnetic post is adsorbed in the mounting groove.

[0017] Optionally, the diameter of the first magnetic post is larger than the diameter of the second magnetic post.

[0018] On the other hand, this invention also provides a magnetron sputtering device, including: a target material; a magnetron assembly as described above; the magnetron assembly is disposed on the back of the target material to scan the back surface of the target material.

[0019] This work has at least one of the following technical effects:

[0020] This invention provides a magnetron assembly in which several second magnetic posts are fixedly connected to a back plate by multiple fastening components arranged in a ring. Since the second magnetic posts are fixed by multiple fastening components, they can be installed or removed in groups when installing or removing the outer ring of second magnetic posts, thereby simplifying the installation method and solving the problem that it is not easy to fix due to the magnetic attraction between the second magnetic posts.

[0021] The fastening assembly includes an inner ring fastener and an outer ring fastener. When it is necessary to replace one or more second magnetic posts, only the corresponding outer ring fastener needs to be removed to remove the second magnetic post to be replaced, thereby saving replacement costs and improving the convenience of replacement.

[0022] The inner and outer ring fasteners are used to fix the second magnetic column by cooperating with the first and second screws. It can be seen that the fixing component and the entire magnetron assembly have a simple structure, save processing time, and reduce manufacturing and time costs. Simple Explanation of the Diagram

[0023] Figure 1 is a schematic diagram of the magnetron assembly without the second magnetic column provided in an embodiment of this invention; Figure 2 is a schematic diagram of the structure of a magnetron assembly with a second magnetic column installed according to an embodiment of the present invention; Figure 3 is a cross-sectional structural diagram of a magnetron assembly provided in an embodiment of this invention; Figure 4 is a schematic diagram of the structure of a magnetron sputtering device provided in one embodiment of this invention. Implementation

[0024] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, further illustrates a magnetron assembly and magnetron sputtering device proposed in this invention. The advantages and features of this invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, intended only to facilitate and clearly illustrate the embodiments of this invention. Please refer to the drawings for a clearer understanding of the purpose, features, and advantages of this invention. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for illustrative purposes and to aid those skilled in the art, and are not intended to limit the implementation conditions of this invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effectiveness and purpose achieved by this invention, should still fall within the scope of the technical content disclosed in this invention.

[0025] As described in the prior art, existing magnetron assemblies suffer from installation difficulties and costly replacements. Existing magnetron assemblies also include the following installation method: a first backplate serves as the substrate, with multiple closely spaced holes. Small magnets are fixed to the substrate by interlocking with or directly embedded in the holes, and then a second backplate is placed on top. While this installation method avoids the difficulty of installing small magnets to some extent, the overall structure is too large and complex, increasing manufacturing costs. Furthermore, the overall installation of the magnetron assembly is not convenient, causing considerable inconvenience for subsequent maintenance and replacement. In summary, the prior art suffers from problems such as difficult magnet installation, high costs, and a large overall structure in its magnetron installation methods.

[0026] In view of this, this invention provides a magnetron assembly that enables the grouping and installation of small magnetic pillars through separate fastening components, thereby solving the problems of difficult magnetic pillar installation, high cost, and large overall structure of the aforementioned magnetron assemblies.

[0027] Specifically, as shown in Figures 1 and 2, this embodiment provides a magnetron assembly, including: a back plate (refer to reference 300 in Figure 3), a first magnetic post 100 disposed on the back plate; a plurality of second magnetic posts 101 disposed on the back plate and surrounding the outer periphery of the first magnetic post 100; and a fixing assembly located at the top of the second magnetic posts 101 to fix the second magnetic posts 101.

[0028] The fixing components include multiple fastening components 200 arranged in a circular ring. That is, the multiple fastening components 200 are independent of each other, and the multiple fastening components 200 can be spliced ​​end to end in the circumferential direction to form a roughly circular shape.

[0029] Please continue to refer to Figures 1 and 2. Each fastening assembly 200 includes an inner ring fastener 201 and an outer ring fastener 202. The top end of the second magnetic post 101 is located between the inner ring fastener 201 and the outer ring fastener 202 and is clamped and fixed by both. The inner ring fastener 201 and the outer ring fastener 202 are fixedly connected to the back plate to clamp and fix the second magnetic post 101 in the axial direction.

[0030] In this embodiment, a plurality of second magnetic posts of a magnetron assembly are fixedly connected to a back plate by a plurality of fastening components arranged in a ring. Since the second magnetic posts are fixed by a plurality of fastening components, the second magnetic posts of the outer ring can be installed or removed in groups, thereby simplifying the installation method and solving the problem that it is not easy to fix due to the magnetic attraction between the second magnetic posts.

[0031] The fastening assembly provided in this embodiment includes an inner ring fastener and an outer ring fastener. When it is necessary to replace one or more second magnetic posts, only the corresponding outer ring fastener needs to be removed to remove the second magnetic post to be replaced, thereby saving replacement costs and improving the convenience of replacement.

[0032] Please continue to refer to Figures 1 and 2. In this embodiment, the inner ring fastener 201 and the outer ring fastener 202 are respectively provided with a plurality of partial holes 2011 on their opposite sides. When the inner ring fastener 201 and the outer ring fastener 202 are arranged radially opposite to each other, a plurality of complete magnetic post fixing holes 203 are formed. The top end of the second magnetic post 101 matches the magnetic post fixing hole 203 and is clamped in the magnetic post fixing hole 203.

[0033] In one embodiment, please continue to refer to Figure 3, where Figure 3(a) is a cross-sectional view along the AA direction in Figure 2, and Figure 3(b) is a cross-sectional view along the BB direction in Figure 2.

[0034] As shown in Figure 3(a), each fastening assembly 200 also includes a plurality of posts 206, which are spaced apart circumferentially on the back plate 300; the inner ring fasteners 201 are fixed to the top of the posts 206 by the first connectors (refer to references 207, 204 and 209 in Figures 1 and 3); the outer ring fasteners 202 are fixed to the back plate 300 by the second connectors (refer to references 208, 205 and 302 in Figures 1 and 3); the second magnetic post 101 is located between two adjacent posts 206.

[0035] Please continue to refer to Figure 3(a). The first connector includes a first screw hole 204 on the inner ring fastener 201 and a first threaded hole 209 on the top of the column 206; a first screw 207, which passes through the first screw hole 204 and stops in the first threaded hole 209; the second connector includes a second screw hole 205 on the outer ring fastener 202 and a second threaded hole 302 on the back plate 300; a second screw 208, which passes through the second screw hole 205 and stops in the second threaded hole 302.

[0036] Please continue to refer to Figures 2 and 3. In this embodiment, the inner ring fastener 201 and the outer ring fastener 202 are only flat plate structures with arc-shaped segments. The second magnetic column 101 is fixedly connected by the first screw 207 and the second screw 208. It can be seen that the fixing component and the entire magnetron assembly have a simple structure, which saves processing time and reduces manufacturing and time costs.

[0037] As shown in Figure 3(b), each second magnetic post 101 has an outwardly extending first protrusion structure 102 and a second protrusion structure 103 at its top and bottom ends along its axial direction, respectively;

[0038] The first protrusion structure 102 matches the magnetic column fixing hole 203 and is clamped in the magnetic column fixing hole 203; the second protrusion structure 103 is disposed on the back plate 300.

[0039] In one embodiment, the second protrusion structure 103 is inserted into the back plate 300.

[0040] For example, please continue to refer to Figure 3(b), the back plate 300 is provided with grooves 301 that are distributed circumferentially and match the second protrusion structure 103. The second protrusion structure 103 is inserted into the groove 301 and can be magnetically fixed in the groove 301.

[0041] In some embodiments, the second protrusion structure 103 is threadedly connected to the back plate 300.

[0042] For example, please continue to refer to Figure 3(b), where the second protrusion structure 103 is provided with threads, and the groove 301 is provided with a thread structure that mates with the second protrusion structure 103, thereby achieving a threaded connection between the two.

[0043] Please continue to refer to Figure 3(b). The second magnetic column 101 can be a cylindrical structure.

[0044] After the inner ring fastener 201 and the outer ring fastener 202 are fixed to the back plate 300, their total radial width is the same as that of the second magnetic post 101, which can better distribute the force and improve the stability and reliability of the structure.

[0045] In one embodiment, the back plate 300 and the fixing assembly are made of magnetic material. That is, all the fastening components included in the fixing assembly, including the outer ring fastener 202 and the inner ring fastener 201, the first screw 207, the second screw 208 and the post 206, are made of magnetic material. The magnetic material can make the magnetic lines of force evenly distributed on the entire outer ring fastener 202.

[0046] In one embodiment, the back plate 300 and the fixing assembly are made of non-magnetic material, which can avoid affecting the magnetic field line distribution of the magnetic column.

[0047] In one embodiment, the back plate 300 is provided with a mounting groove that matches the bottom end of the first magnetic post 100, and the first magnetic post 100 is adsorbed in the mounting groove. The first magnetic post 100 is cylindrical and its diameter is larger than that of the second magnetic post 101.

[0048] Before installing the second magnetic post 101, as shown in Figures 2 and 3, the inner ring fastener 201 is first installed on the post 206 of the back plate 300 by the first screw 207. Then, the lower end (second protrusion structure 103) of the second magnetic post 101 is inserted into the back plate 300, and the upper end (first protrusion structure 102) is pressed against the part of the hole 2011 of the inner ring fastener 201. Then, the outer ring fastener 202 is used to clamp it, and then the second screw 208 is used to fix the outer ring fastener 202 to the back plate 300. The entire magnetron assembly structure can be assembled and fixed as a unit of fastening component 200 first, and then the remaining fastening components 200 are installed. The first magnetic post 100 in the center can be attracted to the central groove (i.e., the mounting groove) of the back plate 300 by strong magnetism. The second magnetic post 101 can be held circumferentially by the inner ring fastener 201 and the outer ring fastener 202, and axially by the inner ring fastener 201, the outer ring fastener 202, and the back plate 300, ensuring structural stability. If one or more second magnetic posts need to be replaced during use, only the corresponding outer ring fastener 202 needs to be replaced, thereby improving the convenience of replacement.

[0049] On the other hand, as shown in Figure 4, this invention also provides a magnetron sputtering apparatus, including: a carrier device 13, a target 12, and the aforementioned magnetron assembly 11. The carrier device 13 is disposed at the bottom of the reaction chamber 10 to support the substrate W, the target 12 is disposed at the top of the reaction chamber 10, and the magnetron assembly 11 is disposed on the back of the target 12 to scan the back surface of the target 12. Positive ions in the plasma within the reaction chamber 10 bombard the lower surface of the target 12, causing target particles to escape from the bombarded lower surface of the target 12. These target particles are deposited on the surface of the substrate W to form a thin film.

[0050] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the foregoing description should not be considered as a limitation thereof. Various modifications and substitutions to the present invention will be apparent to those skilled in the art upon reading the foregoing. Therefore, the scope of protection of the present invention should be defined by the appended claims.

[0051] 10: Reaction Chamber 100: First magnetic column 101: Second magnetic column 102: First protrusion structure 103: Second protrusion structure 11: Magnetron Assembly 12: Target Material 13: Supporting device 200: Fastening components 201: Inner ring fastener 2011: Partial Hole 202: Outer ring fasteners 203: Magnetic post fixing hole 204: First screw hole 205: Second screw hole 206: Column 207: First screw 208: Second screw 209: First threaded hole 300: Backplate 301: Groove 302: Second threaded hole W: substrate

Claims

1. A magnetron assembly, characterized in that it comprises: A back plate; a first magnetic post disposed on the back plate; a plurality of second magnetic posts disposed on the back plate and arranged around the outer periphery of the first magnetic post; A fixing assembly, located at the top of the second magnetic post, is used to fix the second magnetic post; the fixing assembly includes: a plurality of fastening components arranged in a ring; each of the fastening components includes an inner ring fastener and an outer ring fastener; the top of the second magnetic post is located between the inner ring fastener and the outer ring fastener and is clamped and fixed by both; the inner ring fastener and the outer ring fastener are fixedly connected to the back plate to clamp and fix the second magnetic post in the axial direction.

2. The magnetron assembly as claimed in claim 1, wherein, The inner ring fastener and the outer ring fastener each have several partial holes on their opposite sides. When the inner ring fastener and the outer ring fastener are arranged radially opposite each other, they form several complete magnetic post fixing holes. The top end of the second magnetic post matches the magnetic post fixing hole and is clamped in the magnetic post fixing hole.

3. The magnetron assembly as claimed in claim 2, wherein, Each of the fastening components further includes a plurality of posts spaced circumferentially on the back plate; the inner ring fastener is fixed to the top of the post by a first connector; the outer ring fastener is fixed to the back plate by a second connector; the second magnetic post is located between two adjacent posts.

4. The magnetron assembly as claimed in claim 3, wherein, The first connector includes a first screw hole on the inner ring fastener and a first threaded hole on the top of the column; The first screw passes through the first screw hole and stops inside the first threaded hole; The second connector includes: a second screw hole provided on the outer ring fastener, and a second threaded hole provided on the back plate; The second screw passes through the second screw hole and stops inside the second threaded hole.

5. The magnetron assembly as claimed in any one of claims 2 to 4, wherein, Each of the second magnetic pillars has a first protrusion structure and a second protrusion structure extending outward along its axial direction at its top and bottom ends, respectively; the first protrusion structure matches the magnetic pillar fixing hole and is clamped in the magnetic pillar fixing hole; the second protrusion structure is disposed on the back plate.

6. The magnetron assembly as claimed in claim 5, wherein, The second protruding structure is inserted into the back plate.

7. The magnetron assembly as claimed in claim 5, wherein, The second protrusion structure is threadedly connected to the back plate.

8. The magnetron assembly as claimed in claim 1, wherein, The back plate and the fixing assembly are made of magnetically conductive materials.

9. The magnetron assembly as claimed in claim 1, wherein, The back plate and the fixing assembly are made of non-magnetic materials.

10. The magnetron assembly as claimed in claim 1, wherein, The back plate is provided with a mounting groove that matches the bottom end of the first magnetic post, and the first magnetic post is adsorbed into the mounting groove.

11. The magnetron assembly as claimed in claim 1, wherein, The diameter of the first magnetic post is larger than the diameter of the second magnetic post.

12. A magnetron sputtering apparatus, characterized in that it comprises: Target material; The magnetron assembly as described in any one of claims 1 to 11; The magnetron assembly is positioned on the back of the target to scan the back surface of the target.

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