Controller with station number setting

Abstract

This invention is a controller with a dial-up station number setting function, comprising: a control box; a circuit board assembly disposed in the control box; a dial switch electrically connected to the circuit board assembly, the dial switch being used for station number setting; and a flow controller disposed in the control box and electrically connected to the circuit board assembly. The corresponding station number information can be directly displayed by the toggling state of the dial switch, allowing installers to identify the current station number setting of the controller by visually observing the toggling state of the dial switch even when power is off and communication connection is not established.

Description

Controller with station number setting Technical Field

[0001] This invention, as a controller with a dial station number setting, is an auxiliary controller used in wafer transfer systems. Prior Technology

[0002] In semiconductor manufacturing processes, wafers are susceptible to oxidation or quality degradation due to moisture, oxygen, and airborne molecular contaminants (AMCs) in the atmosphere. Therefore, nitrogen is typically introduced into the load port of the wafer transfer system to maintain the stability of its internal environment and reduce the risk of wafer contamination or deterioration.

[0003] In existing technologies, gas supply devices are often installed at each feed station inlet, and the nitrogen delivery is regulated by a computer control system to continuously or selectively introduce nitrogen into each feed station inlet, thereby reducing the concentration of water vapor, oxygen and AMC, and thus achieving the purpose of environmental control.

[0004] The wafer transfer system uses a controller to manage the gas supply. To accommodate multiple feed stations, it typically includes a main unit and several auxiliary units connected to it. Each auxiliary unit is factory-configured identically. To enable the main unit to identify the station number of each auxiliary unit, the station number must usually be pre-set in the internal program of each auxiliary unit before installation. However, this approach has a drawback: it cannot identify the station numbers set for each auxiliary unit when power is off or communication is not established. Therefore, if an auxiliary unit is mistakenly placed in the wrong position during installation, this can only be detected during the power-on testing phase, requiring disassembly and reinstallation, or contacting the original manufacturer to reset the station numbers, thus extending construction time and increasing manpower and time costs. Summary of the Invention

[0005] This invention features a DIP switch on the circuit board assembly, used for station number setting. The station number information is directly displayed by the toggling state of the DIP switch, allowing installers to identify the current station number setting of the controller by visually observing the DIP switch even when there is no power or communication connection. Therefore, it can effectively avoid the problem of controller configuration errors during installation. Even if an accidental missetting still occurs, the station number can be quickly corrected simply by toggling the DIP switch, without the need for disassembly and reinstallation as in conventional technology, or by notifying the original manufacturer to reset the station number. This significantly improves construction efficiency and reduces labor and time costs.

[0006] To achieve the above objectives and effects, this invention provides a controller with a station number setting function, comprising: a control box; a circuit board assembly disposed in the control box; a toggle switch electrically connected to the circuit board assembly, the toggle switch being used for station number setting; and a flow controller disposed in the control box, the flow controller being electrically connected to the circuit board assembly.

[0007] Furthermore, the DIP switch includes a first DIP key, a second DIP key, a third DIP key, and a fourth DIP key, each of which represents a bit in binary.

[0008] Furthermore, the circuit board assembly includes a PLC circuit board and a switching circuit board.

[0009] Furthermore, the flow controller includes a flow meter.

[0010] Furthermore, a filter is connected to the outlet of the flow controller.

[0011] Furthermore, the control box is equipped with a power switch, which is electrically connected to the circuit board assembly.

[0012] Furthermore, the control box is equipped with a warning light, which is electrically connected to the circuit board assembly.

[0013] Furthermore, the control box is provided with a reset key, which is electrically connected to the circuit board assembly. Simple Explanation of the Diagram

[0014] The first image is a three-dimensional illustration of this creation. The second image is a schematic diagram showing the location of the elements in this creation. The third figure is a schematic diagram of a toggle switch. The fourth figure is a schematic diagram of the station number setting for the toggle switch. The fifth figure is a schematic diagram of the station number setting for the toggle switch. Implementation

[0015] To gain a more detailed understanding of the implementation of this invention, please refer to the accompanying diagrams, as shown in Figures 1 to 5. The controller includes: a control box 1; a circuit board assembly 2 disposed in the control box 1; a toggle switch 3 electrically connected to the circuit board assembly 2, used for setting the station number; and a flow controller 4 disposed in the control box 1, electrically connected to the circuit board assembly 2.

[0016] As shown in the second figure, this is one embodiment of the invention, which includes multiple communication ports 6 for connecting to the host and other auxiliary machines, and includes an inert gas inlet 7 and a gas supply 8, which are directly or indirectly connected to the flow controller 4 via pipelines.

[0017] Continuing with a detailed explanation of how to set the station number using the DIP switch 3, as shown in Figure 3, the DIP switch 3 includes a first DIP button 31, a second DIP button 32, a third DIP button 33, and a fourth DIP button 34. Each of these buttons represents a binary bit: the first DIP button 31 in the ON position represents 1, the second DIP button 32 in the ON position represents 2, the third DIP button 33 in the ON position represents 4, and the fourth DIP button 34 in the ON position represents 8. The station number is then set to 8. The numbers are summed to obtain the station number. The setting method of station number 1 to 15 is shown in Figure 4 and Figure 5. In the diagram, Master is the main controller, Slave is the auxiliary controller (i.e., this invention), and Port is the station port. Taking the setting of Port7 (station number 6) as an example, it is when the second dial key 32 and the third dial key 33 are turned to the ON position. When the second dial key 32 is turned to the ON position, it represents 2, and when the third dial key 33 is turned to the ON position, it represents 4. 2 plus 4 equals 6, which is station number 6. Therefore, the installer only needs to observe the movement of each dial key of the dial switch 3 to determine the station number of this controller.

[0018] In summary, this invention features a DIP switch 3 on circuit board assembly 2, which is used for station number setting. The station number information can be directly displayed by the toggling state of the DIP switch 3. This allows installers to identify the current station number setting of the controller by visually observing the toggling state of the DIP switch 3 even when there is no power or communication connection. Therefore, it can effectively avoid the problem of controller configuration errors during installation. Even if an accidental missetting still occurs, the station number can be quickly corrected simply by toggling the DIP switch 3, without the need for disassembly and reinstallation as in conventional technology, or by notifying the original manufacturer to reset the station number. This significantly improves construction efficiency and reduces labor and time costs.

[0019] Therefore, in summary, this invention can significantly improve the convenience and efficiency of installation operations, reduce construction time and maintenance costs, effectively address the deficiencies of conventional technology, and has industrial applicability and substantial technological progress.

[0020] In a further embodiment, the circuit board assembly 2 includes a PLC board 21 and a switch board 22. The toggle switch 3 is disposed on the PLC board 21. The PLC board 21 is the main control circuit responsible for process, condition judgment, handling control, valve control, and alarm. The switch board 22 is responsible for power distribution and signal switching.

[0021] A further embodiment is provided, wherein the flow controller 4 (MFC) includes a flow meter 41. The flow controller 4 is used for precise flow control, and the flow meter 41 is used to display the flow for monitoring purposes. The two work together to ensure that the transfer area and station interior in the wafer transfer system maintain a stable gas supply.

[0022] A further embodiment is provided in which a filter 5 is connected to the outlet of the flow controller 4 to prevent the supplied gas from being mixed with dust and contaminating the wafer.

[0023] In a further embodiment, the control box 1 is provided with a power switch 11, wherein the power switch 11 is electrically connected to the circuit board assembly 2, and the power switch 11 is used to supply the user with the power to turn the overall power on and off.

[0024] In a further embodiment, the control box 1 is provided with a warning light 12, wherein the warning light 12 is electrically connected to the circuit board assembly 2, and the warning light 12 is used to display the abnormal status of the equipment so as to immediately remind the operator to notice the abnormality of the equipment.

[0025] In a further embodiment, the control box 1 is provided with a reset button 13, wherein the reset button 13 is electrically connected to the circuit board assembly 2, and the reset button 13 is used to reset the device after the abnormality is eliminated, for example, to turn off the constant illumination of the warning light 12.

[0026] The above description is merely a preferred embodiment for explaining this work and is not intended to limit this work in any way. Therefore, any modifications or changes made to this work under the same creative spirit, which are other forms that can be implemented and have the same effect, should still be included within the scope of protection intended by this work.

[0027] In conclusion, this invention, "Controller with Station Number Setting," is indeed fully in line with the needs of industrial development in terms of practicality and cost-effectiveness. Furthermore, the disclosed structural invention is an unprecedented innovative construction, so its "novelty" is beyond doubt. Moreover, this invention can improve efficiency compared to conventional structures, thus also possessing "progressiveness." It fully meets the requirements for applying for a utility model patent under the Patent Law of our country. Therefore, we have filed a patent application in accordance with the law and respectfully request that your office examine it as soon as possible and give it approval.

[0028] 1: Control box 11: Power switch 12: Warning Light 13: Regression bond 2: Circuit board assembly 21: PLC circuit board 22: Switching circuit boards 3: DIP switch 31: First DIP Key 32: Second finger control key 33: Third finger key 34: Fourth finger key 4: Flow controller 41: Flow meter 5: Filter 6: Communication port 7: Air intake section 8: Gas Supply Department

Claims

1. A controller with station number setting function, comprising: One control box; A circuit board assembly is disposed in the control box; a DIP switch is electrically connected to the circuit board assembly and is used for station number setting; a flow controller is disposed in the control box and is electrically connected to the circuit board assembly.

2. The controller with a station number setting as described in claim 1, wherein the DIP switch includes a first DIP key, a second DIP key, a third DIP key, and a fourth DIP key, wherein the first DIP key, the second DIP key, the third DIP key, and the fourth DIP key each represent a bit in binary.

3. The controller with station number setting as described in claim 1, wherein the circuit board assembly includes a PLC circuit board and a switching circuit board.

4. A controller with a station number setting as described in claim 1, wherein the flow controller includes a flow meter.

5. A controller with a station number setting as described in claim 1, wherein a filter is connected to the outlet of the flow controller.

6. The controller with station number setting as described in claim 1, wherein the control box is provided with a power switch, wherein the power switch is electrically connected to the circuit board assembly.

7. The controller with station number setting as described in claim 1, wherein the control box is provided with a warning light, wherein the warning light is electrically connected to the circuit board assembly.

8. The controller with station number setting as described in claim 1, wherein the control box is provided with a reset key, wherein the reset key is electrically connected to the circuit board assembly.

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