Testing equipment

Abstract

An inspection device is suitable for inspecting a door panel having a back side. The inspection device includes a transfer device and a first inspection device. The transfer device includes a door opening mechanism module for connecting to the door panel, and a turntable module for rotating the door opening mechanism module. The turntable module is rotatable about a longitudinal axis to move the door panel between a first direction and a second direction. The first inspection device includes a light source plate disposed in the first direction, and a first lens mounted in the center of the light source plate and facing the door panel. When the door panel is moved to the first direction, the first inspection device can capture an image of the back side. By configuring the light source plate and the first lens, the inspection device can significantly improve the inspection accuracy and reliability.

Description

Testing equipment Technical Field

[0001] This invention relates to a testing device, and more particularly to a testing device for testing door panels. Prior Technology

[0002] In the semiconductor industry, a wafer carrier is typically used to hold multiple wafers for transport to various process equipment for processing or inspection. Because this wafer carrier is used for extended periods in different processes and needs to be frequently opened and closed for loading and unloading wafers, one side of the carrier may develop defects such as skewing, deformation, or contamination, thus affecting the yield of the finished wafers.

[0003] Currently, the industry has developed a detection device for this type of door panel. This device primarily uses a lens and at least one mirror to simultaneously capture images of the back and sides of the door panel for further inspection and analysis. However, due to the slightly poor image quality of the lens's simple capture and the image quality of the mirror's reflection, it is easily affected by ambient light, making it difficult to perform clear and stable image recognition or detection. Therefore, the structural design of this detection device still needs improvement. Summary of the Invention

[0004] Therefore, the objective of this invention is to provide a detection device that can at least overcome the shortcomings of prior art.

[0005] Therefore, this novel testing equipment is suitable for testing a door panel having a back side to be tested and several sides surrounding and connected to the periphery of the back side. The testing equipment includes a transfer device and a first testing device. The transfer device includes a door opening mechanism module for connecting the door panel and a turntable module for driving the door opening mechanism module to rotate. The turntable module can rotate about a straight axis to move the door panel between a first direction and a second direction. The first testing device includes a light source plate disposed in the first direction and a first lens mounted in the middle of the light source plate and facing the door panel. When the door panel is moved to the first direction, the first testing device can capture an image of the back side.

[0006] The advantages of this new invention are: by configuring the light source plate and the first lens, the detection equipment can significantly improve the image recognition rate, defect detection rate and detection accuracy. Simple Explanation of the Diagram

[0007] Other features and effects of this invention will be clearly presented in the embodiments with reference to the drawings, wherein: Figure 1 is a front perspective view illustrating a first embodiment of the novel testing equipment, showing a door panel supported and positioned in a second direction; Figure 2 is a rear perspective view illustrating the structure of the first embodiment that drives the door panel; Figure 3 is an incomplete top view illustrating the state in which the door panel moves closer to a first detection device in the second direction according to the first embodiment; Figure 4 is a partial cross-sectional schematic diagram illustrating the connection state of the door panel in the first embodiment; and Figure 5 is a front view illustrating the state in which the first embodiment moves the door panel in the second direction and passes through a second detection device; Figure 6 is an incomplete top view illustrating the state in which the first embodiment drives the door panel to turn in a first direction to face the first detection device; Figure 7 is an incomplete top view illustrating another embodiment of the first embodiment; Figure 8 is a front view schematic diagram illustrating the configuration of the second detection device in a second embodiment of the novel detection equipment; Figure 9 is a front view schematic diagram illustrating the configuration of the second detection device in a third embodiment of the novel detection equipment; and Figure 10 is a front view schematic diagram illustrating another embodiment of the third embodiment. Implementation

[0008] Before this invention is described in detail, it should be noted that similar elements are represented by the same reference numerals in the following description.

[0009] Referring to Figures 1, 2, 3, and 4, a first embodiment of the novel testing device is shown, applicable to the testing of a door panel 9. The door panel 9 is, for example, but not limited to, a rectangular plate, which can be used to cover or fit onto a wafer carrier (not shown) or other device. The door panel 9 has a back surface 91 to be tested and four side surfaces 92 surrounding and connected to the periphery of the back surface 91. Since the structure of the door panel 9 is not the focus of this invention, it will not be described in detail here.

[0010] The testing equipment includes a transfer device 1, a first testing device 2, and a second testing device 3.

[0011] The transfer device 1 is used to support the door panel 9 and can drive the door panel 9 to move or rotate between a first direction 6 and a second direction 7. The first direction 6 and the second direction 7 are perpendicular to each other. In this first embodiment, the first direction 6 refers to the front-back direction and the second direction 7 refers to the left-right direction, but the directions can be changed in other embodiments and are not limited thereto. The transfer device 1 includes a door opening mechanism module 11, a turntable module 12, and a sliding table module 13.

[0012] The door opening mechanism module 11 is adsorbed onto one of the front sides (not shown) of the door panel 9 opposite to the back side 91, and is used to fix and connect the door panel 9 so that the door panel 9 is in an upright position for detection. Since the detailed structure of the door opening mechanism module 11 and the negative pressure adsorption system are not the focus of this invention, they will not be described in detail here.

[0013] The turntable module 12 is installed on the door opening mechanism module 11 and is used to drive the door opening mechanism module 11 to rotate. The turntable module 12 has a horizontal axis turntable 121 connected to the door opening mechanism module 11 along a horizontal axis 4, and a vertical axis turntable 122 connected to the horizontal axis turntable 121 along a vertical axis 5 perpendicular to the horizontal axis 4. The horizontal axis turntable 121 can drive the door opening mechanism module 11 to rotate around the horizontal axis 4, causing the door panel 9 to flip and change its angle in the second direction 7, so that the four sides 92 to be detected rotate downwards in sequence. The vertical axis turntable 122 can drive the horizontal axis turntable 121 to rotate around the vertical axis 5, thereby causing the door opening mechanism module 11 and the door panel 9 to rotate between the first direction 6 and the second direction 7. When the door panel 9 is in the first direction 6 as shown in Figure 6, the horizontal axis 4 is parallel to the second direction 7. When the door panel 9 is in the second direction 7 as shown in Figure 3, the horizontal axis 4 is parallel to the first direction 6. Since the detailed structure and electronic control drive system of the turntable module 12 are not the focus of this invention, they will not be described in detail.

[0014] The slide module 13 is arranged along the length of the second direction 7 and is used to house the turntable module 12, and can drive the turntable module 12 to move along the second direction 7. Since the detailed structure of the slide module 13 and the electronic control drive system are general technologies, they will not be described here.

[0015] The first detection device 2 is spaced apart at one end of the slide module 13 and includes a light source plate 21 disposed in the first direction 6, and a first lens 22 installed in the middle of the light source plate 21 and facing the door panel 9. In this first embodiment, the light source plate 21 is rectangular, but not limited thereto, and the side length of the light source plate 21 is greater than or equal to the side length of the back surface 91 of the door panel 9, providing highly uniform and fully covered collimated light to the back surface 91. Of course, the light source plate 21 can also be of other shapes in other embodiments, such as, but not limited to, the arc-shaped plate shown in FIG. 7, where the side length of the light pattern projected onto the door panel 9 is greater than or equal to the side length of the back surface 91. The first lens 22 is used to capture the image of the back surface 91 of the door panel 9 located in the first direction 6. The image transmission and analysis system of the first detection device 2 is not the focus of this invention, and therefore will not be described in detail.

[0016] The second detection device 3 includes a second lens 31 disposed below the second direction 7 and facing the lower side of the door panel 9. The second lens 31 is used to capture the image of the corresponding side 92 of the door panel 9. As for the image transmission and analysis system of the second detection device 3, it is not the focus of this invention, so it will not be described in detail.

[0017] As shown in Figures 1, 4, and 5, in use, the sliding stage module 13 drives the turntable module 12 to slide along the second direction 7. When the door panel 9 moves directly above the second lens 31, the second lens 31 can capture the image of the corresponding side 92. If needed, the horizontal axis turntable 121 of the turntable module 12 can be driven to rotate the door opening mechanism module 11 and the door panel 9 around the horizontal axis 4. Moreover, every 90-degree rotation allows one of the four sides 92 of the door panel 9 to face the second lens 31, so that the second lens 31 can capture the image of the corresponding side 92. Therefore, as long as the turntable module 12 drives the door panel 9 to rotate one revolution, the second lens 31 can sequentially acquire the images of the four sides 92 for analysis and detection.

[0018] As shown in Figures 1, 3, and 5, the sliding module 13 continues to drive the turntable module 12 to slide until the door panel 9 approaches the first detection device 2. Then, the vertical axis turntable 122 drives the horizontal axis turntable 121 to rotate around the vertical axis 5, causing the door panel 9 to turn from the second direction 7 in Figure 3 to the first direction 6 in Figure 6, so that the back surface 91 faces the first detection device 2. The first detection device 2 is activated, and the light from the light source plate 21 illuminates the back surface 91. The first lens 22 captures and examines the image of the back surface 91. After detection, the turntable module 12 drives the door panel 9 to rotate back to its original position, and the sliding module 13 then moves the door panel 9 away from the first detection device 2.

[0019] Therefore, the testing equipment, through the second testing device 3 and the first testing device 2, can detect the appearance and size of the four sides 92 and the back 91 of the door panel 9, ensuring that the door panel 9 is free from deformation, dirt or damage.

[0020] Referring to Figure 8, the structure of the second embodiment of this novel detection device is generally the same as that of the first embodiment, except that the number of second lenses 31 in the second detection device 3 is different. The second detection device 3 of this second embodiment includes four second lenses 31 respectively disposed on the upper, lower, left, and right sides of the second direction 7. These four second lenses 31 can simultaneously and respectively capture images of the four sides 92 of the door panel 9 located in the second direction 7, thereby improving detection speed and accuracy.

[0021] Referring to Figure 9, the structure of the third embodiment of this novel detection device is generally the same as that of the first embodiment, except that the number of second lenses 31 in the second detection device 3 is different. The second detection device 3 of this second embodiment includes two second lenses 31 respectively disposed on the upper, lower, left, and right sides of the second direction 7. These two second lenses 31 are used to simultaneously capture images of the two sides 92 corresponding to the door panel 9 located on the second direction 7. Thus, the turntable module 12 only needs to drive the door panel 9 to rotate once to capture the other two sides 92, and therefore can also capture and detect images of the four sides 92 of the door panel 9. In this third embodiment, the two second lenses 31 are disposed on opposite sides, such as the upper and lower sides, but are not limited to this; they can also be disposed on the left and right sides. Of course, in other embodiments of this third embodiment, the two second lenses 31 can also be disposed on perpendicularly intersecting sides as shown in Figure 10, such as, but not limited to, the upper and left sides, or the upper and right sides, or the lower and left sides, or the lower and right sides.

[0022] In summary, this novel inspection device, through the configuration of the light source plate 21 and the first lens 22, can construct a machine vision system for intelligent inspection. Furthermore, the design of the light source plate 21 can improve the imaging quality, obtain clear and accurate images, eliminate blind spots in the inspection range, increase the stability and accuracy of inspection, and reduce the risk of error detection. Therefore, it can indeed achieve the purpose of this novel device.

[0023] However, the above description is merely an embodiment of this invention and should not be construed as limiting the scope of implementation of this invention. Any simple equivalent changes and modifications made in accordance with the scope of the patent application and the contents of the patent specification shall still fall within the scope of this invention.

[0024] 1: Transfer device 11: Door opening mechanism module 12: Turntable Module 121: Horizontal Axis Turntable 122: Vertical axis rotary table 13: Slide Table Module 2: First detection device 21: Light source board 22: First Shot 3: Second detection device 31: Second Shot 4: Horizontal axis 5: Straight axis 6: First direction 7: Second direction 9: Door panel 91: Back 92: Side view

Claims

1. An inspection device suitable for inspecting a door panel having a back side to be inspected and a plurality of sides surrounding the periphery of the back side, the inspection device comprising: a transfer device including a door opening mechanism module for connecting the door panel, and a turntable module for driving the door opening mechanism module to rotate, the turntable module being rotatable about a straight axis to drive the door panel to change between a first direction and a second direction; and a first inspection device including a light source plate disposed in the first direction, and a first lens mounted in the middle of the light source plate and facing the door panel, the first inspection device being capable of capturing an image of the back side when the door panel is moved to the first direction.

2. The detection device as claimed in claim 1 further includes a second detection device, the second detection device including at least one second lens disposed on the side of the second direction and facing the side corresponding to the door panel, the second detection device being able to capture an image of the corresponding side when the door panel moves to the second direction and is aligned with the at least one second lens.

3. The testing equipment as described in claim 2, wherein, The second detection device includes a second lens disposed on the lower side of the second direction, the second lens being used to capture the side of the door panel located in the second direction.

4. The testing equipment as described in claim 2, wherein the door panel has four such sides, The second detection device includes four second lenses respectively disposed on the upper side, lower side, left side and right side of the second direction. The four second lenses are used to simultaneously capture images of the four sides of the door panel located in the second direction.

5. The testing equipment as described in claim 2, wherein the door panel has four such sides, The second detection device includes two second lenses respectively disposed on the upper side, lower side, left side, and right side of the second direction. The two second lenses are used to simultaneously capture images of the corresponding sides of the door panel located in the second direction.

6. The testing equipment as described in claim 5, wherein, The two second lenses are positioned on opposite sides or perpendicularly intersecting sides.

7. The testing equipment as described in any one of claims 2 to 6, wherein, The turntable module has a horizontal axis turntable connected to the door opening mechanism module along a transverse axis that is perpendicular to the vertical axis, and a vertical axis turntable connected to the horizontal axis turntable along the vertical axis. The horizontal axis turntable can drive the door opening mechanism module to rotate around the transverse axis, so that the side of the door panel to be inspected is rotated to correspond to the second lens. The vertical axis turntable can drive the horizontal axis turntable to rotate around the vertical axis, so that the back of the door panel to be inspected can be rotated to face the first inspection device.

8. The testing equipment as described in claim 1, wherein, The transfer device also includes a slide module that extends along the second direction and is provided for the turntable module. The slide module can drive the turntable module to move along the second direction to move the door panel closer to or away from the first detection device.

9. The testing equipment as described in claim 1, wherein, The light source board is rectangular, and the side length of the light source board is greater than or equal to the side length of the back side of the door panel.

10. The testing equipment as claimed in claim 1, wherein, The light source board is in the shape of an arc.

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