High-voltage ignition start-up device and impedance matching device for plasma reaction chamber

Abstract

A high-voltage ignition start-up device and impedance matching device for a plasma reaction chamber are disclosed. The ignition start-up device, applied to the plasma reaction chamber, includes a control module, a drive module, an ignition module, and a matching module. The control module controls the ignition module, which provides ignition voltage to the plasma reaction chamber via a power frequency power supply during startup. Simultaneously, the control module controls the drive module to drive the matching module to provide an impedance matching signal to the plasma reaction chamber. Therefore, the ignition start-up device provided by this invention enables rapid ignition of the plasma reaction chamber and provides an impedance matching signal after ignition start-up.

Claims

1. A high-voltage ignition starting device, applied to a plasma reaction chamber, comprising: a control module, a drive module, an ignition module, and a matching module; a first control terminal of the control module is connected to the input terminal of the drive module, for sending the control signal to the drive module; a second control terminal of the control module is connected to the signal input terminal of the ignition module, for sending an ignition signal to the ignition module; a control terminal of the drive module is connected to the controlled terminal of the matching module, for controlling the matching module according to the control signal; the ignition module is used to provide an ignition voltage to the plasma reaction chamber, and the output terminal of the ignition module is connected to the output terminal of the matching module; the power input terminal of the ignition module is connected to the power output terminal of a power frequency power supply; the input terminal and output terminal of the matching module are respectively connected to a radio frequency power supply and the plasma reaction chamber, for receiving the power signal from the radio frequency power supply and transmitting it to the plasma reaction chamber.

2. The high-voltage ignition starting device as described in claim 1, wherein, It also includes a sampling module, the detection end of which is connected to the input end of the matching module to obtain the state parameters of the input end of the matching module, and the output end of the sampling module is connected to the control module to provide the corresponding detection signal to the control module.

3. The high-voltage ignition starting device as described in claim 2, wherein, The sampling module includes an electrical quantity sensor and a sampling controller that are interconnected; the input terminal of the electrical quantity sensor is connected to an RF power supply, and the detection terminal is connected to the input terminal of the matching module; the output terminal of the electrical quantity sensor is connected to the sampling controller, and the sampling controller is connected to the input terminal of the control module.

4. The high-voltage ignition starting device as described in claim 1, wherein, The matching module includes a first adjustable capacitor, a second adjustable capacitor, and a first inductor; the driving module drives the controlled terminal of the first adjustable capacitor and the controlled terminal of the second adjustable capacitor, the second terminal of the first adjustable capacitor and the first terminal of the second adjustable capacitor serve as the input terminal of the matching module, the first terminal of the first adjustable capacitor is grounded, the second terminal of the second adjustable capacitor is connected to the first terminal of the first inductor, and the second terminal of the first inductor serves as the output terminal of the matching module.

5. The high-voltage ignition starting device as described in claim 1, wherein, The ignition module includes a relay, a transformer, and a half-wave rectifier unit; the signal input terminal of the relay is connected to the second control terminal of the control module, and the power input terminal and power output terminal of the relay are respectively connected to the power output terminal of the power frequency power supply and the input winding of the transformer; one end of the output winding of the transformer is connected to the input terminal of the half-wave rectifier unit, and the other end of the output winding of the transformer is grounded; the output terminal of the half-wave rectifier unit serves as the output terminal of the ignition module.

6. The high-voltage ignition starting device as described in claim 5, wherein, The ignition module also includes a low-pass filter; the input of the low-pass filter is connected to the output of the half-wave rectifier unit, and the output is connected to the RF output of the matching module.

7. The high-voltage ignition starting device as described in claim 1, wherein, The control module includes a rectifier and a control unit; the input and output terminals of the rectifier are respectively connected to the power frequency power supply and the input terminal of the control unit.

8. The high-voltage ignition starting device as described in claim 5, wherein, The transformer is a plasma high-voltage transformer.

9. The high-voltage ignition starting device as described in claim 5, wherein, The second control terminal of the control module is connected to the controlled terminal of the relay via a communication interface.

10. An impedance matching device with high-voltage ignition and starting capability, wherein, The impedance matching device includes any one of claims 1 to 9, which is a high-voltage ignition starting device.

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