Front-opening wafer carrier

Abstract

A front-opening wafer carrier includes a housing, a door, and a housing hook. An opening is provided on the side of the housing, forming an internal housing receiving space. A support frame is provided within the housing receiving space for placing 6-inch or 8-inch wafers, allowing the housing to carry 6-inch or 8-inch wafers. The door closes to the opening on the side of the housing. The housing hook is located on the top of the housing and is used by an overhead crane system to lift, lower, and transport the front-opening wafer carrier.

Claims

1. A front-opening wafer carrier, comprising: a housing (1) having an opening (121) on one side (12) of the housing (1) and forming a housing receiving space (14) therein, wherein a support frame (141) is provided in the housing receiving space (14) for placing at least one 6-inch or 8-inch wafer (C), such that the housing (1) is used to carry the 6-inch or 8-inch wafer (C); a door (2) covering the opening (121) on the side (12) of the housing (1); and a housing hook (111) disposed on the top (11) of one side of the housing (1), wherein the housing hook (111) is used by a crane transport system to lift, lower and transport the front-opening wafer carrier (100).

2. The previously open wafer carrier as described in claim 1, wherein the door body (2) has a door plate (21), and when the door plate (21) is closed on the housing (1), one side of the housing (1) in the housing receiving space (14) is a first door plate surface (21a), and a stop (211) is provided on the first door plate surface (21a), the stop (211) being used to reduce the probability of the wafer (C) colliding in the housing receiving space (14) of the housing (1).

3. The previously open wafer carrier as described in claim 2, wherein the door panel (21) has a second door panel surface (21b) and a side door panel (22), the second door panel surface (21b) corresponding to the first door panel surface (21a), and the side door panel (22) surrounds the second door panel surface (21b) such that a door accommodating space (24) is formed between the side door panel (22) and the second door panel surface (21b), and two snap-fit ​​structures (3) are provided on the second door panel surface (21b).

4. The previously open wafer carrier as described in claim 3, wherein each of the latching structures (3) comprises a turntable (31) and two latching members (32), one of the turntables (31) having a central position (311) pivotally connected to the second door panel surface (21b) of the door panel (21), and the turntable (31) having two grooves (312), the two grooves (312) being respectively extended from corresponding sides of the turntable (31) along the rotation direction toward the central position (311) of the turntable (31), and each latching member... One end of the fastener (32) is pivotally connected to one of the two slides (312) of the turntable (31), and the other end of each fastener (32) is located at the position of one side hole (221) of the side door panel (22). When the turntable (31) rotates about the center position (311) as the axis of rotation, the turntable (31) drives the other end of each fastener (32) to pass through or pull away from the side hole (221) of the side door panel (22), so that the other end of each fastener (32) is engaged or pulled away from the housing (1).

5. The previously open wafer carrier as described in claim 4, wherein each of the latches (32) is connected to the second door panel surface (21b) of the door panel (21) by means of a connector (323).

6. The previously open wafer carrier as claimed in claim 4, wherein a plurality of slots (122) are provided on a surface of the housing side (12) facing the housing accommodating space (14) and near the opening (121) of the housing (1), each slot (122) being used for each of the latching members (32) of each latching structure (3) to be latched.

7. The previously open wafer carrier as described in claim 4, wherein two protrusions (313) are respectively provided on the corresponding sides of one edge of the turntable (31), and two grooves (314) are respectively provided on the two protrusions (313) at the position of the edge of the turntable (31), and two positioning posts (33) are provided on the surface (21b) of the second door panel (21), and when the turntable (31) rotates about the center position (311) as the axis of rotation, the two positioning posts (33) are used to lock into the two grooves (314) so ​​that the turntable (31) is fixed.

8. The previously open wafer carrier as described in claim 7, wherein the turntable (31) has two collapsible receiving grooves (315) at the positions of the two protrusions (313), the two collapsible receiving grooves (315) being used to allow the two positioning posts (33) to more easily engage into the two grooves (314) on the two protrusions (313).

9. The previously open wafer carrier as described in claim 8, wherein the snap-fit ​​structure (3) includes two springs (34), one end of each spring (34) being connected to the turntable (31) and the other end of each spring (34) being connected to the second door panel surface (21b) of the door panel (21), wherein when the turntable (31) is rotated away from the two positioning posts (33) by an external force, the two springs (34) are used to pull the turntable (31) so that the two grooves (314) of the turntable (31) are rotated back to the position of the two positioning posts (33).

10. The previously open wafer carrier as described in claim 9, wherein the door body (2) further comprises a door cover (23) that covers the second door panel surface (21b) and the side door panel (22) of the door panel (21) to cover the two snap-fit ​​structures (3).

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