Carrier element

Abstract

This invention relates to the field of bearing equipment technology, specifically a bearing element, comprising: a bearing frustum, the upper surface of which is provided with a plurality of synchronously sliding clamping blocks, each clamping block having a clamping groove on one side and a first driving element connected to the other side; a plurality of large through holes are formed on the surface of the bearing frustum, a rotating ring is fixed to the outer ring, the rotating ring is engaged with the inner side wall of the support cylinder, and a second driving element is connected to the other side; a hot air blower is fixed at the top. The bearing element, through a radial clamping mechanism and a soft limiting design, avoids occupying the effective processing area of ​​the wafer and reduces the risk of breakage; it also integrates rotary spin drying and hot air drying functions, enabling cleaning, waste liquid collection, and pretreatment to be efficiently completed on the same platform.

Claims

1. A carrier element, comprising: A frustum of support; wherein: a plurality of clamping blocks that can slide synchronously are provided on the upper surface of the frustum of support, and a clamping groove is opened on one side of each clamping block, and a soft pad is fixedly connected in the clamping groove; a first driving element for driving the clamping blocks to slide synchronously is connected to the other side of each clamping block; a plurality of large through holes are opened on the surface of the frustum of support, and a rotating ring is fixedly connected to the outer ring surface of the frustum of support, the rotating ring being rotatably engaged with the inner side wall of a support cylinder; a plurality of small through holes are opened on one side of the upper surface of the rotating ring, and a second driving element for driving the rotating ring to rotate is connected to the other side of the upper surface of the rotating ring; a hot air blower is fixedly installed on the top of the frustum of support.

2. The carrier element according to claim 1, wherein, The first driving element includes a first motor, which is fixedly mounted on the lower surface of the supporting frustum. The output end of the first motor passes through the supporting frustum and is fixedly connected to a rotating disk.

3. The carrier element as described in claim 2, wherein, The rotating disk has a plurality of arc-shaped grooves on its surface. Each arc-shaped groove is slidably connected to one end of a sliding pin. The other end of the sliding pin is fixedly sleeved on one end of a sliding plate. The other end of the sliding plate is slidably mounted on a limiting block.

4. The carrier element as described in claim 3, wherein, The limiting block is fixedly installed on the upper surface of the bearing truncated cone and arranged in a circle. The outer cover of the first motor is provided with a fixed cylinder. The bottom of the fixed cylinder is fixedly installed on the inner bottom of the support cylinder. The top of the fixed cylinder is slidably connected to a fixed ring fixedly connected to the lower surface of the bearing truncated cone through an annular groove.

5. The carrier element as claimed in claim 1, wherein, The second driving element includes a second motor, which is fixedly installed inside the side wall of the support cylinder. A drive gear is fixedly sleeved on the output end of the second motor, and the drive gear meshes with a gear ring fixedly connected to the upper surface of the rotating ring.

6. The carrier element as claimed in claim 1, wherein, An upper limit ring and a lower limit ring are fixedly connected to the inner ring of the support cylinder. The edge of the rotating ring is slidably installed between the upper limit ring and the lower limit ring. A driven gear is provided on the upper side of the upper limit ring. The driven gear is rotatably sleeved on one end of a limit shaft. The other end of the limit shaft is fixedly sleeved inside the support cylinder.

7. The carrier element as claimed in claim 1, wherein, The hot air blower is fixed to the top of the support cylinder by welding a frame. A plurality of solenoid valves are arranged in a circumferential array at the bottom of the support cylinder, and the input end of the top side of the solenoid valve is connected to the inner side of the bottom of the support cylinder.

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