Automated optical inspection equipment for glass core substrates

Abstract

An automated optical inspection device for glass core substrates includes a stage, a first light source group, a moving carrier, an image acquisition device, a control device, and an analysis device. The stage supports the glass core substrate to be inspected, which includes a glass core layer, an inner circuit layer, an insulating adhesive layer, and a surface circuit layer. The first light source group is located above the stage and illuminates the surface circuit layer at an angle of 3 to 65 degrees, with a wavelength less than 450 nm. The image acquisition device captures images of the surface circuit layer. The control device controls the movement of the moving carrier and controls the opening and closing of the image acquisition device. The analysis device receives the images, compares them with a built-in target image, and marks the location of defects in the images.

Claims

1. An automated optical inspection device for a glass core carrier, suitable for detecting defects in a surface circuit layer of a glass core carrier, comprising: a stage for supporting the glass core carrier to be inspected, the glass core carrier comprising a glass core layer, an inner circuit layer, an insulating adhesive layer, and the surface circuit layer stacked sequentially from bottom to top; a first light source group located above the stage, irradiating the surface circuit layer at an angle of 3 to 65 degrees, the wavelength of the first light source group being less than 450 nm; a moving carrier; and an image capturing device mounted on the moving carrier, moved by the moving carrier, and capturing a plurality of images on the surface circuit layer. A control device electrically connected to the mobile carrier and the image capturing device controls the movement of the mobile carrier and the opening and closing of the image capturing device according to the area of ​​the glass core carrier plate; and an analysis device electrically connected to the control device and the image capturing device receives the images, compares them with a plurality of built-in target images, and marks the location of a defect present in the images.

2. The automated optical inspection apparatus for a glass core carrier as described in claim 1, wherein the wavelength of the first light source group is from 10 nm to 400 nm.

3. The automated optical inspection apparatus for a glass core substrate as described in claim 1, wherein the first light source group illuminates the surface circuit layer at a direction of 40 to 60 degrees.

4. The automated optical inspection apparatus for a glass core carrier as described in claim 3 further includes a second light source group that illuminates the surface circuit layer at an angle perpendicular to the surface circuit layer, the wavelength of the second light source group being 300 nm to 800 nm.

5. The automated optical inspection apparatus for a glass core substrate as described in claim 1, wherein the first light source group illuminates the surface circuit layer in a direction of 5 to 30 degrees, wherein the automated optical inspection apparatus for the glass core substrate operates in a dark field environment, and the images captured by the image capturing device are a plurality of dark field images.

6. The automated optical inspection apparatus for a glass core substrate as described in claim 5, wherein the first light source group illuminates the surface circuit layer in a direction of 6 to 15 degrees.

7. The automated optical inspection apparatus for a glass core carrier as described in claim 1, wherein the image capturing device includes at least one filter element and a plurality of image capturing elements, the filter element being located in front of the image capturing elements, the image capturing elements being arranged in a line or a matrix.

8. The automated optical inspection apparatus for a glass core carrier as described in claim 7, wherein one of the image capturing elements has a resolution of 2 megapixels to 30 megapixels.

9. The automated optical inspection apparatus for a glass core carrier as described in claim 8, wherein the resolution of the image capturing elements is between 8 megapixels and 24 megapixels.

10. The automated optical inspection apparatus for a glass core carrier as described in claim 8, wherein one of the optical systems of the analysis apparatus has a resolution of 1 μm / pixel to 4.5 μm / pixel.

11. The automated optical inspection apparatus for a glass core carrier as described in claim 10, wherein the optical system of the analysis apparatus has a resolution of 1.5 μm / pixel to 3.5 μm / pixel.

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