Cleaning sheet

Abstract

A cleaning sheet includes a support layer and a cleaning layer. The cleaning layer is disposed on the support layer. The cleaning layer has a base portion and at least one protrusion protruding from the base portion. The cleaning layer includes resin, a plurality of cleaning particles dispersed in the resin, and a plurality of abrasive particles. The cleaning particles have a Mohs hardness of less than 7. The abrasive particles have a Mohs hardness of greater than or equal to 7. The protrusion of the cleaning layer allows the cleaning sheet to be highly customized to meet the needs of various probe arrays, significantly extending the lifespan of the cleaning sheet and / or probe card while minimizing or eliminating probe damage, thereby improving the overall yield and process reliability of semiconductor testing.

Claims

1. A cleaning tablet, comprising: One support layer; A cleaning layer is disposed on the support layer, the cleaning layer having a base portion and at least one protrusion protruding from the base portion, wherein: the cleaning layer includes a resin, a plurality of cleaning particles dispersed in the resin and a plurality of abrasive particles; and the Mohs hardness of the cleaning particles is less than 7, and the Mohs hardness of the abrasive particles is greater than or equal to 7.

2. The cleaning sheet as claimed in claim 1, wherein the resin has a weight-average molecular weight between 20,000 and 1,500,000, and the glass transition temperature of the resin is between -60°C and -20°C.

3. The cleaning sheet as claimed in claim 1, wherein the Shore A hardness of the cleaning layer is between 40 and 90, and the elastic modulus of the cleaning layer is between 15 kg / cm² and 350 kg / cm².

4. The cleaning sheet as claimed in claim 1, wherein the particle size distribution of the cleaning particles is between 0.05 micrometers and 30 micrometers, and the particle size distribution of the abrasive particles is between 0.02 micrometers and 50 micrometers.

5. The cleaning sheet as claimed in claim 1, wherein the cleaning particles and the abrasive particles together with the resin form an integral body of the at least one protrusion and the base portion.

6. The cleaning sheet as claimed in claim 1, wherein the top surface of the cleaning layer is exposed and is adapted to be the first layer that the probe contacts when cleaning the probe.

7. The cleaning sheet as claimed in claim 6, wherein the probe contacts one of the at least one protrusion.

8. The cleaning sheet as claimed in claim 1, wherein the step of forming the cleaning layer includes: A cleaning material is applied to the support layer, wherein the cleaning material includes the resin, the cleaning particles, and the abrasive particles; The cleaning material is pressed using a fixture to form the at least one raised portion.

9. The cleaning sheet as claimed in claim 1, wherein the step of forming the cleaning layer includes: A first cleaning material is formed on the support layer; And at least one second cleaning material is formed on a local area of ​​the first cleaning material using a fixture, wherein both the first cleaning material and the second cleaning material contain the resin, the cleaning particles and the abrasive particles, wherein: the first cleaning material corresponds to the base portion; and the at least one second cleaning material corresponds to the at least one protrusion portion.

10. The cleaning sheet as claimed in claim 1, wherein the step of forming the cleaning layer includes: A cleaning material is formed on the support layer, wherein the cleaning material includes the resin, the cleaning particles, and the abrasive particles; And using a jig to remove part of the cleaning material to form the at least one protrusion.

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