Objects with plasma corrosion resistant coating
TWM687964UActive Publication Date: 2026-09-21DAH YOUNG VACUUM EQUIPMENT CO LTD
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Patent Information
- Application Number
- TW115206687
- Authority / Receiving Office
- TW · TW
- Patent Type
- Utility models
- Current Assignee / Owner
- Filing Date
- 2026-07-16
- Publication Date
- 2026-09-21
- Estimated Expiration
- 2036-07-15
Smart Images
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Abstract
This invention provides an object with a plasma corrosion resistant layer, comprising: a substrate layer having an outer surface; and a plasma corrosion resistant layer covering the outer surface, wherein the plasma corrosion resistant layer is in the form of a thin film and is deposited on the outer surface by ion-assisted electron gun evaporation technology.
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Claims
1. An object having a plasma corrosion resistant layer, comprising: A substrate layer having an outer surface; And a plasma corrosion resistant layer is covered on the outer surface. The plasma corrosion resistant layer is in the form of a thin film and is deposited on the outer surface by ion-assisted electron gun evaporation technology.
2. An object having a plasma corrosion resistant layer as described in claim 1, wherein, The thickness of the anti-plasma corrosion layer is between 10 and 5000 nm.
3. An object having a plasma corrosion resistant layer as described in claim 1, wherein, The anti-plasma corrosion layer is composed of yttrium oxide.