Composite anti-warping membrane

TWM688117UActive Publication Date: 2026-10-01ADVANCED PAO TRUSVAL TECHNOLOGY CO LTD
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Patent Information

Application Number
TW115204607
Authority / Receiving Office
TW · TW
Patent Type
Utility models
Current Assignee / Owner
Filing Date
2026-05-21
Publication Date
2026-10-01
Estimated Expiration
2036-05-20

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  • Figure TWG2TB001914387_001
    Figure TWG2TB001914387_001
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    Figure TWG2TB001914387_002
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    Figure TWG2TB001914387_003
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Abstract

This invention provides a composite anti-warping film for reducing the warping of sheet-like workpieces. It includes a support layer, a curable resin layer disposed on a first side of the support layer, and a removable adhesive layer disposed on a second side of the support layer. The curable resin layer comprises epoxy resin and inorganic fillers dispersed in the epoxy resin. The removable adhesive layer can be attached to and peeled off the sheet-like workpiece. After the removable adhesive layer is attached to the sheet-like workpiece and the curable resin layer is cured by heat or further hardened, the curable resin layer and the support layer together provide shape retention force to reduce the warping of the sheet-like workpiece.
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Claims

1. A composite anti-warping film for reducing warping of a sheet-like workpiece, the composite anti-warping film comprising: a support layer; a curable resin layer disposed on a first side of the support layer, the curable resin layer comprising an epoxy resin and an inorganic filler dispersed in the epoxy resin; and a removable adhesive layer disposed on a second side of the support layer, the second side being opposite to the first side, the removable adhesive layer being configured to adhere to and be peelable from the sheet-like workpiece; wherein... After the removable adhesive layer is attached to the sheet workpiece and the curable resin layer is cured or further hardened by heat, the curable resin layer and the support layer together provide a shape-holding force to reduce the warping of the sheet workpiece.

2. The composite anti-warping film as described in claim 1, wherein the sheet-like workpiece is a semiconductor wafer, a glass substrate, a semiconductor substrate, a packaging substrate, or a panel substrate.

3. The composite anti-warping membrane as claimed in claim 1, wherein the support layer comprises polyethylene terephthalate, polyimide, or a combination thereof.

4. The composite anti-warping membrane as claimed in claim 1, wherein the inorganic filler comprises silicon dioxide, calcium carbonate, calcium sulfate, aluminum oxide or a combination thereof, and the inorganic filler preferably comprises silicon dioxide.

5. The composite anti-warping membrane as claimed in claim 1, wherein the content of the inorganic filler is 30 wt% to 80 wt% of the total weight of the curable resin layer, and more preferably 50 wt% to 75 wt% of the total weight of the curable resin layer.

6. The composite anti-warping film as claimed in claim 1, wherein the removable adhesive layer comprises an acrylic adhesive, and the acrylic adhesive is a UV-sensitive adhesive or a non-UV-sensitive adhesive.

7. The composite anti-warping film as claimed in claim 1, wherein the removable adhesive layer has a 180-degree peel strength relative to a mirror wafer or a test plate of one of 0.2 N / 25 mm to 3 N / 25 mm, and the removable adhesive layer is configured to be peelable from the sheet workpiece without substantially leaving any adhesive residue on the sheet workpiece.

8. The composite anti-warping film as claimed in claim 1 further comprises a protective film disposed on the curable resin layer, wherein the protective film comprises a polyolefin film.