Platform device and liquid coating equipment

Abstract

A stage device and a liquid coating apparatus are disclosed. The stage device is suitable for carrying a workpiece to be coated with a liquid material and includes a first light-transmitting plate and a second light-transmitting plate, and a chamber disposed between the first and second light-transmitting plates for containing a liquid medium. The first light-transmitting plate has a first upper light-transmitting surface, a first lower light-transmitting surface adjacent to the liquid medium, and a suction groove unit disposed on the first upper light-transmitting surface. The liquid coating apparatus includes the stage device, an inspection device, and a coating device. The inspection device includes a light source unit that provides illumination to the workpiece and an image acquisition unit that performs machine vision inspection on the workpiece. The coating device includes a coating unit that coats the workpiece with the liquid material and a coating moving unit that can drive the coating unit to move. This invention can improve coating efficiency and inspection quality.

Claims

1. A stage device suitable for supporting a workpiece to be coated with a liquid material, and comprising: a first light-transmitting plate for placing the workpiece; a second light-transmitting plate spaced vertically from the first light-transmitting plate; and a chamber disposed between the first light-transmitting plate and the second light-transmitting plate; characterized in that the chamber contains a liquid medium, the first light-transmitting plate has a first upper light-transmitting surface and a first lower light-transmitting surface opposite to the first upper light-transmitting surface, the first light-transmitting plate has a suction groove unit on the first upper light-transmitting surface for adsorbing the workpiece, and the first lower light-transmitting surface is adjacent to the liquid medium.

2. The stage device as claimed in claim 1, wherein, The second light-transmitting plate has a second upper light-transmitting surface and a second lower light-transmitting surface opposite to the second upper light-transmitting surface. The second upper light-transmitting surface is adjacent to the liquid medium. The first upper light-transmitting surface and the second lower light-transmitting surface are treated with an anti-reflective coating.

3. The stage device as claimed in claim 1, wherein, The first and second light-transmitting panels are made of quartz glass.

4. The stage device as claimed in claim 1, wherein, The liquid medium is silicone oil or fluorinated liquid.

5. The stage device as claimed in claim 1, wherein, The chamber is located inside a cavity, and the platform device is also provided with a cover that cooperates with the cavity to clamp the first light-transmitting plate.

6. The stage device as claimed in claim 5 further includes a first sealing body sandwiched between the first light-transmitting plate and the cavity.

7. The stage device as claimed in claim 5, wherein, The cover is provided with an air passage unit that communicates with the suction groove unit, and an air nozzle unit that connects the air passage unit to a negative pressure source.

8. The stage device as claimed in claim 1, wherein, The chamber is located inside a cavity, and the platform device is also provided with a body that cooperates with the cavity to clamp the second light-transmitting plate.

9. The stage device as claimed in claim 8 further includes a second sealing body sandwiched between the second light-transmitting plate and the cavity.

10. The stage device as claimed in claim 1, wherein, The chamber is located within a cavity, which is equipped with a flow channel unit communicating with the chamber and a valve unit communicating with a liquid supply unit.

11. The stage device as claimed in claim 10, wherein, The liquid supply unit provides the heated liquid medium into the chamber and fills the chamber.

12. The stage device as claimed in claim 10, wherein, The cavity is also equipped with a temperature sensing unit connected to the valve unit.

13. A liquid coating apparatus using a stage device as described in any one of claims 1 to 12, and comprising: an inspection device disposed below the stage device, the inspection device comprising a light source unit capable of providing illumination to the workpiece from below, and an image acquisition unit capable of performing machine vision inspection on the workpiece from below; and a coating device disposed above the stage device, the coating device comprising a coating unit capable of applying liquid material to the workpiece from above, and a coating moving unit capable of driving the coating unit to move.

14. The liquid coating apparatus as described in claim 13 further includes a control device electrically connected to the inspection device and the coating apparatus, wherein the control device can control the movement path of the coating unit based on the result of the machine vision inspection by the imaging unit.

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