Apparatus for treating sulfuric acid aerosol and airborne molecular contaminants

Abstract

This invention provides an apparatus for continuously removing sulfuric acid aerosols and suspended molecular contaminants from exhaust gas generated during semiconductor manufacturing processes. The apparatus includes at least one particulate pretreatment tank and at least one filter tank. When the exhaust gas enters the particulate pretreatment tank, micron-sized spraying causes the particles containing sulfuric acid aerosols and suspended molecular contaminants to grow through nucleation, aggregation, and coagulation mechanisms. The exhaust gas then enters the filter tank, where wet scrubbing technology cleans the exhaust gas treated in the particulate pretreatment tank. This apparatus and method can effectively remove solid, liquid, and aerosol contaminants, such as sulfuric acid aerosols and gaseous contaminants, suspended in the gas stream generated during semiconductor manufacturing processes.

Claims

1. An apparatus for treating sulfuric acid aerosols and suspended molecular contaminants, comprising at least one inlet, one outlet, at least one particulate pretreatment tank, and at least one filter tank, wherein the particulate pretreatment tank is provided with a plurality of atomizing nozzles, and the filter tank includes at least one packing unit provided with a plurality of nozzles and a demisting layer; wherein at least one airflow passes sequentially through the at least one inlet through the particulate pretreatment tank, the packing unit of the filter tank, and the demisting layer, and exits the apparatus from the outlet, the at least one airflow comprising particulates containing sulfuric acid aerosols and suspended molecular contaminants; The atomizing nozzles of the particulate pretreatment tank are configured to spray high-pressure atomized spray liquid toward the at least one airflow. The spray angle of the atomizing nozzles is set to 20 to 70 degrees and the spray liquid height of the atomizing nozzles is set to 10 to 1000 cm, so as to facilitate the growth of the particles in the at least one airflow from a particle size of 0.1-2.5 micrometers to 50-100 micrometers. The nozzles are disposed between the packing unit and the demisting layer, and the distance between the nozzles and the packing unit is 10 to 40 cm. The nozzles are configured to spray washing liquid toward the packing unit and the at least one airflow that has been treated by the particulate pretreatment tank through the packing unit at a spray angle of 60 to 150 degrees, so as to clean the at least one airflow.

2. The apparatus as claimed in claim 1, wherein the filter tank includes another packing unit disposed between the packing unit and the demister layer, the other packing unit having a plurality of other nozzles disposed between the other packing unit and the demister layer, and the distance between the other nozzles and the other packing unit being 10 to 40 cm, the other nozzles being configured to spray another washing liquid at a spray angle of 60 to 150 degrees toward the other packing unit and the at least one airflow passing through the other packing unit.

3. The apparatus as claimed in claim 1, wherein the high-pressure atomizing spray liquid comprises water or an alkaline solution with a pH of 8 to 13.

4. The apparatus as claimed in claim 1, wherein the washing solution comprises water or an alkaline solution with a pH of 8 to 13.

5. The apparatus as claimed in claim 2, wherein the washing liquid and the other washing liquid contain water or an alkaline solution with a pH of 8 to 13.

6. The apparatus as claimed in claim 1, wherein the flow direction of the at least one airflow through the particulate pretreatment tank is opposite to the spray direction of the high-pressure atomized spray liquid, and the flow direction of the at least one airflow through the filter tank is opposite to the spray direction of the washing liquid.

7. The apparatus as claimed in claim 2, wherein the flow direction of the at least one airflow through the particulate pretreatment tank is opposite to the spray direction of the high-pressure atomized spray liquid, and the flow direction of the at least one airflow through the filter tank is opposite to the spray direction of the washing liquid and the other washing liquid.

8. The apparatus as claimed in claim 1, wherein the filler unit comprises a chemically synthesized fiber with added antimicrobial components, the chemically synthesized fiber being selected from any one or any combination of two or more of the following: polyester, nylon, and polyurethane fiber (Spandex); the antimicrobial components being selected from any one or any combination of two or more of the following: polystyrene, polyacrylonitrile, polyethylene, polypropylene, polyester, polyurethane, and polyamide.

9. The apparatus as claimed in claim 8, wherein the content of the antibacterial component is from 1 wt.% to 10 wt.%.

10. The apparatus of claim 1, wherein the demisting layer comprises a chemically synthesized fiber with added AlxSiyOz catalyst, the chemically synthesized fiber being selected from any one or a combination of any two or more of the following: polyester, nylon and polyurethane fiber (Spandex).

11. The apparatus as claimed in claim 10, wherein when x=1, y=1, 2, 3 or 4 and z=3, 6, 8 or 10; and when x=2, y=1 or 2 and z=5, 6, 7 or 9.

12. The apparatus as claimed in claim 2, wherein the high-pressure atomizing spray liquid contains fresh water, the washing liquid contains recycled water, and the other washing liquid contains fresh water.

13. An apparatus for treating sulfuric acid aerosols and aerosolized molecular contaminants, comprising at least one inlet, one outlet, a first particulate pretreatment tank, a first filter tank, a second particulate pretreatment tank, and a second filter tank, wherein the first particulate pretreatment tank is provided with a plurality of first atomizing nozzles, the first filter tank includes at least one first packing unit provided with a plurality of first nozzles and a first demister, the second particulate pretreatment tank is provided with a plurality of second atomizing nozzles, and the second filter tank includes at least one second packing unit provided with a plurality of second nozzles and a second demister; wherein at least one airflow passes sequentially through the at least one inlet through the first particulate pretreatment tank, the first packing unit and the first demister of the first filter tank, the second particulate pretreatment tank, the second packing unit and the second demister of the second filter tank, and exits the apparatus from the outlet, the at least one airflow comprising particles containing sulfuric acid aerosols and aerosolized molecular contaminants; The first atomizing nozzles of the first particle pretreatment tank are configured to spray a first high-pressure atomized spray liquid towards the at least one airflow. The spray angle of the first atomizing nozzles is set to 20 to 70 degrees, and the spray liquid height is set to 10 to 1000 cm, to facilitate the growth of particles in the at least one airflow from a particle size of 0.1-2.5 micrometers to 50-100 micrometers. The first nozzles are disposed between the first packing unit and the first demisting layer, with a distance of 10 to 40 cm between the first nozzles and the first packing unit. The first nozzles are configured to spray a first washing liquid at a spray angle of 60 to 150 degrees towards the first packing unit and the at least one airflow that has been treated by the first particle pretreatment tank after passing through the first packing unit, to clean the at least one airflow. The second atomizing nozzles of the treatment tank are configured to spray a second high-pressure atomizing spray liquid toward the at least one airflow flowing into the second particulate pretreatment tank. The spray angle of the second atomizing nozzles is set to 20 to 70 degrees and the height of the second high-pressure atomizing spray liquid is set to 10 to 1000 cm, so as to facilitate the growth of the particles in the at least one airflow from a particle size of 0.1-2.5 micrometers to 50-100 micrometers. The second nozzles are disposed between the second packing unit and the second demister layer, and the distance between the second nozzles and the second packing unit is 10 to 40 cm. The second nozzles are configured to spray a second washing liquid toward the second packing unit and the at least one airflow that has been treated by the second particulate pretreatment tank through the second packing unit at a spray angle of 60 to 150 degrees, so as to further clean the at least one airflow.

14. The apparatus of claim 13, wherein the first filter tank includes a third packing unit disposed between the first packing unit and the first demister layer, the third packing unit having a plurality of third nozzles disposed between the third packing unit and the first demister layer, and the distance between the third nozzles and the third packing unit being 10 to 40 cm, the third nozzles being configured to spray a third washing liquid at a spray angle of 60 to 150 degrees toward the third packing unit and the at least one airflow passing through the third packing unit; and the second filter tank includes a fourth packing unit disposed between the second packing unit and the second demister layer, the fourth packing unit having a plurality of fourth nozzles disposed between the fourth packing unit and the second demister layer, and the distance between the fourth nozzles and the fourth packing unit being 10 to 40 cm, the fourth nozzles being configured to spray a fourth washing liquid at a spray angle of 60 to 150 degrees toward the fourth packing unit and the at least one airflow passing through the fourth packing unit.

15. The apparatus as claimed in claim 13, wherein the first high-pressure atomizing spray liquid and the second high-pressure atomizing spray liquid comprise water or an alkaline solution with a pH of 8 to 13.

16. The apparatus as claimed in claim 13, wherein the first washing liquid and the second washing liquid comprise water or an alkaline solution with a pH of 8 to 13.

17. The apparatus as claimed in claim 14, wherein the first washing liquid, the second washing liquid, the third washing liquid and the fourth washing liquid comprise water or an alkaline solution with a pH of 8 to 13.

18. The apparatus of claim 13, wherein the flow direction of the at least one airflow through the first particulate pretreatment tank, the first filter tank, the second particulate pretreatment tank and the second filter tank is opposite to the spray direction of the first high-pressure atomized spray liquid, the first washing liquid, the second high-pressure atomized spray liquid and the second washing liquid.

19. The apparatus of claim 14, wherein the flow direction of the at least one airflow through the first particulate pretreatment tank, the first filter tank, the second particulate pretreatment tank and the second filter tank is opposite to the spray direction of the first high-pressure atomized spray liquid, the first washing liquid, the second washing liquid, the second high-pressure atomized spray liquid, the third washing liquid and the fourth washing liquid.

20. The apparatus of claim 13, wherein the first filler unit and the second filler unit comprise chemically synthesized fibers with added antimicrobial components, the chemically synthesized fibers being selected from any one or any combination of two or more of the following: polyester, nylon, and polyurethane fibers (Spandex); the antimicrobial components being selected from any one or any combination of two or more of the following: polystyrene, polyacrylonitrile, polyethylene, polypropylene, polyester, polyurethane, and polyamide.

21. The apparatus of claim 14, wherein the first packing unit, the second packing unit, the third packing unit and the fourth packing unit comprise chemically synthesized fibers with added antibacterial components, the chemically synthesized fibers being selected from any one or any combination of two or more of the following: polyester, nylon and polyurethane fibers (Spandex); the antibacterial components being selected from any one or any combination of two or more of the following: polystyrene, polyacrylonitrile, polyethylene, polypropylene, polyester, polyurethane and polyamide.

22. The apparatus as claimed in claim 21, wherein the content of the antibacterial component is from 1 wt.% to 10 wt.%.

23. The apparatus of claim 13, wherein the first demister and the second demister comprise chemically synthesized fibers with added AlxSiyOz catalyst, the chemically synthesized fibers being selected from any one or a combination of any two or more of the following: polyester, nylon, and polyurethane fibers (Spandex).

24. The apparatus as claimed in claim 23, wherein when x=1, y=1, 2, 3 or 4 and z=3, 6, 8 or 10; and when x=2, y=1 or 2 and z=5, 6, 7 or 9.

25. The apparatus of claim 14, wherein the first high-pressure atomizing spray liquid contains fresh water, the first washing liquid contains recycled water, and the third washing liquid contains fresh water.

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