Gas splitter and wafer cassette using the gas splitter

Abstract

This invention provides a gas splitter and a wafer cassette using the gas splitter. The gas splitter includes a body and a gas control valve. The body forms a first gas supply channel and a second gas supply channel. The gas control valve is disposed within the body and includes an inlet unit, a first opening, and a second opening. The first opening communicates with the first gas supply channel, and the second opening communicates with the second gas supply channel. When gas is injected into the inlet unit, the gas control valve opens and closes the first opening and / or the second opening according to the physical properties of the gas, allowing the gas to pass through the first gas supply channel and / or the second gas supply channel. When this invention is applied to a wafer cassette, it can adjust the gas supply path according to the physical properties of the gas, improving gas utilization efficiency and reducing gas waste.

Claims

1. A gas splitter, comprising: A main body having a first air supply channel and a second air supply channel; a pneumatic control valve disposed within the main body, the pneumatic control valve including an air inlet unit, a first opening and a second opening, the first opening communicating with the first air supply channel and the second opening communicating with the second air supply channel; wherein, when a gas is injected into the pneumatic control valve, the air inlet unit of the pneumatic control valve opens and closes the first opening and / or the second opening according to the physical properties of the gas, so that the gas passes through the first air supply channel and / or the second air supply channel.

2. The gas splitter as described in claim 1, wherein, The intake unit includes a valve core disposed within the intake unit and displaced according to the physical properties of the gas to open or close the first opening and / or the second opening.

3. The gas splitter as described in claim 2, wherein, The intake unit includes a shaft portion disposed within the intake unit; wherein the valve core is sleeved on the shaft portion, allowing the valve core to be displaced along the axial direction of the shaft portion.

4. The gas splitter as described in claim 2, wherein, The intake unit includes an elastic element disposed between the top of the intake unit and the valve core.

5. The gas splitter as described in claim 2, wherein, The bottom of the intake unit has a protrusion that abuts against the valve core.

6. The gas splitter as described in claim 5, wherein, The gas splitter also includes a limiting seat, the top of which forms a slot, the slot being located at the bottom of the main body, and the bottom of which forms a limiting opening, the limiting opening communicating with the slot, and the end of the limiting opening being located at the bottom of the air intake unit, the end of the limiting opening forming the protrusion.

7. The gas splitter as described in any one of claims 1 to 6, wherein, The body includes: an annular sidewall surrounding the sidewall of the air intake unit; a first connecting wall connecting the top of the annular sidewall to the sidewall of the air intake unit near the top; two second connecting walls connecting the middle of the annular sidewall to the sidewall of the air intake unit near the middle, with one end of each second connecting wall connecting to both ends of the first connecting wall; and a third connecting wall connecting the bottom of the annular sidewall to the sidewall of the air intake unit near the bottom, with both ends of the third connecting wall connecting to the other ends of the second connecting walls; wherein the annular sidewall, the second connecting walls, the third connecting wall, and the sidewall of the air intake unit form a first air supply channel, and the annular sidewall, the first connecting wall, the second connecting walls, and the sidewall of the air intake unit form a second air supply channel, and the second air supply channel penetrates the annular sidewall.

8. A wafer cassette using the gas splitter, comprising: A hollow housing having a first air inlet, a second air inlet, and a connecting portion, the connecting portion having a chamber communicating with the first air inlet and the second air inlet; a gas distributor as described in claim 1, disposed within the chamber of the connecting portion, with a first air supply channel communicating with the first air inlet and a second air supply channel communicating with the second air inlet; wherein, when a gas is injected into the gas control valve of the gas distributor, the air inlet unit of the gas control valve opens and closes the first opening and / or the second opening according to the physical properties of the gas, allowing the gas to flow through the first air inlet and / or the second air inlet into the hollow housing.

9. The wafer cassette using the gas splitter as described in claim 8, wherein, The first air intake section further includes: an annular housing disposed at the bottom of the hollow housing and communicating with the interior of the hollow housing and the first air supply channel; and a filter unit disposed on the annular housing.

10. A wafer cassette using the gas splitter as described in claim 8 or 9, wherein, The second air intake also includes: a diffuser disposed within the hollow housing; a diffusion channel formed within the diffuser and communicating with the second air supply channel; and a plurality of diffusion ports formed on the sidewall of the diffuser and communicating with the diffusion channel and the hollow housing.

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