Semiconductor cavity leak detection device with special gas processing

Abstract

A leak detection device for a semiconductor cavity with a special gas process includes: an isolation valve, an oxygen sensor, and a controller. The isolation valve is connected to a process container and switches between a valve flow state and a valve flow blocking state, wherein the accommodating cavity of the process container is used to house wafers for process processing. The oxygen sensor is connected to the isolation valve, positioning the isolation valve between the process container and the oxygen sensor. The controller is electrically connected to the isolation valve and the oxygen sensor. The controller drives the isolation valve to switch to the valve flow state based on a cavity vacuum operation signal transmitted by a cavity status detection device, and the oxygen sensor obtains oxygen concentration information of the accommodating cavity through the isolation valve. The cavity status detection device is electrically connected to the controller and installed in the process container, generating a cavity vacuum operation signal based on the cavity being in a vacuum state.

Claims

1. A cavity leak detection device for semiconductor special gas processes, comprising: an isolation valve configured and connected to a process container and switching between a valve flow state and a valve blockage state, wherein the accommodating cavity of the process container is used to accommodate wafers for process processing; An oxygen sensor is connected to the isolation valve, positioning the isolation valve between the process container and the oxygen sensor. A controller is electrically connected to the isolation valve and the oxygen sensor. The controller is configured to drive the isolation valve to switch to the valve flow state based on a cavity vacuum operation signal transmitted by a cavity status detection device. The oxygen sensor, through the isolation valve, is connected to the accommodating cavity to obtain oxygen concentration information of the accommodating cavity and transmits it to the controller for leak detection of the accommodating cavity. The cavity status detection device is electrically connected to the controller and its flow path is connected to the process container. It generates a cavity vacuum operation signal based on the accommodating cavity being in a vacuum state. Alternatively, the controller can drive the isolation valve to switch to the valve blockage state. The oxygen sensor is isolated from the accommodating cavity by the isolation valve, thus preventing contact with special gases.

2. The cavity leak detection device as claimed in claim 1, wherein the cavity status detection device is a pressure switch, the cavity status detection device detects the gas pressure of the accommodating cavity and generates a pressure signal related to the operation, which is received by the controller.

3. The cavity leak detection device as claimed in claim 1, wherein the isolation valve is a solenoid valve.

4. The cavity leak detection device as claimed in claim 1 further includes a data reading device electrically connected to the controller, wherein the data reading device is configured to determine the leakage status of the containment cavity of the process container based on the oxygen concentration information received by the controller.

5. The cavity leak detection device as claimed in claim 1, wherein the cavity status detection device includes a vacuum gauge, and the controller drives the isolation valve to switch to the valve passage flow state based on the vacuum gauge detecting that the gas pressure in the accommodating cavity is less than a preset pressure value, wherein the preset pressure value is an adjustable set value; or, the controller drives the isolation valve to switch to the valve passage blockage state based on the vacuum gauge detecting that the gas pressure in the accommodating cavity is greater than the preset pressure value.

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