Method for manufacturing a thermoelectric sensor for a microcalorimeter

Abstract

Method for manufacturing a thermoelectric sensor for a microcalorimeter involves producing elementary thermopiles, assembling them into a thermoelectric unit, thermally insulating the space between the elements, and forming the sensor's heat-receiving surface. A thermoelectric sensor preform is created from elementary thermopiles - which feature series-connected thermoelement legs coated on their side faces with a thermal and electrical insulating material 10-20 µm thick - by interconnecting the elementary thermopiles according to a specified electrical circuit. Subsequently, the sensor preform is placed in a thermally insulating housing made of the same material, and the sensor's working surfaces are formed by applying a thermally conductive, electrically insulating material with a thickness of at least 10 µm.