Substrate plasma-processing apparatus

Inactive Publication Date: 2010-11-11
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0017]According to an aspect of the invention, when the substrate is raised, the distance between the substrate and the first electrode may increase and the distance between the substrate and the second electrode may decrease.

Problems solved by technology

That is, if the surface of the pixel electrode is not uniformly plasma-processed, the brightness of the organic light e

Method used

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Embodiment Construction

[0045]Reference will now be made in detail to the present embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the like elements throughout. The embodiments are described below in order to explain the present invention by referring to the figures.

[0046]FIG. 1 is a cross-sectional view of a substrate plasma-processing apparatus 100 according to an embodiment of the present invention. Referring to FIG. 1, the substrate plasma-processing apparatus 100 includes a chamber 101, a distance adjusting unit 102, a first electrode 104, a second electrode 105, and at least one flow adjusting valve 107.

[0047]The distance adjusting unit 102 is disposed in the chamber 101 to support a substrate 103 and the second electrode 105. The distance adjusting unit 102 supports the substrate 103 and the second electrode 105, raises or lowers the substrate 103 in the chamber 101, and raises or lowers the second electrod...

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Abstract

A substrate plasma-processing apparatus for plasma-processing a surface of an electrode of an organic light emitting device. The substrate plasma-processing apparatus may adjust the distance between a first electrode and a substrate and adjust the distance between a second electrode and the substrate.

Description

CROSS-REFERENCE TO RELATED APPLICATION[0001]This application claims the benefit of Korean Patent Application No. 10-2009-0039887, filed May 7, 2009 in the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]Aspects of the present invention relate to a substrate plasma-processing apparatus.[0004]2. Description of the Related Art[0005]An organic light emitting display device using an organic light emitting device (OLED) has a fast response speed compared to a liquid crystal (LCD) typical of those currently widely used. Organic light emitting display devices are being thought of as the next generation display device because an organic light emitting display device accommodates a moving picture better, has a wider viewing angle due to self light-emission, and exhibits high brightness.[0006]The OLED includes a pixel electrode, a counter electrode facing the pixel electrode, and an...

Claims

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Application Information

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IPC IPC(8): B44C1/22C23F1/08
CPCH01J37/20H01J37/32091H01J37/32568H01L51/0029H01J2237/032H01J2237/038H01J2237/20235H01J2237/024H01J37/32H05B33/26H10K71/00H10K71/811
Inventor KANG, TAE-WOOKKIM, OU-HYONJI, CHANG-SOONCHO, HYUN-LAEAN, CHANG-GUOLEE, JEONG-YEOLPARK, JAE-MORK
Owner SAMSUNG DISPLAY CO LTD
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