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Amplified flow through pressure sensor

a technology of pressure sensor and amplified flow, which is applied in the field of sensor methods and systems, can solve the problems of small voltage difference and no amplified flow through the sensor, and achieve the effect of reliable accuracy

Inactive Publication Date: 2008-10-07
HONEYWELL INT INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0009]It is, therefore, one aspect of the present invention to provide for an improved pressure sensor for measuring very low flow rates with a reliable accuracy.

Problems solved by technology

Unfortunately for silicon piezoresistive sensors, this voltage difference is quite small.
It is believed that there is currently no amplified flow through sensors based on piezoresistive sensing technology in an integrated package.

Method used

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Examples

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Embodiment Construction

[0020]The particular values and configurations discussed in these non-limiting examples can be varied and are cited merely to illustrate at least one embodiment and are not intended to limit the scope thereof.

[0021]FIG. 1 illustrates an exploded-perspective view of an amplified flow through pressure sensor 100, which can be implemented in accordance with a preferred embodiment. The amplified flow through sensor 100 can be partitioned into two halves, first half 101 and second half 102. A tube 103 is generally located between and proximate to the first half 101 and second half 102. In first half 101, a pressure sense die 105 can be packaged with a media seal 106 and a conductive seal 107. A pressure inducing substance can flow through tube 103. In the second half 102, an ASIC 108 can be located and packaged. The sensor 100 can be placed in a desired base with the assistance of a connector 104.

[0022]FIG. 1 further illustrates a second half 102 of the pressure sensor 100 wherein the AS...

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Abstract

A MEMS based pressure sensor for flow measurements includes a pressure sense die located between a media seal and a conductive seal. Such a system includes a pressure sense die located between a media seal and a conductive seal. A sensing diaphragm is generally associated with the pressure sense die, wherein the sensing diaphragm deflects when a pressure is applied thereto. An impedance circuit is generally embedded with one or more resistors on the sensing diaphragm to which the pressure to be detected is applied. An ASIC is generally associated with the impedance circuit and the sense die, wherein the ASIC is placed on a lead frame for signal conditioning in order to detect a change in the pressure.

Description

TECHNICAL FIELD[0001]Embodiments are generally related to sensor methods and systems. Embodiments are also related to MEMS (Microelectromechanical System) based pressure sensors. Embodiments are additionally related to pressure sensors that incorporate ASIC (Application Specific Integrated Circuit) components for signal conditioning and / or amplification.BACKGROUND OF THE INVENTION[0002]Many processes and devices have been used for measuring flow rate in different applications. A miniature MEMS based pressure sensor can be used to measure very low flow rates and with a reliable accuracy. Such MEMS based pressure sensors have been implemented, for example, in various flow sensing devices, such as medical applications, some of which utilize silicon piezoresistive sensing technology for measuring very low pressures. Other flow sensing implementations, for example, include environmental applications.[0003]MEMS involve the integration of micro-mechanical elements, sensor actuators, and el...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): G01L9/06
CPCG01F1/383H01L2224/48091H01L2924/3011H01L2924/1461H01L2924/10253H01L2924/00014H01L2924/00
Inventor SELVAN, THIRUMANI A.SADASIVAN, SARAVANAN
Owner HONEYWELL INT INC
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