SYSTEMS AND METHODS FOR MASS FLOW RATE MEASUREMENT AND PROCESS GAS CONTROL IN SUPPORT FLUID STREAMS USING ONE OR MORE QUARTZ CRYSTAL MICROBAL SENSORS

Abstract

The method for monitoring the material flow in the fabrication system involves moving the material film onto the surface of a quartz micro-mechanical sensor (QCM) and determining the initial resonant frequency of the QCM sensor with the material film being moved. The resonant frequency of the QCM sensor is measured during the fabrication process and compared with the initial resonant frequency. System failure occurs when the measured resonant frequency differs from the corresponding initial resonant frequency by more than a threshold value. System adjustment is performed and automatically configured to restore the QCM sensor to its initial resonant frequency.