Flipping mechanism, processing device and processing method

Abstract

A flipping mechanism, a processing device and a processing method, which relate to the technical field of semiconductor processing. The flipping mechanism comprises a mounting frame, and a first flipping assembly and a second flipping assembly which are mounted on the mounting frame, wherein the first flipping assembly comprises a flipping power member, a first transmission portion, and a first connection portion; the second flipping assembly comprises a second transmission portion and a second connection portion; the first connection portion and the second connection portion are spaced apart and configured to connect a product between the first connection portion and the second connection portion; and the flipping power member is connected to the first transmission portion, the first transmission portion is connected to the first connection portion, the first transmission portion is connected to the second transmission portion, and the second transmission portion is connected to the second connection portion, such that the flipping power member drives the first connection portion and the second connection portion to rotate synchronously. The flipping mechanism can drive the product to rotate, such that the current target processing surface of the product reaches a preset processing position, thereby improving the processing efficiency and product yield.

Description

Tilting mechanism, processing device and processing method

[0001] This application claims priority to Chinese Patent Application No. 2024117583468, filed on December 2, 2024, entitled “Flipping Mechanism, Processing Apparatus and Processing Method”, the entire contents of which are incorporated herein by reference. Technical Field

[0002] This application relates to the field of semiconductor processing technology, and in particular to a flipping mechanism, processing apparatus and processing method. Background Technology

[0003] When processing semiconductors, the semiconductor device needs to be fixed onto the processing equipment. If the target processing surface of the fixed semiconductor is not in a suitable processing position, it is necessary to re-load the semiconductor, that is, remove it from the processing equipment, readjust its angle, and then put it back on. This results in low semiconductor processing efficiency and low yield. In view of this, how to improve the processing efficiency and yield of semiconductors is a technical problem that needs to be solved by those skilled in the art. Summary of the Invention

[0004] To solve the above-mentioned technical problems, this application provides a flipping mechanism, which includes a mounting frame and a first flipping component and a second flipping component mounted on the mounting frame. The first flipping component includes a flipping power component, a first transmission part, and a first connecting part. The second flipping component includes a second transmission part and a second connecting part. The first connecting part and the second connecting part are spaced apart to connect a product between the first connecting part and the second connecting part. The flipping power component is connected to the first transmission part, the first transmission part is connected to the first connecting part, the first transmission part is connected to the second transmission part, and the second transmission part is connected to the second connecting part, so that the flipping power component drives the first connecting part and the second connecting part to rotate synchronously.

[0005] In one embodiment of the flipping mechanism, the flipping power component is a rotary motor. The first transmission part includes a first pulley assembly, a second pulley assembly, and a first transmission shaft. The second transmission part includes a third pulley assembly. The rotary motor is connected to the first transmission shaft via the first pulley assembly. The first transmission shaft is connected to the first connecting part via the second pulley assembly. The first transmission shaft is also connected to the second connecting part via the third pulley assembly.

[0006] In one embodiment of the flipping mechanism, a first support and a second support are provided on both sides of the mounting frame, a first flipping component is mounted on the first support, and a second flipping component is mounted on the second support.

[0007] In one embodiment of the flipping mechanism, the second transmission part includes a third transmission shaft, the first transmission shaft is rotatably inserted through the first support, the third transmission shaft is rotatably inserted through the second support, the third transmission shaft serves as the input shaft of the third pulley assembly, and one end of the third transmission shaft is coaxially connected to one end of the first transmission shaft via a coupling located between the first support and the second support.

[0008] In one embodiment of the flipping mechanism, the first connecting part is installed on the upper part of the first support near the second support, the first pulley assembly is installed on the lower part of the first support near the second support, the second pulley assembly is installed on the side of the first support away from the second support, the second connecting part is installed on the upper part of the second support near the first support, and the third pulley assembly is installed on the side of the second support away from the first support.

[0009] In one embodiment of the flipping mechanism, the mounting frame includes a base plate fixed to the bottom ends of the first support and the second support, wherein at least one of the first support and the second support is slidable relative to the base plate to adjust the distance between the first support and the second support.

[0010] In one embodiment of the flipping mechanism, both the first connecting portion and the second connecting portion include a clamping power member and two cooperating clamping plates. The clamping power member drives the two cooperating clamping plates to move closer to each other to clamp the product or to move further apart to release the product.

[0011] In one embodiment of the flipping mechanism, multiple elastic centering units are connected between the two clamping plates of the first connecting part and between the two clamping plates of the second connecting part. The elastic centering units of the first connecting part and the elastic centering units of the second connecting part cooperate to center the product between the first connecting part and the second connecting part. The elastic centering units of the first connecting part are arranged sequentially along a first direction, and the elastic centering units of the second connecting part are arranged along a second direction. The first direction and the second direction are parallel to each other and both perpendicular to the spacing direction of the first connecting part and the second connecting part.

[0012] In one embodiment of the flipping mechanism, both clamping plates of the first connecting portion and both clamping plates of the second connecting portion have clamping surfaces for contacting the product. Each elastic centering unit of the first connecting portion is located on the side of its clamping surface away from the second connecting portion, and each elastic centering unit of the second connecting portion is located on the side of its clamping surface away from the first connecting portion.

[0013] In one embodiment of the flipping mechanism, grooves are provided between the two clamping plates of the first connecting portion and between the two clamping plates of the second connecting portion. The groove of the first connecting portion is located on the side of its clamping surface away from the second connecting portion, and the groove of the second connecting portion is located on the side of its clamping surface away from the first connecting portion. The groove is used to accommodate the elastic centering unit connected to the clamping plate where the groove is located, and also to accommodate the elastic centering unit connected to the clamping plate that cooperates with the clamping plate where the groove is located.

[0014] In one embodiment of the flipping mechanism, the elastic centering unit includes at least a rotating member, a guide member, and an elastic member. The surface of the rotating member is used to make rolling contact with one side edge of the product. The guide member guides the rotating member to move relative to the clamping plate in a direction closer to or farther from the product. When the rotating member moves away from the product, it presses against the elastic member, thereby increasing the compression of the elastic member.

[0015] In one embodiment of the flipping mechanism, the rotating component is a bearing, which is rotatably connected to a slider. The outer peripheral surface of the bearing is used to roll and contact one side edge of the product. The guiding component is a guide rod, and the slider is slidably fitted around the outer periphery of the guide rod. The bearing is driven to slide closer to or further away from the product by sliding the slider along the guide rod.

[0016] In one embodiment of the flipping mechanism, a product inlet is formed between one end of the two clamping plates of the first connecting part, and a product outlet is formed between the other ends. Similarly, a product inlet is formed between one end of the two clamping plates of the second connecting part, and a product outlet is formed between the other ends. This allows the product to enter the gap between the two mating clamping plates from the product inlet and exit the gap between the two mating clamping plates from the product outlet.

[0017] In one embodiment of the flipping mechanism, the flipping mechanism further includes a product guide and a product exit, the product guide and the product exit are mounted on the mounting frame, the product guide is used to guide the product from the product inlet parallel into the gap between the two cooperating clamps, and the product exit is used to guide the product from the product outlet parallel away from the gap between the two cooperating clamps.

[0018] This application also provides a processing apparatus, which includes the flipping mechanism described in any of the above claims. The flipping mechanism is capable of flipping the target processing surface of a product to a preset processing position so that the processing apparatus can process the target processing surface.

[0019] In one embodiment of the processing apparatus, the processing apparatus further includes a lighting mechanism located below the flipping mechanism. The lighting mechanism includes a light source, a light source bracket, and a lifting mechanism. The light source is connected to the light source bracket, and the light source bracket is guided and engaged with the mounting frame of the flipping mechanism. The lifting mechanism can drive the light source bracket to move up and down relative to the mounting frame, so as to move the light source closer to or away from the product connected to the flipping mechanism.

[0020] This application also provides a processing method based on the above-mentioned processing device, including the following steps: a flipping mechanism connects to the product to be processed, identifies the surface of the product currently located at a preset processing position, and if the surface of the product currently located at the preset processing position is not the current target processing surface, the flipping power component of the flipping mechanism is activated to flip the product until the current target processing surface is located at the preset processing position. Before flipping, the lifting power component of the lighting mechanism is activated to drive the light source down to a position that does not interfere with the flipping of the product. After the current target processing surface of the product is flipped to the preset processing position, the lifting power component of the lighting mechanism is activated to drive the light source up to a position close to the product.

[0021] When processing products, the flipping mechanism provided in this application is used to connect the products. If the current target processing surface of the connected products is not in the preset processing position, the flipping power component can be activated to drive the products to rotate until the current target processing surface of the products reaches the preset processing position. This eliminates the need to remove the products from the flipping mechanism, readjust the angle, and then put them back on the flipping mechanism (i.e., no unloading is required), saving unloading time and avoiding product damage caused by the unloading process. Therefore, it can improve processing efficiency and product yield. Attached Figure Description

[0022] Figure 1 is a perspective view of an embodiment of the flipping mechanism provided in this application;

[0023] Figure 2 is a three-dimensional view of the right-side part of the structure in Figure 1;

[0024] Figure 3 is another perspective view of Figure 2;

[0025] Figure 4 is a three-dimensional view of the left-side part of the structure in Figure 1;

[0026] Figure 5 is another perspective view of Figure 4;

[0027] Figure 6 is a perspective view of the first connecting part in Figure 1;

[0028] Figure 7 is another perspective view of Figure 6;

[0029] Figure 8 is a perspective view of a clamping plate and an elastic centering unit connected to the clamping plate in Figure 6.

[0030] Figure 9 is a three-dimensional view of a single elastic centering unit;

[0031] Figure 10 is a perspective view of an embodiment of the processing apparatus provided in this application;

[0032] Figure 11 is a perspective view of the base plate of the flipping mechanism and the lighting mechanism;

[0033] Figure 12 is the front view of Figure 10;

[0034] Figure 13 is a top view of Figure 10;

[0035] Figure 14 is the right view of Figure 10;

[0036] Figure 15 is a left view of Figure 10.

[0037] The reference numerals in the attached drawings are explained as follows: 01 Product; 100 Tilting mechanism; 101 First support; 101a First support; 101b Third support; 102 Second support; 102a Second support; 102b Fourth support; 103 Base plate; 103a Elongated hole; 104 Tilting power component; 105 First pulley assembly; 106 Second pulley assembly; 107 Third pulley assembly; 108 First drive shaft; 109 Second drive shaft; 110 Third drive shaft; 111 Fourth drive shaft; 112 Coupling; 113 Clamping power component; 113a Coupling hole; E Clamping plate; 114 Clamping plate body; 1 14a Clamping surface, 114b Groove, 115 Clamping plate cover, 116 Connecting block, 117 Limiting assembly, 117a Limiting block, 117b Limiting screw, 118 Elastic centering unit, 118a Bearing, 118b Slider, 118c Guide rod, 118d Elastic element, 118e Screw, 119 First guide rail, 120 Second guide rail, 121 Third guide rail, 122 Fourth guide rail, 123 First cover, 124 Second cover, A First connecting part, B Second connecting part, C First flipping assembly, D Second flipping assembly; 200 Lighting mechanism; 201 Light source, 202 Light source bracket, 202a Upper support plate, 202b Guide column, 202c Lower support plate, 203 Lifting power component; 300 Barcode scanning mechanism; 301 Barcode scanner, 302 Barcode scanner bracket, 302a Horizontal shaft, 302b Adapter arm, 302c Horizontal support arm, 302d Vertical support arm. Detailed Implementation

[0038] This application provides a flipping mechanism, a processing apparatus, and a processing method. To enable those skilled in the art to better understand the technical solution of this application, the following detailed description is provided in conjunction with the accompanying drawings and specific embodiments.

[0039] As shown in Figure 1, the flipping mechanism 100 provided in this application includes a mounting frame and a first flipping component C and a second flipping component D mounted on the mounting frame. In one embodiment, a first support 101 and a second support 102 are respectively provided on opposite sides of the mounting frame, the first flipping component C is mounted on the first support 101, and the second flipping component D is mounted on the second support 102.

[0040] The first flipping assembly C includes a flipping power component 104, a first transmission part, and a first connecting part A; the second flipping assembly D includes a second transmission part and a second connecting part B.

[0041] The flipping power component 104 is connected to the first transmission part, and the first transmission part is connected to the first connecting part A. After the flipping power component 104 is started, the flipping power is transmitted to the first connecting part A through the first transmission part to drive the first connecting part A to rotate.

[0042] The first transmission part is connected to the second transmission part, and the second transmission part is connected to the second connecting part B. After the flipping power component 104 is started, the flipping power is transmitted to the second transmission part through the first transmission part, and then to the second connecting part B through the second transmission part, so as to drive the second connecting part B to rotate.

[0043] A first connecting part A and a second connecting part B are spaced apart to connect the product between them. When the first connecting part A and the second connecting part B rotate under the drive of the flipping drive, the connected product rotates together. After the flipping drive is turned off, the positions of the first connecting part A, the second connecting part B, and the product are all fixed and no longer rotate.

[0044] When processing products, the products are connected using the aforementioned flipping mechanism 100. If the current target processing surface of the connected product is not in the preset processing position, the flipping power component 104 can be activated to drive the product to rotate until the current target processing surface of the product reaches the preset processing position. This eliminates the need to remove the product from the flipping mechanism 100, readjust the angle, and then place it back on the flipping mechanism 100 (i.e., no unloading is required), saving unloading time and avoiding product damage during the unloading process. Therefore, it can improve processing efficiency and product yield.

[0045] In the illustrated embodiment, the flipping power component 104 is a rotary motor. As shown in Figures 2 and 3, the first transmission unit includes a first pulley assembly 105, a second pulley assembly 106, a first transmission shaft 108, and a second transmission shaft 109. As shown in Figures 4 and 5, the second transmission unit includes a third pulley assembly 107, a third transmission shaft 110, and a fourth transmission shaft 111.

[0046] The first pulley assembly 105, the second pulley assembly 106, and the third pulley assembly 107 each include at least an input pulley, an output pulley, and a drive belt wound around the input pulley and the output pulley, and may also optionally include a tension pulley.

[0047] As shown in Figures 2 and 3, the rotary motor is connected to the first drive shaft 108 via the first pulley assembly 105, and the first drive shaft 108 is connected to the first connecting part via the second pulley assembly 106. Specifically, in the illustrated embodiment, the rotary output shaft of the rotary motor is coaxially connected to the input wheel of the first pulley assembly 105, and the output wheel of the first pulley assembly 105 is coaxially connected to the first drive shaft 108, with the first drive shaft 108 serving as the output shaft of the first pulley assembly 105. The first drive shaft 108 is rotatably inserted into the first support 101. The output wheel of the second pulley assembly 106 is connected to the first connecting part A via the second drive shaft 109. The second drive shaft 109 is rotatably inserted into the first support 101. After the rotary motor is started, the power is transmitted from the rotary output shaft of the rotary motor to the input wheel of the first pulley assembly 105, then to the output wheel of the first pulley assembly 105, then through the first drive shaft 108 to the input wheel of the second pulley assembly 106, then to the output wheel of the second pulley assembly 106, and then through the second drive shaft 109 to the first connecting part A, driving the first connecting part A to rotate.

[0048] As shown in Figures 4 and 5, the first drive shaft 108 is connected to the second connecting part B via a third pulley assembly 107. Specifically, in the illustrated embodiment, the input pulley of the third pulley assembly 107 is coaxially connected to the third drive shaft 110. The third drive shaft 110 is rotatably inserted into the second support 102. One end of the third drive shaft 110 is coaxially connected to one end of the first drive shaft 108 via a coupling 112, which is located between the first support 101 and the second support 102. The output pulley of the third pulley assembly 107 is connected to the second connecting part B via a fourth drive shaft 111. The fourth drive shaft 111 of the second connecting part B is rotatably inserted into the second support 102. After the rotary motor is started, the power is transmitted from the rotary output shaft of the rotary motor to the input wheel of the first pulley assembly 105, then to the output wheel of the first pulley assembly 105, then to the first drive shaft 108, then to the third drive shaft 110, then to the input wheel of the third pulley assembly 107, then to the output wheel of the third pulley assembly 107, and then to the second connecting part B through the fourth drive shaft 111, driving the second connecting part B to rotate.

[0049] Alternatively, the first drive shaft 108 and the third drive shaft 110 can be the same shaft, with one end inserted through the first support 101 and the other end inserted through the second support 102.

[0050] The above structure achieves synchronous rotation of the first connecting part A and the second connecting part B using only one motor. The structure is simple, reliable and low in cost.

[0051] In actual implementation, the tilting power component 104 only needs to provide rotational driving force; for example, a rotary cylinder can be used. The first transmission part and the second transmission part only need to be able to transmit the rotational driving force to the first connecting part A and the second connecting part B; for example, a sprocket assembly or a gear assembly can be used.

[0052] In the illustrated embodiment, the first connecting part A is installed on the upper part of the first support 101 near the second support 102, the first pulley assembly 105 is installed on the lower part of the first support 101 near the second support 102, and the second pulley assembly 106 is installed on the side of the first support 101 away from the second support 102. The second connecting part B is installed on the upper part of the second support 102 near the first support 101, and the third pulley assembly 107 is installed on the side of the second support 102 away from the first support 101. This design ensures that the first pulley assembly 105, the second pulley assembly 106, and the third pulley assembly 107 do not interfere with the rotation of the first connecting part A, the second connecting part B, and the product. Furthermore, the overall layout is compact, resulting in a small overall size for the flipping mechanism 100.

[0053] In the illustrated embodiment, the first flipping assembly C and the second flipping assembly D are also provided with a first cover 123 and a second cover 124, respectively. The first cover 123 is connected to the side of the first support 101 away from the second support 102 and covers the second pulley assembly 106. The second cover 124 is connected to the side of the second support 102 away from the first support 101 and covers the third pulley assembly 107.

[0054] The mounting bracket can also optionally include a base plate 103. The base plate 103 is fixed to the bottom ends of the first support 101 and the second support 102, thus connecting the first support 101 and the second support 102 together via the base plate 103, making the entire flipping mechanism 100 a single unit, facilitating installation and transportation. Additionally, at least one of the first support 101 and the second support 102 can selectively slide relative to the base plate 103 to adjust the distance between the first support 101 and the second support 102, more precisely, to adjust the distance between the first connecting part A and the second connecting part B. This allows the first connecting part A and the second connecting part B to connect products of different sizes. Specifically, when connecting smaller products, the distance between the first connecting part A and the second connecting part B is reduced; when connecting larger products, the distance between the first connecting part A and the second connecting part B is increased.

[0055] In the illustrated embodiment, both the first support 101 and the second support 102 can slide relative to the base plate 103. Thus, when adjusting the distance between the first support 101 and the second support 102, the first support 101 and the second support 102 can move closer or further away simultaneously, thereby ensuring that the distance between the first support 101, the second support 102 and the center of the base plate 103 remains consistent.

[0056] In the illustrated embodiment, the base plate 103 is provided with an elongated hole 103a. The first support 101 and the second support 102 are connected to the base plate 103 through threaded fasteners passing through the elongated hole 103a. After loosening the threaded fasteners, the first support 101 and the second support 102 can slide along the length direction of the elongated hole 103a. After tightening the threaded fasteners, the first support 101 and the second support 102 are fixed relative to the base plate 103.

[0057] In actual implementation, the structure for fixing and relatively sliding the first support 101, the second support 102 and the base plate 103 is not limited to the above-mentioned elongated hole 103a and threaded fasteners. For example, a slide rail and a slider can be provided on the base plate 103, the first support 101 and the second support 102 are fixed to the slider, and multiple spring connecting pins are arranged at intervals along the length of the slide rail. When the slider slides along the length of the slide rail to the position of the corresponding spring connecting pin, it is fixed under the stopping action of the corresponding spring connecting pin.

[0058] In the illustrated embodiments, as shown in Figures 6 and 7, both the first connecting part A and the second connecting part B include a clamping power member 113 and two cooperating clamping plates E. The clamping plates E are connected to the clamping power member 113 via a connecting block 116. The clamping power member 113 drives the two cooperating clamping plates E to move closer together to clamp the product or move away from each other to release the product. When connecting the product, one side of the product is located between the two clamping plates E of the first connecting part A and is clamped by the two clamping plates E of the first connecting part A, while the other side of the product is located between the two clamping plates E of the second connecting part B and is clamped by the two clamping plates E of the second connecting part B.

[0059] In practice, the first connecting part A and the second connecting part B are not limited to the clamping structure described above, as long as they can ensure that the connected product does not fall off during rotation. For example, the first connecting part A and the second connecting part B can also be a suction cup structure. The clamping power component 113 can be a cylinder, a hydraulic cylinder, a motor, etc.

[0060] In the illustrated embodiment, both the first connecting part A and the second connecting part B further include a limiting component 117. The limiting component includes a limiting block 117a and a limiting screw 117b. The limiting screw 117b is connected to the limiting block 117a. When the two mating clamping plates E move away from each other to their extreme extent, the two clamping plates E abut against the limiting screw 117b. In other words, the limiting screw 117b limits the extreme distance between the two mating clamping plates E. By adjusting the screw-in depth of the limiting screw 117b relative to the limiting block 117a, the extreme distance between the two mating clamping plates E can be adjusted.

[0061] In the illustrated embodiment, as shown in FIG8, multiple elastic centering units 118 are connected between the two clamping plates E of the first connecting part A and between the two clamping plates E of the second connecting part B. The elastic centering units 118 of the first connecting part A are arranged sequentially along a first direction, and the elastic centering units 118 of the second connecting part B are also arranged sequentially along the first direction. As shown in FIG1, the first direction is perpendicular to the spacing direction of the first connecting part A and the second connecting part B.

[0062] Both clamping plates E of the first connecting part A and both clamping plates E of the second connecting part B have clamping surfaces 114a for contacting the product. Each elastic centering unit 118 of the first connecting part A is located on the side of the clamping surface 114a of the clamping plate E of the first connecting part A away from the second connecting part B, and each elastic centering unit 118 of the second connecting part B is located on the side of the clamping surface 114a of the clamping plate E of the second connecting part B away from the first connecting part A.

[0063] When the two sides of the product are located between the two clamping plates E of the first connecting part A and the two clamping plates E of the second connecting part B respectively, the two edges of the product contact the elastic centering unit 118 of the first connecting part A and the elastic centering unit 118 of the second connecting part B respectively. The elastic centering unit 118 of the first connecting part A and the elastic centering unit 118 of the second connecting part B cooperate to center the product between the first connecting part A and the second connecting part B.

[0064] Specifically, as shown in Figure 9, the elastic centering unit 118 includes at least a rotating component (118a) in the figure, a guide component (118c) in the figure, and an elastic component 118d. The surface of the rotating component is used for rolling contact with one edge of the product. When the product enters or exits the gap between the two clamping plates E, the rotating component can perform a conveying function without scratching the product. The guide component guides the rotating component to move relative to the clamping plate E towards or away from the product. When the rotating component moves away from the product, it presses against the elastic component 118d, increasing the compression of the elastic component 118d.

[0065] In the illustrated embodiment, the rotating component of the elastic centering unit 118 is a bearing 118a, which is rotatably connected to the slider 118b (connected by screw 118e in the figure). The outer peripheral surface of the bearing 118a is used to contact one edge of the product. The guiding component is a guide rod 118c, and the slider 118b is slidably fitted around the outer periphery of the guide rod 118c. The bearing 118a slides towards or away from the product by sliding the slider 118b along the guide rod 118c. The elastic component 118d is disposed between the side of the slider 118b away from the product and the clamping plate E.

[0066] In actual implementation, the rotating component of the elastic centering unit 118 is not limited to the bearing 118a, and the guiding component is not limited to the guide rod 118c. For example, the rotating component can also be a ball, and the guiding component can also be a ball track pre-cut on the clamping plate E.

[0067] If the product is biased towards the first connecting part A, it will push the bearing 118a of the elastic centering unit 118 of the first connecting part A to slide away from the product, thereby causing the slider 118b to compress the elastic element 118d. As a result, the bearing 118a of the elastic centering unit 118 of the first connecting part A will slide towards the product under the elastic force of the elastic element 118d, thereby pushing the product to move towards the second connecting part B, thus achieving product centering.

[0068] Similarly, if the product is biased towards the second connecting part B, it will push the bearing 118a of the elastic centering unit 118 of the second connecting part B to slide away from the product, thereby causing the slider 118b to compress the elastic element 118d. As a result, the bearing 118a of the elastic centering unit 118 of the second connecting part B will slide towards the product under the elastic force of the elastic element 118d, thereby pushing the product to move towards the first connecting part A, thus achieving product centering.

[0069] In the illustrated embodiment, as shown in Figure 6, each of the two cooperating clamping plates E is connected to six elastic centering units 118 (guide rods 118c of twelve elastic centering units 118 can be seen in Figure 6), and the elastic centering units 118 connected to one clamping plate are offset from those connected to the other clamping plate in a first direction. In actual implementation, only one of the two cooperating clamping plates E may be connected to an elastic centering unit 118. As shown in Figure 7, the clamping power member 113 is provided with a coupling hole 113a for connecting a drive shaft.

[0070] In the illustrated embodiment, as shown in Figure 8, two mating clamping plates E are provided with grooves 114b, which are located on the side of the clamping surface 114a away from the product. The grooves 114b are used to accommodate elastic centering units 118. They can accommodate not only the elastic centering units 118 connected to the clamping plate E where the groove 114b is located, but also the elastic centering units 118 connected to another clamping plate E that mats with the clamping plate E where the groove 114b is located. That is, when the two mating clamping plates E clamp the product, the elastic centering unit 118 connected to one can enter the groove 114b of the other.

[0071] In the illustrated embodiment, as shown in Figure 8, the clamping plate E is configured to include a clamping plate body 114 and a clamping plate cover 115 assembled together with the clamping plate body 114. The aforementioned groove 114b and clamping surface 114a are both provided on the clamping plate body 114. An opening is formed on the side of the groove 114b away from the clamping surface 114a, and the clamping plate cover 115 closes this opening. One end of the guide rod 118c is inserted into the clamping plate body 114, and the other end is inserted into the clamping plate cover 115. This facilitates the assembly of the elastic centering unit 118 with the clamping plate E. During assembly, the elastic centering unit 118 can be assembled with the clamping plate body 114 first, and then the clamping plate cover 115 can be assembled. Specifically, the connection method between the clamping plate cover 115 and the clamping plate body 114 is preferably a detachable connection method to facilitate the replacement of the elastic centering unit 118. For example, it can be connected by snap-fit ​​or threaded fasteners.

[0072] In the illustrated embodiments, as shown in Figure 2, a product inlet (indicated by I in the figure) is formed between one end of the two clamping plates E of the first connecting part A, and a product outlet (indicated by X in the figure) is formed between the other ends. As shown in Figure 4, a product inlet (indicated by I in the figure) is formed between one end of the two clamping plates E of the second connecting part B, and a product outlet (indicated by X in the figure) is formed between the other ends. The product enters the gap between the two mating clamping plates E from the product inlet; this process is called product feeding. The product leaves the gap between the two mating clamping plates E from the product outlet; this process is called product discharging. This design allows product feeding and product discharging to occur simultaneously, which is more conducive to improving product connection efficiency.

[0073] In the illustrated embodiment, the flipping mechanism 100 further includes a product guide and a product exit. The product guide and the product exit are mounted on a mounting frame. The product guide is used to guide the product parallel to the product inlet and into the gap between the two mating clamps E, and the product exit is used to guide the product parallel to the gap between the two mating clamps E, so as to avoid the product being scratched by the two mating clamps E when it is feeding or discharging.

[0074] In the illustrated embodiment, as shown in Figures 2-5, the product guide includes a first guide rail 119 and a second guide rail 120, and the product guide includes a third guide rail 121 and a fourth guide rail 122. The first support 101 has a first support portion 101a and a third support portion 101b on both sides, which respectively support and fix the first guide rail 119 and the third guide rail 121. The second support 102 has a second support portion 102a and a fourth support portion 102b on both sides, which respectively support and fix the second guide rail 120 and the fourth guide rail 122.

[0075] As shown in Figure 10, the processing apparatus provided in this application includes the aforementioned flipping mechanism 100. The flipping mechanism 100 can flip the current target processing surface of the product to a preset processing position. When processing the product, the product is connected using the flipping mechanism 100. If the current target processing surface of the connected product is not in the preset processing position, the flipping power component can be activated to drive the product to rotate until the current target processing surface of the product reaches the preset processing position. Then the product is processed without having to remove the product from the flipping mechanism 100, readjust the angle, and then put it back on the flipping mechanism 100 (i.e., no unloading is required). This saves unloading time and avoids product damage caused by the unloading process, thus improving processing efficiency and product yield.

[0076] For example, if the product is a semiconductor wafer, the processing apparatus can be a cleaver. When it is necessary to perform front-side cleaving on the wafer, the front side of the wafer is rotated to an upward position; when it is necessary to perform back-side cleaving on the wafer, the back side of the wafer is rotated to an upward position. It should be noted that the flipping mechanism 100 and processing apparatus provided in this application are not limited to semiconductor processing.

[0077] In the illustrated embodiment, the processing apparatus further includes an illumination mechanism 200. The illumination mechanism 200 is located below the flipping mechanism 100 and includes a light source 201, a light source bracket 202, and a lifting power component 203. The light source 201 is connected to the light source bracket 202. The light source bracket 202 is guided and engaged with the mounting frame of the flipping mechanism 100. The lifting power component 203 drives the light source bracket 202 to move up and down relative to the mounting frame, thereby moving the light source 201 closer to or away from the product connected to the flipping mechanism 100. This design, with the flipping mechanism 100 and the illumination mechanism 200 arranged vertically, reduces the footprint of the processing apparatus. Furthermore, before the flipping mechanism 100 flips the product, the lifting power component 203 can be activated to lower the light source 201 to a position that does not interfere with the product flipping. After the target processing surface of the product is flipped to the preset processing position, the lifting power component 203 is activated again to raise the light source 201 to a position close to the product.

[0078] In the illustrated embodiment, as shown in Figure 11, the light source bracket 202 includes an upper support plate 202a, a guide post 202b, and a lower support plate 202c. The guide post 202b is connected between the upper support plate 202a and the lower support plate 202c. The guide post 202b is inserted into a guide hole on the mounting frame of the flipping mechanism 100. More specifically, when the mounting frame has a base plate 103, the guide hole can be set on the base plate 103. The light source 201 is connected to the upper support plate 202a. The lifting power component 203 is a cylinder, including a cylinder body and a cylinder rod. The cylinder rod is connected to the mounting frame. More specifically, when the mounting frame has a base plate 103, it can be connected to the base plate 103 of the mounting frame. The cylinder body is connected to the lower support plate 202c. After the lifting power component 203 is activated, the cylinder body moves up and down relative to the cylinder rod, driving the lower support plate 202c to move up and down, thereby driving the entire light source bracket 202 and the light source 201 to move up and down together.

[0079] In actual implementation, the structure of the light source bracket 202 is not limited to the illustrated embodiment, as long as it can connect the light source 201 and the lifting power component 203 and can cooperate with the guide of the mounting frame. The lifting power component 203 is not limited to a cylinder; for example, it can also be a hydraulic cylinder or a motor. The positions of the cylinder body and cylinder rod can be interchanged; for example, the cylinder body is connected to the base plate 103 of the mounting frame, and the cylinder rod is connected to the lower support plate 202c.

[0080] In the illustrated embodiment, as shown in FIG10, the processing device further includes a barcode scanning mechanism 300. The barcode scanning mechanism 300 includes a barcode scanner 301 and a barcode scanner bracket 302. The barcode scanner 301 is connected to the barcode scanner bracket 302, and the barcode scanner bracket 302 is connected to the mounting bracket of the flipping mechanism 100. The barcode scanner 301 is used to scan and identify the identification code on the surface of the product to identify the surface of the product currently located at a preset processing position.

[0081] In some embodiments, the scanning mechanism 300 includes multiple scanners 301, each located at a different position on the first connecting part A and the second connecting part B. When the flipping mechanism 100 flips the product to different positions, the same identification code on the product surface can be scanned and identified by different scanners 301, so as to identify the surface of the product currently located at a preset processing position based on the position of the scanner 301 that currently scans and identifies the identification code. Alternatively, the scanning mechanism 300 may also have only one scanner 301, which is used to scan and identify different identification codes on different surfaces of the product to identify the surface of the product currently located at a preset processing position.

[0082] In the illustrated embodiment, as shown in FIG12, a barcode scanner 301 is provided above and below the product 01 connected by the first connecting part A and the second connecting part B. For example, if the product is a semiconductor wafer, when the upper barcode scanner 301 scans the identification code on the front side of the semiconductor wafer, it indicates that the front side of the semiconductor wafer is facing up; when the lower barcode scanner 301 scans the identification code on the front side of the semiconductor wafer, it indicates that the front side of the semiconductor wafer is facing down.

[0083] In the illustrated embodiment, as shown in Figures 12-15, the barcode scanner bracket 302 corresponding to the upper barcode scanner 301 includes a horizontal support arm 302c, which spans across the first support 101 and the second support 102. A vertical support arm 302d is provided at each end of the horizontal support arm 302c, and the bottom ends of the two vertical support arms 302d are respectively connected to the top ends of the first support 101 and the second support 102. The upper barcode scanner 301 is connected to the middle of the horizontal support arm 302c. The barcode scanner bracket 302 corresponding to the lower barcode scanner 301 includes a horizontal shaft 302a, which spans between the first support 101 and the second support 102. An adapter arm 302b is provided at each end of the horizontal shaft 302a, and the two adapter arms 302b are respectively connected to the third support portion 101b of the first support 101 and the fourth support portion 102b of the second support 102. The lower barcode scanner 301 is connected to the middle of the horizontal shaft 302a. This type of barcode scanner bracket does not interfere with the rotation of the product.

[0084] In actual implementation, the form of the barcode scanner bracket 302 is not limited to the illustrated embodiment, as long as it can be connected to the mounting bracket of the flipping mechanism 100 and the barcode scanner 301 without interfering with the rotation of the product.

[0085] The processing method provided in this application is based on the processing device with a barcode scanning mechanism described above, and includes the following steps: The flipping mechanism 100 connects to the product to be processed and identifies the surface of the product currently located at a preset processing position (this can be done by scanning with the barcode scanning mechanism 300). If the surface of the product currently located at the preset processing position is not the current target processing surface, the flipping power component 104 of the flipping mechanism 100 is activated to flip the product until the current target processing surface is located at the preset processing position. Before flipping, the lifting power component 203 of the lighting mechanism 200 is activated to drive the light source 201 to descend to a position that does not interfere with the flipping of the product. After the current target processing surface of the product is flipped to the preset processing position, the lifting power component 203 of the lighting mechanism 200 is activated to drive the light source 201 to rise to a position close to the product.

[0086] The above examples illustrate the principles and implementation methods of this application. The descriptions of the embodiments are merely for the purpose of helping to understand the methods and core ideas of this application. It should be noted that those skilled in the art can make various improvements and modifications to this application without departing from its principles, and these improvements and modifications also fall within the protection scope of this application.

Claims

1. A turnover mechanism, characterized in that The turnover mechanism (100) comprises a mounting frame, a first turnover assembly (C) and a second turnover assembly (D) mounted on the mounting frame, the first turnover assembly (C) comprises a turnover power element (104), a first transmission part and a first connecting part (A), the second turnover assembly (D) comprises a second transmission part and a second connecting part (B), the first connecting part (A) and the second connecting part (B) are arranged in a spaced manner for connecting products between the first connecting part (A) and the second connecting part (B), the turnover power element (104) is connected with the first transmission part, the first transmission part is connected with the first connecting part (A), the first transmission part is connected with the second transmission part, the second transmission part is connected with the second connecting part (B), so that the turnover power element (104) drives the first connecting part (A) and the second connecting part (B) to rotate synchronously.

2. The turnover mechanism according to claim 1, characterized in that The turnover power element (104) is a rotary motor, the first transmission part comprises a first pulley assembly (105), a second pulley assembly (106) and a first transmission shaft (108), the second transmission part comprises a third pulley assembly (107), the rotary motor is in transmission connection with the first transmission shaft (108) through the first pulley assembly (105), the first transmission shaft (108) is in transmission connection with the first connecting part (A) through the second pulley assembly (106), and the first transmission shaft (108) is also in transmission connection with the second connecting part (B) through the third pulley assembly (107).

3. The turnover mechanism according to claim 2, wherein Both sides of the mounting frame are provided with a first support (101) and a second support (102), the first turnover assembly (C) is mounted on the first support (101), and the second turnover assembly (D) is mounted on the second support (102).

4. The turnover mechanism according to claim 3, wherein The second transmission part comprises a third transmission shaft (110), the first transmission shaft (108) is rotatably inserted into the first support (101), the third transmission shaft (110) is rotatably inserted into the second support (102), the third transmission shaft (110) serves as an input shaft of the third pulley assembly (107), and one end of the third transmission shaft (110) is coaxially and in transmission connection with one end of the first transmission shaft (108) through a shaft coupling (112) located between the first support (101) and the second support (102).

5. The turnover mechanism according to claim 3, wherein The first connecting part (A) is mounted on one side of the upper portion of the first support (101) close to the second support (102), the first pulley assembly (105) is mounted on one side of the lower portion of the first support (101) close to the second support (102), the second pulley assembly (106) is mounted on one side of the first support (101) away from the second support (102), the second connecting part (B) is mounted on one side of the upper portion of the second support (102) close to the first support (101), and the third pulley assembly (107) is mounted on one side of the second support (102) away from the first support (101).

6. The turnover mechanism (100) according to claim 3, characterized in that The mounting frame comprises a bottom plate (103) fixed at the bottom end of the first support (101) and the second support (102), and at least one of the first support (101) and the second support (102) is capable of sliding relative to the bottom plate (103) to adjust the distance between the first support (101) and the second support (102).

7. Flip mechanism according to any of claims 1-6, characterized in that The first connecting part (A) and the second connecting part (B) each comprise a clamping power element (113) and two mutually cooperating clamping plates (E), and the clamping power element (113) drives the two mutually cooperating clamping plates (E) to move close to each other to clamp the product or move away from each other to release the product.

8. The turnover mechanism according to claim 7, wherein A plurality of elastic centering units (118) are connected between the two clamping plates (E) of the first connecting part (A) and the two clamping plates (E) of the second connecting part (B), and the elastic centering units (118) of the first connecting part (A) and the elastic centering units (118) of the second connecting part (B) cooperate to center the product between the first connecting part (A) and the second connecting part (B), each of the elastic centering units (118) of the first connecting part (A) is arranged in a first direction, each of the elastic centering units (118) of the second connecting part (B) is arranged in a second direction, and the first direction and the second direction are parallel to each other and perpendicular to the arrangement direction of the first connecting part (A) and the second connecting part (B).

9. The turnover mechanism according to claim 8, wherein The two clamping plates (E) of the first connecting part (A) and the two clumping plates (E) of the second connecting part (B) each have a clamping surface (114a) for contacting the product, each of the elastic centering units (118) of the first connecting part (A) is located on the side of the clamping surface (114a) away from the second connecting part (B), and each of the elastic centering units (118) of the second connecting part (B) is located on the side of the clamping surface (114a) away from the first connecting part (A).

10. The turnover mechanism according to claim 9, wherein The two clamping plates (E) of the first connecting part (A) and the second connecting part (B) are each provided with a groove (114b), the groove (114b) of the first connecting part (A) is located on the side of the clamping surface away from the second connecting part (B), and the groove (114b) of the second connecting part (B) is located on the side of the clamping surface away from the first connecting part (A), the groove (114b) is used to accommodate the elastic centering unit (118) connected to the clamping plate (E) where the groove (114b) is located, and is also used to accommodate the elastic centering unit (118) connected to the clamping plate (E), which cooperates with the clamping plate (E) where the groove (114b) is located.

11. The turnover mechanism of claim 9, wherein, The elastic centering unit (118) comprises at least a rotating member, a guide member and an elastic member (118d), the surface of the rotating member is used for rolling contact with one side edge of the product, the guide member guides the rotating member to move towards the product or away from the product, and when the rotating member moves away from the product, it presses the elastic member (118d), so that the compression amount of the elastic member (118d) increases.

12. The turnover mechanism of claim 11, wherein, The rotating member is a bearing (118a), which is rotatably connected to a sliding block (118b), and the outer peripheral surface of the bearing (118a) is used for rolling contact with one side edge of the product, and the guide member is a guide rod (118c), and the sliding block (118b) is slidably sleeved on the outer periphery of the guide rod (118c), and the sliding block (118b) is slid along the guide rod (118c) to drive the bearing (118a) to slide towards the product or away from the product.

13. The turnover mechanism of claim 7, wherein, The two clamping plates (E) of the first connecting part (A) form a product inlet at one end and a product outlet at the other end, and the two clamping plates (E) of the second connecting part (B) form a product inlet at one end and a product outlet at the other end, so that the product enters the gap between the two clamping plates (E) from the product inlet, and exits the gap between the two clamping plates (E) from the product outlet.

14. The turnover mechanism of claim 13, wherein, The turnover mechanism (100) further comprises a product guide-in member and a product guide-out member, the product guide-in member and the product guide-out member are installed on the mounting frame, the product guide-in member is used for guiding the product to enter the gap between the two clamping plates (E) from the product inlet in parallel, and the product guide-out member is used for guiding the product to exit the gap between the two clamping plates (E) from the product outlet in parallel.

15. A processing apparatus characterized by comprising: The processing device comprises the turnover mechanism (100) of any one of claims 1-14, and the turnover mechanism (100) can turn the target processing surface of the product to a preset processing position, so that the processing device processes the target processing surface.

16. The processing apparatus of claim 15, wherein, The processing device further comprises an illumination mechanism (200) located below the turnover mechanism (100), the illumination mechanism (200) comprises a light source (201), a light source support (202) and a lifting power member (203), the light source (201) is connected to the light source support (202), the light source support (202) is guided and matched with the mounting frame of the turnover mechanism (100), and the lifting power member can drive the light source support (202) to lift relative to the mounting frame, so as to drive the light source (201) to approach or move away from the product connected with the turnover mechanism (100).

17. A method of processing, implemented on the basis of a processing device according to claim 15 or 16, characterized in that The method comprises the following steps: The elastic centering unit (118) comprises at least a rotating member, a guide member and The turnover mechanism (100) is connected to the product to be processed, and the face of the product currently located at the preset processing position is identified. If the face of the product currently located at the preset processing position is not the current target processing face, the turnover power element (104) of the turnover mechanism (100) is started to turn over the product until the current target processing face is located at the preset processing position. Before turnover, the lifting power element (203) of the lighting mechanism (200) is started to drive the light source (201) to descend to a position not interfering with the turnover of the product. After the current target processing face of the product is turned over to the preset processing position, the lifting power element (203) of the lighting mechanism (200) is started to drive the light source (201) to ascend to a position close to the product.

Images