Substratreinigungswerkzeug, substratreinigungsgerät, substratbearbeitungsgerät, substratbearbeitungsverfahren und verfahren zur herstellung von substratreinigungswerkzeug
AT1934191TUndetermined Publication Date: 2026-07-15EBARA CORP
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Patent Information
- Application Number
- AT2019190837T
- Authority / Receiving Office
- AT · AT
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2018-08-09
- Filing Date
- 2019-08-08
- Publication Date
- 2026-07-15
- Estimated Expiration
- 2039-08-08
Abstract
A substrate cleaning apparatus comprises a substrate holding roller and an edge cleaner. The substrate holding roller is configured to hold and rotate a substrate to be processed. The edge cleaner is in contact with an edge portion of the substrate to be processed and includes resin material containing fluororesin particles at least in a portion in contact with the substrate to be processed.
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