Radial antenna and plasma device using it

AU2001076725A1Inactive Publication Date: 2002-02-18TOKYO ELECTRON LTD
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Patent Information

Authority / Receiving Office
AU · AU
Patent Type
Applications
Current Assignee / Owner
TOKYO ELECTRON LTD
Filing Date
2001-08-03
Publication Date
2002-02-18
Estimated Expiration
Not applicable · inactive patent
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