Hall microsensor with resistor elements

Abstract

The Hall microsensor with resistor elements contains a current source (1) in the DC generator mode and three rectangular semiconductor substrates with n-type impurity conductivity - first (2), second (3) and third (4), with the first (2) and third (4) being identical. The substrates (2), (3) and (4) are arranged parallel to each other. On one main side of the substrate (3) three identical rectangular ohmic contacts are sequentially formed from left to right - respectively first (5), second (6) and third (7), located close to and parallel to their long sides. The second contact (6) is central, and the first (5) and third (7) are symmetrical to it. The substrates (2) and (4) each contain two identical rectangular ohmic contacts - from left to right first (8) and (9), and second (10) and (11), located at equal distances from each other. The contact (8) of the pad (2) is connected to the contact (9) of the pad (4), the contact (10) of the pad (2) is connected to the contact (7) of the pad (3), and the contact (11) of the pad (4) is connected to the contact (5) of the pad (3). The contact (6) of the pad (3) is connected to one terminal of the current source (1), and the other is connected to the contacts (8) and (9). The measured magnetic field (12) is parallel to both the planes of the pads (2), (3) and (4), and to the long sides of the rectangular contacts (5), (6), (7), (8), (9), (10) and (11), and the contacts (5) and (7) of the pad (3) are the differential output (13) of the Hall microsensor.