Slow wave structure, traveling wave tube and communication device

Description

1 / 34 “SLOW WAVE STRUCTURE, PROGRESSIVE WAVE TUBE AND COMMUNICATION APPARATUS” TECHNICAL FIELD

[0001] The present invention relates to the field of communication devices and, in particular, to a slow wave structure, a progressive wave tube and a communication apparatus. FUNDAMENTALS

[0002] As a progressive wave tube (traveling-wave tube, TWT), widely used as a power amplifier in the current millimeter wave bands, it integrates advantages of wide operating bands, high output power, high efficiency and compact dimensions, presenting vast potential for applications in the field of millimeter wave communication. A core component of the progressive wave tube is a slow wave structure. However, the assembly of conventional slow wave structures tends to be complex, leading to prolonged production cycles, low yields and inconsistency between devices. SUMMARY

[0003] Technical solutions of the present invention provide a slow wave structure, a progressive wave tube and a communication apparatus to simplify the assembly of the slow wave structure, thereby shortening the overall production cycle of the progressive wave tube and improving the yields and consistency of the progressive wave tube.

[0004] According to a first aspect, a technical solution of the present invention provides a slow wave structure, including a tube housing, a slow wave line, and a plurality of support portions. The slow wave line and the plurality of support portions are all located within the tube housing, and the tube housing, the slow wave line, and the plurality of support portions are integrally connected. The plurality of support portions are sequentially spaced along the slow wave line. One end of each support portion is connected to the tube housing, and the other end is connected to the slow wave line.

[0005] In this solution, the tube housing, the slow wave line, and the support portion in the slow wave structure are transformed into a Petition 870250091933, dated 08 / 10 / 2025, p. 8 / 54 2 / 34 integrated structure, so that processing and assembly errors caused by a split design of a conventional slow wave structure can be improved, and an entire tube assembly process can be simplified, thus shortening the overall production cycle of a progressive wave tube and improving the yield and consistency of the progressive wave tube. The slow wave line is suspended in the tube housing using a plurality of support portions, so that a new slow wave structure can be provided to meet a product need.

[0006] In one implementation of the first aspect, the tube housing includes a tube housing body and a plurality of protruding tube housing portions, the plurality of protruding tube housing portions are all connected to the tube housing body, the plurality of protruding tube housing portions project from the tube housing body, and the plurality of protruding tube housing portions are sequentially spaced along the tube housing body. The slow wave line is located within the tube housing body. One part of each supporting portion is accommodated in the tube housing body, and the other part of each supporting portion is accommodated in the protruding tube housing portion.

[0007] In this solution, the tube housing is arranged as the tube housing body and the protruding portion of the tube housing, and the support portion is located inside the tube housing body and the protruding portion of the tube housing, so that a product design requirement of a slow wave structure having a relatively large volume can be met. In addition, the support portion is made relatively long, so that the bearing strength of the support portion can be increased.

[0008] In an implementation of the first aspect, a longitudinal direction of at least one support portion is perpendicular to a longitudinal direction of the slow wave line. The longitudinal direction of the support portion is made perpendicular to the longitudinal direction of the slow wave line, so that the slow wave structure is a compact structure and has relatively high structural strength. This also facilitates product miniaturization.

[0009] In an implementation of the first aspect, an included angle other than 90 degrees is formed between a longitudinal direction of by Petition 870250091933, dated 08 / 10 / 2025, page 9 / 54 3 / 34 minus a support portion and a longitudinal direction of the slow wave line. The support portion is inclined relative to the slow wave line, so that the support portion can have sufficient length in a limited space size to help ensure the support strength of the support portion.

[0010] In an implementation of the first aspect, at least one part of the plurality of support portions is connected sequentially to form a wavy line structure. The support portions are connected and form the wavy line structure, so that the structural strength and support strength can be increased.

[0011] In one implementation of the first aspect, the plurality of support portions is distributed on two sides of the slow wave line. The support portions are distributed on the two opposite sides of the slow wave line to help ensure structural strength and support strength.

[0012] In an implementation of the first aspect, a length L of each support portion and a wavelength λ of guided waves from the slow-wave structure satisfy the following relationship formula: L=Y*(1±10%), where n is an odd number. The length of the support portion is made to satisfy the previous relationship formula so that a product requirement can be met. Especially when the support portion is made of a conductive material, this helps to make apparent the impedance of a high-frequency electromagnetic wave from the slow-wave line to the tube housing in an open circuit by means of impedance matching, so that the support portion does not affect signal transmission in an operating band.

[0013] In one implementation of the first aspect, the tube housing, the slow wave line, and the plurality of support portions are made of the same material. The same material is used to help fabricate an integrated slow wave structure using a planarization process, so that the assembly of the slow wave structure can be simplified, thus shortening the overall production cycle of a progressive wave tube and improving the yield and consistency of the progressive wave tube.

[0014] In an implementation of the first aspect, each portion of Petition 870250091933, dated 08 / 10 / 2025, page 10 / 54 The 4 / 34 support includes an inner layer and an outer layer. The outer layer is wrapped around an outer periphery of the inner layer. The inner layer is made of an insulating material, and the outer layer is made of the same material as the tube housing and the slow wave line. The material of the outer layer of the support portion is made of the same material as the tube housing and the slow wave line, to help manufacture the slow wave structure using a 3D printing process. This simplifies the assembly of the slow wave structure, thus shortening the overall production cycle of a progressive wave tube and improving the yield and consistency of the progressive wave tube.

[0015] In an implementation of the first aspect, the slow wave structure additionally includes an attenuator, the slow wave line includes a plurality of disconnected segments, and each of the plurality of segments is connected to the attenuator. The slow wave line is segmented and the attenuator is arranged so that a reflected electromagnetic wave can be absorbed, to avoid parasitic oscillation of a progressive wave tube and improve the gain and stability of the progressive wave tube.

[0016] In an implementation of the first aspect, the slow wave line is a bend line, the bend line includes a plurality of bend units connected sequentially end-to-end, and all bend units are coplanar. The previous integrated design is applied to the slow wave structure that has the bend line, so that the assembly of the slow wave structure can be simplified.

[0017] In an implementation of the first aspect, the plurality of support portions are coplanar with the slow wave line. The support portion becomes coplanar with the slow wave line to help fabricate the slow wave structure using a planarization process, so that the assembly of the slow wave structure can be simplified, thus shortening an overall production cycle of a progressive wave tube and improving the yield and consistency of the progressive wave tube.

[0018] In an implementation of the first aspect, the slow wave structure includes two layers of supporting portions between which a gap is defined, and each layer of supporting portions includes a plurality of supporting portions. The slow wave structure includes two layers of lines Petition 870250091933, dated 08 / 10 / 2025, p. 11 / 54 5 / 34 of slow waves between which a gap is defined, and a layer of slow wave lines is correspondingly connected to a layer of support portions. The slow wave structure having the two layers of slow wave lines has a relatively strong electromagnetic wave field, a relatively strong interaction, relatively high efficiency, and a relatively high gain. The previous integrated design is applied to the slow wave structure having the two layers of slow wave lines, so that the assembly of the slow wave structure can be simplified.

[0019] In an implementation of the first aspect, the slow wave line has a helical structure. The previous integrated design is applied to the slow wave structure having a helix, so that the assembly of the slow wave structure can be simplified.

[0020] According to a second aspect, a technical solution of the present invention provides a progressive wave tube, including an electron gun, a focusing system, a collector, an input apparatus, an output apparatus, and the slow wave structure according to any of the previous implementations. The electron gun, the focusing system, the collector, the input apparatus, and the output apparatus are all connected to the slow wave structure.

[0021] The slow wave structure in this solution is an integrated structure, and the assembly of the slow wave structure is relatively simple, so that an overall production cycle of the progressive wave tube is relatively short, and a yield and consistency of the progressive wave tube are relatively high.

[0022] In an implementation of the second aspect, the input device includes a mode converter and / or the output device includes a mode converter, the mode converter is connected to the slow wave line, and the mode converter is configured to implement conversion between an operating mode of the slow wave structure and an operating mode of an external circuit. The mode converter is arranged so that the correspondence between the slow wave structure and the external circuit can be implemented.

[0023] In an implementation of the second aspect, the slow wave structure includes two layers of slow wave lines. The converter of Petition 870250091933, dated 08 / 10 / 2025, page 12 / 54 The 6 / 34 mode includes a flat waveguide, a conductive plate, a crest, and a coupled strip line. The conductive plate is arranged within an inner cavity of the flat waveguide, and there is a gap between each of the plate surfaces on two opposite sides of the conductive plate and a cavity wall of the inner cavity. The crest is arranged on the plate surface and is not connected to the cavity wall of the inner cavity. An inner conductor of the coupled strip line includes a first part and a second part; the first part is connected to the crest and the second part, and one end of the second part, which faces away from the first part, is connected to the two layers of slow wave lines. The width of the first part is greater than the width of the second part, and the width of the first part decreases along a direction from the first part to the second part.

[0024] In this solution, for the slow wave structure having two layers of bend lines, the previous mode converter is designed so that the conversion between a mode of an external circuit and a mode of the slow wave structure can be implemented, to implement good matching between the slow wave structure and the external circuit.

[0025] In one implementation of the second aspect, the slow wave structure includes two layers of slow wave lines. The mode converter includes a flat waveguide, a crest, and a coupled strip line. The crest is disposed within an inner cavity of the flat waveguide; the crest includes a first surface and a second surface; the first surface is opposite the second surface; a spacing between the first surface and the second surface decreases from one end of the crest to the opposite end; there is a gap between the first surface and an inner wall of the inner cavity; and the second surface is connected to the inner wall of the inner cavity. An inner conductor of the coupled strip line is connected to the crest and the two layers of slow wave lines.

[0026] In this solution, for the slow wave structure having two layers of bend lines, the previous mode converter is designed so that the conversion between a mode of an external circuit and a mode of the slow wave structure can be implemented, to implement good matching between the slow wave structure and the external circuit. The mode converter in this solution has a relatively simple structure, of Petition 870250091933, dated 08 / 10 / 2025, page 13 / 54 7 / 34 in a way that a product requirement can be met.

[0027] In an implementation of the second aspect, the first surface has a plurality of sequentially connected steps, and the heights of the plurality of steps decrease sequentially. The first crest surface is designed as a stepped structure, so that a bidirectional mode conversion function and a crest impedance matching function can be implemented, to meet a product requirement.

[0028] In one implementation of the second aspect, the mode converter includes a conical waveguide and a standard rectangular waveguide, the conical waveguide is connected to the flat waveguide and the standard rectangular waveguide, and the coupled strip line and the standard rectangular waveguide are located respectively at two opposite ends of the flat waveguide. The conical waveguide and the standard rectangular waveguide are designed so that the mode converter can implement conversion between a standard waveguide mode of an external circuit and a slow wave structure mode.

[0029] According to a third aspect, a technical solution of the present invention provides a communication apparatus, including the progressive wave tube according to any of the previous implementations. The slow wave structure in this solution is an integrated structure, and the assembly of the slow wave structure is relatively simple, to help shorten the overall production cycle of the communication apparatus and improve yield and consistency.

[0030] In a third-aspect implementation, the communication device is a network device, a terminal device, a vehicle-mounted device, or a satellite payload. This solution can be applied to a scenario such as a network device, a terminal device, a vehicle-mounted device, or a satellite payload, to meet a design requirement. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 is a diagram of a frame structure of a progressive wave tube in an embodiment of the present invention;

[0032] Figure 2 is a diagram of an external structure of a Petition 870250091933, dated 08 / 10 / 2025, page 14 / 54 8 / 34 slow wave structure in Mode 1;

[0033] Figure 3 is a diagram of the internal and external structures of a slow wave structure in Mode 1;

[0034] Figure 4 is a structure diagram of a slow wave line and a support portion of a slow wave structure in Mode 1;

[0035] Figure 5 shows a characteristic transmission graph of a slow wave structure in Mode 1;

[0036] Figure 6 shows a beam-wave interaction simulation result of a slow wave structure in Mode 1;

[0037] Figure 7 shows another beam-wave interaction simulation result of a slow wave structure in Mode 1;

[0038] Figure 8 is a diagram of the internal and external structures of a mode converter in Implementation 1 of Mode 1;

[0039] Figure 9 is an AA cutaway view of the mode converter shown in Figure 8;

[0040] Figure 10 is a diagram of a partial structure of the mode converter shown in Figure 8;

[0041] Figure 11 is a view of the structure shown in Figure 10 in direction B;

[0042] Figure 12 shows a simulation result of the transmission performance of a progressive wave tube with a mode converter used;

[0043] Figure 13 is a diagram of the internal and external structures of a mode converter in Implementation 2 of Mode 1;

[0044] Figure 14 is a side view diagram of a crest structure of a mode converter in another Mode 1 implementation;

[0045] Figure 15 is a diagram of an external structure of a slow wave structure in Mode 2;

[0046] Figure 16 is a diagram of the internal and external structures of a slow wave structure in Mode 2;

[0047] Figure 17 is a diagram of the internal and external structures of a slow wave structure in Mode 3;

[0048] Figure 18 is a diagram of single-line structures Petition 870250091933, dated 08 / 10 / 2025, page 15 / 54 9 / 34 slow waves and a supporting portion of a slow wave structure in Mode 3;

[0049] Figure 19 is a diagram of an external structure of a slow wave structure in Mode 4;

[0050] Figure 20 is a diagram of the internal and external structures of a slow wave structure in Mode 4;

[0051] Figure 21 is a structure diagram of a slow wave line and a support portion of a slow wave structure in Mode 4;

[0052] Figure 22 is a schematic typographic of a slow wave structure in an embodiment of the present invention;

[0053] Figure 23 shows a schematic layered slice of a slow wave structure in an embodiment of the present invention;

[0054] Figure 24 is a region allocation realization diagram on a substrate;

[0055] Figure 25 is a diagram of a slow wave structure matrix galvanized onto a copper wafer; and

[0056] Figure 26 is a diagram in which slow wave frame units manufactured using a planarization process are assembled with a peripheral tube housing in a slow wave frame having two layers of bend lines. DETAILED DESCRIPTION

[0057] In embodiments of the present invention, terms such as “first”, “second” and “third” are used merely to distinguish between components and cannot be understood as an indication or implication of the relative importance of the components or an implication of a number of indicated technical features. Therefore, a feature limited by “first”, “second” or the like may explicitly or implicitly include one or more of these features.

[0058] In embodiments of the present invention, unless otherwise specified, “a plurality of (layers)” means two or more (layers).

[0059] In embodiments of the present invention, terms such as “on”, “under”, “front”, “front side”, “back” and “rear side” are defined with Petition 870250091933, dated 08 / 10 / 2025, p. 16 / 54 10 / 34 refers to a schematic placement position of a structure in the attached drawings. It should be understood that these directional terms are relative concepts, are relative descriptions and clarifications, and may change based on a change in the placement position of the structure.

[0060] In embodiments of the present invention, unless otherwise specified, “and / or” describes only an associative relationship between associated objects and indicates that three relationships can exist. For example, A and / or B can indicate the following three cases: Only A exists, A and B exist, and only B exists.

[0061] The following embodiment of the present invention provides a communication apparatus. The communication apparatus is applicable to both a low-frequency (sub-6G) and a high-frequency (above-6G) scenario. An application scenario includes, but is not limited to, a Long Term Evolution (LTE) system, a 5th generation system, a new radio (NR) communication system, a future evolved public land mobile network (PLMN) system, or the like. The communication apparatus includes, but is not limited to, a network device, a terminal device, a vehicle-mounted device, a satellite payload, or the like.

[0062] The network device includes, but is not limited to, a next-generation NodeB (gNodeB, gNB) in a 5G system, an evolved NodeB (eNB) in a long-term evolution (LTE) system, a radio network controller (RNC), a radio controller in a cloud radio access network (CRAN) system, a base station controller (BSC), a home base station (e.g., a home evolved NodeB or a home NodeB, HNB), a baseband unit (BBU), a transmitting and receiving point (TRP), a transmitting point (TP), a mobile switching center, or a base transceiver station (BTS) in a global system for mobile communication (GSM) or code division multiple access (CDMA) network.Alternatively, the network device could be a node base station (NB) in multiple access. Petition 870250091933, dated 08 / 10 / 2025, p. 17 / 54 11 / 34 by wideband code division multiple access (WCDMA), it can be an evolved NB (eNB or eNodeB) in LTE, it can be a base station device in a future 5G network or an access network device in a future evolved PLMN network, it can be a wearable device or a vehicle-mounted device, or it can be a radio frequency base station, a microwave base station, a millimeter wave base station, a terahertz base station or similar.

[0063] When the network device is an access network device, the network device may additionally be connected to a core network (CN) device. The access network device is a device that provides a network access function, for example, a radio access network (RAN) base station. The network device may specifically include a base station (BS) (such as a RAN base station) or include a base station and a radio resource management device configured to control the base station or similar. The network device may alternatively include a relay station, an access point, a base station in a future 5G network, a base station in a future evolved PLMN network, an NR base station or similar. The network device may be a wearable device or a vehicle-mounted device.Alternatively, the network device could be a communication chip having a communication module.

[0064] The terminal device may be user equipment (UE), a terminal, an access terminal, a terminal unit, a terminal station, a mobile station (MS), a remote station, a remote terminal, a mobile terminal, a wireless communication device, a terminal agent, or the like. The terminal device may have a wireless transceiver function and may communicate (e.g., perform wireless communication) with one or more network devices in one or more communication systems, and accept network services provided by the network devices. The terminal device may be a mobile phone, a cordless phone, a session initiation protocol (SIP) phone, a wireless local loop (WLL) station, or a personal digital assistant device. Petition 870250091933, dated 08 / 10 / 2025, page 18 / 54 12 / 34 (personal digital assistant, PDA), a portable device having a wireless communication function, a computing device, another processing device connected to a wireless modem, a vehicle-mounted device, a wearable device, a terminal device in a future 5G network, a terminal device in a future evolved PLMN network, or similar.

[0065] The terminal device may be deployed on land, including indoor or outdoor devices, portable or vehicle-mounted; the terminal device may be deployed on water (e.g., on a steamship); or the terminal device may be deployed in the air (e.g., on an airplane, a balloon, or a satellite). The terminal device may specifically be a mobile phone, a tablet, a computer with a wireless transceiver function, a display, a virtual reality (VR) terminal, an augmented reality (AR) terminal, a wearable device (such as a smartwatch or smart bracelet), a smart display device, a headset (such as a wired headset or a wireless headset), a router, portable Wi-Fi, a mobile power supply, an e-reader, a mouse, a smart speaker, a printer, a smart lock,A wireless terminal can be a home storage device, a wireless terminal in industrial control, a wireless terminal in self-driving devices, a wireless terminal in telemedicine, a wireless terminal in a smart grid, a wireless terminal in transportation safety, a wireless terminal in a smart city, a wireless terminal in a smart home, or similar devices. Alternatively, the terminal device can be a communication chip having a communication module, or it can be a vehicle having a communication function, a vehicle-mounted device (e.g., a vehicle-mounted communication apparatus or a vehicle-mounted communication chip), or similar devices.

[0066] The vehicle-mounted device includes, but is not limited to, a millimeter-wave radar, a terahertz imaging device, or similar.

[0067] A satellite payload is an instrument, device, or system that is carried by a satellite to perform a specific task. Petition 870250091933, dated 08 / 10 / 2025, page 19 / 54 13 / 34 satellite includes, but is not limited to, a communications satellite, a weather satellite, or similar.

[0068] A progressive wave tube is used in the communication apparatus in embodiments of the present invention. As an electric vacuum power amplification device, the progressive wave tube has comprehensive advantages of a wide operating band, large output power, high efficiency and a small volume, and has a wide application prospect in the field of millimeter wave communication. For example, in a millimeter wave base station application scenario, the equivalent isotropically radiated power (EIRP) of the base station can be significantly improved using a millimeter wave progressive wave tube, thus reducing the number of base stations and lowering implementation costs.

[0069] Figure 1 shows a schematic structure of a progressive wave tube in one embodiment of the present invention. As shown in Figure 1, a progressive wave tube 1 may include a slow wave structure 14 (a part between two dashed lines), an electron gun 11, a collector 15, a focusing system 13 (a dotted shadow region), an input apparatus 12 and an output apparatus 16. The slow wave structure 14 may include a tube housing and a slow wave line suspended in the tube housing (which are described in more detail below).

[0070] The electron gun 11 and the collector 15 can be connected respectively to two opposite ends of the slow wave structure 14. As shown in Figure 1, for example, the focusing system 13 can encircle an outer periphery of the tube housing of the slow wave structure 14. In another implementation, the focusing system 13 can be distributed alternately on two sides of the tube housing of the slow wave structure 14. The input device 12 and the output device 16 are connected respectively to two ends of the slow wave structure 14. The input device 12 and the output device 16 can accommodate the slow wave structure 14, to provide a vacuum operating environment for the slow wave structure 14. Both the input device 12 and the output device 16 are connected to the slow wave line. Petition 870250091933, dated 08 / 10 / 2025, page 20 / 54 14 / 34

[0071] Referring to Figure 1, one operating principle of the progressive wave tube 1 is as follows: The electron gun 11 generates an electron beam and accelerates the electron beam to a speed slightly greater than the speed of an electromagnetic wave traveling along the slow wave line. The electron beam emitted by the electron gun 11 can enter the slow wave structure 14 and be transmitted along the slow wave line. The focusing system 13 can maintain the electron beam in the required shape to ensure that the electron beam passes smoothly through the slow wave structure 14 and interacts effectively with an electromagnetic field. The focusing system 13 can be, for example, a magnetic focusing system and restricts the electron beam using a magnetic field. Input device 12 can be connected to an external circuit, and input device 12 can input a signal to be amplified from the external circuit into the slow wave structure 14.Input device 12 can additionally perform mode conversion on the signal to be amplified, for example, converting a waveguide mode of the signal to be amplified into a transverse electromagnetic mode (TEM) or a quasi-TEM mode, so that an operating mode of the slow wave structure 14 corresponds to a mode of an external signal. The slow wave structure 14 is a core component of the progressive wave tube 1 and can allow the electron beam to fully interact with the signal to be amplified and convert the kinetic energy of an electron into electromagnetic wave energy, thus implementing signal amplification. When the electron beam interacts with the electromagnetic wave, the electron beam is also modulated by the electromagnetic wave. An amplified signal can be transmitted to output device 16 via the slow wave line and coupled to an external circuit using output device 16.Output device 16 can perform mode conversion on the amplified signal, for example, converting a TEM mode or a quasi-TEM mode of the amplified signal into a waveguide mode, so that an output signal from the progressive wave tube 1 corresponds to a mode of an external signal. Collector 15 is configured to collect a remaining electron beam after the completion of an interaction with the slow wave structure 14.

[0072] Most or all of the components of the slow wave structure 14 in embodiments of the present invention are Petition 870250091933, dated 08 / 10 / 2025, page 21 / 54 15 / 34 integrally connected. To be specific, most or all components of the slow wave structure 14 can be manufactured in a single process (a planarization process, such as a semiconductor process or a 3D printing process, which will be described below) and form an integrated structure. Detailed descriptions follow.

[0073] Figure 2 and Figure 3 show schematic structures of a slow wave structure 14 in Mode 1. Figure 2 is a diagram of an external structure of the slow wave structure 14, and Figure 3 is a diagram of an internal and external structure of the slow wave structure 14.

[0074] As shown in Figure 2 and Figure 3, the slow wave structure 14 may include a tube housing 141, two layers of slow wave lines 142, and a plurality of support portions 143. The tube housing 141, the two layers of slow wave lines 142, and the plurality of support portions 143 are integrally connected. The tube housing 141 has an internal cavity, and the two layers of slow wave lines 142 and the plurality of support portions 143 are all accommodated within the cavity of the tube housing 141.

[0075] In embodiments, the pipe housing 141 may be of an integrated structure, and the integrated pipe housing 141 may be manufactured using the planarization process. Alternatively, the pipe housing 141 may be formed by assembling a plurality of sub-housings. The pipe housing 141 is generally of a discrete structure, but at least one sub-housing may be of an integrated structure manufactured using the planarization process. It may be understood that, for the pipe housing 141 of the generally discrete structure, the slow wave line 142 and the support portion 143 may be integrally connected to the sub-housings in the split pipe housing 141. This may also be described as the pipe housing 141, the slow wave line 142, and the support portion 143 still being integrally connected.

[0076] As shown in Figure 2 and Figure 3, the tube housing 141 may include a tube housing body 141a, a plurality of tube housing protruding portions 141b, and two tube housing protruding portions 141c. The tube housing body 141a may, for example, have the shape of a long rectangular box. The protruding portion of Petition 870250091933, dated 08 / 10 / 2025, p. 22 / 54 16 / 34 Tube housing 141b and the protruding portion of tube housing 141c may, for example, be in the shape of short rectangular boxes. Both the protruding portion of tube housing 141b and the protruding portion of tube housing 141c are connected to an outer side of the tube housing body 141a and protrude from a surface of the tube housing body 141a. A plurality of protruding portions of tube housing 141b may be arranged on each of two opposite sides of the tube housing body 141a (for example, two sides on which two opposite long sides of the tube housing body 141a are located). There is specific spacing between two adjacent protruding portions of tube housing 141b. Spacings between any two adjacent protruding portions of tube housing 141b may be basically equal or even.The two protruding portions of the tube housing 141c can be located respectively at opposite ends of the tube housing body 141a. For example, the two protruding portions of the tube housing 141c can be located respectively on opposite sides of the tube housing body 141a. The tube housing body 141a, the protruding portion of the tube housing 141b, and the protruding portion of the tube housing 141c are all hollow, and the three parts together enclose an internal cavity of the tube housing 141. It can be understood that the previous appearance structure of the tube housing 141 is merely an example. In fact, an appearance structure of the tube housing 141 can be designed based on a requirement.

[0077] As shown in Figure 3, the two layers of slow wave lines 142 can be suspended in the tube housing body 141a, and the two layers of slow wave lines 142 are not in contact with an inner wall of the tube housing body 141a. As shown in Figure 3 and Figure 4, the two layers of slow wave lines 142 can be stacked in the thickness H direction in Figure 3, and there may be a gap between the two layers of slow wave lines 142. Structures of the two layers of slow wave lines 142 can be consistent or approximately consistent, and the two layers of slow wave lines 142 can overlap or approximately overlap when projected in the thickness H direction. Petition 870250091933, dated 08 / 10 / 2025, page 23 / 54 17 / 34

[0078] As shown in Figure 4, the slow wave line 142 can be a bend line, and the slow wave line 142 includes a plurality of bending units 142a connected sequentially end-to-end. The bending unit 142a can, for example, have approximately an “n” shape or a “u” shape. In some implementations, the bending unit 142a can alternatively have another suitable shape, for example, a “v” shape or an “s” shape. Parts of each bending unit 142a can be in a plane, and all bending units 142a can also be coplanar, so that the slow wave line 142 is distributed in a plane. A number of bending units 142a can be designed based on a requirement. For example, the number of bending units 142a could be 75, or the number of cycles of the slow wave line 142 is 75.

[0079] As shown in Figure 4, the slow wave line 142 can generally be strip-shaped, and a longitudinal direction L1 of the strip-shaped slow wave line 142 can be defined, that is, a general extension direction of the slow wave line 142 from one end (e.g., the left end in Figure 4) to the other end (e.g., the right end in Figure 4). Illustratively, the longitudinal direction L1 can be the horizontal direction in Figure 4.

[0080] Figure 3 and Figure 4 further show two input lines 121 on the input device 12 and two output lines 161 on the output device 16. The two input lines 121 and the two output lines 161 can be connected respectively to two ends of the longitudinal direction L1 of the slow wave line 142. An input line 121 is correspondingly connected to a layer of slow wave line 142, and an output line 161 is correspondingly connected to a layer of slow wave line 142. Structures and types of the input line 121 and the output line 161 are not limited. For example, the input line 121 and the output line 161 can each be an inner conductor in a coupled strip line. Input device 12 can input a signal to be amplified on the slow wave line 142 via input line 121. Output device 16 can output an amplified signal via output line 161.The inlet line 121 and the outlet line 161 can extend respectively to the two protruding portions of the tube housing 141c. Petition 870250091933, dated 08 / 10 / 2025, p. 24 / 54 18 / 34

[0081] As shown in Figure 3 and Figure 4, all support portions 143 can also be divided into two spaced layers. The two layers can be stacked in the thickness direction H in Figure 3, and the two layers of support portions 143 can overlap or approximately overlap when projected in the thickness direction H. There is a gap between two corresponding support portions 143 in the two layers. In each layer, support portions 143 can be coplanar or approximately coplanar with a slow wave line 142, support portions 143 can be sequentially spaced in a longitudinal direction L1 of the slow wave line 142, and a plurality of support portions 143 can be distributed on each of the two sides of the slow wave line 142. A quantity and spacing of support portions 143 can be designed based on a product requirement.For example, adjacent support portions 143 may be spaced by seven bending units 142a, or they may be spaced by seven cycles of the slow wave line 142.

[0082] As shown in Figure 4, the support portion 143 can be approximately strip-shaped or rod-shaped (for example, the support portion 143 can be referred to as a stump), and a longitudinal direction L2 of the support portion 143 can be defined. For example, the longitudinal direction L2 can be a vertical direction in Figure 4, and the longitudinal direction L2 can be perpendicular or approximately perpendicular to the longitudinal direction L1 of the slow waveline 142. For example, the lengths (sizes in the longitudinal direction L2) of all support portions 143 can be consistent or approximately consistent.

[0083] As shown in Figure 4 and Figure 3, part of the support portion 143 may be located within the tube housing body 141a, the other part of the support portion 143 may be located within the protruding portion of the tube housing 141b, and the support portion 143 is connected between an inner wall of the protruding portion of the tube housing 141b and the slow wave line 142. The support portion 143 may play the role of supporting the slow wave line 142. Therefore, the slow wave line 142 may be suspended in the tube housing 141 using the support portion 143. The support portion 143 is distributed within the housing body of Petition 870250091933, dated 08 / 10 / 2025, page 25 / 54 19 / 34 tube 141a and in the protruding portion of tube housing 141b, so that a length of the support portion 143 can meet a product requirement, and support strength can also be increased.

[0084] In this embodiment, the support portion 143, the slow wave line 142, and the tube housing 141 can be made of the same type of conductive material. Materials of all parts of the support portion 143 are the conductive material. The conductive material can be metal, for example, molybdenum alloy, tungsten alloy, tungsten, molybdenum, copper, stainless steel, or nickel-based alloy, or the conductive material can be non-metal. The same type of conductive material is used to help manufacture the slow wave structure 14 in batches using the planarization process.

[0085] In another embodiment, the support portion 143 may include an inner layer and an outer layer, the outer layer covering an outer side of the inner layer and the outer layer enclosing all regions of the inner layer. The inner layer may be made of an insulating material. Materials of the outer layer, the slow wave line 142 and the tube housing 141 may be the same type of conductive material. The slow wave structure in this embodiment may be manufactured using, for example, a 3D printing process.

[0086] In another embodiment, the materials of the support portion 143, the slow wave line 142, and the tube housing 141 may not be completely the same. The support portion 143 may be made of a conductive material or an insulating material, and the slow wave line 142 and the tube housing 141 may be made of a conductive material.

[0087] In this embodiment, the support portion 143 can be made of a conductive material, and the length L of the support portion 143 and a wavelength λ of guided waves of the slow wave structure 14 can satisfy the following relationship formula: L=n^ *(1±10%), where n is an odd number. It can be understood that n is a positive number. For example, n can be 1, 3, or 5. 10% in the relationship formula represents an error range. For example, the length L of the support portion 143 can be γ*90%, γ*95%, —, nA*1Q4%, or —*110%. 4 4 4

[0088] As support portion 143 is connected to line Petition 870250091933, dated 08 / 10 / 2025, p. 26 / 54 20 / 34 slow wave line 142 and to tube housing 141, from a direct current perspective, the support portion 143 directly grounds the slow wave line 142 (the tube housing 141 is used as a ground). The previous length design is carried out in the support portion 143 to help make apparent the impedance of a high-frequency electromagnetic wave from the slow wave line 142 to the tube housing 141 in an open circuit by means of impedance matching, so that the support portion 143 does not affect signal transmission in an operating band.

[0089] In another embodiment, at least part of the support portion 143 may be made of an insulating material. For example, the inner layer of the support portion 143 is made of an insulating material, and the outer layer is made of a conductive material; or all parts of the support portion 143 are made of an insulating material. In these solutions, the length of the support portion 143 may still be made to satisfy L=y*(1±10%), to meet a product requirement.

[0090] In this embodiment, the quantity and spacing of the support portions 143 are designed appropriately so that good transmission performance of a signal in a target band can be achieved. In addition, the support portion 143 can additionally perform a heat conduction function, so the quantity and spacing of support portions 143 can be designed based on a requirement to meet a heat dissipation requirement of the progressive wave tube 1.

[0091] The slow wave structure 14 in this embodiment has two layers of bend lines, in other words, the slow wave structure 14 is based on a coupled strip line. Therefore, a fundamental mode (mode 1) and a uniform mode (mode 2) exist. An operational mode of the slow wave structure 14 is the uniform mode. The slow wave structure 14 has an electric field in a longitudinal direction (a transmission direction of an electron beam), and the electric field can interact with the electron beam to amplify an electromagnetic wave signal.

[0092] Figure 5 shows a characteristic transmission graph of the slow wave structure 14 in this mode. As shown in Figure Petition 870250091933, dated 08 / 10 / 2025, page 27 / 54 21 / 34 5, in a frequency range of 34 GHz to 42 GHz, in mode 2, a reflection coefficient S11 is less than -20 dB, and a transmission coefficient S21 is about -5 dB. This indicates that the transmission characteristic of the slow wave structure 14 is relatively good. A bandwidth of about 8 GHz can fully meet a requirement of the progressive wave tube 1 in this band. It is proven, from a simulation perspective, that the structure in which the slow wave line 142 is supported using the support portion 143 can completely replace a conventional structure in which a slow wave line is supported using a ceramic medium.

[0093] Through beam-wave interaction simulation, under the condition that the input power is 31 mW, beam-wave interaction simulation results of the slow wave structure 14, which are shown in Figure 6 and Figure 7, can be obtained. Figure 6 shows the power of an output signal and Figure 7 shows a spectrum corresponding to the output signal. As shown in Figure 6 and Figure 7, the output power is 80 W at 40 GHz, a corresponding gain is 34 dB, electronic efficiency is 12.9%, the output signal spectrum is pure, and there is no defined interference signal in an operating band. This also proves, from the simulation perspective, that the progressive wave tube 1 having the slow wave structure 14 has a signal amplification function.

[0094] In the slow wave structure 14 in this embodiment, the impact of the support portion 143 on a dispersion feature can suppress a synchronization condition under which reverse wave oscillation and reflective oscillation are generated. The support portion 143 plays a jumping role in a phase velocity of the slow wave structure 14. Therefore, it is difficult to stimulate reverse wave oscillation, thus improving the gain of a single-segment slow wave structure. For example, simulation results show that the gain of the single-segment slow wave structure can reach 34 dB. This is significantly higher than a theoretical value for a single-segment gain of a conventional slow wave structure, which does not exceed 25 dB.Furthermore, since the support portion 143 has an oscillation suppression effect, the problem that a cutoff and an attenuator need to be added additionally to a conventional high-gain progressive wave tube for stability can be solved, simplifying the process. Petition 870250091933, dated 08 / 10 / 2025, page 28 / 54 22 / 34 thus a structure and process of the high-gain progressive wave tube.

[0095] The conventional slow wave structure that uses an all-metal waveguide structure operates in a waveguide mode and has a relatively large structure size. However, the operating mode of the slow wave structure 14 in this embodiment can be a non-waveguide mode, for example, a TEM mode or a quasi-TEM mode, so that the slow wave structure 14 and the progressive wave tube 1 can have relatively small structure sizes and can meet a miniaturization application requirement of a communication device.

[0096] In this embodiment, at least one slow wave line 142 can be arranged alternatively as a plurality of disconnected segments, an attenuator connected to the slow wave line 142 is arranged, and each of the plurality of segments is connected to the attenuator. For example, two adjacent segments can be connected using the same attenuator, or the segments can be connected separately to different attenuators. The attenuator is configured to absorb a reflected electromagnetic wave, to avoid parasitic oscillation of the progressive wave tube 1. The slow wave line 142 segmentation solution can improve the gain and stability of the progressive wave tube 1.

[0097] In this embodiment, to match a waveguide mode, for example, a transverse electric mode (TE) or a quasi-TE mode, of an external circuit, a special mode converter can be designed in the input device 12 and / or a special mode converter can be designed in the output device 16, to implement mode conversion. Descriptions are provided below.

[0098] Figure 8 shows internal and external three-dimensional structures of a mode 17 converter in Implementation 1 of this embodiment, and Figure 9 is an AA sectional view of the mode 17 converter shown in Figure 8. As shown in Figure 8 and Figure 9, the mode 17 converter may include a coupled strip line 171, a crest 172, a conductor plate 173, a flat waveguide 174, a conical waveguide 175, and a standard rectangular waveguide 176. The crest 172, the conductor plate 173, the flat waveguide 174, the conical waveguide 175, and the standard rectangular waveguide 176 may Petition 870250091933, dated 08 / 10 / 2025, page 29 / 54 23 / 34 can be made, for example, of metallic materials.

[0099] As shown in Figure 8, the flat waveguide 174, the conical waveguide 175, and the standard rectangular waveguide 176 are connected sequentially. Both the flat waveguide 174 and the standard rectangular waveguide 176 are rectangular waveguides. The conical waveguide 175 can be trapezoidal; one end of the conical waveguide 175 that is connected to the flat waveguide 174 can be relatively narrow, and one end of the conical waveguide 175 that is connected to the standard rectangular waveguide 176 can be relatively wide. The flat waveguide 174, the conical waveguide 175, and the standard rectangular waveguide 176 form a structure having a cavity.

[0100] As shown in Figure 8 and Figure 9, the conductive plate 173 can be fixed in an internal cavity 174a of the flat waveguide 174 and can be close to a side (e.g., a left side in Figure 8) of the flat waveguide 174. There is a gap between a plate surface 173a (a normal line of the plate surface is in a thickness direction of the conductive plate 173, and this is also applicable below) of the conductive plate 173 and a cavity wall that is of the internal cavity 174a and that is opposite the plate surface 173a, and there is a gap between a plate surface 173b of the conductive plate 173 and a cavity wall that is of the internal cavity 174a and that is opposite the plate surface 173b. The conductive plate 173 has a relatively small thickness and can be of a thin plate structure.

[0101] As shown in Figure 10 and Figure 11, there may be two ridges 172, and the two ridges 172 may be fixed respectively to the surface of plate 173a and to the surface of plate 173b. The two ridges 172 may be close to an edge of the conductive plate 173. As shown in Figure 9, the ridge 172 is not connected to a cavity wall of the inner cavity 174a, and there is a gap between the ridge 172 and the cavity wall of the inner cavity 174a. For example, one appearance of the ridge 172 may be approximately a rectangular block.

[0102] As shown in Figure 8, the coupled strip line 171 may include an outer conductor 171c and two inner conductors, and the outer conductor 171c surrounds an outer periphery of the inner conductor. As Petition 870250091933, dated 08 / 10 / 2025, page 30 / 54 24 / 34 shown in Figure 10 and Figure 11, each inner conductor may include a first part 171a and a second part 171b, and the first part 171a is connected to the second part 171b and to the crest 172. With reference to Figure 8 and Figure 3, one end that is from the second part 171b and that faces away from the first part 171a may be connected to the slow wave line 142.

[0103] As shown in Figure 10, the first part 171a may have a variable width, and the width of the first part 171a may decrease from crest 172 to the second part 171b. “Decline” may include progressive decrease; or it may include a general decrease in width, but there may be repetitions in some parts. For example, the first part 171a may include a part of equal width and a part of gradient width (the latter case); or the first part 171a may have only a part of gradient width, but not have a part of equal width (the former case). The second part 171b may, for example, have a uniform width, and the width of the second part 171b is less than the width of the first part 171a.

[0104] In the mode 17 converter in Implementation 1, second parts 171b of the two inner conductors in the coupled strip line 171 can be connected respectively to the two layers of slow wave lines 142, and the standard rectangular waveguide 176 can be connected to an external circuit. Therefore, the mode 17 converter connects the slow wave line 142 to the external circuit, to implement mutual conversion between operating modes of the slow wave line 142 and the external circuit.

[0105] For example, if mode converter 17 is used on input device 12, coupled strip line 171 is input line 121. The standard rectangular waveguide 176, the conical waveguide 175, the flat waveguide 174, the lead plate 173, and the crest 172 are all configured to perform mode conversion, to convert a standard waveguide mode of an external signal into the operational mode (e.g., a TEM mode or a quasi-TEM mode) of the slow wave structure 14. The structure design of the coupled strip line 171 causes the coupled strip line 171 to have an impedance matching function. Therefore, mode converter 17 can implement mode conversion and input a signal to be amplified and converted into the slow wave line 142.

[0106] Alternatively, for example, if the mode converter 17 Petition 870250091933, dated 08 / 10 / 2025, page 31 / 54 25 / 34 can be used in output device 16, the coupled strip line 171 is the output line 161. The crest 172, the conductive plate 173, the flat waveguide 174, the conical waveguide 175, and the standard rectangular waveguide 176 are all configured to perform mode conversion, to convert the operating mode (e.g., a TEM mode or a quasi-TEM mode) of the slow wave structure 14 into a standard waveguide mode of an external signal. The structure design of the coupled strip line 171 gives the coupled strip line 171 an impedance matching function. Therefore, the mode converter 17 can implement mode conversion and output a converted amplified signal to an external circuit.

[0107] Figure 12 shows a simulation result of the transmission performance of the progressive wave tube 1 with the mode converter 17 used. As shown in Figure 12, in a frequency range of 34 GHz to 42 GHz, a reflection coefficient S11 is less than -15 dB, and a transmission coefficient S21 is about -0.3 dB. This indicates that the transmission characteristic of the progressive wave structure 1 is relatively good.

[0108] Figure 13 shows internal and external three-dimensional structures of a mode 18 converter in Implementation 2 of this embodiment. As shown in Figure 13, the mode 18 converter may include a coupled strip line 181, a crest 182, a flat waveguide 184, a conical waveguide 185, and a standard rectangular waveguide 186. The crest 182, the flat waveguide 184, the conical waveguide 185, and the standard rectangular waveguide 186 may be made, for example, of metallic materials. Comparing Figure 13 and Figure 12, it is learned that the differences with respect to the mode 17 converter are as follows: The mode 18 converter does not have a conductive plate; there is a crest 182, and the crest 182 may have a stepped structure; and an inner conductor 181b of the coupled strip line 181 may have a uniform width. Descriptions are provided below.

[0109] As shown in Figure 13, the crest 182 may have a first surface 182a and a second surface 182b that are opposite each other. The second surface 182b may be a planar surface, and the second surface 182b may be connected to an inner wall of an inner cavity of the planar waveguide 184. For example, the first surface 182a may have a stepped structure, and the stepped structure may include several Petition 870250091933, dated 08 / 10 / 2025, page 32 / 54 26 / 34 sequentially connected steps (Figure 13 shows four steps). For example, from an end that is on crest 182 and close to the conical waveguide 185 to an end that is on crest 182 and far from the conical waveguide 185 (e.g., from a right end to a left end), these steps can rise sequentially; in other words, step heights can increase sequentially, so that a spacing between the first surface 182a and the second surface 182b can increase. The first surface 182a is not connected, but has a gap with the inner wall of the inner cavity of the flat waveguide 184.

[0110] Figure 14 shows a side view structure of a crest 182 in another implementation. Unlike what is shown in Figure 13, a first surface 182a of the crest 182 shown in Figure 14 does not form a stepped structure, but may include a flat surface and an inclined surface, so that a spacing between the first surface 182a and a second surface 182b may decrease (from left to right). With reference to Figure 14 and Figure 13, the left end of the crest 182 may be connected to the inner conductor 181b, and the right end of the crest 182 may be close to the conical waveguide 185.

[0111] Based on Figure 14, in another implementation, an entire first surface 182a of a crest 182 can be an inclined surface, so that a spacing between the first surface 182a and a second surface 182b can also decrease. On the crest 182, one end with a large spacing can be connected to the inner conductor 181b, and one end with a small spacing can be close to the conical waveguide 185.

[0112] In previous implementations, the spacing between the first surface 182a and the second surface 182b of crest 182 is varied, so that crest 182 can also have an impedance matching function. When there is a relatively large number of spacing levels, it is possible to implement a relatively good impedance matching. For example, as shown in Figure 13, the step structure can have four steps, corresponding to three spacing levels (or height levels), so that crest 182 can have a performance of Petition 870250091933, dated 08 / 10 / 2025, page 33 / 54 27 / 34 relatively good impedance matching.

[0113] As shown in Figure 13, the coupled strip line 181 includes an outer conductor 181a and two inner conductors 181b, and the two inner conductors 181b may have uniform widths. The two inner conductors 181b may be connected at the end with the large spacing between the first surface 182a and the second surface 182b.

[0114] The mode 18 converter can also implement conversion between a standard waveguide mode of an external signal and the operating mode of the slow wave structure 14.

[0115] Based on previous implementations, a mode converter of another structure can be designed. For example, the standard conical waveguide and rectangular waveguide can be canceled, and the flat waveguide 184 is connected to an external circuit, so that conversion between a non-standard waveguide mode of an external signal and the operating mode of the slow wave structure 14 can be implemented. In this solution, a difference from the previous one is that the end with the small spacing between the first surface and the second surface of the crest can be connected to the inner conductor.

[0116] In this embodiment, the progressive wave tube 1 having the two layers of bend lines has a relatively strong electromagnetic wave field, relatively strong interaction, relatively high efficiency and relatively high gain. In another embodiment, the progressive wave tube may alternatively be arranged as having a single-layer bend line and, correspondingly, there is only one layer of support portions.

[0117] In this embodiment, the tube housing 141, the slow wave line 142 and the support portion 143 in the slow wave structure 14 are transformed into an integrated structure, so that processing and assembly errors caused by a split design of a conventional slow wave structure can be improved, and an entire tube assembly process can be simplified, thus shortening the overall production cycle of the progressive wave tube and improving the yield and consistency of the progressive wave tube.

[0118] Figure 15 and Figure 16 are diagrams of the structures of a Petition 870250091933, dated 08 / 10 / 2025, page 34 / 54 28 / 34 slow wave structure 14 in Mode 2. Figure 15 is a diagram of an external structure of the slow wave structure 14, and Figure 16 is a diagram of internal and external structures of the slow wave structure 14.

[0119] Unlike that in Embodiment 1, a slow wave line 142 of the slow wave structure 14 shown in Figure 15 and Figure 16 is of a circular helical structure, and a cross-section of the circular helical structure may be approximately circular. For example, a tube housing body 141a may be cylindrical, and a protruding portion of the tube housing 141b and a protruding portion of the tube housing 141c may also be cylindrical. A support portion 143 may have the shape of a round rod. In Embodiment 2, the input device may include a coaxial coupler and / or the output device may include a coaxial coupler. The coaxial coupler is a mode converter and is configured to implement conversion between an operating mode of an external circuit and an operating mode of the slow wave structure 14.

[0120] A propeller is arranged within the slow wave structure 14 in Mode 2, so that a specific product requirement can be met.

[0121] Figure 17 and Figure 18 are diagrams of the structures of a slow wave structure 14 in Mode 3. Figure 17 is a diagram of the internal and external structures of the slow wave structure 14, and Figure 18 is a diagram of the structures of a slow wave line 142 and a support portion 143 in the slow wave structure 14.

[0122] Unlike that in Embodiment 2, in an Embodiment 3 solution, a tube housing 141 may not have any protruding tube housing portion configured to accommodate the support portion 143, and the volume of the tube housing 141 may be relatively small. Furthermore, each support portion 143 may be inclined relative to the slow wave line 142; in other words, an included angle other than 90 degrees may be formed between a longitudinal direction of each support portion 143 and a longitudinal direction L1 of the slow wave line 142. A plurality of support portions 143 located on each side of the slow wave line 142 may be sequentially connected end-to-end and form a continuous wavy line structure. For example, included angles formed between Petition 870250091933, dated 08 / 10 / 2025, p. 35 / 54 29 / 34 any two adjacent support portions 143 and the longitudinal direction L1 can be complementary, two spaced support portions 143 can be parallel, and included angles between each two support portions 143 can be equal. Of course, the previous relative positions are merely examples and are not limited to the solution of Modality 3.

[0123] In the solution of Modality 3, in a scenario where the size of the tube housing 141 is limited, the support portion 143 is inclined so that the support portion 143 is relatively long, thus meeting a support portion 143 length requirement. In addition, the support portions 143 are connected to help increase the support strength.

[0124] Based on the solution in Mode 3, another alternative solution can be obtained.

[0125] For example, in one embodiment, included angles other than 90 degrees may be formed between longitudinal directions of all support portions 143 and a longitudinal direction L1, all support portions 143 are approximately parallel and all support portions 143 are not connected to each other.

[0126] Alternatively, in another embodiment, included angles other than 90 degrees may be formed between longitudinal directions of all support portions 143 and a longitudinal direction L1; a portion of the support portions 143 is not connected to each other, for example, adjacent support portions 143 are not connected and are approximately parallel, or adjacent support portions 143 are not connected, and extension lines of the adjacent support portions 143 intersect; and the other portion of the support portions 143 may be connected sequentially to form a wavy line structure.

[0127] Alternatively, in another embodiment, longitudinal directions of some support portions 143 may be perpendicular or approximately perpendicular to a longitudinal direction L1, and these support portions 143 are not connected to each other; and included angles other than 90 degrees may be formed between longitudinal directions of the other support portions 143 and the longitudinal direction L1, wherein all support portions 143 may be sequentially connected to form Petition 870250091933, dated 08 / 10 / 2025, page 36 / 54 30 / 34 a continuous wavy line structure; or a portion of the support portions 143 may be connected sequentially to form a continuous wavy line structure, and the other portion of the support portions 143 is not connected to each other, for example, adjacent support portions 143 are not connected and are approximately parallel, or adjacent support portions 143 are not connected and extension lines of the adjacent support portions 143 intersect.

[0128] It can be understood that, in embodiments of the present invention, in both solutions where the support portion 143 is perpendicular to and inclined to the slow wave line 142, the protruding tube housing portion 141b may be disposed within the tube housing 141 based on a product requirement, to accommodate the support portion 143, or the protruding tube housing portion 141b may not be disposed of.

[0129] Figure 19 and Figure 20 are diagrams of the structures of a slow wave structure 14 in Mode 4. Figure 19 is a diagram of an external structure of the slow wave structure 14, and Figure 20 is a diagram of the internal and external structures of the slow wave structure 14. Figure 21 is a diagram of the structures of a slow wave line 142 and a support portion 143 of the slow wave structure 14 in Mode 4.

[0130] Unlike that in Embodiment 1, the slow wave line 142 of the slow wave structure 14 shown in Figure 20 and Figure 21 is of a rectangular helical structure, and a cross-section of the rectangular helical structure may be approximately rectangular. The slow wave line 142 of the rectangular helical structure is suitable for the passage of a strip-shaped electron beam (also known as a square electron beam). For example, a tube housing body 141a may have the shape of a rectangular box, a protruding portion of a tube housing 141b may have the shape of a rectangular box, and a protruding portion of a tube housing 141c may be cylindrical. The support portion 143 may have the shape of a square rod. In Embodiment 4, the input apparatus may include a coaxial coupler and / or the output apparatus may include a coaxial coupler.The coaxial coupler is a mode converter and is configured to implement conversion between an operating mode of an external circuit and an operating mode of the slow wave structure 14. Petition 870250091933, dated 08 / 10 / 2025, page 37 / 54 31 / 34

[0131] The above describes in detail a structure of the slow wave structure 14 in embodiments of the present invention. The following describes a method for manufacturing the slow wave structure 14 using the planarization process.

[0132] Embodiment 5 provides a method for fabricating a slow wave structure. The method can be used to fabricate slow wave structure 14 in any of the previous embodiments. The fabrication method may include the following steps.

[0133] S1. Provide a process file for a slow wave structure, wherein the process file may include a typographic design file and a layout design file of the slow wave structure. The typographic design file may include a three-dimensional model file (a three-dimensional model established using modeling software) and a layered slice file (layered slice data obtained by processing the three-dimensional model file using layered slice software) of the slow wave structure. Figure 22 is a schematic typographic of the slow wave structure, and Figure 23 shows a schematic layered slice of the slow wave structure. The layout design file may include information on how to arrange a plurality of slow wave units on a substrate. Figure 24 shows the region allocation on the substrate. Multiple slow wave structures are subsequently arranged in each region.The process file is used to perform layered fabrication on the substrate and fabricate as many slow-wave structures as possible simultaneously within a limited substrate size.

[0134] S2. Deposit materials sequentially in layers based on the process file, to form a slow wave structure matrix.

[0135] In one implementation, materials can be deposited sequentially onto the substrate in layers using a semiconductor process, to form the slow-wave structure matrix.

[0136] In a solution, the substrate can be, for example, a metallic substrate, such as a copper wafer. Surface polishing and cleaning processes can be performed first on the copper wafer, so that it has relatively good flatness and the greatest smoothness. Petition 870250091933, dated 08 / 10 / 2025, page 38 / 54 32 / 34 possible. This helps improve manufacturing accuracy and batch manufacturing consistency, and can also reduce loss of the slow wave structure. Next, the copper wafer can be sequentially layered galvanized based on the process file, to produce layers of materials sequentially. In this process, a hollow position in the slow wave structure needs to be filled with a sacrificial layer (also called a mask) to support a galvanized material. After galvanizing is complete, the sacrificial layer can be removed using a corrosion solution, all galvanized materials can be retained, and residues on the surfaces of the galvanized materials can be cleaned. In this solution, the copper wafer can be used as part of a tube housing of the slow wave structure. Figure 25 is a diagram of a galvanized slow wave structure matrix on the copper wafer.

[0137] In another solution, the substrate can be, for example, a sapphire, and the smoothness and flatness of the sapphire surface are relatively good. The sapphire substrate is separable from a slow wave structure matrix on the sapphire substrate, so that the sapphire substrate can be removed after the completion of batch manufacturing, to facilitate the reuse of the sapphire substrate.

[0138] In another implementation, materials can be sequentially deposited onto the substrate in layers using a 3D printing process, to form the slow wave structure matrix. The substrate is separable from the slow wave structure matrix on the substrate, so that the substrate can be removed after batch manufacturing is complete.

[0139] In another implementation, the slow wave structure matrix can alternatively be formed using another suitable planarization process, for example, electroforming.

[0140] S3. Cut the slow wave structure matrix into a plurality of independent slow wave structures. For a solution where the substrate needs to be removed, the substrate can be removed before cutting. For a solution where the substrate does not need to be removed, the substrate and the slow wave structure matrix on the substrate can be cut together.

[0141] In this modality, based on a real case, an accommodation Petition 870250091933, dated 08 / 10 / 2025, page 39 / 54 33 / 34 of a tube having a full thickness can be formed using a planarization process. Alternatively, if only a tube housing having a partial thickness can be formed due to a limitation of a planarization process, a peripheral tube housing can be manufactured separately, and the peripheral tube housing can be assembled with a tube housing that is of the slow wave structure and that is manufactured using the planarization process, to obtain the tube housing having the full thickness. The peripheral tube housing and the tube housing manufactured using the planarization process can also be referred to as tube sub-housings. For example, as shown in Figure 26, a slow wave structure unit 14b and a slow wave structure unit 14c that are manufactured using a planarization process can be assembled into a slow wave structure having two layers of bend lines.A slow-wave structure tube housing is further assembled with a 14a peripheral tube housing and a 14d peripheral tube housing.

[0142] In this embodiment, the previous mode converter can be fabricated together with the slow wave structure using the planarization process. The process file can include a typographic design file and a layout design file of the slow wave structure + mode converter. A slow wave structure + mode converter array can be formed on the substrate using the previous planarization process. The slow wave structure + mode converter array can be cut to prepare a plurality of independent slow wave structures + mode converters, and each slow wave structure + mode converter is integrally connected. Alternatively, the mode converter and the slow wave structure can be fabricated separately and then assembled, and the mode converter and the slow wave structure are not integrally connected.

[0143] After the slow wave structure is manufactured, the slow wave structure can be connected to an input device, an output device, a focusing system, an electron gun, a collector and the like, to manufacture a progressive wave tube. One way of connection can be, for example, welding, including, but not limited to, soldering and Petition 870250091933, dated 08 / 10 / 2025, pages 40 / 54 34 / 34 brazing, laser welding, argon-shielded arc welding or molecular diffusion welding.

[0144] In this embodiment of the present invention, the slow wave structure is used as a circuit for energy exchange between an electron beam and an electromagnetic wave from a vacuum electronic device, and a slow wave line in the slow wave structure is a transmission line having a reactance characteristic (the transmission line may have a periodic structure or an aperiodic structure). The transmission line that has the reactance characteristic generally has a bandpass characteristic. Therefore, the slow wave structure can also be used as a filter; in other words, the filter may include the preceding tube housing, the slow wave line, and the support portion. The filter may be a bandpass filter, allowing the passage of a signal of a specific frequency or band, and not allowing the passage of a signal of another frequency. The filter may also be a low-pass filter.The filter can be used in any type of communication system, radar testing system, or measurement system.

[0145] The above descriptions are merely specific implementations of the present invention, but the scope of protection of the present invention is not limited to them. Any variation or substitution readily discoverable by one skilled in the art within the technical scope disclosed in the present invention shall fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be subject to the scope of protection of the claims. Petition 870250091933, dated 08 / 10 / 2025, pages 41 / 54

Claims

1 / 5 CLAIMS 1. Slow wave structure, CHARACTERIZED in that it comprises a tube housing, a slow wave line and a plurality of support portions, wherein the slow wave line and the plurality of support portions are all located within the tube housing, and the tube housing, the slow wave line and the plurality of support portions are integrally connected; the plurality of support portions are sequentially spaced along the slow wave line; and one end of each support portion is connected to the tube housing, and the other end is connected to the slow wave line.

2. Slow wave structure, according to claim 1, CHARACTERIZED in that the tube housing comprises a tube housing body and a plurality of protruding tube housing portions, the plurality of protruding tube housing portions are all connected to the tube housing body, the plurality of protruding tube housing portions project from the tube housing body, and the plurality of protruding tube housing portions are sequentially spaced along the tube housing body; and the slow wave line is located within the tube housing body; and one part of each supporting portion is accommodated in the tube housing body, and the other part of each supporting portion is accommodated in the protruding portion of the tube housing.

3. Slow wave structure, according to claim 1 or 2, CHARACTERIZED in that a longitudinal direction of at least one support portion is perpendicular to a longitudinal direction of the slow wave line.

4. Slow wave structure, according to claim 1 or 2, CHARACTERIZED in that an included angle other than 90 degrees is formed between a longitudinal direction of at least one support portion and a longitudinal direction of the slow wave line.

5. Slow wave structure, according to claim 4, Petition 870250091936, dated 10 / 08 / 2025, page 8 / 13 2 / 5 CHARACTERIZED in that at least one part of the plurality of support portions is sequentially connected to form a wavy line structure.

6. Slow wave structure, according to any one of claims 1 to 5, CHARACTERIZED in that the plurality of supporting portions is distributed on two sides of the slow wave line.

7. Slow wave structure, according to any one of claims 1 to 6, CHARACTERIZED in that a length L of each support portion and a wavelength λ of the guided wave of the slow wave structure satisfy the following relation formula: L = γ * (1 ± 10%), where n is an odd number.

8. Slow wave structure, according to any one of claims 1 to 7, CHARACTERIZED in that the tube housing, the slow wave line and the plurality of support portions are made of the same material.

9. Slow wave structure, according to any one of claims 1 to 7, CHARACTERIZED in that each support portion comprises an inner layer and an outer layer, the outer layer is wrapped around an outer periphery of the inner layer, the inner layer is made of an insulating material, and the outer layer is made of the same material as the tube housing and the slow wave line.

10. Slow wave structure, according to any one of claims 1 to 9, CHARACTERIZED in that the slow wave structure additionally comprises an attenuator, the slow wave line comprises a plurality of disconnected segments, and each of the plurality of segments is connected to the attenuator.

11. Slow wave structure, according to any one of claims 1 to 10, CHARACTERIZED in that the slow wave line is a bend line, the bend line comprises a plurality of bending units connected sequentially end-to-end, and all bending units are coplanar.

12. Slow wave structure, according to claim 11, CHARACTERIZED in that the plurality of supporting portions is coplanar with the slow wave line.

13. Slow wave structure, according to claim 11 or 12, CHARACTERIZED in that the slow wave structure comprises two layers of support portions between which a gap is defined, and each layer of support portions comprises a plurality of support portions; and the slow wave structure comprises two layers of slow wave lines between which a gap is defined, and a layer of slow wave lines is correspondingly connected to a layer of support portions.

14. Slow wave structure, according to any one of claims 1 to 10, CHARACTERIZED in that the slow wave line has a helical structure.

15. Progressive wave tube, CHARACTERIZED in that it comprises an electron gun, a focusing system, a collector, an input apparatus, an output apparatus and the slow wave structure as defined in any one of claims 1 to 14, wherein the electron gun, the focusing system, the collector, the input apparatus and the output apparatus are all connected to the slow wave structure.

16. Progressive wave tube, according to claim 15, CHARACTERIZED in that the input apparatus comprises a mode converter and / or the output apparatus comprises a mode converter, the mode converter is connected to the slow wave line, and the mode converter is configured to implement conversion between an operating mode of the slow wave structure and an operating mode of an external circuit.

17. Progressive wave tube, according to claim 16, CHARACTERIZED in that the slow wave structure comprises two layers of slow wave lines; and Petition 870250091936, dated 08 / 10 / 2025, p.10 / 13 4 / 5 The mode converter comprises a flat waveguide, a conductive plate, a crest, and a coupled strip line; the conductive plate is disposed within an inner cavity of the flat waveguide, and there is a gap between each of the plate surfaces on two opposite sides of the conductive plate and a cavity wall of the inner cavity; the crest is disposed on the plate surface, and the crest is not connected to the cavity wall of the inner cavity; an inner conductor of the coupled strip line comprises a first part and a second part, the first part is connected to the crest and the second part, and one end that is of the second part and that faces away from the first part is connected to the two layers of slow wave lines; and a width of the first part is greater than a width of the second part, and the width of the first part decreases along a direction from the first part to the second part.

18. Progressive wave tube, according to claim 16, CHARACTERIZED in that the slow wave structure comprises two layers of slow wave lines; and the mode converter comprises a flat waveguide, a crest and a coupled strip line; the crest is disposed within an inner cavity of the flat waveguide, the crest comprises a first surface and a second surface, the first surface is opposite the second surface, a spacing between the first surface and the second surface decreases from one end of the crest to the opposite end, there is a gap between the first surface and an inner wall of the inner cavity, and the second surface is connected to the inner wall of the inner cavity; and an inner conductor of the coupled strip line is connected to the crest and the two layers of slow wave lines.

19. Progressive wave tube, according to claim 18, CHARACTERIZED in that the first surface has a plurality of sequentially connected steps, and the heights of the plurality of steps decrease sequentially.

20. Progressive wave tube, according to any one of claims 17 to 19, CHARACTERIZED in that Petition 870250091936, dated 08 / 10 / 2025, p. 11 / 13 5 / 5 the mode converter comprises a conical waveguide and a standard rectangular waveguide, the conical waveguide is connected to the flat waveguide and the standard rectangular waveguide, and the coupled strip line and the standard rectangular waveguide are located, respectively, at two opposite ends of the flat waveguide.

21. Communication apparatus, CHARACTERIZED in that it comprises the progressive wave tube as defined in any one of claims 15 to 20.

22. Communication apparatus, according to claim 21, CHARACTERIZED in that the communication apparatus is a network device, a terminal device, a vehicle-mounted device or a satellite payload. Petition 870250091936, dated 08 / 10 / 2025, pp. 12 / 13

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