Display device and method of manufacturing the same

Abstract

A display device and a method for manufacturing the display device are provided. The display device includes a substrate, a pixel defining layer, a spacer, an auxiliary electrode and an organic light emitting diode. The substrate includes a light emitting region and a non-light emitting region adjacent to the light emitting region. The pixel defining layer is arranged on the non-light emitting region of the substrate. The spacer is arranged on the pixel defining layer. The auxiliary electrode is arranged on the spacer. The organic light emitting diode is arranged on the substrate, and at least a portion of the organic light emitting diode is arranged in the light emitting region. The organic light emitting diode includes a pixel electrode, an intermediate layer arranged on the pixel electrode and including an organic light emitting layer, and a counter electrode arranged on the intermediate layer and electrically connected to the auxiliary electrode.

Description

[0001] This application claims priority to and the benefit of Korean Patent Application No. 10-2018-0123413 filed on October 16, 2018, in the Korean Intellectual Property Office (KIPO), the entire contents of which are incorporated herein by reference. Technical Field

[0002] The present disclosure herein relates to a display device and a method of manufacturing the same, and more particularly, to a display device having improved reliability and a method of manufacturing the same. Background Art

[0003] An organic light emitting display device (among display devices) is drawing attention as a next-generation display device due to its wide viewing angle, excellent contrast, and / or fast response speed.

[0004] Generally, an organic light-emitting display device may include a thin film transistor and an organic light-emitting element formed on a substrate, and the organic light-emitting element may emit light by itself to make the organic light-emitting display device work (e.g., emit light by itself during the operation of the organic light-emitting display device). The organic light-emitting element may include a pixel electrode, a counter electrode facing the pixel electrode, and a light-emitting layer disposed between the pixel electrode and the counter electrode. The organic light-emitting display device may be used as a display unit for a small-sized product such as a portable phone, and may also be used as a display unit for a large-sized product such as a television.

[0005] In an organic light-emitting display device that displays full color, different pixels can emit light of different colors, and a deposition mask can be used to form a light-emitting layer of each pixel and a counter electrode commonly provided in a plurality of pixels. As the resolution of the organic light-emitting display device increases, the width of the opening slit of the mask used in the deposition process decreases (e.g., gradually decreases), and it is desirable to reduce the dispersion of the width of the opening slit. In addition, in order to manufacture a high-resolution organic light-emitting display device, it is desirable to reduce or eliminate the shadow effect. Therefore, a method of performing a deposition process in a state where the mask is in close contact with the substrate can be used. Summary of the invention

[0006] Aspects according to embodiments of the present disclosure are directed to a method of manufacturing a display device capable of easily removing a lift-off layer and a mask layer by preventing or protecting the lift-off layer and the mask layer from collapsing in a manufacturing process, and a display device having improved reliability.

[0007] In an embodiment of the present disclosure, a display device may include a substrate, a pixel defining layer, a spacer, an auxiliary electrode, and an organic light emitting diode.

[0008] The substrate may include a light emitting region and a non-light emitting region adjacent to the light emitting region.

[0009] The pixel defining layer may be located on the non-light emitting region of the substrate.

[0010] The spacer may be located on the pixel defining layer.

[0011] The auxiliary electrode may be located on the spacer.

[0012] The organic light emitting diode may be on the substrate and have at least a portion located in the light emitting region.

[0013] The organic light emitting diode may include: a pixel electrode; an intermediate layer located on the pixel electrode and including an organic light emitting layer; and a counter electrode located on the intermediate layer and electrically connected to the auxiliary electrode.

[0014] In embodiments, the intermediate layer and / or the counter electrode may overlap the spacer.

[0015] In an embodiment, the auxiliary electrode and the pixel defining layer may seal the spacer.

[0016] In an embodiment, the spacer may include an organic material.

[0017] In an embodiment, the pixel defining layer and the spacer may be composed of different materials.

[0018] In an embodiment, the pixel defining layer and the spacer may constitute a single integral body.

[0019] In an embodiment, the auxiliary electrode may contact a top surface of the spacer.

[0020] In an embodiment, the spacer may be provided in plurality, the spacer may be adjacent to the light emitting region, and each spacer may have an island shape.

[0021] In an embodiment, the light emitting region may have a polygonal shape when viewed in a plan view, and each of the spacers may be adjacent to a corner of the light emitting region.

[0022] In an embodiment, a shortest distance between spacers adjacent to each other may be in a range from 10 μm to 25 μm.

[0023] In an embodiment, the display device may further include an insulating protective layer covering a top surface of the counter electrode and exposing a portion of the auxiliary electrode.

[0024] In an embodiment of the present disclosure, a display device may include a substrate, a pixel defining layer, a spacer, an auxiliary electrode, a pixel electrode, an intermediate layer, and a counter electrode.

[0025] The substrate may include a light emitting region and a non-light emitting region adjacent to the light emitting region.

[0026] The pixel defining layer may be located on the non-light emitting region of the substrate.

[0027] The spacer may be located on the pixel defining layer.

[0028] The auxiliary electrode may be located on the spacer.

[0029] The pixel electrode may be located on the substrate and have at least a portion located in the light emitting region.

[0030] The intermediate layer may be located on the pixel electrode and have at least a portion overlapping the spacer, the intermediate layer including an organic light emitting layer.

[0031] The counter electrode may be located on the intermediate layer and may contact the auxiliary electrode and have at least a portion overlapping the spacer.

[0032] In an embodiment, the auxiliary electrode and the pixel defining layer may seal the spacer.

[0033] In an embodiment of the present disclosure, a method for manufacturing a display device may include: forming a first pixel electrode for emitting a first color light, a second pixel electrode for emitting a second color light, and a third pixel electrode for emitting a third color light on a substrate; forming a pixel defining layer that exposes a portion of the first pixel electrode, a portion of the second pixel electrode, and a portion of the third pixel electrode; forming a first spacer on the pixel defining layer adjacent to the first pixel electrode; forming an auxiliary electrode covering the first spacer; forming a first peeling layer and a first mask layer on the pixel defining layer, the first peeling layer exposing the portion of the first pixel electrode, and the first mask layer having a first mask opening exposing the portion of the first pixel electrode; forming a first intermediate layer on the first pixel electrode through the first mask opening; forming a first pair of electrodes on the first intermediate layer through the first mask opening; and removing the first peeling layer and the first mask layer.

[0034] In an embodiment, the method may further include: after the step of forming the first pair of electrodes, forming a first insulating protection layer covering the first pair of electrodes through the first mask opening.

[0035] In an embodiment, the first spacer may be provided in plurality, and each of the first spacers may have an island shape.

[0036] In an embodiment, the steps of forming a first stripping layer and a first mask layer may include: forming a first polymer layer on a pixel defining layer on which an auxiliary electrode is formed; forming a first photoresist layer on the first polymer layer; exposing and developing the first photoresist layer to form a first mask layer; and etching the first polymer layer using the first mask layer as an etching mask to form a first stripping layer.

[0037] In an embodiment, the first lift-off layer may have an undercut shape laterally recessed from an inner side surface of the first mask layer, the inner side defining the first mask opening.

[0038] In an embodiment, the first mask layer may overlap the first spacer when viewed in a plan view.

[0039] In an embodiment, the first peeling layer may expose at least a portion of the first spacer.

[0040] In an embodiment, the first spacer may include an organic material.

[0041] In an embodiment, the first pair of electrodes may be in contact with the auxiliary electrode. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] The accompanying drawings are included to provide a further understanding of the subject matter of the present disclosure and are incorporated into and constitute a part of this specification. The accompanying drawings illustrate exemplary embodiments of the present disclosure and together with the description serve to explain the principles of the present disclosure. In the drawings:

[0043] Figure 1 is a plan view schematically showing a display device according to an embodiment of the present disclosure;

[0044] Figure 2 is an equivalent circuit diagram of a pixel of a display device according to an embodiment of the inventive concept;

[0045] Figure 3 yes Figure 1 An enlarged plan view of area AA;

[0046] Figure 4 It is along Figure 3 A cross-sectional view taken along line II';

[0047] FIG. 5A to FIG. 5H is a cross-sectional view illustrating a method of manufacturing a display device according to an embodiment of the present disclosure; and

[0048] Figure 6 It is along Figure 3 8 is a cross-sectional view taken along line II' of FIG. 1 to illustrate a display device according to an embodiment of the present disclosure. DETAILED DESCRIPTION

[0049] The subject matter of the present disclosure will now be more fully described below with reference to the accompanying drawings in which various embodiments are shown. However, the subject matter of the present disclosure can be implemented in many different forms and should not be construed as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided so that the present disclosure will be thorough and complete, and the scope of the present disclosure will be fully conveyed to those skilled in the art. The same reference numerals always represent the same elements.

[0050] It will be understood that when an element such as a layer, region or substrate is referred to as "on" another element, the element may be directly on the other element, or there may be an intermediate element. In contrast, the term "directly" means that there is no intermediate element. As used herein, the term "and / or" includes any and all combinations of one or more related listed items. The terms used here are only used for the purpose of describing a specific embodiment and are not intended to be limiting. As used herein, unless the content clearly indicates otherwise, the singular forms "one", "one" and "the" and "at least one" are intended to include plural forms. "Or" means "and / or". It will also be understood that when the terms "include", "comprising" and / or their variations are used in this specification, it is explained that there are the features, regions, wholes, steps, operations, elements, components and / or groups, but it is not excluded that there are or add one or more other features, regions, wholes, steps, operations, elements, components and / or their groups. When a statement such as "at least one (kind) (person) in ... " is after a column of elements, the entire column of elements is modified without modifying the individual elements in the column of elements.

[0051] For ease of description, spatially relative terms such as "under ...", "below ...", "below ...", "above ...", "above ...", etc. may be used here to describe the relationship between one element or feature and another (other) element or feature as shown in the figure. It will be understood that the spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation depicted in the figure. For example, if the device in the figure is turned over, the element described as "below" or "below" other elements or features will then be positioned as "above" the other elements or features. Therefore, the exemplary term "below ..." can include both above and below orientations. The device can be positioned otherwise (rotated 90 degrees or at other orientations), and the spatially relative descriptors used here are interpreted accordingly.

[0052] It will be understood that, although the terms first, second, etc. can be used here to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings here, the first element, component, region, layer or part discussed below can be referred to as the second element, component, region, layer or part.

[0053] Exemplary embodiments are described herein with reference to cross-sectional views and / or plan views that are idealized exemplary illustrations. In the accompanying drawings, the thickness of layers and regions are exaggerated for clarity. Therefore, variations in the illustrated shapes caused by, for example, manufacturing techniques and / or tolerances are expected. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown here, but will include shape deviations caused by, for example, manufacturing. For example, an etched region shown as a rectangle will typically have rounded or curved features. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shape of the regions of the device, and are not intended to limit the scope of the exemplary embodiments.

[0054] Figure 1 is a plan view schematically showing a display device according to an embodiment of the present disclosure.

[0055] like Figure 1 As shown in , the display device 1000 may include a display area DA capable of displaying an image and a peripheral area PA outside the display area DA. Figure 1 It can be understood as a view of the substrate 100 of the display device 1000. For example, it can be understood that the substrate 100 includes a display area DA and a peripheral area PA.

[0056] Pixels configured to emit light of different colors may be disposed in the display area DA. In this regard, Figure 1 1 and 2 are shown, which are configured to emit red light, green light, and blue light, respectively. Figure 1 In the embodiment, the first to third pixels PX1, PX2 and PX3 are arranged in a Pentile form. However, the embodiments of the present disclosure are not limited thereto. In some embodiments, the arrangement of pixels may be variously modified and appropriately modified. In some embodiments of the present disclosure, the first to third pixels PX1, PX2 and PX3 may display images of different colors.

[0057] The peripheral area PA may correspond to a non-display area, and a driver and a power voltage supply line for providing electrical signals and power to the pixels may be disposed in the peripheral area PA. In addition, the peripheral area PA may include a pad area including a pad electrically connected to an electronic device and / or a printed circuit board.

[0058] In the present embodiment, the display device 1000 has a rectangular shape when viewed in a plan view. The extending direction of the long side of the display device 1000 is defined as a first direction DR1, and the extending direction of the short side of the display device 1000 is defined as a second direction DR2 (e.g., perpendicular to the first direction DR1). The thickness direction of the display device 1000 is defined as a third direction DR3 (e.g., perpendicular to the first direction DR1 and the second direction DR2).

[0059] Figure 2 is an equivalent circuit diagram of a pixel of a display device according to an embodiment of the present disclosure.

[0060] Reference Figure 2 , a pixel may include a pixel circuit PC and a display element connected to the pixel circuit PC. Figure 2 In FIG. 1 , an organic light emitting diode OLED is shown as a display element. The pixel circuit PC may include a first thin film transistor T1 , a second thin film transistor T2 , and a storage capacitor Cst.

[0061] The second thin film transistor T2 may be a switching thin film transistor and may be connected to the scan line SL and the data line DL. The second thin film transistor T2 may transmit a data voltage input from the data line DL to the first thin film transistor T1 in response to a switching voltage input from the scan line SL. The storage capacitor Cst may be connected to the second thin film transistor T2 and the driving voltage line PL and may store a voltage corresponding to a difference between a voltage transmitted from the second thin film transistor T2 and a first power supply voltage ELVDD supplied to the driving voltage line PL.

[0062] The first thin film transistor T1 may be a driving thin film transistor and may be connected to a driving voltage line PL and a storage capacitor Cst. The first thin film transistor T1 may control a driving current flowing from the driving voltage line PL to the organic light emitting diode OLED (e.g., a pixel electrode of the organic light emitting diode OLED) in response to the value of the voltage stored in the storage capacitor Cst. The organic light emitting diode OLED may emit light having a set or predetermined brightness determined by the driving current. The counter electrode (e.g., cathode) of the organic light emitting diode OLED may be supplied with a second power supply voltage ELVSS.

[0063] exist Figure 2 In the embodiment, the pixel circuit PC includes two thin film transistors and one storage capacitor. However, the embodiments of the present disclosure are not limited thereto. In some embodiments, the number of thin film transistors and the number of storage capacitors may be changed differently and appropriately according to the design of the pixel circuit PC.

[0064] Figure 3 yes Figure 1 An enlarged plan view of area AA, Figure 4It is along Figure 3 A cross-sectional view taken along line II'.

[0065] Reference Figure 3 , the light emitting area and the non-light emitting area NPXA may be defined in the display area DA. The light emitting area may be an area of ​​the first pixel PX1 to the third pixel PX3 in which an image is displayed. The light emitting area may be defined to correspond to portions of the pixel electrodes 211, 212, and 213 exposed by the openings OP11, OP21, and OP31 of the pixel defining layer 120 (to be described in more detail later).

[0066] The area in which the image is displayed of the first pixel PX1 may be defined as a first light emitting area PXA1 , the area in which the image is displayed of the second pixel PX2 may be defined as a second light emitting area PXA2 , and the area in which the image is displayed of the third pixel PX3 may be defined as a third light emitting area PXA3 .

[0067] The non-luminescent region NPXA may be a region in which light emitted from the organic light emitting diodes OLED1 to OLED3 is blocked. The non-luminescent region NPXA may be defined (e.g., formed) between the luminescent regions PXA1, PXA2, and PXA3. The non-luminescent region NPXA may be a single region. That is, the non-luminescent region NPXA may form a single continuous region around or around each luminescent region.

[0068] Reference Figure 4 , first to third pixel circuits PC1, PC2, and PC3 for driving the first to third pixels PX1, PX2, and PX3, respectively, may be disposed on the substrate 100. In one embodiment, a buffer layer may be disposed between the substrate 100 and the pixel circuits PC1, PC2, and PC3. The first to third pixel circuits PC1, PC2, and PC3 may include reference Figure 2 A thin film transistor and a storage capacitor are described.

[0069] The substrate 100 may include a polymer resin such as polyethersulfone (PES), polyacrylate (PAR), polyetherimide (PEI), polyethylene naphthalate (PEN), polyethylene terephthalate (PET), polyphenylene sulfide (PPS), polyallyl ester, polyimide (PI), polycarbonate (PC) and / or cellulose acetate propionate (CAP).

[0070] The first insulating layer 110 may be disposed on the first to third pixel circuits PC1, PC2, and PC3. The first insulating layer 110 may cover the pixel circuits PC1, PC2, and PC3, and may be a planarized insulating layer to provide a flat surface. The first insulating layer 110 may include an organic insulating material such as polyimide.

[0071] Components constituting the first to third pixel circuits PC1 to PC3 (e.g., a semiconductor layer, a gate electrode, a source electrode, and a drain electrode of a thin film transistor, and an electrode plate of a storage capacitor) may be formed between the substrate 100 and the first insulating layer 110. In addition, an inorganic insulating layer and / or an organic insulating layer that may be disposed between the semiconductor layer and the gate electrode, between the gate electrode and the source electrode or the drain electrode, and between the electrode plates of the storage capacitor may also be formed between the substrate 100 and the first insulating layer 110.

[0072] First to third organic light emitting diodes OLED1, OLED2, and OLED3 may be disposed on the first insulating layer 110. The first to third organic light emitting diodes OLED1, OLED2, and OLED3 may be disposed to correspond to first to third light emitting areas PXA1, PXA2, and PXA3, respectively.

[0073] The first to third organic light emitting diodes OLED1, OLED2, and OLED3 may have similar structures, and therefore the first organic light emitting diode OLED1 will be mainly described in more detail below. The description of the second organic light emitting diode OLED2 and the third organic light emitting diode OLED3 may be substantially the same as the description of the first organic light emitting diode OLED1.

[0074] The first organic light emitting diode OLED1 may include a first pixel electrode 211 , a first intermediate layer 221 , and a first counter electrode 231 .

[0075] The first pixel electrode 211 may include a reflective layer formed of silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), and / or a mixture thereof.

[0076] Optionally, the first pixel electrode 211 may include the reflective layer described above and a transparent conductive oxide (TCO) layer on and / or under the reflective layer. For example, the transparent conductive oxide layer may be made of indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In 2 O 3 ), indium gallium oxide (IGO) and / or aluminum zinc oxide (AZO). In an embodiment, the first pixel electrode 211 may have a triple-layer structure of ITO / Ag / ITO.

[0077] The first intermediate layer 221 may include an organic light emitting layer, and may also include a functional layer disposed on and / or under the organic light emitting layer. The functional layer may include a hole injection layer, a hole transport layer, an electron transport layer and / or an electron injection layer. The organic light emitting layer may emit red light, green light, blue light or white light.

[0078] The first pair of electrodes 231 may be formed of a conductive material having a low work function. For example, the first pair of electrodes 231 may include silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), lithium (Li), calcium (Ca), and / or alloys thereof. In an embodiment, the first pair of electrodes 231 may include aluminum (Al), silver (Ag), and / or an alloy of magnesium and silver (Mg:Ag). In an embodiment, the first pair of electrodes 231 may include an alloy in which the silver (Ag) content is greater than the magnesium (Mg) content.

[0079] The first intermediate layer 221 and the first counter electrode 231 may be formed by a thermal deposition method.

[0080] The first intermediate layer 221 and the first counter electrode 231 may be disposed in the first light emitting region PXA1 and portions of the non-light emitting region NPXA adjacent to the first light emitting region PXA1 , but may not be disposed in other portions of the non-light emitting region NPXA.

[0081] Each of the second organic light emitting diode OLED2 and the third organic light emitting diode OLED3 may have substantially the same structure as the first organic light emitting diode OLED1 , and thus a detailed description of components thereof is not repeated.

[0082] The second organic light emitting diode OLED2 may include a second pixel electrode 212, a second intermediate layer 222, and a second counter electrode 232. The third organic light emitting diode OLED3 may include a third pixel electrode 213, a third intermediate layer 223, and a third counter electrode 233. In an embodiment of the present disclosure, the first to third intermediate layers 221, 222, and 223 may include organic light emitting layers configured to emit light of different colors from each other.

[0083] The display device 1000 may further include a pixel defining layer 120. The pixel defining layer 120 may define a non-light emitting area NPXA.

[0084] The pixel defining layer 120 may be disposed on the first to third pixel electrodes 211, 212, and 213, and may cover ends of the first to third pixel electrodes 211, 212, and 213. The first to third openings OP11, OP21, and OP31 may be disposed (e.g., formed) in the pixel defining layer 120. The first to third openings OP11, OP21, and OP31 may expose portions of the first to third pixel electrodes 211, 212, and 213, respectively. The first to third openings OP11, OP21, and OP31 may correspond to the first to third light emitting areas PXA1, PXA2, and PXA3, respectively.

[0085] The first to third intermediate layers 221 , 222 , and 223 may be disposed on the pixel defining layer 120 .

[0086] For example, the pixel defining layer 120 may be formed of an organic insulating material such as an acrylic organic material and / or benzocyclobutene (BCB). In another embodiment, the pixel defining layer 120 may be formed of an organic insulating material such as silicon nitride (SiN x ), silicon oxide (SiO x ), silicon oxynitride (SiON) and / or silicon oxycarbide (SiOC). When the pixel defining layer 120 is formed of an inorganic insulating material, the pixel defining layer 120 can block the penetration path of oxygen and / or moisture to inhibit, protect or prevent the organic light emitting diode from being damaged by oxygen and / or moisture.

[0087] The display device 1000 may further include an auxiliary electrode 130. The auxiliary electrode 130 may be disposed on the pixel defining layer 120. The auxiliary electrode 130 may directly contact a top surface of the pixel defining layer 120.

[0088] The auxiliary electrode 130 may be disposed in the non-light emitting area NPXA. The area of ​​the auxiliary electrode 130 may be smaller than the area of ​​the pixel defining layer 120 in a plan view, and thus the auxiliary electrode 130 may be covered by the pixel defining layer 120 in a plan view. The auxiliary electrode 130 may be formed by a metal layer including a low resistance metal such as molybdenum (Mo), titanium (Ti), copper (Cu), aluminum (Al) and / or an alloy thereof. In addition, the auxiliary electrode 130 may further include a transparent conductive oxide layer (e.g., indium tin oxide (ITO)) disposed on and / or under the metal layer described above.

[0089] The auxiliary electrode 130 may contact the first to third pairs of electrodes 231, 232, and 233 to be electrically connected to the first to third pairs of electrodes 231, 232, and 233. The first to third pairs of electrodes 231, 232, and 233 may be electrically connected to each other through the auxiliary electrode 130, and thus may receive the same voltage for driving the first to third organic light emitting diodes OLED1, OLED2, and OLED3.

[0090] The display device 1000 may further include a spacer 150 . The spacer 150 may be disposed between the pixel defining layer 120 and the auxiliary electrode 130 .

[0091] The spacer 150 may be disposed in the non-light emitting area NPXA. When viewed in a plan view, the spacer 150 may have an island shape and may be disposed in plurality around each of the first to third light emitting areas PXA1, PXA2, and PXA3. Figure 3 In the embodiment, four spacers 150 spaced apart from each other are disposed around each of the first to third light emitting regions PXA1, PXA2, and PXA3. However, the embodiments of the present disclosure are not limited thereto. The number of spacers 150 disposed around each of the first to third light emitting regions PXA1, PXA2, and PXA3 may be variously and appropriately set or changed.

[0092] In an embodiment of the present disclosure, each of the first to third light emitting regions PXA1, PXA2, and PXA3 may have a polygonal shape when viewed in a plan view (e.g., in the third direction DR3). When viewed in a plan view, the spacer 150 may be disposed adjacent to a corner of each of the first to third light emitting regions PXA1, PXA2, and PXA3.

[0093] The shortest distance DT between the spacers 150 adjacent to each other in a plan view may be in the range of 10 μm to 25 μm. FIG. 5C to FIG. 5E In the embodiment described in more detail, the spacers 150 can support the mask layer to prevent or protect the mask layer from collapse. However, if the shortest distance between adjacent spacers 150 is greater than 25 μm, the spacers 150 may have difficulty supporting the mask layer. If the shortest distance is less than 10 μm, the etching solution may not penetrate freely between the spacers 150.

[0094] exist Figure 3 In the embodiment of the present invention, the spacer 150 has a circular shape in a plan view. However, the embodiments of the present disclosure are not limited thereto. The shape of the spacer 150 may be modified variously and appropriately.

[0095] The spacer 150 may include an organic material.

[0096] The spacer 150 may be sealed (e.g., encapsulated or completely covered) by the auxiliary electrode 130. Therefore, even if gas emerges (e.g., is generated) from the organic material included in the spacer 150 during the manufacturing process, the gas is not transferred (e.g., does not penetrate) to the organic light emitting layer included in the first to third intermediate layers 221, 222, and 223. Therefore, the organic light emitting layer can be protected.

[0097] The display device 1000 may further include first to third insulating protective layers 241, 242, and 243. The first to third insulating protective layers 241, 242, and 243 may be disposed on the first to third pairs of electrodes 231, 232, and 233, respectively, and may respectively cover the first to third pairs of electrodes 231, 232, and 233. The first to third insulating protective layers 241, 242, and 243 may respectively encapsulate the first to third pairs of electrodes 231, 232, and 233 to prevent or protect the first to third pairs of electrodes 231, 232, and 233 from being exposed to moisture and / or air.

[0098] The first to third insulating protective layers 241 , 242 , and 243 may be spaced apart from each other. Therefore, a portion of the auxiliary electrode 130 may be exposed between the first to third insulating protective layers 241 , 242 , and 243 .

[0099] The first to third insulating protective layers 241, 242, and 243 may include an inorganic insulating material such as silicon nitride and / or silicon oxide. The first to third insulating protective layers 241, 242, and 243 may be formed by, for example, a chemical vapor deposition (CVD) method.

[0100] Ends of each of the first to third intermediate layers 221 , 222 , and 223 , ends of each of the first to third counter electrodes 231 , 232 , and 233 , and ends of each of the first to third insulating protective layers 241 , 242 , and 243 may overlap the spacer 150 .

[0101] FIG. 5A to FIG. 5H is a cross-sectional view illustrating a method of manufacturing a display device according to an embodiment of the present disclosure. FIG. 5A to FIG. 5H Can be along Figure 3 The cross-sectional view corresponds to the line II'.

[0102] FIG. 5A to FIG. 5HThe first to third light emitting areas PXA1, PXA2, and PXA3 and the non-light emitting areas NPXA adjacent to (e.g., surrounding) the first to third light emitting areas PXA1, PXA2, and PXA3 are shown. The first to third light emitting areas PXA1, PXA2, and PXA3 may be defined as areas for displaying images having different colors.

[0103] Reference Figure 5A , pixel circuits PC1 to PC3, a first insulating layer 110, first to third pixel electrodes 211, 212, and 213, and a pixel defining layer 120 may be formed on a substrate 100. The pixel circuits PC1 to PC3, the first insulating layer 110, the first to third pixel electrodes 211, 212, and 213, and the pixel defining layer 120 may be formed using any suitable or known method, and a detailed description thereof will not be repeated.

[0104] Thereafter, a spacer 150 may be formed on the pixel defining layer 120 .

[0105] An organic material may be deposited on the pixel defining layer 120, and then, a patterning process may be performed on the organic material to form the spacer 150. The spacer 150 may overlap the pixel defining layer 120.

[0106] The spacer 150 may be formed in an island shape around each of the first to third light emitting regions PXA1 , PXA2 , and PXA3 .

[0107] The spacer 150 may include first to third spacers 151 , 152 , and 153 .

[0108] The first spacer 151 may be formed around the first light emitting region PXA1, the second spacer 152 may be formed around the second light emitting region PXA2, and the third spacer 153 may be formed around the third light emitting region PXA3. In other words, the first opening OP11 (see FIG. 1 ) of the pixel defining layer 120 may be formed around the first opening OP11 (see FIG. 1 ). Figure 4 ) is formed outside the first spacer 151, and can be formed at the second opening OP21 (see Figure 4 ) outside the pixel defining layer 120 to form a second spacer 152, and the third opening OP31 (see Figure 4 )A third spacer 153 is formed outside.

[0109] The first spacer 151 may be a spacer closest to the first light-emitting region PXA1 among the first to third light-emitting regions PXA1, PXA2, and PXA3, the second spacer 152 may be a spacer closest to the second light-emitting region PXA2 among the first to third light-emitting regions PXA1, PXA2, and PXA3, and the third spacer 153 may be a spacer closest to the third light-emitting region PXA3 among the first to third light-emitting regions PXA1, PXA2, and PXA3.

[0110] Thereafter, the auxiliary electrode 130 may be formed on the pixel defining layer 120 having the spacer 150 formed thereon. A conductive material may be formed on the pixel defining layer 120 and the spacer 150, and then, a patterning process may be performed on the conductive material to form the auxiliary electrode 130.

[0111] The auxiliary electrode 130 may be formed of a metal layer including a low resistance metal such as molybdenum (Mo), titanium (Ti), copper (Cu), aluminum (Al), and / or an alloy thereof. In addition, the auxiliary electrode 130 may further include a transparent conductive oxide layer (e.g., indium tin oxide (ITO)) disposed on and / or under the metal layer described above.

[0112] The auxiliary electrode 130 may overlap the pixel defining layer 120 and the spacer 150. The auxiliary electrode 130 may cover the spacer 150 and may seal the spacer 150 together with the pixel defining layer 120.

[0113] Reference Figure 5B Subsequently, a first polymer layer 301 may be formed on the pixel defining layer 120 on which the auxiliary electrode 130 is formed.

[0114] The first polymer layer 301 may include a polymer material. For example, the first polymer layer 301 may include a fluorine-containing polymer. For example, the first polymer layer 301 may include polytetrafluoroethylene, polychlorotrifluoroethylene, polydichlorodifluoroethylene, a copolymer of chlorotrifluoroethylene and difluorodichloroethylene, a copolymer of tetrafluoroethylene and perfluoroalkyl vinyl ether, and / or a copolymer of chlorotrifluoroethylene and perfluoroalkyl vinyl ether.

[0115] To form the first polymer layer 301, a polymer material may be coated on the pixel defining layer 120 on which the auxiliary electrode 130 is formed. Thereafter, the polymer material may be reflowed (eg, flowed) by heating the polymer material, thereby forming the first polymer layer 301 having a flat top surface.

[0116] Next, a photoresist material may be coated on the first polymer layer 301 to form a first photoresist layer 311 .

[0117] Reference Figure 5C , then, the first photoresist layer 311 may be patterned to form a first mask layer 320. A portion of the first photoresist layer 311 located at a position corresponding to the first pixel electrode 211 may be removed through an exposure process and a development process. A first mask opening OP12 exposing the first pixel electrode 211 may be provided (e.g., formed) in the first mask layer 320.

[0118] At this time, the first mask layer 320 may overlap the first spacer 151 when viewed in a plan view.

[0119] Subsequently, the first polymer layer 301 may be etched using the first mask layer 320 as an etching mask to form a first lift-off layer 310. A first lift-off opening OP13 exposing the first pixel electrode 211 may be provided (eg, formed) in the first lift-off layer 310.

[0120] When the first polymer layer 301 includes a fluoropolymer, a solvent capable of etching the fluoropolymer (eg, hydrofluoroether) may be used as an etching solution.

[0121] The first peeling layer 310 may have an undercut shape that is laterally recessed from an inner side surface of the first mask layer 320 defining the first mask opening OP12. In other words, when viewed in a plan view, the first mask layer 320 may have an area wider (e.g., larger) than that of the first peeling layer 310 and may cover the first peeling layer 310. When viewed in a plan view, the size of the first peeling opening OP13 may be larger than that of the first mask opening OP12.

[0122] A distance W1 between the pixel defining layer 120 (e.g., the top surface of the pixel defining layer 120) and the top surface of the first peeling layer 310 may be greater than a distance W2 between the pixel defining layer 120 (e.g., the top surface of the pixel defining layer 120) and the top surface of the first spacer 151.

[0123] The first peeling layer 310 may expose at least a portion of the first spacer 151. The first peeling layer 310 may not overlap at least a portion of the first spacer 151. The first peeling layer 310 may be spaced apart from the first spacer 151.

[0124] Reference Figure 5D Next, a first intermediate layer 221 and a first counter electrode 231 may be sequentially formed on the first pixel electrode 211 through the first mask opening OP12 of the first mask layer 320. A material for forming the first intermediate layer 221 and the first counter electrode 231 may be formed on the first mask layer 320 and on the first pixel electrode 211.

[0125] The first intermediate layer 221 and the first counter electrode 231 may be formed to overlap the first spacer 151 and the auxiliary electrode 130. The first counter electrode 231 may be in contact with the auxiliary electrode 130. Figure 5D The first organic light emitting diode OLED1 is formed by a process.

[0126] The structures and materials of the first intermediate layer 221 and the first pair of electrodes 231 may be the same as those of reference Figure 4 The descriptions are the same, so a detailed description thereof will not be repeated.

[0127] Reference Figure 5E Subsequently, the first insulating protective layer 241 may be formed through the first mask opening OP12 of the first mask layer 320. A material for forming the first insulating protective layer 241 may be formed on the first counter electrode 231, and a material for forming the first insulating protective layer 241 may also be formed on the first mask layer 320.

[0128] The first insulating protective layer 241 may seal or encapsulate the first pair of electrodes 231. The material of the first insulating protective layer 241 may be the same as that of the reference Figure 4 The descriptions are the same, so a detailed description thereof will not be repeated.

[0129] Reference can be formed by deposition process Figure 5D and Figure 5E The first intermediate layer 221, the first pair of electrodes 231 and the first insulating protection layer 241 are described.

[0130] In the deposition process of the first intermediate layer 221, the first pair of electrodes 231 and / or the first insulating protective layer 241, the temperature may rise, so that the first peeling layer 310 may soften and reflow (e.g., flow), and thus the first peeling layer 310 may not firmly (e.g., not fully) support the first mask layer 320. In this case, a portion of the first mask layer 320 that is not overlapped with the first peeling layer 310 and is adjacent to the first light-emitting region PXA1 may collapse toward the pixel defining layer 120. If the first mask layer 320 collapses, the position and shape of the first mask opening OP12 may be changed. In this case, it may be difficult to form a desired deposition pattern in the first light-emitting region PXA1 in a subsequent process. In addition, if the first mask layer 320 collapses, the first mask layer 320 may contact at least one of the first intermediate layer 221, the first pair of electrodes 231 and the first insulating protective layer 241, and thus a space into which the etching solution penetrates may not be ensured (e.g., a space into which the etching solution penetrates may be blocked). In this case, it may be difficult to remove the first peeling layer 310 and the first mask layer 320 in a subsequent process.

[0131] However, in the method of manufacturing a display device according to an embodiment of the present disclosure, when the first mask layer 320 collapses in the deposition process of the first intermediate layer 221 and the first pair of electrodes 231, the first spacer 151 can support the first mask layer 320. The first spacer 151 can be adjacent to the first light emitting region PXA1 and can have an island shape. Therefore, even if the first mask layer 320 may collapse, the first mask layer 320 may have an area between the first spacers 151 (adjacent to each other) that is not in contact with at least one selected from the first intermediate layer 221, the first pair of electrodes 231, and the first insulating protective layer 241, and an etching solution for removing the first peeling layer 310 can be freely provided through the area (for example, the etching solution for removing the first peeling layer 310 can flow without hindrance). Therefore, the first peeling layer 310 and the first mask layer 320 can be easily removed.

[0132] Reference Fig. 5F , thereafter, the first peeling layer 310 and the first mask layer 320 may be removed. The first peeling layer 310 and the first mask layer 320 may be removed using an etching solution.

[0133] When the first peeling layer 310 includes a fluoropolymer, a solvent capable of etching the fluoropolymer (eg, hydrofluoroether) may be used as an etching solution.

[0134] Can be FIG. 5A to FIG. 5F The first organic light emitting diode OLED1 and the first insulating protective layer 241 are formed in the first light emitting area PXA1 by a process of FIG.

[0135] Thereafter, a process of forming a second organic light emitting diode OLED2 and a second insulating protective layer 242 in the second light emitting region PXA2 may be performed. The process may be repeated for the second light emitting region PXA2 (eg, by repeating FIG. 5B to FIG. 5F The process of forming the second organic light emitting diode OLED2 and the second insulating protective layer 242 may be substantially the same as the process of forming the first organic light emitting diode OLED1 and the first insulating protective layer 241, and thus a detailed description thereof will not be repeated. Figure 5G 2 is a view in which a second organic light emitting diode OLED2 and a second insulating protective layer 242 are formed.

[0136] Thereafter, a process of forming a third organic light emitting diode OLED3 and a third insulating protective layer 243 in the third light emitting region PXA3 may be performed. The process may be repeated for the third light emitting region PXA3 (eg, by repeating FIG. 5B to FIG. 5FThe process of forming the third organic light emitting diode OLED3 and the third insulating protective layer 243 may be substantially the same as the process of forming the first organic light emitting diode OLED1 and the first insulating protective layer 241, and thus a detailed description thereof will not be repeated. Figure 5H is a view in which a third organic light emitting diode OLED3 and a third insulating protective layer 243 are formed.

[0137] Figure 6 It is along Figure 3 A cross-sectional view of a display device according to an embodiment of the present disclosure is shown taken along line II'.

[0138] Figure 6 The spacer and pixel defining layer of the display device 1001 are Figure 4 The spacers and pixel defining layers of the display device 1000 are different, while other components of the display device 1001 may be substantially the same as corresponding components of the display device 1000. Figure 6 The spacer and the pixel defining layer of the display device 1001 are mainly described, and the description of other components will not be repeated.

[0139] The display device 1001 may include a pixel defining layer 120-1 and a spacer 150-1 disposed on the pixel defining layer 120-1. The pixel defining layer 120-1 and the spacer 150-1 may constitute a single integral (unitary) body.

[0140] The pixel defining layer 120-1 and the spacer 150-1 may be formed of the same material. The pixel defining layer 120-1 and the spacer 150-1 may include an organic material.

[0141] The pixel defining layer 120 - 1 and the spacer 150 - 1 may be formed through the same process using a half-tone mask.

[0142] In accordance with Figure 6 In the display device 1001 of the embodiment of the present invention, the pixel defining layer 120-1 and the spacer 150-1 can be formed by the same process, and thus one patterning process can be removed. Figure 6 The embodiment can simplify the manufacturing process.

[0143] In the method of manufacturing a display device according to an embodiment of the present disclosure, a spacer overlapping the mask layer may be formed to prevent or protect the lift-off layer and the mask layer from collapsing. Therefore, the lift-off layer and the mask layer may be easily removed in a subsequent process.

[0144] Furthermore, the spacer may be covered by the auxiliary electrode, and thus gas transfer (eg, permeation) caused by outgassing to the organic light emitting diode may be reduced or prevented.

[0145] As used herein, the terms "substantially," "approximately," and similar terms are used as terms of approximation rather than as terms of degree, and are intended to account for the inherent deviations in measurements or calculations that one of ordinary skill in the art would recognize. In addition, "may" is used when describing embodiments of the present invention to mean "one or more embodiments of the present invention." Moreover, the term "exemplary" is intended to mean an example or illustration.

[0146] In addition, any numerical range recorded here is intended to include all sub-ranges of the same numerical precision contained in the range of the record. For example, the range of "1.0 to 10.0" is intended to include all sub-ranges between the minimum value 1.0 recorded and the maximum value 10.0 recorded (and including the minimum value 1.0 recorded and the maximum value 10.0 recorded), that is, all sub-ranges (such as 2.4 to 7.6) with a minimum value equal to or greater than 1.0 and a maximum value equal to or less than 10.0. Any maximum numerical limit recorded here is intended to include all lower numerical limits contained therein, and any minimum numerical limit recorded in this specification is intended to include all higher numerical limits contained therein. Therefore, the applicant reserves the right to modify this specification (including claims) to explicitly record any sub-ranges included in the range explicitly recorded here.

[0147] Although the subject matter of the present disclosure has been described with reference to example embodiments, it will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the present disclosure. Therefore, it should be understood that the above embodiments are not restrictive, but illustrative. Therefore, the scope of the present disclosure will be determined by the broadest permissible interpretation of the claims and their equivalents, and should not be limited or restricted by the foregoing description.

Claims

1. A display device, comprising: A substrate having a light-emitting region and a non-light-emitting region adjacent to the light-emitting region; A pixel defining layer, located on the non-luminescent area of ​​the substrate; A spacer, located on the pixel defining layer; an auxiliary electrode, located on the spacer; as well as an organic light emitting diode, located on the substrate and having at least a portion located in the light emitting region, The organic light emitting diode comprises: a pixel electrode; an intermediate layer located on the pixel electrode and comprising an organic light emitting layer; and a counter electrode located on the intermediate layer and electrically connected to the auxiliary electrode, and The auxiliary electrode and the pixel defining layer seal the spacer, and the auxiliary electrode contacts a side surface of the spacer.

2. The display device according to claim 1, wherein: The intermediate layer and / or the counter electrode overlaps the spacer.

3. The display device according to claim 1, wherein: The spacer includes an organic material.

4. The display device according to claim 3, wherein: The pixel defining layer and the spacer are composed of different materials from each other.

5. The display device according to claim 1, wherein: The pixel defining layer and the spacer constitute a single integral body.

6. The display device according to claim 1, wherein: The auxiliary electrode contacts a top surface of the spacer.

7. The display device according to claim 1, wherein: The spacers are arranged in a plurality adjacent to the light emitting region, and Wherein, each of the spacers has an island shape.

8. The display device according to claim 7, wherein: When viewed in a plan view, the light emitting region has a polygonal shape, and Wherein, each of the spacers is adjacent to a corner of the light emitting area.

9. The display device according to claim 7, wherein: The shortest distance between the spacers adjacent to each other ranges from 10 μm to 25 μm.

10. A method for manufacturing a display device, the method comprising the following steps: forming a first pixel electrode for emitting a first color light, a second pixel electrode for emitting a second color light, and a third pixel electrode for emitting a third color light on a substrate; forming a pixel defining layer exposing a portion of the first pixel electrode, a portion of the second pixel electrode, and a portion of the third pixel electrode; forming a first spacer on the pixel defining layer adjacent to the first pixel electrode; forming an auxiliary electrode covering the side surface and the upper surface of the first spacer; forming a first lift-off layer and a first mask layer on the pixel defining layer, wherein the first lift-off layer exposes the portion of the first pixel electrode, and the first mask layer has a first mask opening exposing the portion of the first pixel electrode; forming a first intermediate layer on the first pixel electrode through the first mask opening; forming a first pair of electrodes on the first intermediate layer through the first mask opening; and The first lift-off layer and the first mask layer are removed.

11. The method of claim 10, further comprising: After the step of forming the first pair of electrodes, a first insulating protection layer covering the first pair of electrodes is formed through the first mask opening.

12. The method of claim 10, wherein: The first spacer is provided in plurality, and Each of the first spacers has an island shape.

13. The method of claim 10, wherein: The step of forming the first peeling layer and the first mask layer includes: forming a first polymer layer on the pixel defining layer on which the auxiliary electrode is formed; forming a first photoresist layer on the first polymer layer; exposing and developing the first photoresist layer to form the first mask layer; and The first polymer layer is etched using the first mask layer as an etching mask to form the first lift-off layer.

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