Display panel and method of manufacturing the same

Abstract

A display panel and a manufacturing method thereof are provided. The display panel according to an embodiment of the inventive concept includes: a base substrate, on which a pixel area and a surrounding area adjacent to the pixel area are defined; a pixel defining layer, which is disposed on the base substrate and on which a plurality of openings corresponding to the pixel area are defined; and a plurality of light-emitting layers, which are respectively disposed in the plurality of openings. Here, the pixel defining layer includes: a first pixel defining portion; a second pixel defining portion, which is disposed between the light-emitting layer and the first pixel defining portion; and a third pixel defining portion, which covers the first pixel defining portion and the second pixel defining portion and includes a spacer that exposes a portion of the first pixel defining portion.

Description

[0001] This patent application claims the benefit of Korean Patent Application No. 10-2019-0059463, filed on May 21, 2019, which is hereby incorporated by reference in its entirety. Technical Field

[0002] The present disclosure herein relates to a display panel and a method of manufacturing the same. More particularly, the present disclosure herein relates to a display panel having improved light emitting characteristics and improved reliability and a method of manufacturing the same. Background Art

[0003] The electronic device is activated according to the electrical signal. The electronic device includes various electronic components such as an electronic panel and an electronic module. The electronic panel includes a plurality of light emitting elements that generate an image. The light emitting elements can respectively define light emitting areas, and the image can be realized by the light emitted by the light emitting elements in the light emitting areas.

[0004] Typically, a plurality of anodes are disposed on a substrate, and an organic insulating layer is provided to cover the anodes. A pixel defining layer is provided by patterning the organic insulating layer to have a plurality of openings. Predetermined areas of the anode electrode are exposed by the openings of the pixel defining layer, respectively. The area provided by the openings can be defined as a light emitting area of ​​the pixel.

[0005] The light emitting layer is disposed on the anode in the light emitting region of the pixel. The light emitting layer may be provided by a printing method such as inkjet printing. Summary of the invention

[0006] The present disclosure provides a display panel having improved light emitting efficiency and improved reliability, and in which liquid repellency of an organic pixel defining layer is not reduced although a residue treatment process is included, and a method of manufacturing the same.

[0007] An embodiment of the inventive concept provides a display panel, the display panel comprising: a base substrate, a pixel region and a surrounding region adjacent to the pixel region are defined on the base substrate; a pixel defining layer, disposed on the base substrate, and a plurality of openings corresponding to the pixel region are defined on the pixel defining layer; and a plurality of light emitting layers, respectively disposed in the plurality of openings. Here, the pixel defining layer comprises: a first pixel defining portion; a second pixel defining portion, disposed between the light emitting layer and the first pixel defining portion; and a third pixel defining portion, covering the first pixel defining portion and the second pixel defining portion, and comprising a spacer that exposes a portion of the first pixel defining portion.

[0008] In an embodiment, the first pixel defining part may include one side surface adjacent to the second pixel defining part, and the one side surface may be exposed by the spacer of the third pixel defining part.

[0009] In an embodiment, the first pixel defining part may include a hydrophobic material.

[0010] In an embodiment, the light emitting layer may contact the exposed portion of the first pixel defining portion.

[0011] In an embodiment, the third pixel defining part may overlap at least a portion of the light emitting layer in a plan view.

[0012] In an embodiment, the third pixel defining portion may include silicon nitride (SiN x ), silicon oxide (SiO x ) and silicon oxynitride (SiO x N y ) at least one of.

[0013] In an embodiment, the display panel may further include a base pixel defining layer overlapping the surrounding area of ​​the base substrate. The pixel defining layer may be disposed on the base pixel defining layer.

[0014] In an embodiment, the first pixel defining part may have a height equal to or greater than a height of the second pixel defining part.

[0015] In an embodiment, the first pixel defining part and the second pixel defining part may be spaced apart from each other.

[0016] In an embodiment, the first pixel defining part may include a plurality of sub-patterns spaced apart from each other in the first direction.

[0017] In an embodiment of the inventive concept, a method for manufacturing a display panel includes: forming a plurality of electrodes on a base substrate; forming a plurality of organic patterns by patterning an organic material on the base substrate on the plurality of electrodes; forming an inorganic layer to cover the plurality of organic patterns; patterning the inorganic layer to expose the plurality of electrodes; removing residues on the plurality of electrodes; and curing the organic patterns to form a pixel defining layer.

[0018] In an embodiment, in patterning the inorganic layer, a spacer may be formed in the inorganic layer.

[0019] In embodiments, at least a portion of the cured organic pattern may be exposed by the spacers.

[0020] In an embodiment, a plurality of openings may be defined in the pixel defining layer to expose the plurality of electrodes. The manufacturing method may further include: after forming the pixel defining layer, forming an intermediate layer including a light emitting material in each of the plurality of openings. The intermediate layer may contact the exposed portion of the cured organic pattern.

[0021] In an embodiment, the pixel defining layer may include a first pixel defining portion, a second pixel defining portion spaced apart from the first pixel defining portion, and a third pixel defining portion covering the first pixel defining portion and the second pixel defining portion and having a spacer defining a portion exposing the first pixel defining portion. The first pixel defining portion may be formed by curing a first organic pattern formed on a base substrate before forming an inorganic layer. The second pixel defining portion may be formed by curing a second organic pattern formed on a base substrate adjacent to the first pixel defining portion after forming an inorganic layer.

[0022] In an embodiment, after the curing of the second organic pattern, the third pixel defining portion may be formed by forming a spacer in the inorganic layer. The spacer may be formed at a boundary between the first pixel defining portion and the second pixel defining portion.

[0023] In an embodiment, in the formation of the pixel defining layer, the organic pattern may be shrunk by a curing process.

[0024] In embodiments, the plurality of organic patterns may include a hydrophobic material.

[0025] In an embodiment, the removing of the residue may include performing a plasma treatment on a surface of the inorganic layer.

[0026] In an embodiment, the manufacturing method may further include: before forming the plurality of organic patterns, forming a base pixel defining layer on the base substrate. The pixel defining layer may be formed on the base pixel defining layer. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The accompanying drawings are included to provide a further understanding of the inventive concept and are incorporated in and constitute a part of this specification. The accompanying drawings illustrate exemplary embodiments of the inventive concept and together with the description serve to explain the principles of the inventive concept. In the drawings:

[0028] Figure 1 is a perspective view showing a display panel according to an embodiment of the inventive concept;

[0029] Figure 2 is a plan view showing a display panel according to an embodiment of the inventive concept;

[0030] Figure 3A is a plan view showing a pixel area of ​​a display panel according to an embodiment of the inventive concept;

[0031] Figure 3B is a cross-sectional view showing a pixel region of a display panel according to an embodiment of the inventive concept;

[0032] Figure 4A , Figure 4B and Figure 4Cis a cross-sectional view showing a pixel region of a display panel according to an embodiment of the inventive concept;

[0033] Figure 5 is a cross-sectional view showing a pixel region of a display panel according to an embodiment of the inventive concept;

[0034] Fig. 6A , Figure 6B , Figure 6C , Fig.6D , Fig. 6E , Fig. 6F and Figure 6G is a cross-sectional view sequentially showing a partial process of a method for manufacturing a display panel according to an embodiment of the inventive concept;

[0035] Fig. 7A and Figure 7B are cross-sectional views sequentially illustrating partial processes of a method for manufacturing a display panel according to an embodiment of the inventive concept; and

[0036] Fig. 8A and Figure 8B are cross-sectional views sequentially illustrating partial processes of a method of manufacturing a display panel according to an embodiment of the inventive concept. DETAILED DESCRIPTION

[0037] Hereinafter, preferred embodiments of the inventive concept will be described in more detail below with reference to the accompanying drawings. Since the present disclosure may have different modified embodiments, preferred embodiments are shown in the accompanying drawings and described in the detailed description of the inventive concept. However, this does not limit the present disclosure to specific embodiments, and it should be understood that the present disclosure covers all modifications, equivalents and alternatives within the scope of the inventive concept and technology.

[0038] The same reference numerals always refer to the same elements. In the accompanying drawings, the size and dimensions of each structure are exaggerated, omitted or schematically shown for ease of description and clarity. It will be understood that although terms such as "first" and "second" are used here to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one component from other components. For example, a first element referred to as a first element in one embodiment may be referred to as a second element in another embodiment without departing from the scope of the appended claims. Unless otherwise indicated, terms in the singular may include plural forms.

[0039] The meaning of “include” or “comprising” refers to a property, region, fixed number, step, process, element and / or component, but does not exclude other properties, regions, fixed numbers, steps, processes, elements and / or components.

[0040] In the specification, it will be understood that when a layer (or film), region or plate is referred to as being "on" another layer, region or plate, the layer (or film), region or plate may be directly on the other layer, region or plate, or an intermediate layer, region or plate may also be present. In contrast, it will be understood that when a layer (or film), region or plate is referred to as being "under" another layer, region or plate, the layer (or film), region or plate may be directly under the other layer (or film), region or plate, or an intermediate layer, region or plate may also be present. In addition, in the present specification, a structure in which a layer, film, region or plate is disposed "on" another layer, film, region or plate may include a structure in which a layer, film, region or plate is disposed at both the lower and upper portions of another layer, film, region or plate.

[0041] On the other hand, it will be understood that when a layer, film, region or panel is "directly disposed" on another layer, film, region or panel, there may not be another layer, film, region or panel between them. For example, the feature of "directly disposed" can mean that two layers or two components are disposed without using additional components such as bonding components.

[0042] Hereinafter, a display panel according to an embodiment of the inventive concept will be described with reference to the accompanying drawings.

[0043] Figure 1 is a perspective view illustrating a display panel DP according to an embodiment of the inventive concept. Figure 2 is a plan view showing a display panel DP according to an embodiment of the inventive concept.

[0044] Reference Figure 1 and Figure 2 The display panel DP may be one of a liquid crystal display panel, an electrophoretic display panel, a micro-electromechanical system display panel, an electrowetting display panel, an organic light emitting display panel, a micro-LED display panel, a quantum dot display panel, and a quantum rod display panel. However, embodiments of the inventive concept are not particularly limited thereto.

[0045] Although not separately shown, the display panel DP may further include a frame member or a molding member, and may further include a backlight unit according to the kind of the display panel DP.

[0046] like Figure 1 As shown in , the display panel DP may display an image through a display surface DP-IS. The display surface DP-IS is parallel to a plane defined by a first direction DR1 and a second direction DR2. The display surface DP-IS may include a display area DA and a non-display area NDA. The pixels PX are arranged in the display area DA. The non-display area NDA is defined along an edge of the display surface DP-IS. The display area DA may be surrounded by the non-display area NDA.

[0047] The normal direction of the display surface DP-IS (i.e., the thickness direction of the display panel DP) represents a third direction DR3. In the following, the front surface (or top surface) and the rear surface (or bottom surface) of each of the layers or units are distinguished by the third direction DR3. However, the first direction DR1, the second direction DR2, and the third direction DR3 are intended to be illustrative in the embodiments. In the following, the first direction, the second direction, and the third direction are defined as directions represented by the first direction DR1, the second direction DR2, and the third direction DR3 and designated by the same reference numerals, respectively.

[0048] Although a display panel DP having a flat display surface DP-IS is shown in the embodiments of the inventive concept, the embodiments of the inventive concept are not limited thereto. For example, the display panel DP may include a curved display surface or a three-dimensional display surface. The three-dimensional display surface may include a plurality of display areas having different light emission directions from each other.

[0049] exist Figure 2 , a planar arrangement relationship between the signal lines GL1 to GLn and DL1 to DLm and the pixels PX11 to PXnm is shown. The signal lines may include a plurality of gate lines GL1 to GLn and a plurality of data lines DL1 to DLm.

[0050] Each of the pixels PX11 to PXnm is connected to a corresponding gate line among a plurality of gate lines GL1 to GLn and a corresponding data line among a plurality of data lines DL1 to DLm. Each of the pixels PX11 to PXnm may include a pixel driving circuit and a display element. More signal lines may be provided in the display panel DP according to the configuration of the pixel driving circuit.

[0051] Although the pixels PX11 to PXnm may be arranged in a matrix form, embodiments of the inventive concept are not limited thereto. For example, the pixels PX11 to PXnm may be arranged in a PenTile matrix form. Alternatively, the pixels PX11 to PXnm may be arranged in a diamond form.

[0052] The gate driving circuit GDC may be disposed in the non-display area NDA. The gate driving circuit GDC may be integrated in the display panel DP through an oxide silicon gate driving circuit (OSG) process or an amorphous silicon gate driving circuit (ASG) process.

[0053] Figure 3A is a plan view illustrating pixel areas PXA- 1 , PXA- 2 , and PXA- 3 of a display panel DP according to an embodiment of the inventive concept. Figure 3B is a cross-sectional view illustrating a pixel area PXA- 2 of a display panel DP according to an embodiment of the inventive concept. Figure 3B It is along Figure 3A A cross-sectional view taken along line II'.

[0054] Figure 3A It is shown Figure 1 An enlarged view of a portion of the display area DA in FIG. Figure 3A , three types of pixel areas PXA-1, PXA-2, and PXA-3 are mainly shown. Figure 3A The three pixel areas PXA-1, PXA-2, and PXA-3 may be arranged in a repeated manner over the entire display area DA.

[0055] Reference Figure 3A , the surrounding area NPXA is disposed around the pixel areas PXA-1, PXA-2, and PXA-3. The surrounding area NPXA is disposed in the boundary between the pixel areas PXA-1, PXA-2, and PXA-3 to prevent color mixing between the pixel areas PXA-1, PXA-2, and PXA-3. In addition, the surrounding area NPXA blocks the source light so that the source light is not emitted through the surrounding area NPXA, and thus the light incident on the surrounding area NPXA is not provided to the user.

[0056] Although the first pixel region PXA-1, the second pixel region PXA-2, and the third pixel region PXA-3 have the same plane area as each other in the embodiment, the embodiment of the inventive concept is not limited thereto. For example, the first pixel region PXA-1, the second pixel region PXA-2, and the third pixel region PXA-3 may have different areas from each other, or at least two of the first pixel region PXA-1, the second pixel region PXA-2, and the third pixel region PXA-3 may have different areas from each other. In addition, although each of the first pixel region PXA-1, the second pixel region PXA-2, and the third pixel region PXA-3 has a rectangular shape with rounded corners in a plan view, the embodiment of the inventive concept is not limited thereto. For example, in a plan view, each of the first pixel region PXA-1, the second pixel region PXA-2, and the third pixel region PXA-3 may have a polygonal shape, and the corners may have a rounded polygonal shape.

[0057] One of the first pixel area PXA-1, the second pixel area PXA-2, and the third pixel area PXA-3 may provide a first color light to a user, another may provide a second color light different from the first color light, and the rest may provide a third color light different from the first color light and the second color light. In an embodiment, the first pixel area PXA-1 may provide red light, the second pixel area PXA-2 may provide green light, and the third pixel area PXA-3 may provide blue light. In this embodiment, the source light may be blue light as the third color light. The source light may be generated from a light source such as a backlight unit or from a display element such as a light emitting diode.

[0058] Figure 3B A cross section of the display panel DP corresponding to the second pixel area PXA- 2 is shown. Figure 3B The cross sections corresponding to the driving transistor TD and the light emitting element LED are exemplarily shown.

[0059] like Figure 3B As shown in , the display panel DP may include a first base substrate BS1, a circuit element layer DP-CL disposed on the first base substrate BS1, and a display element layer DP-LED disposed on the circuit element layer DP-CL.

[0060] The first base substrate BS1 may include a synthetic resin substrate or a glass substrate. The circuit element layer DP-CL includes at least one insulating layer and a circuit element. The circuit element includes a signal line and a driving circuit of a pixel. The circuit element layer DP-CL may be provided by a process of forming an insulating layer, a semiconductor layer, and a conductive layer by, for example, a coating process or a deposition process, and a process of patterning the insulating layer, the semiconductor layer, and the conductive layer by a photolithography process.

[0061] In an embodiment, the circuit element layer DP-CL may include a buffer layer BFL, a first insulating layer 10, a second insulating layer 20, and a third insulating layer 30. Each of the first insulating layer 10 and the second insulating layer 20 may be an inorganic layer, and the third insulating layer 30 may be an organic layer. The third insulating layer 30 may include polyimide (PI).

[0062] exist Figure 3A and Figure 3B , an arrangement relationship among the semiconductor pattern OSP, the control electrode GE, the input electrode DE, and the output electrode SE of the driving transistor TD is exemplarily shown. In addition, a first through hole CH1, a second through hole CH2, and a third through hole CH3 are exemplarily shown.

[0063] The display element layer DP-LED includes a light emitting element LED. The light emitting element LED may generate the above-mentioned source light. The light emitting element LED includes a first electrode AE, a second electrode CE, and an intermediate layer EML disposed between the first electrode AE ​​and the second electrode CE. In this embodiment, the light emitting element LED may include an organic light emitting diode. However, the embodiments of the inventive concept are not limited thereto. As a non-limiting example, the light emitting element LED included in the display element layer DP-LED may include various display elements such as LCD, LED, micro LED, nano LED, quantum dot or quantum rod. The display element layer DP-LED includes a pixel defining layer PDL.

[0064] An opening OP corresponding to the second pixel area PXA-2 is defined in the pixel defining layer PDL. Figure 3BAlthough not shown, a plurality of openings respectively corresponding to the first pixel area PXA-1, the second pixel area PXA-2, and the third pixel area PXA-3 may be defined in the pixel defining layer PDL.

[0065] The pixel defining layer PDL may include a first pixel defining portion PD1, a second pixel defining portion PD2, and a third pixel defining portion PD3. The first pixel defining portion PD1 may be disposed to surround the second pixel region PXA-2 on the surrounding area NPXA, and the second pixel defining portion PD2 may be disposed on an outer portion of the surrounding area NPXA. The second pixel defining portion PD2 may be disposed to be closer to the second pixel region PXA-2 than the first pixel defining portion PD1. The second pixel defining portion PD2 is disposed between the second pixel region PXA-2 and the first pixel defining portion PD1 to surround the second pixel region PXA-2. The first pixel defining portion PD1 and the second pixel defining portion PD2 may be spaced apart from each other in the first direction DR1 and the second direction DR2, and the first pixel defining portion PD1 may have a grid shape disposed on the entire display area DA. Figure 3B , although the first pixel defining portion PD1 exemplarily has a height greater than that of the second pixel defining portion PD2 in the length (i.e., cross section) of the third direction DR3 of the first pixel defining portion PD1, embodiments of the inventive concept are not limited thereto. For example, the first pixel defining portion PD1 may have the same height as that of the second pixel defining portion PD2.

[0066] The third pixel defining portion PD3 is disposed on the first pixel defining portion PD1 and the second pixel defining portion PD2 to cover the first pixel defining portion PD1 and the second pixel defining portion PD2. At least one spacer PD3-SP is defined in the third pixel defining portion PD3. At least a portion of the first pixel defining portion PD1 may be exposed by the spacer PD3-SP of the third pixel defining portion PD3.

[0067] In an embodiment, the first pixel defining portion PD1 may include a side surface PD1-LF adjacent to the second pixel defining portion PD2. A spacer PD3-SP of the third pixel defining portion PD3 may be defined between the first pixel defining portion PD1 and the second pixel defining portion PD2 to expose the side surface PD1-LF of the first pixel defining portion PD1.

[0068] Each of the first pixel defining portion PD1 and the second pixel defining portion PD2 may include an organic material. Each of the first pixel defining portion PD1 and the second pixel defining portion PD2 may include a hydrophobic organic material. The first pixel defining portion PD1 and the second pixel defining portion PD2 may include the same material as each other and be formed simultaneously.

[0069] The third pixel defining portion PD3 may include an inorganic material. For example, the third pixel defining portion PD3 may include silicon nitride (SiN x ), silicon oxide (SiO x ) and silicon oxynitride (SiO x N y ). Preferably, the third pixel defining portion PD3 may include silicon nitride (SiN x ).

[0070] The first electrode AE ​​may be disposed on the third insulating layer 30. The first electrode AE ​​may be connected to the output electrode SE through a third through hole CH3 passing through the third insulating layer 30. Figure 3B In the embodiment, although the first electrode AE ​​is exemplarily disposed on the third insulating layer 30, embodiments of the inventive concept are not limited thereto. For example, the first electrode AE ​​may be embedded in the third insulating layer 30 while its top surface is exposed. In this case, the top surface of the first electrode AE ​​and the top surface of the third insulating layer 30 may provide the same plane.

[0071] The opening OP of the pixel defining layer PDL exposes at least a portion of the first electrode AE. In a plan view, the third pixel defining portion PD3 may overlap at least a portion of the first electrode AE. Specifically, the third pixel defining portion PD3 may overlap an outer portion of the first electrode AE ​​in a plan view to surround the first electrode AE.

[0072] The intermediate layer EML may be disposed on the first electrode AE. The intermediate layer EML may be disposed in the opening OP of the pixel defining layer PDL. The intermediate layer EML may include a light emitting layer and generate blue light. Here, the blue light may have a wavelength of about 410 nm to about 480 nm. The light emitting layer of the intermediate layer EML may have a stacked structure or a single layer structure.

[0073] The intermediate layer EML may include a low molecular organic material or a high molecular organic material. Alternatively, the intermediate layer EML may include quantum dots as a luminescent material. The core of the quantum dots may be selected from the group consisting of II-VI compounds, III-V compounds, IV-VI compounds, IV elements, IV compounds, and combinations thereof.

[0074] exist Figure 3B In the embodiment, although the intermediate layer EML is exemplarily patterned and disposed on the opening OP of the pixel defining layer PDL and the second pixel defining portion PD2, but not on the first pixel defining portion PD1, embodiments of the inventive concept are not limited thereto. For example, the intermediate layer EML may be disposed in the first pixel region PXA-1, the second pixel region PXA-2, and the third pixel region PXA-3 (refer to Figure 3A ) above.

[0075] In addition to the light emitting layer, the intermediate layer EML may further include functional layers such as a hole transport layer, a hole injection layer, an electron transport layer, and an electron injection layer. As described above, each of the functional layers may be patterned and disposed on the opening OP of the pixel defining layer PDL and the second pixel defining portion PD2, and commonly disposed on the first pixel region PXA-1, the second pixel region PXA-2, and the third pixel region PXA-3.

[0076] The intermediate layer EML may contact a portion of the first pixel defining portion PD1 exposed by the spacer PD3-SP of the third pixel defining portion PD3. Specifically, a side surface PD1-LF of the first pixel defining portion PD1 may be exposed by the spacer PD3-SP of the third pixel defining portion PD3, and the intermediate layer EML may contact the side surface PD1-LF. The intermediate layer EML may contact only a portion of the side surface PD1-LF of the first pixel defining portion PD1, and may not contact the rest of the first pixel defining portion PD1.

[0077] The second electrode CE is disposed on the intermediate layer EML. The second electrode CE may be commonly disposed in the first pixel region PXA-1, the second pixel region PXA-2, and the third pixel region PXA-3 (refer to Figure 3A The second electrode CE may have an area larger than that of the first electrode AE.

[0078] A cover layer CL protecting the second electrode CE and the light emitting element LED may be further disposed on the second electrode CE. The cover layer CL may include an organic material or an inorganic material. The cover layer CL may have a structure in which organic material layers and inorganic material layers are alternately stacked with each other. In an embodiment, the cover layer CL may be omitted.

[0079] The display panel according to an embodiment of the inventive concept includes a pixel defining portion including a hydrophobic organic material and an inorganic material covering the hydrophobic organic material. Although the hydrophobicity of the hydrophobic organic material may deteriorate in a residue treatment process including a plasma process, the display panel according to an embodiment of the inventive concept can prevent the degradation of the hydrophobicity of the hydrophobic organic material caused by the plasma process by covering the inorganic material pixel defining portion having the hydrophobic organic material. In addition, because the inorganic material pixel defining portion has a spacer that exposes the hydrophobic surface of the first pixel defining portion PD1 through the spacer, when the organic light emitting layer is provided by a printing method such as inkjet printing, the organic light emitting layer can contact the hydrophobic surface, and thus the overflow phenomenon of the organic light emitting layer can be prevented.

[0080] FIG. 4A to FIG. 4C is a cross-sectional view illustrating pixel areas PXA- 1 , PXA- 2 , and PXA- 3 of a display panel according to an embodiment of the inventive concept. FIG. 4A to FIG. 4C It is along Figure 3A A cross-sectional view taken along line II-II'. FIG. 4A to FIG. 4C hour, Figure 3A and Figure 3B The same components described in the accompanying drawings will be denoted by the same reference numerals, and description thereof will be omitted.

[0081] Reference Figure 4A , openings OP respectively overlapping the first pixel area PXA-1, the second pixel area PXA-2, and the third pixel area PXA-3 may be defined in the pixel defining layer PDL. Figure 4A In the embodiment, since the first pixel region PXA-1, the second pixel region PXA-2, and the third pixel region PXA-3 have the same plane area as each other, the openings OP defining the first pixel region PXA-1, the second pixel region PXA-2, and the third pixel region PXA-3 have the same area as each other. However, embodiments of the inventive concept are not limited thereto. For example, the size of each of the openings OP may vary according to the area of ​​each of the first pixel region PXA-1, the second pixel region PXA-2, and the third pixel region PXA-3.

[0082] In the pixel defining layer PDL, the first pixel defining portion PD1 may be disposed on a central portion of each of the surrounding areas NPXA, and the second pixel defining portion PD2 may be disposed adjacent to each of the first pixel area PXA-1, the second pixel area PXA-2, and the third pixel area PXA-3 to surround the first pixel area PXA-1, the second pixel area PXA-2, and the third pixel area PXA-3. The third pixel defining portion PD3 may be disposed on the first pixel defining portion PD1 and the second pixel defining portion PD2 to cover the first pixel defining portion PD1 and the second pixel defining portion PD2, and a plurality of spacers PD3-SP may be defined to expose each of the boundaries of the first pixel defining portion PD1 and the boundaries of the second pixel defining portion PD2. The spacers PD3-SP may expose one side surface PD1-LF of each of the first pixel defining portions PD1 in a cross-sectional view.

[0083] like Figure 4A As shown in , the intermediate layer EML may be patterned to overlap the first pixel area PXA-1, the second pixel area PXA-2, and the third pixel area PXA-3, respectively. Each of the patterned intermediate layers EML may include a light emitting layer and is disposed in the opening OP of the pixel defining layer PDL and on the second pixel defining portion PD2. Each of the intermediate layers EML may be disposed to contact a side surface PD1-LF of each of the first pixel defining portions PD1.

[0084] Reference Figure 4BIn the display panel DP-1 according to the embodiment of the inventive concept, the first pixel defining part PD1-1 may include a plurality of sub-patterns. In a cross-sectional view, the plurality of sub-patterns may be spaced apart from each other in the first direction DR1. Figure 4B The first pixel defining part PD1-1 includes two sub-patterns, but embodiments of the inventive concept are not limited thereto. For example, the first pixel defining part PD1-1 may include three or more sub-patterns.

[0085] Each of the sub-patterns of the first pixel defining part PD1-1 may include a side surface PD1-LF1 adjacent to the second pixel defining part PD2-1, and one side surface PD1-LF1 of each of the sub-patterns of the first pixel defining part PD1-1 may be exposed by the spacer PD3-SP1 of the third pixel defining part PD3-1. The intermediate layer EML including the light emitting layer may contact one side surface PD1-LF1 of each of the sub-patterns of the first pixel defining part PD1-1. The intermediate layer EML may contact only a portion of the one side surface PD1-LF1 of the first pixel defining part PD1-1, and may not contact the rest of the first pixel defining part PD1-1.

[0086] The display panel DP-1 according to an embodiment of the inventive concept may further include a matrix pixel defining layer PD-BS. The matrix pixel defining layer PD-BS may overlap with the outer portion of the first electrode AE ​​in a plan view. The matrix pixel defining layer PD-BS may include a hydrophobic organic material. The sub-pattern of the first pixel defining portion PD1-1, the second pixel defining portion PD2-1, and the third pixel defining portion PD3-1 may be disposed on the matrix pixel defining layer PD-BS.

[0087] Reference Figure 4C In the display panel DP-2 according to the embodiment of the inventive concept, the first pixel defining portion PD1-2 and the second pixel defining portion PD2-2 may be formed as one component, formed of the same material, and formed by the same process. The first pixel defining portion PD1-2 and the second pixel defining portion PD2-2 may be integral with each other to have a dome shape. The third pixel defining portion PD3-2 may cover the central portion and the edge of the upper portion of the integral dome shape, and expose the portion of the upper portion of the integral dome shape located between the central portion and the edge. Here, a portion in the integral dome shape that is adjacent to each of the pixel areas PXA-1, PXA-2, and PXA-3 but does not include an exposed portion may be defined as the second pixel defining portion PD2-2, and the remaining portion may be defined as the first pixel defining portion PD1-2.

[0088] A portion of the first pixel defining portion PD1-2 may be exposed by the spacer PD3-SP2 of the third pixel defining portion PD3-2. The intermediate layer EML including the light emitting layer may contact the exposed one side surface PD1-LF2 of the first pixel defining portion PD1-2. The intermediate layer EML may contact only a portion of the one side surface PD1-LF2 of the first pixel defining portion PD1-2, and may not contact the rest of the first pixel defining portion PD1-2.

[0089] Figure 5 is a cross-sectional view illustrating pixel areas PXA- 1 , PXA- 2 , and PXA- 3 of a display panel according to an embodiment of the inventive concept. Figure 5 Shown along Figure 3A The section taken along the line II-II' is shown below. Figure 5 , the above components will be represented by the same figure marks and the description thereof will be omitted.

[0090] Reference Figure 5 , the display panel DP-3 according to the embodiment of the inventive concept may further include a light control layer CCL disposed on the light emitting element. The display panel DP-3 according to the embodiment may further include a color filter layer CFL and an upper base substrate BS2 disposed on the light control layer CCL. The display panel DP-3 according to the embodiment may further include cover layers CAP1 and CAP2 covering the upper and lower portions of the light control layer CCL and a filling layer FL filling the space between the light control layer CCL and the light emitting element. The color filter layer CFL included in the display panel DP-3 according to the embodiment may include a light blocking member BM overlapped with the surrounding area NPXA and a color filter portion CFP overlapped with the pixel areas PXA-1, PXA-2, and PXA-3.

[0091] In the display panel DP-3 according to the embodiment of the inventive concept, the light control layer CCL may include a light control part CCP and a bank BK. The light control part CCP may include a luminescent material, scattering particles, a matrix resin, etc. The luminescent material contained in the light control part CCP may convert the wavelength of light emitted from the light emitting element. In an embodiment, the light control part CCP may include quantum dots as a luminescent material.

[0092] In the display panel DP-3 according to the embodiment of the inventive concept, the bank BK may include a first bank BK1, a second bank BK2, and a third bank BK3. The first bank BK1 may be disposed at a central portion of each of the surrounding regions NPXA, and the second bank BK2 may be disposed on each of the surrounding regions NPXA to be adjacent to each of the first pixel region PXA-1, the second pixel region PXA-2, and the third pixel region PXA-3. The third bank BK3 may be disposed on the first bank BK1 and the second bank BK2 to cover the first bank BK1 and the second bank BK2, and a plurality of spacers may be defined to expose each of the boundary portions between the first bank BK1 and the second bank BK2. Each of the spacers may expose a side surface of each of the first bank BK1.

[0093] Each of the first bank BK1 and the second bank BK2 may include an organic material. Each of the first bank BK1 and the second bank BK2 may include a hydrophobic organic material. The third bank BK3 may include an inorganic material. For example, the third bank BK3 may include silicon nitride (SiN x ), silicon oxide (SiO x ) and silicon oxynitride (SiO x N y Preferably, the third bank BK3 may include silicon nitride (SiN x ).

[0094] In the display panel DP-3 according to the embodiment of the inventive concept, the light control layer CCL includes a bank having a hydrophobic organic material and a bank having an inorganic material covering the bank having the hydrophobic organic material. Although the hydrophobicity of the bank having the hydrophobic organic material may deteriorate during a residue treatment process including a plasma process, the display panel according to the embodiment of the inventive concept can prevent the degradation of the hydrophobicity of the bank having the hydrophobic organic material due to the plasma process by covering the bank having the hydrophobic organic material. In addition, because a spacer is defined in the bank having the inorganic material to expose the hydrophobic surface, when a light control part CCP in which a light emitting material (such as quantum dots) is distributed in a matrix resin is provided by a printing method such as inkjet printing, the light control part CCP can contact the hydrophobic surface, and thus the overflow phenomenon of the light control part CCP can be prevented.

[0095] Hereinafter, a method of manufacturing a display panel according to an embodiment of the inventive concept will be described.

[0096] FIG. 6A to FIG. 6G 2 is a cross-sectional view sequentially illustrating a partial process of a method of manufacturing a display panel according to an embodiment of the inventive concept. Fig. 7A and Figure 7B2 is a cross-sectional view sequentially illustrating a partial process of a method of manufacturing a display panel according to another embodiment of the inventive concept. Fig. 8A and Figure 8B 1 is a cross-sectional view sequentially showing a partial process of a method for manufacturing a display panel according to another embodiment of the inventive concept. FIG. 6A to FIG. 6G In the method for manufacturing a display panel according to an embodiment, a process of forming a pixel defining layer and a process of forming a light emitting element are sequentially shown. Fig. 7A , Figure 7B , Fig. 8A and Figure 8B In the method for manufacturing a display panel according to other embodiments, part of the process of forming a pixel defining layer is sequentially shown.

[0097] Reference Fig. 6A In the method for manufacturing a display panel according to an embodiment, a first electrode AE ​​and a first pixel defining portion PD1 may be formed on a base substrate BS1 and a circuit element layer DP-CL. Each of the first electrode AE ​​and the first pixel defining portion PD1 may be formed in plurality on the circuit element layer DP-CL, and each of the plurality of first electrodes AE and the plurality of first pixel defining portions PD1 may be spaced apart from each other in a first direction DR1 in a cross section. The plurality of first electrodes AE and the plurality of first pixel defining portions PD1 may be alternately arranged in a first direction DR1 in a cross section.

[0098] The circuit element layer DP-CL includes at least one insulating layer and a circuit element. A third insulating layer 30 including an organic material may be disposed on the uppermost portion of the circuit element layer DP-CL (see Figure 3B ).

[0099] The first pixel defining portion PD1 may include a hydrophobic organic material. The first pixel defining portion PD1 may be made of an organic material to have liquid repellency on a surface thereof. Although not separately shown, an additional process of liquid repellency treatment on a surface of the first pixel defining portion PD1 may be performed.

[0100] The first pixel defining portion PD1 may be formed by patterning a hydrophobic organic material on the circuit element layer DP-CL and curing the patterned hydrophobic organic material. Before the subsequent inorganic layer forming process, the first pixel defining portion PD1 may be in a state where the hydrophobic organic pattern forming and curing processes are completed. However, embodiments of the inventive concept are not limited thereto. For example, the first pixel defining portion PD1 may be in a hydrophobic organic material pattern state before the inorganic layer forming process, and then formed by a curing process after the inorganic layer forming process.

[0101] Reference Figure 6B, patterning the organic material on the circuit element layer DP-CL to form a plurality of organic patterns PP. Each of the plurality of organic patterns PP may include a hydrophobic organic material. Each of the plurality of organic patterns PP may be formed by patterning the hydrophobic organic material.

[0102] Each of the plurality of organic patterns PP may be formed by patterning a hydrophobic organic material to be disposed adjacent to each of the first pixel defining parts PD1. Each of the plurality of hydrophobic organic patterns PP may be disposed to be spaced apart from the first pixel defining part PD1 in a plan view and to overlap the outer portion of the first electrode AE. However, the first pixel defining part PD1 and the plurality of organic patterns PP may be formed of the same material and may be formed by the same process. The first pixel defining part PD1 and the plurality of organic patterns PP may be simultaneously formed by the same process using one mask.

[0103] Reference Figure 6C , an inorganic layer IOL-P1 is formed on the plurality of organic patterns PP and the first pixel defining part PD1. The inorganic layer IOL-P1 may be formed to cover the plurality of organic patterns PP, the first pixel defining part PD1, and the first electrode AE.

[0104] The inorganic layer IOL-P1 may include an inorganic material. The inorganic layer IOL-P1 may include silicon nitride (SiN x ), silicon oxide (SiO x ) and silicon oxynitride (SiO x N y ). Preferably, the inorganic layer IOL-P1 may include silicon nitride (SiN x Inorganic materials (such as silicon nitride (SiN x ), silicon oxide (SiO x ) and silicon oxynitride (SiO x N y )) to form the inorganic layer IOL-P1.

[0105] Reference Fig.6D and Figure 6C , the inorganic layer pattern IOL-P2 may be formed by patterning the inorganic layer IOL-P1. In an embodiment, a portion of the inorganic layer IOL-P1 disposed on the central portion of the first electrode AE ​​may be removed, for example, by using an etching process. The inorganic layer pattern IOL-P2 may be formed by patterning the inorganic layer IOL-P1 by a photolithography method.

[0106] Reference Fig. 6EThe method for manufacturing a display panel according to an embodiment includes a process of removing residues after forming the inorganic layer pattern IOL-P2. The residues may be generated in the process of forming the first pixel defining portion PD1, the process of forming the plurality of organic patterns PP, and the process of forming and patterning the inorganic layer IOL-P1.

[0107] The process of removing the residue may include a plasma treatment PT process. Through the plasma treatment PT process, the residue existing on the inorganic layer pattern IOL-P2 and the first electrode AE ​​may be effectively removed.

[0108] In the manufacturing method of the display panel according to the embodiment, before forming the organic light-emitting layer, the residue formed on the inorganic layer pattern and the first electrode on which the organic light-emitting layer is to be formed is effectively removed by a plasma treatment process to improve the efficiency of the display panel. More specifically, when the residue exists at the position where the organic light-emitting layer is formed, the light-emitting characteristics of the display panel are deteriorated because the organic light-emitting layer is not formed uniformly. However, in the manufacturing method of the display panel according to the embodiment, since the residue is removed by plasma treatment before forming the organic light-emitting layer, the organic light-emitting layer can be uniformly formed, and thus the degradation of the light-emitting characteristics can be prevented.

[0109] In addition, in the method for manufacturing a display panel according to an embodiment, since the inorganic pattern covers the hydrophobic organic pixel defining layer or the hydrophobic organic pattern during the plasma treatment process, degradation of the hydrophobicity of the organic pixel defining layer can be prevented. Therefore, in the subsequent organic light emitting layer formation process, an overflow phenomenon in which the organic light emitting layer overflows can be prevented.

[0110] Reference Fig. 6F and Fig. 6E In the method of manufacturing the display panel according to the embodiment, the first pixel defining part PD1 and the second pixel defining part PD2 may be formed by curing the first pixel defining part PD1 and the organic pattern PP after the residue removing process.

[0111] In the curing process, the organic pattern PP may shrink more than the first pixel defining part PD1 during the curing process. Therefore, the second pixel defining part PD2 may be smaller in size than each of the organic patterns PP before being cured. Because the organic pattern PP may shrink more than the first pixel defining part PD1 during the curing process, the second pixel defining part PD2 may be smaller in height than the first pixel defining part PD1.

[0112] In the process of curing the organic pattern PP and the first pixel defining part PD1, a spacer PD3-SP is formed in the inorganic layer pattern IOL-P2 disposed between the organic pattern PP and the first pixel defining part PD1. The spacer PD3-SP may be formed at a boundary between the first pixel defining part PD1 and the second pixel defining part PD2, and at least one side surface PD1-LF of the first pixel defining part PD1 may be exposed. One side surface PD1-LF of the first pixel defining part PD1 may be disposed adjacent to the second pixel defining part PD2.

[0113] The spacer PD3-SP formed in the third pixel defining part PD3 may be formed due to stress generated in the inorganic layer pattern IOL-P2 as the organic pattern PP shrinks to the size of the second pixel defining part PD2 during the curing process and cracks formed by the third insulating layer 30 (refer to FIG. 1 ) disposed on the upper portion of the circuit element layer DP-CL during the curing process. Figure 3B Here, since the stress generated when the organic pattern PP contracts and the external pressure generated by the exhaust gas of the insulating layer are concentrated on the vulnerable portion of the inorganic layer pattern IOL-P2, the spacer PD3-SP may be formed at the boundary between the first pixel defining portion PD1 and the second pixel defining portion PD2.

[0114] Reference Figure 6G In the method of manufacturing the display panel according to the embodiment, an intermediate layer EML including a light emitting layer and a second electrode CE may be formed on each of the first pixel defining part PD1 , the second pixel defining part PD2 , and the third pixel defining part PD3 .

[0115] The intermediate layer EML may be formed in a solution process. In an embodiment, the light emitting layer, the hole injection layer, and the hole transport layer constituting the intermediate layer EML may be formed by a low molecular organic material or a high molecular organic material. The intermediate layer EML may be formed by a photolithography process by forming an intermediate forming material on each area defined by one side surface PD1-LF of the first pixel defining portion PD1 and patterning the intermediate forming material. When the intermediate layer EML is formed by a solution process, since the hydrophobic one side surface PD1-LF of the first pixel defining portion PD1 is exposed, the intermediate layer EML may be uniformly formed without overflowing.

[0116] Fig. 7A and Figure 7B 1 is a view showing a process of forming an inorganic pattern and curing an organic pattern in a method of manufacturing a display panel according to another embodiment of the inventive concept. Fig. 7A and Figure 7B At the same time, FIG. 6A to FIG. 6GThe same components as those described in will be denoted by the same reference numerals, and description thereof will be omitted.

[0117] Reference Fig. 7A In a method for manufacturing a display panel according to another embodiment of the inventive concept, a plurality of first organic patterns PP-1 and a plurality of second organic patterns PP-2 spaced apart from each other may be simultaneously formed on the circuit element layer DP-CL. Each of the first organic pattern PP-1 and the second organic pattern PP-2 may be formed of a hydrophobic organic material by a photolithography method. The first organic pattern PP-1 may include a plurality of sub-patterns spaced apart from each other in a first direction. Fig. 7A In the embodiment, although each of the first organic patterns PP-1 exemplarily includes two sub-patterns, embodiments of the inventive concept are not limited thereto. For example, each of the first organic patterns PP-1 may include three or more sub-patterns.

[0118] The inorganic layer pattern IOL-P3 may be formed on the first organic pattern PP-1 and the second organic pattern PP-2. The inorganic layer pattern IOL-P3 may be formed in such a manner that an inorganic layer is formed by depositing an inorganic material on the first organic pattern PP-1 and the second organic pattern PP-2, and then etching a region overlapping a central portion of the first electrode AE ​​on a plane.

[0119] The manufacturing method of the display panel according to the embodiment of the inventive concept may further include a process of forming a matrix pixel defining layer PD-BS on the circuit element layer DP-CL before the process of forming the first organic pattern PP-1 and the second organic pattern PP-2. The matrix pixel defining layer PD-BS may overlap the outer portion of the first electrode AE ​​on a plane. The matrix pixel defining layer PD-BS may be formed in such a manner that a hydrophobic organic material is patterned by a photolithography method and then cured. The first organic pattern PP-1, the second organic pattern PP-2, and the inorganic layer pattern IOL-P3 may be formed on the matrix pixel defining layer PD-BS.

[0120] After forming the first organic pattern PP-1, the second organic pattern PP-2, and the inorganic layer pattern IOL-P3, a process of plasma treatment of the surface of the inorganic layer pattern IOL-P3 may be performed to remove residues generated during the formation process. In the plasma treatment process, since the first organic pattern PP-1 and the second organic pattern PP-2, both including a hydrophobic material, are covered by the inorganic layer pattern IOL-P3, degradation of hydrophobicity due to plasma does not occur.

[0121] Reference Figure 7B and Fig. 7A, the first pixel defining part PD1-1 and the second pixel defining part PD2-1 may be formed by curing the first organic pattern PP-1 and the second organic pattern PP-2, respectively. The first pixel defining part PD1-1 may include a plurality of sub-patterns.

[0122] In the curing process, each of the first and second organic patterns PP-1 and PP-2 may be contracted to form the first and second pixel defining portions PD1-1 and PD2-1. Since cracks are generated at vulnerable portions of the inorganic layer pattern IOL-P3 covering the first and second organic patterns PP-1 and PP-2 due to stress generated when the first and second organic patterns PP-1 and PP-2 are contracted, a spacer PD3-SP1 may be formed in the third pixel defining portion PD3-1. One side surface PD1-LF1 of the first pixel defining portion PD1-1 may be exposed by the spacer PD3-SP1 of the third pixel defining portion PD3-1.

[0123] Fig. 8A and Figure 8B 1 is a view of a process of forming an inorganic layer pattern and a process of curing an organic pattern in a method of manufacturing a display panel according to another embodiment of the inventive concept. FIG. 8A to FIG. 8B When Fig. 6A and Figure 6G The same components described in the accompanying drawings will be denoted by the same reference numerals, and description thereof will be omitted.

[0124] Reference Fig. 8A In a method for manufacturing a display panel according to another embodiment of the inventive concept, a plurality of organic patterns PP-3 may be formed on the circuit element layer DP-CL. A plurality of organic patterns PP-3 may be formed on the base pixel defining layer PD-BS to have a dome shape. An inorganic layer pattern IOL-P4 may be formed on the plurality of organic patterns PP-3 to completely cover the dome shape. The inorganic layer pattern IOL-P4 may be formed in such a manner that an inorganic layer is formed by depositing an inorganic material to completely overlap the base substrate BS1, and then a region overlapping the central portion of the first electrode AE ​​is removed, for example, by using an etching process.

[0125] After the process of forming the plurality of organic patterns PP-3 and the inorganic layer pattern IOL-P4, a process of performing plasma treatment on the surface of the inorganic layer pattern IOL-P4 to remove residues generated during the formation process may be performed. In the plasma treatment process, since the plurality of organic patterns PP-3 including a hydrophobic material are covered by the inorganic layer pattern IOL-P4, degradation of hydrophobicity due to plasma does not occur.

[0126] Reference Figure 8B and Fig. 8A, the first pixel defining part PD1-2 and the second pixel defining part PD2-2 may be formed by curing the plurality of organic patterns PP-3. In the curing process, a spacer PD3-SP2 may be formed in the inorganic layer pattern IOL-P4 to form a third pixel defining part PD3-2.

[0127] In the curing process, the plurality of organic patterns PP-3 may be shrunk to form the first pixel defining portion PD1-2 and the second pixel defining portion PD2-2. Since cracks are generated in the inorganic layer pattern IOL-P4 covering the plurality of organic patterns PP-3 by stress generated when the organic pattern PP-3 is shrunk, the third pixel defining portion PD3-2 having the spacer PD3-SP2 may be formed. Figure 8B Although, as an example, two spacers PD3-SP2 are regularly formed in each of the third pixel defining parts PD3-2, the embodiments of the inventive concept are not limited thereto. For example, the plane position where the spacers PD3-SP2 are formed and the plane area of ​​the spacers PD3-SP2 may be randomly formed. One side surface PD1-LF2 of the first pixel defining part PD1-2 may be exposed by the spacers PD3-SP2 of the third pixel defining part PD3-2.

[0128] According to an embodiment of the inventive concept, since the organic pixel defining layer is protected by the inorganic layer during the residue treatment process and the hydrophobic surface of the organic pixel defining layer is exposed in the curing process after the residue treatment process, a uniform organic light emitting layer can be formed. Therefore, the light emitting efficiency and reliability of the display panel can be increased.

[0129] Although exemplary embodiments of the inventive concept have been described, it is understood that the inventive concept should not be limited to these exemplary embodiments, but a person skilled in the art may make various changes and modifications within the spirit and scope of the inventive concept as claimed.

[0130] Therefore, the actual protection scope of the present inventive concept should be determined by the technical scope of the appended claims.

Claims

1. A display panel, comprising: A base substrate, on which a pixel area and a surrounding area adjacent to the pixel area are defined; A pixel defining layer is disposed on the base substrate, and a plurality of openings corresponding to the pixel areas are defined on the pixel defining layer; as well as A plurality of light-emitting layers are respectively arranged in the plurality of openings, Wherein, the pixel defining layer comprises: a first pixel defining portion; a second pixel defining portion, disposed between the light emitting layer and the first pixel defining portion; and a third pixel defining portion covering the first pixel defining portion and the second pixel defining portion and including a spacer exposing a portion of the first pixel defining portion, wherein the first pixel defining portion includes a side surface adjacent to the second pixel defining portion, and the side surface is exposed by the spacer portion of the third pixel defining portion, and Wherein, each of the first pixel defining portion and the second pixel defining portion includes a hydrophobic organic material, and the third pixel defining portion includes an inorganic material.

2. The display panel according to claim 1, wherein: The second pixel defining portion includes a side surface adjacent to the first pixel defining portion and exposed by the spacer of the third pixel defining portion.

3. The display panel according to claim 1, wherein: The light emitting layer contacts the exposed portion of the first pixel defining portion.

4. The display panel according to claim 1, wherein: The third pixel defining portion includes at least one of silicon nitride, silicon oxide, and silicon oxynitride.

5. The display panel according to claim 1, wherein: The first pixel defining portion and the second pixel defining portion are spaced apart from each other.

6. A method for manufacturing a display panel, the method comprising: forming a plurality of electrodes on a base substrate; forming a plurality of organic patterns by patterning an organic material on the base substrate on the plurality of electrodes; forming an inorganic layer to cover the plurality of organic patterns; patterning the inorganic layer to expose the plurality of electrodes; removing residues on the plurality of electrodes; as well as curing the plurality of organic patterns to form a pixel defining layer, Wherein, in the step of patterning the inorganic layer, a spacer is formed in the inorganic layer.

7. The manufacturing method according to claim 6, wherein: In the step of forming the pixel defining layer, the plurality of organic patterns are shrunk by a curing process.

8. The manufacturing method according to claim 6, wherein: The removing of the residue includes performing a plasma treatment on a surface of the inorganic layer.

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