Integrated circuit production device with dust removal function

Abstract

The application discloses a kind of integrated circuit production equipment with dust removal function, including main body storehouse, the center position of main body storehouse inside is equipped with mounting column, and the top and bottom of mounting column outside are equipped with bearing jointly, the outside of bearing is equipped with mounting pipe jointly, the outside of mounting pipe is equipped with fixed component, the bottom of mounting pipe outside is equipped with rotary disc, and the edge position of rotary disc top is evenly provided with eight groups of U-shaped groove.The application is used by cooperating with driven gear, main body storehouse, electric lifting rod, mounting bracket, integrated circuit processing assembly, mounting column, mounting pipe and limit ring, multiple integrated circuit processing assemblies can continue to process other groups of integrated circuit boards simultaneously, avoid the stop state of processing equipment caused by replacing integrated circuit boards, thereby greatly guarantee the production and processing efficiency of the entire integrated circuit production equipment, which is conducive to the popularization and application of the integrated circuit production equipment.

Description

Technical Field

[0001] This invention relates to the field of integrated circuit manufacturing technology, specifically to an integrated circuit manufacturing equipment with dust removal function. Background Technology

[0002] An integrated circuit is a miniature electronic device or component. Using certain processes, transistors, resistors, capacitors, inductors, and other components required for a circuit, along with interconnected wiring, are fabricated on one or several small pieces of semiconductor wafers or dielectric substrates, and then packaged in a casing to become a miniature structure with the required circuit function.

[0003] Current integrated circuit (IC) manufacturing equipment often requires processing circuit boards in groups. During the loading and unloading of IC boards, the equipment is in a stopped state, making it impossible to replace circuit boards without interrupting processing. This significantly reduces efficiency and hinders the widespread adoption of such equipment. Furthermore, current equipment typically requires manual fixing and unfixing of circuit boards, which is cumbersome. It lacks the automatic unfixing function after processing, and the automatic fixing of new groups of IC boards increases the workload for operators. Additionally, current equipment cannot perform dust removal before and after processing, requiring manual cleaning of the IC board surfaces, which is also inconvenient. Summary of the Invention

[0004] The purpose of this invention is to provide an integrated circuit manufacturing equipment with dust removal function to solve the related problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an integrated circuit manufacturing equipment with dust removal function, comprising a main chamber, an installation column installed at the center of the main chamber, bearings installed at the top and bottom of the outer side of the installation column, an installation tube installed on the outer side of the bearings, a fixing component provided on the outer side of the installation tube, a rotating disk installed at the bottom of the outer side of the installation tube, and eight sets of U-shaped grooves evenly formed at the top edge of the rotating disk, a fixing component installed at the bottom of the inner side of the main chamber, and four sets of second rollers cooperating with limiting rings evenly installed at the bottom edge of the rotating disk. A driven gear is installed at the bottom of the outer side of the mounting tube. A servo motor is installed at the bottom of the inner side of the main body compartment. A driving gear that meshes with the driven gear is installed at the output end of the servo motor. Electric lifting rods are symmetrically installed at both ends of the top of the main body compartment. An installation frame is installed at the output end of the electric lifting rods. Integrated circuit processing components are evenly installed at the bottom of the installation frame. A dust removal component is installed near the center of the top of the main body compartment. An opening is opened on the top and outer side of the main body compartment. A control panel is installed on the outer side of the main body compartment. The control panel is electrically connected to the electric lifting rod and the servo motor respectively through wires.

[0006] The fixing assembly includes an arc-shaped plate, a roller groove, a slider, a mounting base, a limiting groove, a fixing frame, a mounting rod, a limiting block, a spring, a connecting rod, a first roller, and a sliding groove. Sliding grooves are evenly distributed on the outer side of the mounting tube, and a spring is installed at the bottom of the inner side of the sliding groove. A slider is installed at the top of the spring, and a mounting base is installed on the outer side of the slider. A connecting rod is installed at the bottom of the mounting base, and a first roller is installed at the top of the mounting base. An arc-shaped plate is installed at a non-central position at the top of the main body compartment, and the arc-shaped plate... The bottom has a roller groove that mates with the first roller. Mounting rods are evenly hinged to the bottom of the outer side of the mounting tube. The top of the mounting rod has a limiting groove, and a limiting block is set inside the limiting groove. The bottom end of the connecting rod is hinged to the top of the corresponding limiting block. A fixing frame that mates with the U-shaped groove is installed at the end of the mounting rod away from the mounting tube. A horizontal sliding plate is set inside the U-shaped groove. A hinge rod is hinged to the bottom of the mounting rod, and the bottom end of the hinge rod is hinged to the top of the horizontal sliding plate.

[0007] The dust removal assembly includes an air pump, a filter chamber, a duct, a filter screen, a mounting cover, and a connecting frame. The filter chamber is installed at the center of the top of the main chamber, and two sets of filter screens are installed inside the filter chamber. Two sets of ducts are installed at the bottom of one side of the filter chamber. The air pump is installed at the top of the main chamber, and the input end of the air pump is connected to the top of the filter chamber. Connecting frames are installed at both ends of the bottom of the mounting frame, and a mounting cover is installed at the bottom of the connecting frame. The end of the duct away from the filter chamber is connected to the inner top of the mounting cover. The control panel is electrically connected to the air pump via wires.

[0008] Preferably, the bottom of the outer side of the mounting tube is hinged with eight sets of mounting rods, and the included angle between adjacent mounting rods is 45°.

[0009] Preferably, three sets of support columns are evenly installed at the bottom edge of the main compartment, and a pad is installed at the bottom of the support column.

[0010] Preferably, the mounting bracket is in the shape of a ring, and a notch is provided near the opening of the mounting bracket.

[0011] Preferably, three sets of observation windows are evenly arranged on the outer side of the main compartment.

[0012] Preferably, a door is hinged to one side of one end of the filter chamber, and a handle is installed on the outside of the door.

[0013] Preferably, a rib is installed at the bottom of the outer side of the mounting column, and the bottom of the rib is fixedly connected to the inner bottom of the main compartment.

[0014] Preferably, the top of the limiting ring is provided with an annular groove that cooperates with the second roller.

[0015] Preferably, the inner sides of the filter chamber are symmetrically provided with two sets of filter screen grooves that cooperate with the filter screen.

[0016] Preferably, the bottom of the fixing frame is provided with an annular rubber pad, and the bottom of the annular rubber pad is provided with anti-slip texture.

[0017] Compared with the prior art, the present invention provides an integrated circuit manufacturing equipment with dust removal function, which has the following beneficial effects:

[0018] 1. This invention utilizes the coordinated use of a driven gear, main chamber, electric lifting rod, mounting frame, integrated circuit processing assembly, second roller, driving gear, servo motor, bearing, mounting column, mounting tube, and limiting ring. After processing a set of integrated circuit boards, the processed set can be moved to the opening position. When the operator replaces the integrated circuit boards in the U-shaped groove at this location, multiple sets of integrated circuit processing assemblies can simultaneously continue processing other sets of integrated circuit boards, avoiding equipment downtime due to board replacement. This significantly improves the overall production efficiency of the integrated circuit manufacturing equipment and facilitates its widespread use.

[0019] 2. This invention utilizes a U-shaped groove, a rotating disk, an opening, a main chamber, a fixing component, and the aforementioned rotating mounting tube structure. Each time the mounting tube rotates to a fixed angle, the cooperation between the roller groove and the first roller forces a set of mounting seats that has just entered the main chamber to gradually descend until the fixing frame descends to the top of the integrated circuit board, pressing and fixing the integrated circuit board. Simultaneously, the horizontal sliding plate moves until one side of the integrated circuit board, in conjunction with the U-shaped groove, fixes the integrated circuit board inside the U-shaped groove. The set of mounting seats that has just moved to the opening position rises due to the elastic restoring force of the spring, causing the corresponding mounting rod and fixing frame to lift around the hinge point of the mounting rod, thereby releasing the fixing of the integrated circuit board inside the corresponding U-shaped groove. The entire process eliminates the need for manual fixing of the integrated circuit board by the operator, making it extremely convenient and significantly reducing the operational difficulty of the integrated circuit production equipment.

[0020] 3. This invention, through the coordinated use of dust removal components, a rotating disc, a main chamber, an electric lifting rod, a mounting frame, and an integrated circuit processing component, can simultaneously force the filter chamber into a negative pressure state using an air pump during each processing of the integrated circuit board. This negative pressure state creates a space between the mounting cover and the fixed frame, forcing air from outside the mounting cover to flow between the mounting cover and the fixed frame. This effectively removes dust from the integrated circuit board inside the U-shaped groove. The dust-laden air is drawn into the filter chamber and filtered through two sets of filters, trapping the dust inside. The filtered air is then directly discharged into the external environment, achieving dust removal before and after integrated circuit board processing and ensuring the overall processing efficiency of the integrated circuit production equipment. Attached Figure Description

[0021] Figure 1 This is a front sectional view of the present invention;

[0022] Figure 2 This is a top view of the present invention;

[0023] Figure 3 This is a top sectional view of the present invention;

[0024] Figure 4 This is a three-dimensional schematic diagram of the mounting bracket of the present invention;

[0025] Figure 5 This is a three-dimensional schematic diagram of the arc-shaped plate of the present invention;

[0026] Figure 6 This is a partial schematic diagram of the fixing component of the present invention;

[0027] Figure 7 For the present invention Figure 6 Enlarged view of point A.

[0028] In the diagram: 1. Dust removal assembly; 101. Air pump; 102. Filter chamber; 103. Conduit; 104. Filter screen; 105. Mounting cover; 106. Connecting frame; 2. Control panel; 3. Driven gear; 4. U-shaped groove; 5. Rotating disc; 6. Opening; 7. Main chamber; 8. Fixing assembly; 801. Arc plate; 802. Roller groove; 803. Slider; 804. Mounting base; 805. Limiting groove; 806. Fixed... 807. Fixed frame; 808. Mounting rod; 809. Limiting block; 810. Spring; 811. Connecting rod; 812. First roller; 813. Slide groove; 814. Hinge rod; 815. Horizontal sliding plate; 9. Electric lifting rod; 10. Mounting bracket; 11. Integrated circuit processing component; 12. Second roller; 13. Drive gear; 14. Servo motor; 15. Bearing; 16. Mounting column; 17. Mounting tube; 18. Limiting ring. Detailed Implementation

[0029] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] Please see Figure 1-7This invention provides a technical solution: an integrated circuit manufacturing equipment with dust removal function, comprising a main chamber 7, an installation column 16 installed at the center of the main chamber 7, bearings 15 installed at the top and bottom of the outer side of the installation column 16, a rib plate installed at the bottom of the outer side of the installation column 16, and the bottom of the rib plate fixedly connected to the inner bottom of the main chamber 7, which helps to improve the stability of the connection between the installation column 16 and the main chamber 7, three sets of support columns evenly installed at the bottom edge of the main chamber 7, and pads installed at the bottom of the support columns, an installation tube 17 installed on the outer side of the bearings 15, three sets of observation windows evenly arranged on the outer side of the main chamber 7, a fixing component 8 arranged on the outer side of the installation tube 17, a rotating disk 5 installed at the bottom of the outer side of the installation tube 17, and eight sets of U-shaped grooves 4 evenly opened at the top edge of the rotating disk 5, a fixing component 8 installed at the bottom of the inner side of the main chamber 7, and four sets of limit rings evenly installed at the bottom edge of the rotating disk 5. The second roller 12, which cooperates with the limiting ring 18, has an annular groove at the top that cooperates with the second roller 12, which helps to improve the stability of the rotation of the rotating disk 5. A driven gear 3 is installed at the bottom of the outer side of the mounting tube 17. A servo motor 14 is installed at the bottom of the inner side of the main body compartment 7, and an active gear 13 that meshes with the driven gear 3 is installed at the output end of the servo motor 14. Electric lifting rods 9 are symmetrically installed at both ends of the top of the main body compartment 7. A mounting frame 10 is installed at the output end of the electric lifting rods 9. The mounting frame 10 is in the shape of a ring structure, and a notch is provided near the opening 6. Integrated circuit processing components 11 are evenly installed at the bottom of the mounting frame 10. A dust removal component 1 is provided near the center of the top of the main body compartment 7. An opening 6 is provided at the top and outer side of the main body compartment 7. A control panel 2 is installed on the outer side of the main body compartment 7. The control panel 2 is electrically connected to the electric lifting rod 9 and the servo motor 14 through wires.

[0031] The fixing component 8 includes an arc-shaped plate 801, a roller groove 802, a slider 803, a mounting base 804, a limiting groove 805, a fixing frame 806, a mounting rod 807, a limiting block 808, a spring 809, a connecting rod 810, a first roller 811, and a sliding groove 812. Sliding grooves 812 are evenly distributed on the outer side of the mounting tube 17, and a spring 809 is installed at the bottom inner part of the sliding groove 812. A slider 803 is installed at the top of the spring 809, and a mounting base 804 is installed on the outer side of the slider 803. A connecting rod 810 is installed at the bottom end of the mounting base 804, and a first roller 811 is installed at the top of the mounting base 804. An arc-shaped plate 801 is installed at a non-central position at the top of the main body compartment 7, and a roller groove 802 that cooperates with the first roller 811 is opened at the bottom of the arc-shaped plate 801. The bottom outer side of the mounting tube 17 is evenly distributed with the sliding groove 802. The mounting tube 17 is hinged with mounting rods 807. Eight sets of mounting rods 807 are hinged to the bottom of the outer side of the mounting tube 17, and the included angle between adjacent mounting rods 807 is 45°. The top of the mounting rod 807 is provided with a limiting groove 805, and a limiting block 808 is provided inside the limiting groove 805. The bottom end of the connecting rod 810 is hinged to the top of the corresponding limiting block 808. The end of the mounting rod 807 away from the mounting tube 17 is equipped with a fixing frame 806 that cooperates with the U-shaped groove 4. The bottom of the fixing frame 806 is provided with an annular rubber pad, and the bottom of the annular rubber pad is provided with anti-slip texture to help avoid damage to the surface of the integrated circuit board. The inner side of the U-shaped groove 4 is provided with a horizontal sliding plate 814. The bottom of the mounting rod 807 is hinged with a hinge rod 813, and the bottom end of the hinge rod 813 is hinged to the top of the horizontal sliding plate 814.

[0032] The dust removal assembly 1 includes an air pump 101, a filter chamber 102, a duct 103, a filter screen 104, a mounting cover 105, and a connecting frame 106. The filter chamber 102 is installed at the center of the top of the main body chamber 7, and two sets of filter screens 104 are installed inside the filter chamber 102. Two sets of filter screen grooves that cooperate with the filter screens 104 are symmetrically arranged on both sides of the inner side of the filter chamber 102, facilitating the removal of the filter screens 104 from the filter chamber 102 for cleaning. A door is hinged to one side of one end of the filter chamber 102, and a mounting bracket is installed on the outside of the door. The handle facilitates opening the chamber door to clean the dust collected inside the filter chamber 102. Two sets of conduits 103 are installed at the bottom of one side of the filter chamber 102. An air pump 101 is installed at the top of the main chamber 7, and the input end of the air pump 101 is connected to the top of the filter chamber 102. Connecting brackets 106 are installed at both ends of the bottom of the mounting bracket 10, and a mounting cover 105 is installed at the bottom of the connecting bracket 106. The end of the conduit 103 away from the filter chamber 102 is connected to the inner top of the mounting cover 105. The control panel 2 is electrically connected to the air pump 101 via wires.

[0033] Example 1, such as Figure 1-4As shown, each time the integrated circuit processing assembly 11 processes the integrated circuit board, the electric lifting rod 9 is lowered via the control panel 2, causing the mounting bracket 10 to descend until the bottom of the multiple integrated circuit processing assemblies 11 approaches the top of the fixing frame 806. The mounting cover 105 also moves to the inner top of the fixing frame 806. The integrated circuit processing assembly 11 processes the surface of the integrated circuit board inside the corresponding U-shaped groove 4. At this time, the mounting cover 105 extends into the inner side of the fixing frame 806. Simultaneously, the air pump 101 is turned on via the control panel 2, using the air pump 101 to force... The interior of the filter chamber 102 is under negative pressure, which also creates a negative pressure in the space between the mounting cover 105 and the fixing frame 806. Because there is a gap between the mounting cover 105 and the fixing frame 806, air from the outside of the mounting cover 105 is forced to flow into the space between the mounting cover 105 and the fixing frame 806 through the gap, thereby blowing away dust from the integrated circuit board inside the U-shaped groove 4. The dusty air is drawn into the interior of the filter chamber 102 and filtered by two sets of filter screens 104. The dust is blocked inside the filter chamber 102, and the filtered air is directly discharged into the outside environment.

[0034] Example 2, as Figure 1 , 2As shown in Figures 3, 5, 6, and 7, after each integrated circuit board is processed by the integrated circuit manufacturing equipment, the servo motor 14 is rotated via the control panel 2. The driven gear 3 and the driving gear 13 drive the mounting tube 17 to rotate 45° each time. After an integrated circuit board is placed inside each U-shaped groove 4, the electric lifting rod 9 is lowered via the control panel 2, causing the mounting frame 10 to descend until the bottom of the multiple integrated circuit processing components 11 is close to the top of the fixed frame 806. The mounting cover 105 also moves to the inside of the fixed frame 806. The integrated circuit processing components 11 process the surface of the integrated circuit board inside the corresponding U-shaped groove 4. Each time the servo motor 14 drives the mounting tube 17 to rotate, the first roller 811 rolls inside the roller groove 802, and a set of mounting seats 804 that has just entered the main body compartment 7 from the opening 6 gradually descends. The slider 803 slides downward inside the slide groove 812. When the spring 809 is compressed, the connecting rod 810 pushes the limiting block 808 to move gradually from one end near the fixed frame 806 to the other inside the limiting groove 805. At this time, the mounting rod 807 gradually rotates downward with its hinge as the axis until the bottom of the fixed frame 806 fixes the integrated circuit board inside the U-shaped groove 4. The horizontal sliding plate 814 also moves until it fixes one side of the integrated circuit board inside the U-shaped groove 4. The set of mounting seats 804 that have just moved from the inside of the main body compartment 7 to the position of the opening 6 will rise due to the elastic restoring force of the spring 809, causing the corresponding mounting rod 807 and the fixed frame 806 to lift up with the hinge of the mounting rod 807 as the axis. The horizontal sliding plate 814 will also gradually move away from the side of the integrated circuit board, thereby releasing the fixation of the integrated circuit board inside the corresponding U-shaped groove 4. The entire process does not require the operator to manually fix the integrated circuit board.

[0035] Working principle: Before use, connect the device to the power supply. First, place the unprocessed integrated circuit board into the corresponding U-shaped groove 4 through the opening 6. Then, control the servo motor 14 to rotate through the control panel 2. The driven gear 3 and the driving gear 13 drive the mounting tube 17 to rotate 45° each time. After placing the integrated circuit board in each U-shaped groove 4, control the electric lifting rod 9 to descend through the control panel 2, causing the mounting frame 10 to descend until the bottom of the multiple integrated circuit processing components 11 is close to the top of the fixed frame 806. The mounting cover 105 will also move to the inner top of the fixed frame 806. The integrated circuit processing components 11 are used to process the surface of the integrated circuit board inside the corresponding U-shaped groove 4. At this time, the mounting cover 105 extends into the inside of the fixing frame 806, and the air pump 101 is turned on through the control panel 2. The air pump 101 forces the inside of the filter chamber 102 into a negative pressure state, which in turn creates a negative pressure state in the space between the mounting cover 105 and the fixing frame 806. Since there is a gap between the mounting cover 105 and the fixing frame 806, air from the outside of the mounting cover 105 is forced to flow into the space between the mounting cover 105 and the fixing frame 806 through the gap, thereby blowing away dust from the integrated circuit board inside the U-shaped groove 4. The dusty air is drawn into the filter chamber 102, and after being filtered by two sets of filter screens 104, the dust is blocked inside the filter chamber 102. The gas is directly discharged into the external environment; each time the servo motor 14 drives the mounting tube 17 to rotate, the first roller 811 rolls inside the roller groove 802, and a set of mounting seats 804 that have just entered the main body compartment 7 from the opening 6 position gradually descends. The slider 803 slides downward inside the slide groove 812, the spring 809 is shortened by force, and the connecting rod 810 pushes the limiting block 808 to gradually move from one end near the fixed frame 806 to the other end inside the limiting groove 805. At this time, the mounting rod 807 gradually rotates downward with its hinge point as the axis until the bottom of the fixed frame 806 fixes the integrated circuit board inside the U-shaped groove 4, and the horizontal sliding plate 814 also moves until one side of the integrated circuit board is fixed. The integrated circuit board is fixed inside the U-shaped groove 4. A set of mounting seats 804 that have just moved from the main body compartment 7 to the opening 6 will rise due to the elastic restoring force of the spring 809. This causes the corresponding mounting rod 807 and fixing frame 806 to lift around the hinge of the mounting rod 807. The horizontal sliding plate 814 will also gradually move away from one side of the integrated circuit board, thereby releasing the fixing of the integrated circuit board inside the U-shaped groove 4. No manual fixing of the integrated circuit board is required by the operator throughout the process. The dust collected inside the filter compartment 102 can be cleaned by opening the compartment door on the outside of the filter compartment 102 periodically, and the filter screen 104 can be removed from the inside of the filter compartment 102 for cleaning.

[0036] Finally, it should be noted that the above content is only used to illustrate the technical solution of the present invention, and is not intended to limit the scope of protection of the present invention. Simple modifications or equivalent substitutions made by those skilled in the art to the technical solution of the present invention do not depart from the essence and scope of the technical solution of the present invention.

Claims

1. An integrated circuit manufacturing equipment with dust removal function, comprising a main chamber (7), characterized in that: A mounting column (16) is installed at the center of the main body compartment (7), and bearings (15) are installed on the top and bottom of the outer side of the mounting column (16). A mounting tube (17) is installed on the outer side of the bearings (15). A fixing component (8) is provided on the outer side of the mounting tube (17). A rotating disk (5) is installed on the bottom of the outer side of the mounting tube (17), and eight sets of U-shaped grooves (4) are evenly opened at the top edge of the rotating disk (5). A fixing component (8) is installed on the bottom of the inner side of the main body compartment (7). Four sets of second rollers (12) that cooperate with the limiting ring (18) are evenly installed on the bottom edge of the rotating disk (5). A driven gear (3) is installed on the bottom of the outer side of the mounting tube (17). A servo motor (14) is installed at the bottom of the inner part of the compartment (7), and a drive gear (13) that meshes with the driven gear (3) is installed at the output end of the servo motor (14). Electric lifting rods (9) are symmetrically installed at both ends of the top of the main compartment (7). A mounting frame (10) is installed at the output end of the electric lifting rods (9), and an integrated circuit processing component (11) is evenly installed at the bottom of the mounting frame (10). A dust removal component (1) is provided at the top of the main compartment (7) near the center. An opening (6) is opened at the top and the outside of the main compartment (7). A control panel (2) is installed on the outside of the main compartment (7). The control panel (2) is electrically connected to the electric lifting rod (9) and the servo motor (14) respectively through wires. The fixing assembly (8) includes an arc-shaped plate (801), a roller groove (802), a slider (803), a mounting base (804), a limiting groove (805), a fixing frame (806), a mounting rod (807), a limiting block (808), a spring (809), a connecting rod (810), a first roller (811), a sliding groove (812), a hinge rod (813), and a horizontal sliding plate (814). The mounting tube (17) The outer side is uniformly provided with sliding grooves (812), and a spring (809) is installed at the inner bottom of the sliding groove (812). A slider (803) is installed at the top of the spring (809), and a mounting base (804) is installed on the outer side of the slider (803). A connecting rod (810) is installed at the bottom of the mounting base (804). A first roller (811) is installed at the top of the mounting base (804). An arc plate (801) is installed at the non-center position of the top of the main body compartment (7), and a roller groove (802) that cooperates with the first roller (811) is opened at the bottom of the arc plate (801). The bottom of the outer side of the mounting tube (17) is... The mounting rod (807) is evenly hinged to the top of the mounting rod (807), and a limiting groove (805) is provided at the top of the limiting groove (805). A limiting block (808) is provided inside the limiting groove (805). The bottom end of the connecting rod (810) is hinged to the top of the corresponding limiting block (808). A fixing frame (806) that cooperates with the U-shaped groove (4) is installed at the end of the mounting rod (807) away from the mounting tube (17). A horizontal sliding plate (814) is provided on the inner side of the U-shaped groove (4). A hinge rod (813) is hinged to the bottom of the mounting rod (807), and the bottom end of the hinge rod (813) is hinged to the top of the horizontal sliding plate (814). The dust removal assembly (1) includes an air pump (101), a filter chamber (102), a conduit (103), a filter screen (104), a mounting cover (105), and a connecting frame (106). The filter chamber (102) is installed at the center of the top of the main body chamber (7), and two sets of filter screens (104) are provided inside the filter chamber (102). Two sets of conduits (103) are installed at the bottom of one side of the filter chamber (102). The air pump (101) is installed at the top of the main body chamber (7), and the input end of the air pump (101) is connected to the top of the filter chamber (102). The connecting frame (106) is installed at both ends of the bottom of the mounting frame (10), and the mounting cover (105) is installed at the bottom end of the connecting frame (106). The end of the conduit (103) away from the filter chamber (102) is connected to the inner top of the mounting cover (105). The control panel (2) is connected to the air pump (101) via a wire. Electrical connection.

2. The integrated circuit manufacturing equipment with dust removal function according to claim 1, characterized in that: The bottom of the outer side of the mounting tube (17) is hinged with eight sets of mounting rods (807), and the included angle between adjacent mounting rods (807) is 45°.

3. The integrated circuit manufacturing equipment with dust removal function according to claim 1, characterized in that: Three sets of support columns are evenly installed at the bottom edge of the main compartment (7), and a pad is installed at the bottom of the support column.

4. An integrated circuit manufacturing equipment with dust removal function according to claim 1, characterized in that: The mounting bracket (10) is in the shape of a ring, and a notch is provided near the opening (6) of the mounting bracket (10).

5. An integrated circuit manufacturing equipment with dust removal function according to claim 1, characterized in that: Three sets of observation windows are evenly arranged on the outside of the main compartment (7).

6. An integrated circuit manufacturing equipment with dust removal function according to claim 1, characterized in that: The filter chamber (102) has a door hinged to one side at one end, and a handle is installed on the outside of the door.

7. An integrated circuit manufacturing equipment with dust removal function according to claim 1, characterized in that: A rib is installed at the bottom of the outer side of the mounting column (16), and the bottom of the rib is fixedly connected to the inner bottom of the main body compartment (7).

8. An integrated circuit manufacturing equipment with dust removal function according to claim 1, characterized in that: The top of the limiting ring (18) is provided with an annular groove that cooperates with the second roller (12).

9. An integrated circuit manufacturing equipment with dust removal function according to claim 1, characterized in that: The filter chamber (102) has two sets of filter screen grooves symmetrically arranged on its inner sides, which cooperate with the filter screen (104).

10. An integrated circuit manufacturing equipment with dust removal function according to claim 1, characterized in that: The bottom of the fixed frame (806) is provided with an annular rubber pad, and the bottom of the annular rubber pad is provided with anti-slip texture.

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