A catamaran based dinghy transport structure

Abstract

The application discloses a kind of based on double oar's dinghy transport structure, including dinghy, boat and boat paddle;Dinghy is set on boat, and boat paddle is set under boat;Boat includes vertical plate, side plate, and vertical plate and side plate are enclosed to form boat;Boat paddle includes fixed part of fixed boat and stable part connected with control equipment thereof;The application provides a kind of based on double oar's dinghy transport structure with simple structure, reasonable design, light weight itself.

Description

[0001] This patent is a divisional application of application number 2019110110886, entitled "A Small Boat Transportation Structure". Technical Field

[0002] This invention relates to the field of semiconductor or photovoltaic material processing, and more specifically, to a semiconductor processing apparatus. Background Technology

[0003] Semiconductor or photovoltaic materials are widely used in industries such as electronics and new energy. Semiconductor and photovoltaic materials usually need to undergo chemical processing before they can be applied to products. CVD technology is one such processing method. CVD stands for Chemical Vapor Deposition. CVD technology is now widely used in the processing of semiconductor or photovoltaic materials. Common processing equipment includes PECVD, LPCVD, and APCVD. In addition to CVD, there are also diffusion processes, such as phosphorus diffusion and boron diffusion, which can all use gas diffusion to process raw materials. Currently, there are many related equipment available in the industry, and the appropriate equipment can be selected for processing based on specific processing needs. The processing of semiconductor or photovoltaic materials usually involves feeding sheet materials into a furnace and reacting them under certain temperature and pressure conditions. During the processing of semiconductor or photovoltaic materials, some devices are usually used to load or move the materials to be processed, in the process of processing, or after processing. In the industry, such loading or moving devices are usually called boats, graphite boats, small boats, or flower baskets.

[0004] In traditional equipment, the material to be processed is placed vertically as inserts. During the process, the flow of process gas is disturbed or blocked, resulting in uneven coating on the material. The vertical insert method is also prone to deformation of the material. During the automated insertion and removal process, the material is prone to excessive fragmentation, making automation difficult. Summary of the Invention

[0005] This invention overcomes the shortcomings of the prior art and provides a novel small boat transportation structure that is simple in structure, reasonable in design, and lightweight.

[0006] The technical solution of the present invention is as follows:

[0007] A small boat transportation structure, characterized in that it includes a small boat, a boat support, and a paddle; the small boat is mounted on the boat support, and the paddle is mounted below the boat support; the small boat includes a top plate, a bottom plate, and grooved bars, the top plate and the bottom plate being connected by grooved bars, which are distributed between the top plate and the bottom plate; each grooved bar has grooves distributed on it, and corresponding grooves on each grooved bar are on the same horizontal plane; the small boat also includes a connecting rod, which connects two adjacent grooved bars; a handle is provided on the connecting rod, and the handle is on the same horizontal plane as the center of gravity of the entire small boat.

[0008] The boat support includes a vertical plate and side plates, which surround each other to form the boat support; through holes are provided on the vertical plate and / or side plates; handles are provided on the side plates, which are located at both ends of the side plates, and mounting grooves are provided at the bottom of the handles; through holes are distributed on the vertical plate and / or side plates, and positioning grooves are provided at the upper edge of the side plates, which are distributed at the upper edge of the side plates; components that increase friction are provided in the positioning grooves.

[0009] The oar includes a fixed part for fixing the boat support and a stabilizing part for connecting its control equipment; the thickness of the fixed part is less than that of the stabilizing part, and a smooth transition part is provided between the fixed part and the stabilizing part; a fixing structure is provided at one end of the stabilizing part; the fixed part of the oar is provided with one or more through holes, the shape of which is adapted to the fixed part of the oar; a limiting member is provided at the end of the fixed part of the oar away from the stabilizing part; the through holes are distributed in the fixed part; the limiting member is a circular boss.

[0010] Furthermore, the top plate and the bottom plate are set parallel to each other; through holes or through grooves are provided on the bottom plate.

[0011] Furthermore, the distance between adjacent slots is a multiple of the spacing between adjacent boats; the orientation of the slots matches the overall shape of the boats.

[0012] Furthermore, the small boat is made of non-conductive, high-temperature resistant, and pressure-resistant materials; the boat support is also made of non-conductive, high-temperature resistant, and pressure-resistant materials.

[0013] Furthermore, the handle is cylindrical or cuboid in shape; a mounting groove is provided at one end or in the middle of the bottom of the handle near the side plate, and the mounting groove is a circular or rectangular groove; or a mounting groove is provided at one end of the bottom of the handle away from the side plate, and a limiting block is provided at that end of the handle.

[0014] Furthermore, the boat support and oars are made of non-conductive, high-temperature resistant, and pressure-resistant materials.

[0015] Furthermore, it also includes a boat support with handles on both sides, and two oars symmetrically arranged on both sides of the boat support.

[0016] Furthermore, the handle at the corresponding position on the boat support is provided with a groove that matches the oar.

[0017] Furthermore, the handles of the boat support are set at both ends of the side plate of the boat support. The bottom of the handle at one end is provided with a cut rectangular or circular groove, and the bottom of the handle at the other end is provided with the same groove, and a positioning notch is provided in the middle of the groove.

[0018] Furthermore, the positioning notch is matched with the transition section of the oar.

[0019] The advantages of this invention are:

[0020] This design is simple and rational. The transport structure consists of a small boat, a boat support, and a paddle. The top and bottom plates of the small boat are connected by grooved bars, forming a space for placing the material to be processed. The insert to be processed is placed horizontally in the small boat, and the boat support is movable on the paddle, avoiding interference from process gas flow and uneven coating. Compared to a single paddle, the stability of the boat support after fixing the boat support is significantly higher. The upright plate of the boat support structure is located at the air inlet of the diffused airflow in the furnace tube, and the side plates are arranged along the airflow direction, with corresponding through holes to reduce obstruction to the diffused airflow. Positioning grooves are provided at the upper edges of the side plates, and components that increase friction can also be placed within these grooves to reduce boat dragging. The paddle stabilizes the handles on both sides of the boat support through limiting components and transition sections, preventing the quartz boat support from deviating.

[0021] This design incorporates handles on the side panels, typically located at both ends. This placement of handles minimizes the space required for the boat support along its length in relation to the oars, allowing for the placement of larger or more quartz boats. Attached Figure Description

[0022] Figure 1 A 3D model of the small boat;

[0023] Figure 2 This is a side view of the small boat;

[0024] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0025] Figure 4 A top view omitting the fixed board for the small boat;

[0026] Figure 5 This is a diagram showing the overall structure of a boat paddle;

[0027] Figure 6 For the present invention Figure 5 A magnified view of a portion of AF;

[0028] Figure 7 For the present invention Figure 5 A magnified view of a portion of AG.

[0029] Figure 8 This is a diagram of the overall structure of the boat support;

[0030] Figure 9 For the present invention Figure 8 A magnified view of a portion of AF;

[0031] Figure 10 For the present invention Figure 8 A magnified view of a portion of AG.

[0032] The following components are marked in the diagram: Top plate 1, Bottom plate 2, Groove bar 3, Groove opening 31, Handle 4, Connecting rod 5, Paddle 6, Fixing part 7, Stabilizing part 8, Transition part 9, Limiting part 10, Through hole 11, Boat support 12, Positioning notch 15, Side plate 16, Vertical plate 17, Handle 18, Upper edge 19, Installation groove 20, Through hole 21. Detailed Implementation

[0033] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only for explaining the present invention and are not intended to limit the present invention.

[0034] Example:

[0035] A small boat transport structure includes a small boat, a boat support, and a paddle; the small boat is mounted on the boat support, and the paddle is mounted below the boat support; as shown... Figure 1 The novel small boat shown includes a top plate 1, a bottom plate 2, and a channel bar 3; the top plate 1 and the bottom plate 2 are connected by the channel bar 3 to form a space for placing the boat planks to be processed. The small boat has a simple overall structure, is lightweight, and maximizes its load-bearing capacity.

[0036] Multiple grooved rods 3 are used, distributed between the top plate 1 and the bottom plate 2. The specific number of grooved rods 3, the shape of the top plate 1, and the shape of the bottom plate 2 are all adapted to the boat plank. For example, if the boat plank is rectangular, the entire boat forms a cuboid, with four grooved rods 3 distributed at the four corners of the top plate 1 and the bottom plate 2. Figure 2 , Figure 3 As shown, each channel bar 3 has slots 31 distributed on it, providing space for placing the boat plate to be processed. Corresponding slots 31 on each channel bar 3 are on the same horizontal plane, and the boat plate is placed within them, forming a boat with controllable height. The parallel-placed boat plates have a better thermal field than traditional methods. The boat plates are parallel to the plane of the material to be processed and the direction of heat radiation, allowing heat to radiate throughout the entire boat, thus effectively obtaining a uniform temperature field. After the anti-reflective coating process, the material to be processed will not exhibit plating wrapping. The orientation of the slots 31 is also matched as closely as possible to the overall shape of the boat to improve the stability of the boat plate. For example, when the boat is a cuboid, the slots 31 on the four channel bars 3 are symmetrically arranged in pairs. The slots 31 are located near the inner side of the channel bar 3, making it easier to insert the boat plate, which needs to be placed horizontally, into the boat, and the slots 31 support and stabilize the boat plate.

[0037] The spacing between adjacent slots 31 of the grooved bar 3 and the spacing between adjacent small boats can be set according to the requirements of different automated equipment. Preferably, the distance between adjacent slots 31 is a multiple of the spacing between adjacent small boats, which is more conducive to the staggered insertion of boat plates by automated equipment. Figure 4As shown, the base plate 2 is provided with through holes or through slots, and the through holes or through slots are as numerous and large as possible to reduce the weight of the boat while ensuring its load-bearing strength. As a preferred solution, taking the boat as a cuboid as an example, the base plate 2 with through holes or through slots is U-shaped as a whole.

[0038] The top plate 1 and the bottom plate 2 are set parallel to maximize the space for placing the boat planks. If the top plate 1 and the bottom plate 2 are not set parallel, some space cannot be used to place the boat planks horizontally, thus wasting unnecessary space and increasing the weight of the boat.

[0039] It also includes connecting rods 5. Taking a cuboid boat as an example, connecting rods 5 connect to the grooved bars 3 located on the left and right sides of the boat to stabilize the overall structure and improve strength. Handles 4 are installed on connecting rods 5, and the handles 4 are on the same horizontal plane as the center of gravity of the entire boat. The shape of the handles 4 can be set according to actual needs, generally rectangular, but obviously other shapes can also be used, as long as it facilitates the picking and placing of the robotic arm of the automated equipment. Having the handles 4 on the same horizontal plane as the center of gravity of the entire boat will improve stability when picking up and placing the boat, making it less likely for the boat to shift during transportation.

[0040] The boat is made of non-conductive, high-temperature resistant, and pressure-resistant materials. Quartz or silicon carbide are preferred materials to minimize its weight, maximize the number of planks that can be placed on the boat, and still meet the boat's non-conductive and high-temperature resistant characteristics.

[0041] like Figures 5 to 7 As shown, a novel paddle structure is provided, with a limiting member 10 on the paddle 6 to restrict the movement of the boat support 12 and thus stabilize the boat support 12. The limiting member 10 can be a circular boss or other similar limiting structures.

[0042] A fixing structure is provided at one end of the paddle 6. This fixing structure can be achieved by providing a connection hole at the end of the paddle 6 that connects to the control device, facilitating the stabilization of the paddle 6. Specifically, the paddle 6 includes a fixing part 7 that fixes the boat support 12 and a stabilizing part 8 that connects to its control device. The thickness of the fixing part 7 is less than that of the stabilizing part 8, and a smooth transition part 9 is provided between the fixing part 7 and the stabilizing part 8. The transition part 9 generally adopts a gradual linear change, but other changes are also possible, as long as they match the mounting groove 20 on the handle 18 of the boat support 12. The fixing part 7 of the paddle 6 is provided with one or more through holes 11. The shape of the through holes 11 is adapted to the fixing part 7 of the paddle 6 (e.g., if the paddle 1 is elongated, the through holes 11 are also elongated). The through holes 11 are distributed throughout the fixing part 7. The structure of the paddle 6 minimizes its own weight while ensuring strength within the load-bearing range. The through holes 11 not only reduce the weight but also reduce the obstruction of diffused gas within the quartz furnace tube.

[0043] The propeller 6 is made of non-conductive, high-temperature resistant, and pressure-resistant materials. The preferred materials are quartz or silicon carbide, in order to reduce its own weight as much as possible, increase its load capacity, and expand its production capacity.

[0044] The oar support structure of the oar structure also includes a boat support 12 with handles 18 on both sides, and two oars 6 are symmetrically arranged on both sides of the boat support 12. Compared with the traditional single oar 6, the stability of the boat support 12 after fixing it is much greater than that of a single oar 6. The strength of the new oar 6 structure within its load range has been minimized as much as possible.

[0045] The handles 18 of the boat support 12 are located at both ends of the side plate of the boat support 12. The bottom of the handle 18 at one end is provided with a cut rectangular or circular mounting groove 20, and the bottom of the handle 18 at the other end is provided with the same mounting groove 20. A positioning notch 15 is provided in the middle of the mounting groove 20. The mounting groove 20 is provided to facilitate the cooperation between the boat support 12 and the oar 6.

[0046] A handle 18 at one end of the boat support 12 is located at the limiting member 10 of the paddle 6, and a handle 18 at the other end is located at the transition part 9 of the paddle 6. For example... Figure 9 , Figure 8 As shown in the diagram, at positions AF and AG, the paddle 6 engages with the boat support 12. The paddle 6, through the limiting member 10 and the transition part 9, secures the handles 18 on both sides of the boat support 12, preventing the quartz boat support 12 frame from deviating. Specifically, as... Figure 8 The handle at the AG position of the boat support 12 is placed on the side of the limiting member 10 of the paddle 6 near the stabilizing part 8; the handle at the AF position of the boat support 12 is placed at the transition part 9 of the paddle 6, or at the end of the fixing part 7 of the paddle 6 near the transition part 9. The transition part 9 also forms a structure that restricts the movement of the boat support 12.

[0047] A novel boat support structure includes a vertical plate 17 and side plates 16, which together form the boat support. Through holes 21 are provided on the vertical plate 17 and / or side plates 16. The boat support, formed by the vertical plate 17 and side plates 16, is generally rectangular in shape. The boat support needs to support a quartz boat, resulting in a large overall volume and thus a significant weight, limiting its load-bearing capacity. By providing one or more through holes 21, while ensuring the strength of the boat support within its load-bearing range, its weight can be reduced, increasing its load-bearing capacity. Specifically, the through holes 21 can be arbitrarily placed on the vertical plate 17 and side plates 16. The shape of the through holes 21 can be regular or irregular, such as rectangular, circular, rhomboid, or pentagonal. Currently, the preferred solution is that the shape of the through holes 21 on the vertical plate 17 and side plates 16 matches the shape of the vertical plate 17 and side plates 16 themselves. Only one large through hole 21 is provided on the vertical plate 17 and the side plate 16. The through hole 21 is as large as possible while ensuring the strength of the boat support within its load-bearing range. The boat support is made of non-conductive, high-temperature resistant, and pressure-resistant material, preferably quartz or silicon carbide, in order to minimize its own weight, increase the number of boat support processes in the entire equipment, and also meet the non-conductive and high-temperature resistant characteristics of the boat support. Specifically, the vertical plate 17 of the boat support structure is located at the air inlet of the furnace tube diffusion gas flow (not shown in the figure), and the through hole 21 on the vertical plate 17 will reduce the obstruction to the diffusion gas. The side plate 16 is arranged along the air flow direction, and the through hole 21 on the side plate 16 will also reduce the obstruction to the diffusion gas flow.

[0048] A positioning groove (not shown in the figure) is provided at the upper edge 19 of the side plate 16. The positioning groove is distributed at the upper edge 19 of the side plate 16 to facilitate the positioning and placement of the quartz boat product. Preferably, a corresponding external component can be provided in the positioning groove to reduce the probability of boat dragging, such as a protruding component to increase friction.

[0049] Preferably, handles 18 are provided on the side plate 16. Generally, handles 18 are located at both ends of the side plate 16, but multiple handles 18 can be provided as needed. Providing handles 18 on the side plate 16 minimizes the space required for the boat support in the length direction that mates with the oar, thus allowing for the placement of larger or more quartz boats. Specifically, as shown... Figure 8 As shown, a mounting groove 20 is provided at the bottom of the handle 18. Generally, the handle 18 is cylindrical or cuboid, but other shapes can be provided as needed. The mounting groove 20 is provided at one end or in the middle of the bottom of the handle 18 near the side plate 16, and the mounting groove 20 is circular or rectangular. The mounting groove 20 at the bottom of the handle 18 facilitates its use with the oar and prevents the oar from detaching from the boat support. Alternatively, the mounting groove 20 can be provided at the end of the bottom of the handle 18 away from the side plate 16, and a limiting block can be provided at that end of the handle 18 to prevent the oar from separating from the boat support. Obviously, a handle 18 with a limiting block can omit the mounting groove 20.

[0050] The above description is only a preferred embodiment of the present invention. It should be noted that those skilled in the art can make several improvements and modifications without departing from the concept of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A small boat transportation structure based on twin propellers, characterized in that: It includes a small boat, a boat support, and a paddle; the small boat is mounted on the boat support, and the paddle is mounted below the boat support. The boat includes a top plate, a bottom plate, and grooved bars. The top plate and bottom plate are connected by grooved bars, which are distributed between the top and bottom plates. Each grooved bar has slots, and corresponding slots on each grooved bar are on the same horizontal plane. The boat also includes a connecting rod that connects two adjacent grooved bars. The connecting rod has a handle, which is on the same horizontal plane as the center of gravity of the entire boat. The bottom plate has through holes or through slots to reduce the weight of the boat. The boat support includes a vertical plate and side plates, which surround each other to form the boat support. The vertical plate is located at the air inlet of the furnace tube diffusion airflow, and the side plates are arranged along the airflow direction. Through holes are provided on the vertical plate and / or side plates. Handles are provided on both ends of the side plates, and mounting grooves are provided at the bottom of the handles. Through holes are distributed on the vertical plate and / or side plates, and positioning grooves are provided on the upper edge of the side plates. The positioning grooves are provided with components that increase friction. The oar includes a fixed part for fixing the boat support and a stabilizing part for connecting its control equipment; the thickness of the fixed part is less than that of the stabilizing part, and a smooth transition part is provided between the fixed part and the stabilizing part; a fixing structure is provided at one end of the stabilizing part; the oar fixed part is provided with one or more through holes, the shape of which is adapted to the oar fixed part; a limiting member is provided on the end of the oar fixed part away from the stabilizing part; the through holes are distributed in the fixed part; the limiting member is a circular boss. Handles are provided on both sides of the boat support, and two oars are symmetrically arranged on both sides of the boat support; The handles of the boat support are located at both ends of the side plate of the boat support. The bottom of the handle at one end is provided with a cut rectangular or circular groove, and the bottom of the handle at the other end is provided with the same groove, and a positioning notch is provided in the middle of the groove. The positioning notch matches the transition section of the oar.

2. The small boat transportation structure based on twin propellers according to claim 1, characterized in that: The small boat is made of non-conductive, high-temperature resistant, and pressure-resistant materials; the boat support is made of non-conductive, high-temperature resistant, and pressure-resistant materials.

3. The small boat transportation structure based on twin propellers according to claim 1, characterized in that: The handle is cylindrical or cuboid in shape; a mounting groove is provided at one end or in the middle of the bottom of the handle near the side plate, and the mounting groove is a circular or rectangular groove; or a mounting groove is provided at one end of the bottom of the handle away from the side plate, and a limiting block is provided at that end of the handle.

4. The small boat transportation structure based on twin propellers according to claim 1, characterized in that: The boat support and oars are made of non-conductive, high-temperature resistant, and pressure-resistant materials.

5. The small boat transportation structure based on twin propellers according to claim 1, characterized in that: The handle at the corresponding position on the boat support has a groove that matches the oar.

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