A simple oblique illumination color confocal measurement system and detection method

Abstract

The present invention relates to a simple oblique illumination color confocal measurement system, comprising a polychromatic point light source module, a dispersion lens module, a moving object module, a reflector and a light collection and calculation module. The polychromatic point light source module emits light obliquely downward through the dispersion lens module to the moving object module, and then obliquely reflects upward to the reflector, and then reflects twice to the light collection and calculation module. The moving object is loaded with the moving object. The incident light is projected onto the surface of the object at an oblique angle, and lights of different wavelengths are focused to different axial heights to form light spots on the surface of the object. The light collection and calculation module receives and analyzes the light wave signal, moves the object, and collects all sampling point information of the object and performs point cloud modeling to generate three-dimensional surface morphology information. The measurement system and detection method are suitable for the case where the surface morphology of the sample cannot be detected in the vertical direction, such as the surface morphology measurement of the rotor blades of an aircraft engine and the thickness measurement of transparent materials such as glass.

Description

Technical Field

[0001] The invention relates to the field of non-contact surface three-dimensional shape detection, and in particular to a simple oblique illumination color confocal measurement system and a detection method. Background Art

[0002] The rapid development of science and technology has driven the industrial upgrading of the manufacturing industry, making the products produced and processed more and more precise, and the society has also put forward higher requirements for the surface 3D topography detection technology of high-precision products. Surface measurement technology spans many different fields such as science and industry, and is widely used in biomedicine, geological samples, processing materials, mechanical parts, integrated circuits, micro-electromechanical systems and optical components.

[0003] At present, in the field of surface three-dimensional topography detection, optical detection methods have surpassed traditional contact measurement and become the mainstream detection method due to their advantages of non-contact, high precision, high speed, and strong adaptability. Traditional optical detection methods usually include white light interferometry, laser triangulation, astigmatism, laser confocal method, etc. Compared with these traditional optical detection methods, color confocal technology has shorter scanning time, higher precision, and is more adaptable to the needs of industrial detection.

[0004] The principle of color confocal technology is to scan the surface of the object under test by combining a mechanical displacement device, and reflect the position information according to the change of the spectral information collected by the sensor. Compared with the traditional laser confocal measurement method, color confocal technology does not require axial scanning, saves detection time, improves detection speed, and can achieve sub-micron level detection accuracy.

[0005] Color confocal technology usually requires that the measurement light be irradiated vertically onto the surface of the object to be measured in order to ensure that the measurement light is reflected back to the detection device. Therefore, the illumination system of a conventional color confocal measurement device can usually only measure perpendicularly to the surface of the object to be measured. However, there are actually some special cases that limit the above traditional measurement schemes: for example, when applied to the detection of the surface morphology of aircraft engine rotor blades, the space between the two blades is very narrow, which compresses the geometric space for measurement in the vertical direction; for example, when measuring the thickness of glass, the vertically incident light is reflected on the upper and lower surfaces of the glass, and the reflected light will overlap, which will interfere with the receiving end. Similar situations where measurements cannot be made in the vertical direction often occur in other industrial detection fields. Summary of the invention

[0006] The technical problem to be solved by the present invention is that the existing color confocal measurement system can only measure perpendicularly to the object to be measured, but cannot measure the surface topography in a non-vertical direction.

[0007] In order to solve the above technical problems, the present invention proposes a color confocal measurement system for collecting object surface information in an oblique illumination mode, which can realize measurement at different geometric angles, and the solution can be applied to other related surface morphology measurement fields. The technical solution of the present invention is as follows.

[0008] A simple oblique illumination color confocal measurement system, the measurement system includes a polychromatic point light source module, a dispersion lens module, a moving object module, a reflector and a light collection and calculation module. The incident light emitted by the polychromatic point light source module passes through the dispersion lens module obliquely downward, is emitted obliquely downward to the moving object module, then is reflected obliquely upward to the reflector, and then is reflected obliquely downward to the light collection and calculation module for a second time; the light-emitting port of the polychromatic point light source module faces the dispersion lens module, and the moving object module is arranged at the outer focus of the exit end of the dispersion lens module; the moving object module includes a stage for loading the object to be measured. The light collection and calculation module is also connected to the moving object module.

[0009] The present invention uses a color confocal distance measurement method to collect the surface information of the object to be measured in an inclined manner, and the measuring light is directed to the surface of the object to be measured at an inclined angle, and the inclined angle can be 20°, 40°, 65°, 70°, etc. The dispersion module on the incident light channel is passed in the middle, so that light of different wavelengths is focused to different axial height positions of the optical axis, and the surface of the object to be measured shows light spots of different colors at different axial heights. After these light spots are reflected by the surface of the object to be measured to the reflector, they are finally received by the light collection and calculation module. In this process, when the axial position of the object to be measured changes, the position of the reflector also changes accordingly, and the light collection and calculation module collects the corresponding change in the wavelength of the focused light. The surface of the object to be measured is measured by moving the moving carrier module, and the wavelength of the focused light of the measured point at each different axial height of the surface of the object to be measured is collected to obtain the relative height information of the measured point. The light collection and calculation module will model and generate the three-dimensional morphology of the surface of the object to be measured based on this information. This system solves the problem that the current color confocal measurement system can only measure the surface topography perpendicular to the object being measured, and can be applied to surface topography measurement in specific scenarios where measurement in the vertical direction is not possible.

[0010] As a further improvement of the simple oblique illumination color confocal measurement system of the present invention, the complex point light source module includes a light source, an incident optical fiber and a pinhole mechanism; the pinhole mechanism is provided with a pinhole; one end of the incident optical fiber is connected to the light source, and the other end is directed toward the pinhole and the incident end of the dispersion lens module at the rear end of the pinhole.

[0011] As a further improvement of the simple oblique illumination color confocal measurement system of the present invention, the dispersion lens module includes a first dispersion tube lens and an objective lens; the incident light emitted by the complex point light source module passes through the first dispersion tube lens and the objective lens in sequence.

[0012] As a further improvement of the simple oblique illumination color confocal measurement system of the present invention, the moving stage module includes a stage and a displacement control system, and the displacement control system controls the displacement of the stage; the stage has three overlapping moving layers, the bottom layer is fixed to the vertical movement axis, the middle layer moves horizontally longitudinally relative to the bottom layer, and the upper layer moves horizontally laterally relative to the middle layer, and the upper layer is used to load the object to be measured.

[0013] As a further improvement of the simple oblique illumination color confocal measurement system of the present invention, the light collection and calculation module includes a focusing mirror, a second dispersion tube mirror, an optical sensor and a computer; the secondary reflected light passes through the focusing mirror and the second dispersion tube mirror to reach the optical sensor, and the optical sensor is connected to the computer.

[0014] As a further improvement of the simple oblique illumination color confocal measurement system of the present invention, the computer is also connected to the moving object module.

[0015] As a further improvement of the simple oblique illumination color confocal measurement system of the present invention, the reflector is parallel to the stage.

[0016] The present invention also proposes a simple oblique illumination color confocal detection method, which is applied to the above-mentioned simple oblique illumination color confocal measurement system, and includes the following steps:

[0017] P1, after the polychromatic point light source module emits a polychromatic light beam and enters the dispersion lens module, it first becomes collimated light, and then after refracting out of the dispersion lens module, light of different wavelengths is focused to different axial positions of the incident light axis, and the moving object module is moved so that the incident light is focused on the surface of the object to be measured loaded on the moving object module to form a light spot;

[0018] P2, the light spot is reflected from the surface of the object to be measured to the reflector, and then reflected twice by the reflector to the light collection and calculation module;

[0019] P3, the light collection and calculation module collects the wavelength information of the light spot reflected from the surface of the object to be measured, and then calculates the relative height data of the surface of the object to be measured by combining the wavelength information with the displacement information of the moving object module;

[0020] P4, repeatedly and synchronously move the moving object module and the reflector, so that different positions on the surface of the object to be measured in the direction of the incident light axis show light spots of different colors. The light spots are reflected from the surface of the object to be measured to the reflector, and then reflected twice by the reflector to the light collection and calculation module to collect image information at various positions on the surface of the object to be measured, and the axial height of the sampling point information and the corresponding horizontal position coordinate information are used for three-dimensional point cloud modeling to generate a surface morphology image of the object to be measured.

[0021] As a further improvement of the simple oblique illumination color confocal detection method of the present invention, the light source emits complex light, and transmits the complex light to the first small hole through the incident optical fiber to generate a complex point light source. The complex light emitted by the complex point light source becomes collimated light after passing through the first dispersion tube lens, and then passes through the objective lens. The complex light is dispersed into light beams of different wavelengths, and the light beams of different wavelengths are respectively focused on the axis of the incident light, and the focal points of each wavelength are arranged in sequence in the axial position according to the wavelength change; scanning sampling of each position point on the surface of the object to be measured is achieved by controlling the moving trajectory of the moving carrier module.

[0022] As a further improvement of the simple oblique illumination color confocal detection method of the present invention, in step P4, the repeated synchronous movement of the moving object module and the reflector so that different positions on the surface of the object to be measured in the direction of the incident light axis show light spots of different colors specifically include:

[0023] The moving carrier module is moved in the horizontal direction, and the vertical position of the moving carrier module is adjusted to form a light spot at each position on the surface of the object to be measured, wherein the position of the reflector is synchronously adjusted with the moving carrier module, and the reflection signal of the light spot is received by the light collection and calculation module to model and generate the surface morphology image of the object to be measured.

[0024] The simple oblique illumination color confocal measurement system and detection method of the present invention use color confocal technology to disperse the oblique incident illumination light beam through the dispersion module, generate light of different wavelengths and focus at different axial height positions according to the wavelength size law. After these light rays are reflected by the surface of the object to be measured, they pass through the reflector and focusing mirror in sequence. The focusing mirror focuses the measurement light into the optical sensor to be received. The measuring device measures the surface of the object to be measured by controlling the movement of the stage, and the optical sensor transmits the collected wavelength information of the measured point to the computer for processing and generates a three-dimensional morphology. This measurement system and detection method are suitable for situations where detection cannot be performed in the vertical direction, such as the detection of the surface morphology of aircraft engine rotor blades, measuring the thickness of transparent materials such as glass, and other application scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 It is the overall structure diagram of the simple oblique illumination color confocal measurement system of the present invention;

[0027] Figure 2 yes Figure 1 A schematic diagram showing that a complex light beam emitted by a light source is dispersed into a plurality of light beams of different wavelengths after passing through a dispersion lens module, and the focal points of the light beams of different wavelengths are arranged in sequence in the axial position according to the wavelength change;

[0028] Figure 3 yes Figure 1 Schematic diagram of the structure of the stage in .

[0029] Figure 4 It is a schematic flow chart of the simple oblique illumination color confocal detection method of the present invention.

[0030] Markings in the figure: light source 1, incident optical fiber 2, pinhole mechanism 3, first dispersion tube lens 4-1, objective lens 5, object to be measured 6, stage 7, reflector 8, focusing lens 9, second dispersion tube lens 4-2, optical sensor 10, computer 11. DETAILED DESCRIPTION

[0031] The present invention is a simple oblique illumination color confocal measurement system and detection method, the purpose of which is to provide a new method for measuring the three-dimensional morphology of the surface of an object in an oblique manner when the conventional vertical measurement method is limited by space. The following is a detailed description of the device structure and operation steps of the technical solution of the present invention in conjunction with the accompanying drawings, so as to make it easier to understand and grasp the purpose, structure and function of the present invention, but it is not intended to limit the scope of protection required by the claims attached to the present invention.

[0032] It is a simple oblique illumination color confocal measurement system, which includes a polychromatic point light source module, a dispersion lens module, a moving object module, a reflector 8 and a light collection and calculation module. The incident light emitted by the polychromatic point light source module passes through the dispersion lens module obliquely downward, is emitted obliquely downward to the moving object module, then is reflected obliquely upward to the reflector, and then is reflected obliquely downward to the light collection and calculation module for a second time; the light-emitting port of the polychromatic point light source module faces the dispersion lens module, the polychromatic point light source module can be arranged at the outer focus of the incident end of the dispersion lens module, and the moving object module is arranged at the outer focus of the exit end of the dispersion lens module; the moving object module includes a stage for loading the object to be measured 6. The light collection and calculation module is also connected to the moving object module.

[0033] The present invention uses a color confocal distance measurement method to collect the surface information of the object to be measured in an inclined manner. The measuring light is directed to the surface of the object to be measured at an inclined angle, and passes through a dispersion lens module on the incident light channel in the middle, so that light of different wavelengths is focused to different axial height positions of the optical axis, and the surface of the object to be measured shows light spots of different colors at different axial heights. These light spots are reflected by the surface of the object to be measured to the reflector, and finally received by the light collection and calculation module. In this process, when the axial position of the object to be measured changes, the position of the reflector also changes accordingly, and the light collection and calculation module collects the corresponding change in the wavelength of the focused light. The surface of the object to be measured is measured by moving the moving object carrier module, and the wavelength of the focused light of the measured point at each different axial height on the surface of the object to be measured is collected to obtain the relative height information of the measured point. The light collection and calculation module will model and generate the three-dimensional morphology of the surface of the object to be measured based on this information. This system solves the problem that the current color confocal measurement system can only measure the surface morphology perpendicular to the object to be measured, and can be applied to the surface morphology measurement in specific scenarios such as the vertical direction cannot be measured, such as the surface morphology measurement of the rotor blade of an aircraft engine, and the thickness measurement of transparent materials such as glass.

[0034] like Figure 1 As shown, the polychromatic point light source module includes a light source 1, an incident optical fiber 2 and a pinhole mechanism 3; the pinhole mechanism 3 is a plate with a pinhole in the middle; one end of the incident optical fiber 2 is connected to the light source 1, and the other end faces the pinhole and the incident end of the dispersion lens module at the rear end of the pinhole. Among them, the light source 1 is the HL-2000-fhsa halogen tungsten light source of Ocean Optics, and the polychromatic light beam emitted by the light source 1 is white light with continuous spectral information, and the spectral wavelength includes from 400nm to 800nm. The incident optical fiber 2 is composed of quartz material and includes a core, a cladding and a coating. The light source 1 transmits the polychromatic light to the pinhole to generate a point light source through the incident optical fiber 2.

[0035] like Figure 1As shown, the dispersion lens module includes a first dispersion tube lens 4-1 and an objective lens 5. The incident light emitted by the complex point light source module passes through the first dispersion tube lens 4-1 and the objective lens 5 in sequence. The first dispersion tube lens 4-1 is a specially designed lens combination that converges the light of the point light source into collimated light of different colors. The objective lens 5 is a semi-convex lens that focuses the collimated light emitted by the first dispersion tube lens 4-1 and projects it onto the object to be measured 6 to form a light spot.

[0036] The formation of the light spot can be referred to Figure 2 The complex light emitted by the light source 1 becomes a point light source after passing through the pinhole, and then dispersed into light beams of different wavelengths after passing through the dispersion lens module, and the focal points of each wavelength are arranged in sequence in the axial position according to the wavelength change. Specifically, when the point light source enters the first dispersion tube lens 4-1, the light of different wavelengths in the same dielectric glass has different refraction angles due to different wavelengths, and axial chromatic aberration is formed after refraction. Then, the light of different wavelengths is focused to different axial heights along the optical axis direction through the objective lens 5, generating a group of focused light spots with continuously changing wavelengths.

[0037] like Figure 1 As shown, the moving loading module includes a loading platform 7 and a displacement control system, and the displacement control system includes a driving motor and a computer 11.

[0038] like Figure 3 As shown, the stage 7 is composed of three layers of metal plates, wherein the bottom metal plate is fixed to the vertical motion axis, which is driven by a motor; the middle metal plate moves horizontally longitudinally (y direction) relative to the bottom metal plate, which is driven by a second motor; the upper metal plate moves horizontally transversely (x direction) relative to the middle metal plate, which is used to load the object to be measured 6, which is driven by a third motor. The computer 11 controls the motor controller to send instructions to control the rotation of the motor, thereby controlling the moving trajectory of the metal plate on the x-axis, y-axis and z-axis, so as to realize scanning sampling of each position point on the entire surface of the sample to be measured.

[0039] like Figure 1 As shown, the light collection and calculation module includes a focusing lens 9, a second dispersion tube lens 4-2, an optical sensor 10 and a computer 11. The focusing lens 9 is a semi-convex lens, and the second dispersion tube lens 4-2 has the same structure as the first dispersion tube lens 4-1. The secondary reflected light passes through the focusing lens 9 and the second dispersion tube lens 4-2 to reach the optical sensor 10, and the optical sensor 10 is connected to the computer 11. The computer 11 is also connected to the motion carrier module to control the movement of the carrier 7.

[0040] The reflector 8 is parallel to the stage 7 to facilitate synchronous position adjustment. The reflector 8 and the bottom layer of the stage 7 can be connected and fixed using a connecting device so that the reflector 8 and the stage 7 are linked to each other to keep the two parallel to each other and the distance between them unchanged.

[0041] Please refer to Figure 1 The light path diagram is shown in FIG. 1 , and the simple oblique illumination color confocal measurement system is used to perform oblique illumination color confocal detection to detect the surface three-dimensional morphology of the sample. The simple oblique illumination color confocal detection method comprises the following steps:

[0042] P1, the light source 1 emits a polychromatic light, and transmits the polychromatic light to the first small hole through the incident optical fiber 2 to generate a polychromatic point light source. The polychromatic light emitted by the polychromatic point light source becomes collimated light after passing through the first dispersion tube lens 4-1 which is tilted, and then passes through the objective lens 5, and the polychromatic light is dispersed into light beams of different wavelengths. The light beams of different wavelengths are sequentially focused on the optical axis behind the objective lens 5, and the focal points are sequentially arranged at the axial position of the incident light center according to the wavelength change. The moving trajectory of the stage 7 is controlled by the computer 11, so that the focal point appears on the surface of the object to be measured 6 loaded on the stage 7 to form a light spot;

[0043] P2, the light spot is reflected on the surface of the object 6 to the reflector 8, and then reflected twice by the reflector 8, the light diverges and passes through the focusing mirror 9 to become focused light, and then converges to the optical sensor 10 after passing through the second dispersion tube mirror 4-2, and the optical sensor 10 converts the light signal into an electrical signal;

[0044] P3, the optical sensor 10 collects the wavelength information of the light spot reflected from the surface of the object to be measured, converts the optical signal into an electrical signal and transmits it to the computer 11. The computer 11 calculates the relative height data of the surface of the object to be measured by combining the wavelength information with the displacement information of the moving load module;

[0045] P4, sets the sampling time interval and sampling times through the acquisition program in the computer 11, realizes moving the moving carrier module in the horizontal direction, and adjusting the vertical position of the moving carrier module in the vertical direction, so that a light spot can be formed at each position of the surface of the object to be measured, wherein the position of the reflector is synchronously adjusted with the moving carrier module, the light spot is reflected to the reflector on the surface of the object to be measured, and then reflected twice by the reflector to the light acquisition and calculation module, the computer 11 collects the color and wavelength information of the light spot reflected at each position on the surface of the object to be measured, and then calculates the relative height data at each position on the surface of the object to be measured, and performs three-dimensional point cloud modeling on the axial height of the sampling point information and the corresponding horizontal position coordinate information to generate a surface morphology image of the object to be measured 6. Figure 1In FIG. 1 , the two focusing points on the object 6 represent light spots formed at different positions on the surface of the object 6 after the stage 7 is moved up and down during two tests, and the two light spots are on the same focusing axis.

[0046] See also Figure 4 The above simple oblique illumination color confocal detection method is further summarized as follows:

[0047] S1: Project the illumination light of the color confocal measurement system onto the surface of the object to be measured at an inclined angle, use a connecting device to connect and fix the stage 7 and the reflector 8, adjust the plane mirror (i.e., the reflector 8) so that the plane mirror is parallel to the stage plane, and adjust the reflector 8 and the focusing mirror 9 to the optimal position to focus the light into the collection end (optical sensor 10);

[0048] S2: Place the sample to be tested on the stage 7, set the sampling frequency, scanning path, scanning speed and other parameters in the control software of the computer 11 to control the stage 7 and the reflector 8 to move together and scan the sample;

[0049] S3: Standard calibration of the color confocal measurement system;

[0050] S4: The upper computer software starts the image acquisition device and controls the stage 7 and the reflector 8 to move together. The stage 7 starts to collect the surface of the sample under test according to the preset scanning speed and path. The optical sensor 10 collects the wavelength information of different measured points on the surface in real time according to the sampling frequency and uploads it to the computer 11;

[0051] S5: (Computer 11) performs three-dimensional point cloud modeling based on the axial heights of multiple measured point information and the corresponding horizontal position coordinate information to generate a surface topography image.

[0052] This measurement system and detection method are suitable for detecting sample surface morphology, step height, surface roughness, flatness, and thickness of transparent materials in situations where geometric space is limited, such as the surface morphology of aircraft engine rotor blades. It can collect two-dimensional contours and three-dimensional morphological information of samples at an inclined angle. For example, this system and method can be applied to measuring glass thickness. When the traditional color confocal measurement system measures in the vertical direction, the light reflected from the upper and lower surfaces of the glass will be mixed together. However, the oblique illumination measurement system of the present invention can separate the light reflected from the upper and lower surfaces, eliminate light interference factors, and provide more accurate measurement results.

[0053] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A simple oblique illumination color confocal detection method, applied to a simple oblique illumination color confocal measurement system, the measurement system comprises a polychromatic point light source module, a dispersion lens module, a moving object module, a reflector and a light collection and calculation module; the incident light emitted by the polychromatic point light source module passes through the dispersion lens module obliquely downward, is emitted obliquely downward to the moving object module, then is reflected obliquely upward to the reflector, and then is reflected obliquely downward for a second time to the light collection and calculation module; the light emitting port of the polychromatic point light source module faces the dispersion lens module, and the moving object module is arranged at the outer focus of the exit end of the dispersion lens module; the moving object module comprises a stage for loading the object to be measured; the light collection and calculation module is also connected to the moving object module; it is characterized in that The following steps are involved: P1, after the polychromatic point light source module emits a polychromatic light beam and enters the dispersion lens module, it first becomes collimated light and then refracts out of the dispersion lens module. Lights of different wavelengths are focused to different axial positions of the incident light axis. The moving object module is moved so that the incident light is focused on the surface of the object to be measured loaded on the moving object module to form a light spot; P2, the light spot is reflected from the surface of the object to be measured to the reflector, and then reflected twice by the reflector to the light collection and calculation module; P3, the light collection and calculation module collects the wavelength information of the light spot reflected from the surface of the object to be measured, and then calculates the relative height data of the surface of the object to be measured by combining the wavelength information with the displacement information of the moving object module; P4, repeatedly and synchronously move the moving object module and the reflector, so that different positions on the surface of the object to be measured in the direction of the incident light axis show light spots of different colors. The light spots are reflected from the surface of the object to be measured to the reflector, and then reflected twice by the reflector to the light collection and calculation module to collect image information at various positions on the surface of the object to be measured, and the axial height of the sampling point information and the corresponding horizontal position coordinate information are used for three-dimensional point cloud modeling to generate a surface morphology image of the object to be measured.

2. The simple oblique illumination color confocal detection method according to claim 1 is applied to a simple oblique illumination color confocal measurement system, wherein the measurement system comprises a polychromatic point light source module, a dispersion lens module, a moving object module, a reflector and a light collection and calculation module; the incident light emitted by the polychromatic point light source module passes through the dispersion lens module obliquely downward, is emitted obliquely downward to the moving object module, then is reflected obliquely upward to the reflector, and then is reflected obliquely downward to the light collection and calculation module for a second time; the light emitting port of the polychromatic point light source module faces the dispersion lens module, and the moving object module is arranged at the outer focus of the exit end of the dispersion lens module; the moving object module comprises a stage for loading the object to be measured; the light collection and calculation module is also connected to the moving object module, and the dispersion lens module comprises a first dispersion tube lens (4-1) and an objective lens (5); the incident light emitted by the polychromatic point light source module passes through the first dispersion tube lens (4-1) and the objective lens (5) in sequence; it is characterized in that The light source (1) emits a complex light, and transmits the complex light to the first small hole through the incident optical fiber (2) to generate a complex point light source. The complex light emitted by the complex point light source becomes collimated light after passing through the first dispersion tube lens (4-1). After passing through the objective lens (5), the complex light is dispersed into light beams of different wavelengths. The light beams of different wavelengths are respectively focused on the axis of the incident light, and the focal points of each wavelength are arranged in sequence in the axial position according to the wavelength change. The scanning sampling of each position point on the surface of the object to be measured is achieved by controlling the moving trajectory of the moving carrier module.

3. The simple oblique illumination color confocal detection method according to claim 1, characterized in that: In step P4, the repeatedly synchronously moving the moving object loading module and the reflector so that different positions on the surface of the object to be measured in the direction of the incident light axis show light spots of different colors specifically include: The moving carrier module is moved in the horizontal direction, and the vertical position of the moving carrier module is adjusted to form a light spot at each position on the surface of the object to be measured, wherein the position of the reflector is synchronously adjusted with the moving carrier module, and the reflection signal of the light spot is received by the light collection and calculation module to model and generate the surface morphology image of the object to be measured.

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