一种基于深度学习和坩埚下降法的高阻型氧化镓制备方法

By combining deep learning and the crucible descent method with a neural network model, the problem of high-resistivity gallium oxide that cannot be prepared with a predetermined resistivity in existing technologies has been solved, and the precise preparation of high-resistivity gallium oxide single crystals has been achieved.

CN112863617BActive Publication Date: 2026-07-17HANGZHOU FUJIA GALLIUM TECH CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HANGZHOU FUJIA GALLIUM TECH CO LTD
Filing Date
2020-12-31
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing technologies cannot effectively prepare high-resistivity gallium oxide with a predetermined resistivity.

Method used

By employing deep learning and the crucible-lowering method, seed crystal, environmental, and control data are acquired and preprocessed. A trained neural network model is used to predict the resistivity of high-resistivity gallium oxide, and high-resistivity gallium oxide single crystals are prepared by combining this with the crucible-lowering method.

Benefits of technology

Accurate prediction and preparation of the resistivity of high-resistivity gallium oxide single crystals have been achieved, ensuring the acquisition of high-resistivity gallium oxide with a predetermined resistivity.

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Abstract

本申请涉及基于深度学习和坩埚下降法的高阻型氧化镓制备方法,预测方法包括:获取高阻型氧化镓单晶的制备数据;制备数据包括:籽晶数据、环境数据、控制数据以及原料数据;原料数据包括:掺杂类型数据及掺杂浓度;对制备数据进行预处理;将预处理的制备数据输入训练好的神经网络模型,得到高阻型氧化镓单晶对应的预测性质数据;所述预测性质数据包括:预测电阻率。先将制备数据进行预处理,得到预处理的制备数据,将预处理的制备数据输入训练好的神经网络模型,得到高阻型氧化镓单晶对应的预测性质数据,通过调整制备数据,可以得到预定电阻率的高阻型氧化镓。
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