Uniformity acquisition device, uniformity acquisition method, and program

Abstract

The present application relates to a uniformity acquisition device, a uniformity acquisition method, and a program, the uniformity acquisition device acquiring uniformity of a mixed liquid in which an insoluble solid substance is mixed in a liquid, the uniformity acquisition device including: a pair of electrodes that apply an alternating current signal to the mixed liquid; a measurement unit that measures an impedance of the mixed liquid based on a response signal flowing through the mixed liquid when the alternating current signal is applied to the mixed liquid; and a processing unit that acquires the uniformity of the mixed liquid based on the impedance measured by the measurement unit.

Description

Technical Field

[0001] This invention relates to a uniformity acquisition apparatus, a uniformity acquisition method, and a program for obtaining the uniformity of a mixture of particles of insoluble solid substances mixed in a liquid. Background Technology

[0002] As a slurry, which is a mixture of particles of insoluble solid matter mixed in a liquid, particle size distribution and other parameters are used as evaluation indicators.

[0003] One method for determining the particle size distribution of particles contained in a slurry is sedimentation. Among sedimentation methods, there are liquid-phase gravity sedimentation using natural gravity (Japanese Industrial Standard "JIS Z8820-1:2002") and liquid-phase centrifugal sedimentation using centrifugal force (Japanese Industrial Standard "JIS Z8823-1:2001").

[0004] In the sedimentation test according to the above sedimentation method, the slurry is put into the sedimentation tube, and the tester observes the change in the interface height between the settled particle layer and the supernatant over time, and whether the supernatant is transparent or turbid, etc., thereby determining the particle size distribution of the particles contained in the slurry.

[0005] In recent years, the requirements for high functionality and high performance in electronic components have increased. Therefore, it is necessary to strictly manage the quality of slurries, which are the starting materials for electronic components. Furthermore, it is essential to accurately grasp the state of the slurry using evaluation indicators such as uniformity, which is expressed by the types and size distribution of particles contained in the slurry.

[0006] However, in the aforementioned sedimentation tests, time is required until the particles in the slurry have settled and stabilized. While liquid-phase centrifugal sedimentation can shorten the test time compared to liquid-phase gravity sedimentation, it is not practical to perform this during the manufacturing process, and further time reduction is still necessary. Furthermore, the aforementioned sedimentation tests involve the subjectivity of the tester in the measurement process, thus lacking rigor.

[0007] As mentioned above, there is room for improvement in the above-described experimental methods, from the perspective of measurement time and objectivity. Summary of the Invention

[0008] This invention was made in response to the above-mentioned problems, and its purpose is to obtain the uniformity of the mixture in a short time.

[0009] As one aspect of the present invention, a uniformity acquisition device acquires the uniformity of a mixture containing an insoluble solid substance in a liquid. The uniformity acquisition device comprises: a pair of electrodes for applying an alternating current signal to the mixture; a measurement unit for measuring the impedance of the mixture based on a response signal flowing through the mixture when the alternating current signal is applied to the mixture; and a processing unit for acquiring the uniformity of the mixture based on the impedance measured by the measurement unit.

[0010] According to this scheme, the impedance of the mixture is measured based on the response signal of the mixture flowing through it when an AC signal is applied to the mixture containing insoluble solids. The homogeneity of the mixture is then obtained based on this measured impedance. Therefore, compared to the sedimentation method, it has a shorter standby time and can obtain homogeneity independent of the observer's subjective judgment. Thus, the homogeneity of the mixture can be obtained in a short time. Attached Figure Description

[0011] Figure 1 This is a schematic diagram illustrating a uniformity measuring device according to an embodiment of the present invention.

[0012] Figure 2 This is a block diagram showing the functional configuration of the processing unit of the main body of the measuring device.

[0013] Figure 3A This is a diagram illustrating the complex plane impedance diagram created in the complex plane impedance data generation module and the equivalent circuit analysis module.

[0014] Figure 3B It is a diagram illustrating the equivalent circuit used in equivalent circuit analysis.

[0015] Figure 4 This is a flowchart illustrating the uniformity measurement process performed by the uniformity measuring device.

[0016] Figure 5 This is a schematic diagram illustrating a uniformity evaluation device according to an embodiment of the present invention.

[0017] Figure 6 This is a block diagram showing the functional configuration of the processing unit of the main body of the measuring device.

[0018] Figure 7 It is a graph showing the correlation between the frequency of the AC voltage applied to the slurry and the imaginary component of the measured impedance, which is generated in the processing unit.

[0019] Figure 8 This is a flowchart representing the uniformity evaluation process performed by the uniformity evaluation device.

[0020] Explanation of reference numerals in the attached figures:

[0021] 1. Uniformity measuring device;

[0022] 2 electrodes;

[0023] 3. Main body of the measuring device;

[0024] 31. Measurement Department;

[0025] 32. Storage Unit;

[0026] 33. Operations Department;

[0027] 34. Display Unit;

[0028] 35. Processing Department;

[0029] 111 Parsing and setting module;

[0030] 112 Impedance Acquisition Module;

[0031] 113 Imaginary component generation part;

[0032] 114 Generator of real number components;

[0033] 115 Complex plane impedance data generation module, generation module;

[0034] 116 Equivalent Circuit Analysis Module;

[0035] 117 Uniformity Calculation Module;

[0036] 201 Uniformity Evaluation Device;

[0037] 202 electrode;

[0038] 203. Main body of the measuring device;

[0039] 204 Analysis device;

[0040] 231 Storage Department;

[0041] 232 Operations Department;

[0042] 233 Display Department;

[0043] 234 Processing Department;

[0044] 241 Frequency Control Unit;

[0045] 242 Impedance Measurement Section;

[0046] 311 Parsing and setting module;

[0047] 312 Frequency acquisition module;

[0048] 313 Impedance Acquisition Module;

[0049] 314 Imaginary component generation part;

[0050] 316 Related graph generation module;

[0051] 317 Related graph analysis module. Detailed Implementation

[0052] The uniformity acquisition apparatus of the present invention acquires the uniformity of a mixture containing an insoluble solid substance in a liquid. The uniformity acquisition apparatus includes: a pair of electrodes for applying an AC signal to the mixture; a measurement unit for measuring the impedance of the mixture based on a response signal flowing through the mixture when the AC signal is applied; and a processing unit for acquiring the uniformity of the mixture based on the impedance measured by the measurement unit.

[0053] According to the uniformity acquisition device of this embodiment, the impedance of the mixture is measured based on the response signal of the mixture flowing through it when an AC signal is applied to the mixture containing an insoluble solid substance in the liquid. The uniformity of the mixture is then acquired based on this impedance. Therefore, compared with the sedimentation method, the standby time is shorter, and uniformity that does not include the subjective judgment of the measurer can be obtained. Thus, the uniformity of the mixture can be acquired in a short time.

[0054] Hereinafter, as an example of the uniformity acquisition device of this embodiment, a uniformity measuring device for measuring the uniformity of a mixture and a uniformity evaluation device for evaluating the uniformity of a mixture will be described.

[0055] 1. First Implementation Method

[0056] In the first embodiment, a uniformity measuring device 1 for measuring the uniformity of a mixture will be described as a uniformity acquisition apparatus according to an embodiment of the present invention. Furthermore, a uniformity measurement process will be described as an example of a uniformity acquisition method according to an embodiment of the present invention.

[0057] [Description of the Uniformity Measurement Apparatus]

[0058] use Figure 1 and Figure 2 The uniformity measuring device 1 according to an embodiment of the present invention will be described in detail.

[0059] Figure 1 This is a schematic diagram showing the uniformity measuring device 1 of this embodiment.

[0060] The uniformity measuring apparatus 1 is an apparatus for evaluating a slurry Xc, which is stored in a liquid tank X and is one of a mixture containing an insoluble solid substance (hereinafter referred to as a dispersed phase) Xb mixed in a liquid Xa. In this embodiment, the uniformity measuring apparatus 1 measures uniformity as an evaluation index for the slurry Xc.

[0061] In this embodiment, uniformity includes: the type of liquid Xa, the type of dispersed phase Xb, the particle size of dispersed phase Xb, and the particle size distribution of dispersed phase Xb.

[0062] In this embodiment, as an example of slurry Xc, a mixture obtained by dispersing conductive particles such as carbon black, which are high-conductivity dispersion particles Xb, in a solvent (an organic solvent containing binder resin and active substances) that is low-conductivity liquid Xa can be given.

[0063] The uniformity measuring device 1 comprises: a pair of electrodes 2 and a measuring device body 3.

[0064] A pair of electrodes 2 are used to apply an AC voltage, which serves as an AC signal, to the slurry Xc stored in the liquid tank X. The pair of electrodes 2 are disposed opposite each other on the peripheral wall of the liquid tank X. The electrodes 2 are formed, for example, of an inert metal such as platinum or copper. A response current, which serves as a response signal corresponding to the AC voltage applied to the slurry Xc, flows between the pair of electrodes 2. It should be noted that the AC signal applied to the slurry Xc is not limited to AC voltage; it can also be AC ​​current.

[0065] like Figure 1 As shown, the main body 3 of the measuring device includes: a measuring unit 31 as a measuring unit, a storage unit 32 as a storage unit, an operation unit 33, a display unit 34, and a processing unit 35 as a processing unit.

[0066] The measuring unit 31 measures the impedance based on the response current flowing through the slurry Xc located between a pair of electrodes 2 when an alternating voltage is applied. The measuring unit 31 applies an alternating voltage with a phased frequency variation to the pair of electrodes 2. It should be noted that the alternating voltage applied to the pair of electrodes 2 is supplied from a constant voltage power supply (CV) or a constant current power supply (CC) built into the measuring unit 31. Furthermore, each time the frequency of the alternating voltage changes phasedly, the measuring unit 31 measures the impedance based on the response current between the pair of electrodes 2 and outputs it as a measurement signal to the processing unit 35.

[0067] The storage unit 32 consists of RAM and ROM. The storage unit 32 stores a program for performing a uniformity measurement process to determine the uniformity of slurry Xc. The storage unit 32 is a computer-readable storage medium that records the operation program of the processing unit 35. The storage unit 32 may also be configured to be detachable from the main body 3 of the measuring device.

[0068] Furthermore, in the storage unit 32, the measured value of the impedance corresponding to the AC voltage applied to the slurry Xc with known uniformity is established and stored as a frequency characteristic table. In this frequency characteristic table, a correspondence is established between the frequency characteristics of the real and imaginary parts of the impedance for each type of slurry Xc.

[0069] Furthermore, in the storage unit 32, various parameters of the equivalent circuit approximating the complex plane impedance diagram generated based on the impedance of the slurry Xc known according to the above uniformity are associated with the aforementioned uniformity and stored as a uniformity table. In this uniformity table, the parameters of the equivalent circuit for each type of slurry Xc are associated with the uniformity including the type of liquid Xa, the type of dispersed phase Xb, the particle size of dispersed phase Xb, and the particle size distribution of dispersed phase Xb.

[0070] The operation unit 33 has various operation switches for setting measurement conditions and starting uniformity measurement processing, etc. The operation unit 33 outputs operation signals corresponding to these operations to the processing unit 35. The operation unit 33 may also be a touch panel formed on the display unit 34, instead of mechanical operation switches.

[0071] The display unit 34 displays various setting screens and measurement results for uniformity measurement according to the instructions of the processing unit 35. In this embodiment, the display unit 34 is composed of a liquid crystal panel or the like.

[0072] The processing unit 35 controls each part of the uniformity measuring device 1 according to the operation signal from the operation unit 33. In addition, the processing unit 35 controls the frequency of the AC voltage applied to a pair of electrodes 2, and acquires the impedance corresponding to the applied AC voltage, and performs a process to calculate the uniformity of the slurry Xc based on the acquired impedance.

[0073] In this embodiment, the processing unit 35 is configured as a CPU, which is a computer. The processing unit 35 may also be configured as multiple microcomputers.

[0074] Next, the functional structure and operation of the processing unit 35 of the measuring device body 3 will be explained. Figure 2 This is a block diagram showing the functional configuration of the processing unit 35 of the main body 3 of the measuring device.

[0075] The processing unit 35 includes: an analysis setting module 111, an impedance acquisition module 112, a complex plane impedance data generation module 115, an equivalent circuit analysis module 116, and a uniformity calculation module 117. Hereinafter, the complex plane impedance data generation module 115 will be referred to simply as the generation module 115.

[0076] The analysis setting module 111 generates control signals for causing the measuring unit 31 to perform the application of AC voltage to the electrode 2 and the measurement of impedance.

[0077] The impedance acquisition module 112 acquires the impedance measured by the measurement unit 31. Furthermore, the impedance acquisition module 112 has an imaginary component generation unit 113 that generates an imaginary component of the impedance based on the impedance of the response current sent from the measurement unit 31, and a real component generation unit 114 that generates a real component of the impedance.

[0078] The imaginary component generation unit 113 generates the imaginary component of the acquired impedance and outputs it to the generation module 115, which will be described later. The real component generation unit 114 generates the real component of the acquired impedance and outputs it to the generation module 115.

[0079] The generation module 115 generates data representing the complex plane impedance based on the imaginary and real parts of the impedance obtained from the impedance acquisition module 112.

[0080] In this embodiment, as data representing the complex plane impedance, the generation module 115 creates a complex plane impedance diagram with the imaginary part of the measured impedance as the vertical axis and the real part as the horizontal axis. It should be noted that the complex plane impedance diagram is sometimes also referred to as a Nyquist plot.

[0081] The generation module 115 outputs the generated complex plane impedance diagram to the equivalent circuit analysis module 116.

[0082] The equivalent circuit analysis module 116 performs equivalent circuit analysis using an equivalent circuit composed of elements such as resistors and capacitors.

[0083] In this embodiment, a constant phase element (hereinafter referred to as CPE) is used as an element of the equivalent circuit. That is, the equivalent circuit analysis module 116 takes the parallel circuit of resistor R and CPE (R-CPE) as an element and sets the equivalent circuit obtained by combining this element.

[0084] For example, the equivalent circuit analysis module 116 generates impedance characteristic data representing the frequency characteristics of the real and imaginary parts of the impedance of the initial equivalent circuit based on the parameters of the initial equivalent circuit with CPE applied. The equivalent circuit analysis module 116 sequentially changes the parameters of the equivalent circuit in a manner that makes the generated initial impedance characteristic data close to the measured data of Xc. The equivalent circuit analysis module 116 outputs the parameters of the equivalent circuit that yield impedance characteristic data consistent with the measured data as the analysis result. As described above, the equivalent circuit analysis module 116 performs equivalent circuit analysis using the equivalent circuit with CPE applied.

[0085] In this embodiment, the equivalent circuit analysis module 116 generates a complex plane impedance diagram of the set equivalent circuit as impedance characteristic data.

[0086] A constant-phase element (CPE) refers to an element relative to a typical capacitor C that incorporates factors that account for various disturbances. The impedance Z of the CPE... CPE It is represented by the following formula (1).

[0087] [Formula 1]

[0088]

[0089] Furthermore, in the above formula (1),

[0090] j is the imaginary unit.

[0091] ω is the angular frequency.

[0092] T is the CPE constant.

[0093] p is the CPE index (Z) CPE (Number of times).

[0094] As shown in the above formula (1), the impedance Z of CPE is CPE It consists of the CPE constant T and the CPE exponent p. For example, in impedance Z... CPE In the case of simple capacitive behavior, the CPE exponent P takes values ​​from 0 to 1.

[0095] Furthermore, in the above formula (1), when p = 1, the CPE constant T is equivalent to a normal capacitor C, and the equivalent circuit of the slurry Xc becomes composed of a normal capacitor C, therefore the impedance Z CPE This represents the value of C in a typical capacitor.

[0096] Figure 3A This is a diagram illustrating the complex plane impedance diagram produced in generation module 115 and equivalent circuit analysis module 116. Furthermore, Figure 3B This represents the equivalent circuit C used in equivalent circuit analysis. CPE The image.

[0097] Figure 3A The solid line shown is a complex plane impedance diagram A generated by the generation module 115 based on impedance measurement data. The dashed line is a complex plane impedance diagram B generated by the equivalent circuit analysis module 116.

[0098] Figure 3B The equivalent circuit C shown CPE It is an equivalent circuit obtained by connecting the parallel circuit R-CPE1 composed of resistors R1 and CPE1, the parallel circuit R-CPE2 composed of resistors R2 and CPE2, and the parallel circuit R-CPE3 composed of resistors R3 and CPE3 in series.

[0099] Figure 3AThe complex plane impedance diagram B in the diagram uses the equivalent circuit C. CPE The complex impedance diagram is obtained by performing equivalent circuit analysis.

[0100] The equivalent circuit analysis module 116 repeatedly performs equivalent circuit analysis to make the complex plane impedance map B coincide with the complex plane impedance map A obtained from the generation module 115. CPE Changes in the parameters associated with resistors R and CPE in each parallel circuit.

[0101] The uniformity calculation module 117 obtains the complex impedance diagram generated by the equivalent circuit analysis module 116 and analyzes it.

[0102] In this embodiment, Z CPE The closer the number of CPE exponents p is to 1, the lower the deviation in particle size of the dispersed phase Xb contained in the slurry Xc is determined by the uniformity calculation module 117 (i.e., the higher the uniformity of particle size). In addition, the uniformity calculation module 117 determines the number of particle types of dispersed phase Xb based on the number of parallel circuits (R-CPE) obtained by equivalent circuit analysis.

[0103] In addition, the uniformity calculation module 117 calculates the resistance value of the dispersed particles Xb based on the resistance of the resistor R calculated by the equivalent circuit.

[0104] Furthermore, the uniformity calculation module 117 selects the parameter set by the equivalent circuit analysis module 116 based on the uniformity table stored in the storage unit 32, and determines the uniformity associated with the parameter as the uniformity of the measured slurry Xc.

[0105] The processing unit 35, which has the above-mentioned functions, generates a complex plane impedance diagram A based on the impedance measured by the measuring unit 31, and generates a complex plane impedance diagram B using an equivalent circuit that takes the parallel circuit composed of resistor R and CPE as an element through the equivalent circuit analysis module 116.

[0106] Furthermore, the processing unit 35 sets the parameters of the circuit elements of the equivalent circuit so that the complex plane impedance diagram B coincides with the complex plane impedance diagram A. Then, the processing unit 35 determines the uniformity associated with the set parameters as the uniformity of the measured slurry Xc. As a result, the uniformity measuring device 1 can calculate the uniformity of the slurry Xc.

[0107] [Uniformity Measurement Processing]

[0108] Next, refer to Figure 4 The uniformity measurement process, which is used as an evaluation index for slurry Xc, is explained.

[0109] Figure 4 This is a flowchart illustrating the uniformity measurement process performed by the uniformity measuring device 1.

[0110] First, when the uniformity measurement process is started by the operator operating the operation unit 33, step S1 is entered.

[0111] In step S1, the analysis setting module 111 of the processing unit 35 instructs the measuring unit 31 to perform a voltage application process on the slurry Xc. Specifically, the analysis setting module 111 instructs the measuring unit 31 to perform a process of applying an AC voltage to the slurry Xc while changing the frequency.

[0112] Therefore, the measuring unit 31 applies an alternating voltage to the slurry Xc via a pair of electrodes 2 according to the instructions from the analytical setting module 111, and performs control to change the frequency of the applied alternating voltage.

[0113] Furthermore, each time the frequency of the AC voltage is changed, the measuring unit 31 measures the impedance of the slurry Xc based on the response current flowing through the pair of electrodes 2. Then, the measuring unit 31 outputs the measured impedance as measurement data to the impedance acquisition module 112 of the measuring device main body 3.

[0114] Next, in step S2, the impedance acquisition module 112 acquires impedance measurement data from the measurement unit 31.

[0115] In step S3, the impedance acquisition module 112 generates an imaginary component of the impedance through the imaginary component generation unit 113, and generates a real component of the impedance through the real component generation unit 114. The impedance acquisition module 112 outputs the generated imaginary and real components to the generation module 115.

[0116] Next, in step S4, as Figure 3A As shown, the generation module 115 generates a complex plane impedance diagram A based on the impedance measurement data, and outputs the generated complex plane impedance diagram A to the equivalent circuit analysis module 116.

[0117] In step S5, the equivalent circuit analysis module 116 performs equivalent circuit analysis based on the measured data, taking the parallel circuit of resistor R and CPE (R-CPE) as a single element, and sets the parameters of the equivalent circuit obtained by combining this element. Then, the equivalent circuit analysis module 116 generates the complex plane impedance diagram B of the set equivalent circuit.

[0118] For example, the equivalent circuit analysis module 116 sets the diameter of the semicircle drawn on the complex plane based on the measurement data of slurry Xc to R, and sets the frequency of the vertex of the semicircle to f. topThe initial CPE constant T is set using the following formula (2), and the initial CPE exponent p is set to 1. Then, the equivalent circuit analysis module 116 generates the complex plane impedance diagram B of the initial equivalent circuit based on the set values ​​of the CPE constant T and the CPE exponent P.

[0119] [Formula 2]

[0120]

[0121] In step S6, the equivalent circuit analysis module 116 compares the complex plane impedance diagram A and the complex plane impedance diagram B to determine whether they overlap.

[0122] If the complex plane impedance diagram A and complex plane impedance diagram B do not coincide (step S6: No), return to step S5, and the equivalent circuit analysis module 116 resets the equivalent circuit C. CPE The parameters (variables) of the circuit elements are used to create a new complex plane impedance diagram B.

[0123] The equivalent circuit analysis module 116 repeatedly sets the equivalent circuit C in a manner that makes the complex plane impedance map B coincide with the complex plane impedance map A obtained from the generation module 115. CPE The parameters associated with resistors R and CPE in each parallel circuit.

[0124] When the complex plane impedance map A and the complex plane impedance map B coincide (step S6: Yes), the equivalent circuit analysis module 116 outputs the final complex plane impedance map B to the uniformity calculation module 117.

[0125] In step S7, the uniformity calculation module 117 obtains the complex plane impedance map B from the equivalent circuit analysis module 116. Based on the uniformity table stored in the storage unit 32, the uniformity calculation module 117 selects and constructs the equivalent circuit C that generates the complex plane impedance map B. CPE The parameters establish the associated uniformity, and the selected uniformity is determined as the uniformity of the slurry Xc, which is the object of the test.

[0126] Next, in step S8, the display unit 34 displays the uniformity of the slurry Xc, etc., according to the instructions of the processing unit 35. Then, the processing unit 35 ends the uniformity measurement process.

[0127] <Effects>

[0128] Next, the effects produced by this embodiment will be explained.

[0129] As described above, the uniformity measuring device 1 of this embodiment includes: a pair of electrodes 2 for applying an alternating voltage to the slurry Xc; a measuring unit 31 for measuring the impedance of the slurry Xc based on the response current flowing through the slurry Xc when an alternating voltage with a phase-varying frequency is applied to the slurry Xc; and a processing unit 35 for setting an equivalent circuit C, which includes a resistor R and a constant phase element (CPE) in parallel, based on the impedance measured by the measuring unit 31. CPE Using the set equivalent circuit C CPE To perform equivalent circuit analysis, generate data representing the complex plane impedance, and calculate the uniformity based on parameters related to the parallel circuit.

[0130] The uniformity measuring device 1, equipped with the above-described configuration, generates a complex plane impedance diagram A based on the impedance of the slurry Xc measured from the response current flowing through the slurry Xc, and generates a complex plane impedance diagram B of the equivalent circuit by setting an equivalent circuit consisting of a parallel circuit composed of resistors R and CPE as elements.

[0131] Furthermore, the uniformity measuring device 1 sets parameters related to the equivalent circuit in such a way that the complex plane impedance diagram B is close to the complex plane impedance diagram A.

[0132] The uniformity measuring device 1, based on the uniformity table stored in the storage unit 32, selects parameters obtained from known slurry and determines the uniformity associated with the selected parameters as the uniformity of the slurry Xc being measured.

[0133] Therefore, compared to previous settlement tests, the waiting time until the measurement results are obtained can be shortened. Furthermore, it allows for the measurement of evaluation indicators that do not involve the subjective opinions of the person conducting the measurement.

[0134] Furthermore, the uniformity measuring device 1 can use the uniformity table stored in the storage unit 32 to calculate the uniformity of the particle size of the dispersed phase Xb contained in the slurry Xc, the number of different types of dispersed phase Xb particles, the resistivity of the dispersed phase Xb particles, and the particle size of the dispersed phase Xb particles.

[0135] [Uniformity Measurement Procedure]

[0136] The above-described uniformity measurement method can also be provided as a program for a computer to perform uniformity measurements.

[0137] That is, the program of this embodiment is used to make a computer perform the determination of the uniformity of the dispersed phase Xb in a slurry Xc, which is a mixture of an insoluble solid substance (dispersed phase Xb) mixed in a liquid Xa. The program is used to make the computer perform the following process: applying an AC voltage to the slurry Xc, changing the frequency of the AC voltage, measuring the impedance based on the response current flowing through the slurry Xc when the AC voltage is applied, and obtaining an equivalent circuit with the parallel circuit of the resistor and the CPE circuit as elements based on the impedance measured corresponding to the frequency of the AC voltage, and calculating the uniformity using the equivalent circuit.

[0138] In this embodiment, the above-described program can be stored in the storage unit 32 or recorded on a recording medium that is removable from the uniformity measuring device 1.

[0139] [Other implementation methods]

[0140] The embodiments of the present invention have been described above. However, the above embodiments are merely examples of applications of the present invention and are not intended to limit the technical scope of the present invention to the specific configurations of the above embodiments.

[0141] In the uniformity measuring device 1, the storage unit 32, the operation unit 33, and the display unit 34 may be configured separately from the measuring device main body 3. Furthermore, the measuring unit 31 may also be separated from the uniformity measuring device 1, for example, and provided as a separate device like an analytical apparatus.

[0142] The uniformity measuring device 1 can be configured in various ways. For example, the uniformity measuring device 1 can be configured as a stationary type. In addition, the uniformity measuring device 1 can also be configured as a portable type.

[0143] 2. Second Implementation Method

[0144] As a uniformity acquisition apparatus according to an embodiment of the present invention, a uniformity evaluation apparatus 201 for evaluating the uniformity of a mixture will be described. Furthermore, a uniformity evaluation process, as an example of a uniformity acquisition method according to an embodiment of the present invention, will be described.

[0145] [Description of the Uniformity Evaluation Device]

[0146] use Figure 5 and Figure 6 The uniformity evaluation device 201 according to an embodiment of the present invention will be described in detail.

[0147] Figure 5 This is a schematic diagram showing the uniformity evaluation device 201 of this embodiment.

[0148] The uniformity evaluation apparatus 201 is an apparatus for evaluating a slurry Xc stored in a liquid tank X, which is one of the mixtures containing an insoluble solid substance (hereinafter referred to as a dispersed phase) Xb mixed in a liquid Xa. The uniformity evaluation apparatus 201 of this embodiment evaluates the uniformity of the slurry Xc.

[0149] In this embodiment, uniformity includes: the type of liquid Xa, the type of dispersed phase Xb, the particle size of dispersed phase Xb, and the particle size distribution of dispersed phase Xb.

[0150] In this embodiment, as an example of slurry Xc, a mixture obtained by dispersing conductive particles such as carbon black, which are high-conductivity dispersion particles Xb, in a solvent (an organic solvent containing binder resin and active substances) that is low-conductivity liquid Xa can be given.

[0151] The uniformity evaluation device 201 includes: a pair of electrodes 202, a measuring device body 203, and an analytical device 204.

[0152] A pair of electrodes 202 are used to apply an AC voltage, which serves as an AC signal, to the slurry Xc stored in the liquid tank X. The pair of electrodes 202 are disposed opposite each other on the peripheral wall of the liquid tank X. The electrodes 202 are formed, for example, of an inert metal such as platinum or copper. A response current, which serves as a response signal corresponding to the AC voltage applied to the slurry Xc, flows between the pair of electrodes 202. It should be noted that the AC signal applied to the slurry Xc is not limited to AC voltage; it can also be AC ​​current.

[0153] like Figure 5 As shown, the main body 203 of the measuring device includes: a storage unit 231 as a storage unit, an operation unit 232, a display unit 233, and a processing unit 234 as a processing unit.

[0154] The storage unit 231 consists of RAM and ROM. The storage unit 231 stores a program that performs a uniformity evaluation process to evaluate the uniformity of particles contained in the slurry Xc. The storage unit 231 is a computer-readable storage medium that records the operation program of the processing unit 234. The storage unit 231 may also be configured to be detachable from the measuring device main body 203.

[0155] Furthermore, in the storage unit 231, the measured values ​​of impedance corresponding to the AC voltage applied to various reference slurries are correlated with the frequency of the AC voltage and stored as a table. Reference slurries refer to slurries pre-made using a manufacturing method that serves as a reference. Ideally, the reference slurry should be a slurry Xc whose uniformity evaluation index is known as described above.

[0156] In the table stored in storage unit 231, for various reference slurries, uniformity evaluation indicators obtained in advance by other methods are correlated with impedance characteristic data representing the frequency characteristics of the measured impedance values.

[0157] Furthermore, in the storage unit 231, relevant information is stored for various reference slurries, including the frequency of the applied AC voltage and the imaginary component of the impedance measured based on the response current corresponding to the applied AC voltage. Among this relevant information, for each reference slurry, a uniformity evaluation index obtained in advance by other methods and relevant information determined based on impedance characteristic data are correlated. As described above, the uniformity evaluation index stored in the storage unit 231 is a predetermined evaluation index based on experimental data or simulation results.

[0158] For example, relevant information could include data on the imaginary characteristics of the imaginary component representing the impedance, the component value and frequency when the imaginary component reaches its maximum, the frequency range in which the imaginary component exceeds a specific value, and the component value and frequency when the rate of change of the imaginary component reaches its maximum.

[0159] In this embodiment, the imaginary characteristic data of impedance is used as relevant information of the reference slurry, and a correlation diagram representing the frequency of AC voltage and the imaginary component of impedance is generated based on this imaginary characteristic data. The correlation diagram is, for example, a diagram that plots the imaginary characteristic data of the reference slurry in a bi-axial orthogonal coordinate system of AC voltage frequency and imaginary component of impedance. Hereinafter, the correlation diagram based on relevant information for the reference slurry will be referred to as the "reference correlation diagram".

[0160] The operation unit 232 includes various operation switches for setting measurement conditions and starting uniformity evaluation processing. The operation unit 232 outputs operation signals corresponding to these operations to the processing unit 234. Alternatively, the operation unit 232 may be a touch panel similar to that of the display unit 233, replacing the mechanically configured operation switches.

[0161] The display unit 233 displays various setting screens and measurement results for uniformity evaluation according to the instructions of the processing unit 234. In this embodiment, the display unit 233 is composed of a liquid crystal panel or the like.

[0162] The processing unit 234 instructs the frequency control unit 241 of the analysis device 204 to change the frequency of the AC voltage. Furthermore, the processing unit 234 receives the impedance measured by the analysis device 204 and performs a process based on this impedance to calculate a uniformity evaluation index for the slurry Xc, which is the object of the measurement.

[0163] In this embodiment, the processing unit 234 is configured as a CPU, which is a computer. The processing unit 234 may also be configured as multiple microcomputers.

[0164] The analysis device 204 includes a frequency control unit 241 as a frequency control unit and an impedance measurement unit 242 as an impedance measurement unit.

[0165] The frequency control unit 241 controls the frequency of the AC voltage applied to the slurry Xc via the electrodes 202 according to the control signal from the measuring device body 203. Between the pair of electrodes 202, an AC voltage with a phased frequency variation is applied by the frequency control unit 241. It should be noted that the AC voltage applied to the pair of electrodes 202 is supplied from a constant voltage power supply (CV) or a constant current power supply (CC) built into the frequency control unit 241.

[0166] The frequency control unit 241 applies alternating voltages of different frequencies to the slurry Xc between a pair of electrodes 202, and the impedance measurement unit 242 measures the impedance based on the response current flowing through the slurry Xc corresponding to the alternating voltage.

[0167] Each time the frequency of the AC voltage is changed by the frequency control unit 241, the impedance measurement unit 242 measures the impedance based on the response current flowing between the pair of electrodes 202. Then, the impedance measurement unit 242 outputs the impedance measurement result to the processing unit 234.

[0168] Next, the functional structure and operation of the processing unit 234 of the measuring device main body 203 will be explained. Figure 6 This is a block diagram showing the functional configuration of the processing unit 234 of the measuring device main body 203.

[0169] The processing unit 234 controls each part of the uniformity evaluation device 201 according to the operation signal from the operation unit 232. In addition, the processing unit 234 performs processing to calculate the uniformity evaluation index of the slurry Xc based on the impedance measurement results.

[0170] The processing unit 234 includes: a resolution setting module 311, a frequency acquisition module 312, an impedance acquisition module 313, a correlation diagram generation module 316, and a correlation diagram resolution module 317.

[0171] The analysis setting module 311 generates control signals for controlling the analysis device 204 and outputs them to the frequency control unit 241.

[0172] The frequency acquisition module 312 acquires the frequency of the AC voltage set by the frequency control unit 241 and outputs it to the correlation graph generation module 316, which will be described later. The impedance acquisition module 313 acquires the impedance based on the response current detected at each frequency set by the analysis device 204.

[0173] The impedance acquisition module 313 includes an imaginary component generation unit 314 that generates an imaginary component of the impedance based on the impedance sent from the analysis device 204, and a real component generation unit 315 that generates a real component of the impedance. The imaginary component generation unit 314 generates the imaginary component of the acquired impedance and outputs it to the correlation graph generation module 316, which will be described later. The real component generation unit 315 generates the real component of the acquired impedance and outputs it to the correlation graph analysis module 317.

[0174] The correlation graph generation module 316 acquires the frequency of the AC voltage set by the analysis device 204. Furthermore, the correlation graph generation module 316 receives the imaginary components of the impedance generated by the imaginary component generation unit 314 at each frequency of the AC voltage set by the analysis device 204.

[0175] Then, the correlation graph generation module 316 generates relevant information representing the correlation between the received frequency and the imaginary component of the impedance. As described above, the correlation graph generation module 316 generates relevant information about the slurry Xc, which is the object of measurement. This relevant information may include, for example, data on the imaginary characteristics of the impedance, the component value and frequency when the imaginary component is at its maximum, or the frequency range in which the imaginary component exceeds a specific value, or the component value and frequency when the rate of change of the imaginary component is at its maximum.

[0176] In this embodiment, the correlation graph generation module 316 generates a correlation graph representing the correlation between the received frequency and the imaginary component of the impedance, and outputs the generated correlation graph to the correlation graph parsing module 317.

[0177] In addition, the correlation graph generation module 316 obtains relevant information of the reference slurry from the frequency acquisition module 312 and the storage unit 231, creates the aforementioned reference correlation graph based on the obtained relevant information, and outputs the created reference correlation graph to the correlation graph parsing module 317.

[0178] Figure 7 It is a graph representing the correlation graph of the frequency and imaginary components of the AC voltage generated by the correlation graph generation module 316.

[0179] exist Figure 7 In the figure, there are two correlation graphs, correlation graph D and correlation graph E, which are generated by the correlation graph generation module 316 based on the measurement results of the impedance of slurry Xc.

[0180] exist Figure 7 In the correlation graph D, there is a peak P1. The height of peak P1 is r1, and the half-width is F1hm. Furthermore, correlation graph E has a broad peak P2. The height of peak P2 is r2, and the half-width is F2hm.

[0181] The correlation graph parsing module 317 receives the correlation graphs D and E generated by the correlation graph generation module 316 and parses them.

[0182] In this embodiment, the smaller the half-width of the peak in the correlation graph, the higher the uniformity of the particle size of the dispersed phase Xb contained in the slurry Xc, as determined by the correlation graph analysis module 317. Here, uniformity refers to the degree of uniformity of the particle size of the dispersed phase Xb. The closer the particle size of the dispersed phase Xb is to a uniform state, the higher the uniformity; the closer it is to a non-uniform state, the lower the uniformity.

[0183] In this embodiment, high uniformity of particle size means less deviation in the particle size of the dispersed phase Xb. That is, the smaller the half-width of the peak, the more consistent the particle size of the dispersed phase Xb.

[0184] In this embodiment, by setting a specific threshold for the half-width, the uniformity of particle size can be represented by relative evaluations such as "high" and "low".

[0185] Furthermore, the correlation graph analysis module 317 determines the number of types of dispersed phase Xb based on the number of peaks in the correlation graph. The number of peaks in the obtained correlation graph represents the number of types of dispersed phase Xb.

[0186] The correlation graph analysis module 317 detects the number of peaks in the correlation graph to determine the number of types of dispersed phase Xb contained in slurry Xc. Based on... Figure 7 The correlation diagrams D and E shown indicate that the slurry Xc contains two types of dispersed phase Xb.

[0187] The processing unit 234, equipped with the above-described functions, acquires the frequency of the AC voltage set by the frequency control unit 241 of the analysis device 204 and the impedance of the response current detected based on each frequency set by the analysis device 204. Then, the processing unit 234 generates a correlation diagram between the imaginary component of the acquired impedance and the frequency.

[0188] Then, the processing unit 234 determines the uniformity of particle size of the dispersed phase Xb in the slurry Xc based on the value of the half-width of the peak in the generated correlation diagram.

[0189] In addition, the processing unit 234 determines the number of types of dispersed phase Xb based on the number of peaks in the correlation diagram.

[0190] The processing unit 234 selects a correlation graph that is close to the generated correlation graph from the table stored in the storage unit 231. Then, the processing unit 234 determines the uniformity of the slurry Xc that has been correlated with the correlation graph in the table as the uniformity of the measured slurry Xc.

[0191] [Uniformity Evaluation Processing]

[0192] Next, refer to Figure 8The uniformity evaluation process for determining the uniformity of slurry Xc is explained.

[0193] Figure 8 This is a flowchart representing the uniformity evaluation process performed by the uniformity evaluation device 201.

[0194] First, when the uniformity evaluation process is started by the operation of the operation unit 232 by the measurer, the processing unit 234 enters step S11.

[0195] In step S11, the analysis setting module 311 of the processing unit 234 instructs the analysis device 204 to perform a voltage application process on the slurry Xc. Specifically, the analysis setting module 311 instructs the analysis device 204 to perform a process of applying an AC voltage to the slurry Xc while changing the frequency.

[0196] Therefore, in the analysis apparatus 204, the frequency control unit 241 applies an alternating voltage to the slurry Xc via a pair of electrodes 202 according to the instruction from the analysis setting module 311, and performs control to change the frequency of the applied alternating voltage.

[0197] Each time the frequency of the AC voltage is changed by the frequency control unit 241, the impedance measurement unit 242 measures the impedance of the slurry Xc based on the response current flowing through the pair of electrodes 202. Then, the impedance measurement unit 242 calculates the impedance based on the set frequency of the AC voltage and the response current flowing through the slurry Xc due to the AC voltage at that frequency, and outputs the calculated result as the measurement result to the main body 203 of the measuring device.

[0198] Next, in step S12, the frequency acquisition module 312 of the processing unit 234 receives the frequency of the AC voltage set by the frequency control unit 241 from the impedance measurement unit 242. Furthermore, the processing unit 234 acquires impedance measurement data output from the impedance measurement unit 242 in the impedance acquisition module 313.

[0199] Next, in step S13, the impedance acquisition module 313 generates the imaginary component of the impedance through the imaginary component generation unit 314.

[0200] In step S14, the correlation graph generation module 316 of the processing unit 234 generates a correlation graph between the frequency of the AC voltage obtained from the frequency acquisition module 312 and the imaginary component of the impedance obtained from the imaginary component generation unit 314. Here, the correlation graph represents the frequency characteristic of the AC voltage relative to the imaginary component of the impedance.

[0201] The correlation graph generation module 316 outputs the generated correlation graphs D and E to the correlation graph parsing module 317.

[0202] In step S15, the correlation graph parsing module 317 obtains correlation graphs D and E from the correlation graph generation module 316 and parses them.

[0203] In this embodiment, the correlation graph analysis module 317 detects the size and number of peaks in the obtained correlation graphs D and E, and calculates the half-width of the peaks.

[0204] In step S16, the correlation graph analysis module 317 evaluates the uniformity of the measured slurry Xc.

[0205] In this embodiment, for correlation graphs D and E, the smaller the half-width value of the peak, the higher the uniformity of the size of the dispersed phase Xb (particles) contained in the slurry Xc, as determined by the correlation graph analysis module 317. Moreover, the correlation graph analysis module 317 determines the type of dispersed phase Xb contained in the slurry Xc based on the number of peaks, i.e., the number of maxima, in each correlation graph D and E.

[0206] As described above, the correlation graph analysis module 317 calculates uniformity evaluation indicators such as the uniformity of particle size and particle type contained in the slurry Xc. That is, for the slurry Xc, which is the object of measurement, the correlation graph analysis module 317 evaluates the uniformity of the slurry Xc based on relevant information about the relationship between the measured values ​​of the frequency representing the AC voltage and the imaginary component of the impedance.

[0207] Instead, the processing unit 234 generates multiple reference correlation maps based on the relevant information stored in the storage unit 231, and selects the reference correlation map that is closest to the correlation map generated based on the measurement results from the generated reference correlation maps. Furthermore, the processing unit 234 can also determine the uniformity of particle size and the types of particles in the slurry Xc that are associated with the selected reference correlation map.

[0208] Next, in step S17, the display unit 233 displays the evaluation results, etc., according to the instructions of the processing unit 234. Then, the processing unit 234 ends the uniformity evaluation process.

[0209] <Effects>

[0210] Next, the effects produced by this embodiment will be explained.

[0211] As described above, the uniformity evaluation device 201 of this embodiment evaluates the uniformity of slurry Xc based on the impedance of slurry Xc, which is determined based on the response current flowing through slurry Xc when an alternating voltage is applied to slurry Xc containing an insoluble dispersion Xb mixed in liquid Xa at a varying frequency.

[0212] According to this embodiment, the processing unit 234 of the uniformity evaluation device 201 generates relevant information indicating the correlation between the imaginary component of the impedance corresponding to the frequency of the AC voltage measured by the analysis device 204 and the frequency of the applied AC voltage when the frequency of the AC voltage is changed. Then, the processing unit 234 evaluates the uniformity of the slurry Xc based on the generated relevant information.

[0213] More specifically, the processing unit 234 calculates the uniformity of the slurry Xc based on the half-width of the peaks in correlation graphs D and E, which are generated based on relevant information about the slurry Xc. In particular, the smaller the half-width of the peaks in correlation graphs D and E, the higher the uniformity of the size of the dispersed phase Xb, as determined by the processing unit 234.

[0214] Furthermore, the correlation graph analysis module 317 determines the type of dispersed phase Xb contained in the slurry Xc based on the number of peaks in correlation graphs D and E.

[0215] As described above, the processing unit 234 can calculate the uniformity of the slurry Xc.

[0216] Therefore, compared to previous settlement tests, the waiting time until the measurement results are obtained can be shortened. Furthermore, it allows for the measurement of uniformity evaluation indicators that do not involve the subjective opinions of the person conducting the measurement.

[0217] Furthermore, according to this embodiment, the uniformity evaluation device 201 further includes a storage unit 231 that stores, for each of a plurality of reference liquids (reference slurries) serving as a reference for slurry Xc, relevant information relating the imaginary component of the impedance of the reference liquid to the frequency of the AC voltage, and a predetermined uniformity evaluation index. The processing unit 234 selects relevant information corresponding to relevant information generated based on impedance measurements from the plurality of relevant information stored in the storage unit 231, and calculates a uniformity evaluation index associated with the selected relevant information. Thus, the uniformity of slurry Xc can be evaluated based on the relevant information generated based on impedance measurements.

[0218] [Uniformity Evaluation Procedure]

[0219] The above-described uniformity evaluation method can also be provided as a program for enabling a computer to perform the determination of uniformity evaluation indicators.

[0220] That is, the program of this embodiment is a program for making a computer perform an evaluation of a slurry Xc, which is a mixture of an insoluble solid substance (dispersion Xb) mixed in a liquid Xa. The program is used to make the computer perform the following process: applying an alternating voltage to the slurry Xc, changing the frequency of the alternating voltage, measuring the impedance based on the response current flowing through the slurry Xc when the alternating voltage is applied, and evaluating the uniformity of the slurry Xc based on the impedance measured corresponding to the frequency of the alternating voltage and the frequency of the applied alternating voltage.

[0221] In this embodiment, the above-described program can be stored in the storage unit 231 or recorded on a recording medium that is removable from the uniformity evaluation device 201.

[0222] [Other implementation methods]

[0223] The embodiments of the present invention have been described above. However, the above embodiments are merely examples of applications of the present invention and are not intended to limit the technical scope of the present invention to the specific configurations of the above embodiments.

[0224] In the uniformity evaluation device 201, the storage unit 231, the operation unit 232, and the display unit 233 can be separately configured from the measuring device main body 203. Furthermore, the analysis device 204 can also be incorporated into the uniformity evaluation device 201 as a functional component.

[0225] The uniformity evaluation device 201 can be implemented in various ways. For example, both the uniformity evaluation device 201 and the analysis device 204 can be fixed. Alternatively, it can be a portable device configured to have the functions of both the uniformity evaluation device 201 and the analysis device 204.

[0226] This application claims priority based on Japanese Patent Application No. 2020-009423 and Japanese Patent Application No. 2020-009424, both filed with the Japanese Patent Office on January 23, 2020, the entire contents of which are incorporated herein by reference.

Claims

1. A uniformity measuring device for measuring the uniformity of a mixture containing an insoluble solid substance in a liquid, the uniformity measuring device comprising: A pair of electrodes applies an AC signal to the mixture; The measuring unit measures the impedance of the mixture based on the response signal of the mixture flowing through it when the AC signal is applied to it. The processing unit obtains the uniformity of the mixture based on the impedance measured by the measuring unit. as well as The frequency control unit controls the frequency of the AC signal. The processing unit, based on the impedance measured in the measurement unit, sets an equivalent circuit that includes a parallel circuit of a resistor and a constant-phase element. It then performs equivalent circuit analysis using the set equivalent circuit to generate data representing the complex plane impedance. Finally, it calculates the uniformity based on parameters related to the parallel circuit. The processing unit evaluates the uniformity based on the impedance measured by the measuring unit at each frequency of the AC signal controlled by the frequency control unit.

2. The uniformity acquisition device according to claim 1, wherein, The closer the number of the constant phase element is to 1, the higher the uniformity of the size of the solid material is determined by the processing unit.

3. The uniformity acquisition device according to claim 1, wherein, The processing unit determines the number of types of solid substances based on the number of parallel circuits obtained through the analysis of the equivalent circuit.

4. The uniformity acquisition device according to claim 1, wherein, The processing unit generates relevant information representing the correlation between the imaginary component of the impedance measured by the measurement unit at the frequency when the frequency of the AC signal is changed and the frequency of the applied AC signal, and evaluates the uniformity based on the generated relevant information.

5. The uniformity acquisition device according to claim 4, wherein, Based on the aforementioned information, the smaller the half-width value of the peak in the correlation graph, the higher the uniformity of the size of the solid material is determined by the processing unit.

6. The uniformity acquisition device according to claim 4, wherein, The processing unit determines the number of types of solid substances based on the number of peaks of the imaginary component determined by the relevant information.

7. The uniformity acquisition device according to claim 1, wherein, It also has: The storage unit stores, for each of a plurality of reference liquids serving as a reference for the mixture, relevant information relating the imaginary component of the impedance of the reference liquid to the frequency of the AC signal, as well as evaluation metrics for assessing the uniformity. The processing unit selects relevant information from the storage unit that corresponds to the relevant information generated based on the impedance measured by the measurement unit, and calculates the evaluation index that is associated with the selected relevant information.

8. A method for obtaining uniformity, wherein the uniformity of a mixture containing an insoluble solid substance in a liquid is obtained, and in the method for obtaining uniformity, An AC signal is applied to the mixture. The impedance of the mixture is measured based on the response signal of the mixture flowing through it when the AC signal is applied. The homogeneity of the mixture is obtained based on the measured impedance. Based on the response signal of the mixture flowing through it when the AC signal is applied, the impedance of the mixture is measured. Based on the measured impedance, an equivalent circuit is derived, incorporating the parallel circuit of the resistor and the constant-phase element. The uniformity is then calculated using this equivalent circuit. While varying the frequency of the AC signal, the AC signal is applied to the mixture. Based on the response signal of the mixture flowing through it when the AC signal is applied, the impedance of the mixture is measured. Based on the measured impedance and the frequency of the applied AC signal, the uniformity is evaluated.

9. A program for performing a uniformity acquisition method, used to cause a computer to perform the acquisition of the uniformity of a mixture containing an insoluble solid substance in a liquid, wherein in the uniformity acquisition method, An AC signal is applied to the mixture. The impedance of the mixture is measured based on the response signal of the mixture flowing through it when the AC signal is applied. The uniformity of the mixture is obtained based on the measured impedance. Based on the response signal of the mixture flowing through it when the AC signal is applied, the impedance of the mixture is measured. Based on the measured impedance, an equivalent circuit is derived, incorporating the parallel circuit of the resistor and the constant-phase element. The uniformity is then calculated using this equivalent circuit. While varying the frequency of the AC signal, the AC signal is applied to the mixture. Based on the response signal of the mixture flowing through it when the AC signal is applied, the impedance of the mixture is measured. Based on the measured impedance and the frequency of the applied AC signal, the uniformity is evaluated.

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