Linear comb drive with non-uniform fingers for discrete position alignment stability

Abstract

The linear comb drive can include a stator. The linear comb drive can include a rotor. At least one of the stator or the rotor can include a comb having one or more horizontally extending fingers having a tooth shape formed by one or more prongs extending perpendicularly from the one or more fingers in a plane formed by the one or more fingers.

Description

[0001] This application claims priority to U.S. Provisional Patent Application 62 / 967,854, filed January 30, 2020, entitled "Linear Comb Actuator with Improved Stability in Drive Range", the entire contents of which are incorporated herein by reference. Technical Field

[0002] This disclosure generally relates to microelectromechanical systems and linear comb drives. Background Technology

[0003] A linear comb actuator is a microelectromechanical system (MEMS) actuator that uses electrostatic force for actuation. A linear comb actuator includes a rotor and a stator, the rotor including a first conductive comb and the stator including a second conductive comb. The linear comb actuator moves the rotor relative to the stator, which may be static, based at least in part on the application of electrostatic forces to the first and second conductive combs. Linear comb actuators can be used for micrometer- or nanometer-scale control of other MEMS components, such as MEMS optical elements in compact optical systems. For example, an optical switching device may include a linear comb actuator to actuate a mirror, enabling the mirror to be aligned with different ports of the optical switching device. In this case, by actuating the mirror to discrete positions, the linear comb actuator enables variable switching within the optical switching device. Summary of the Invention

[0004] According to some possible implementations, a linear comb driver may include a stator. A linear comb driver may include a rotor. At least one of the stator or rotor may include a comb having one or more horizontally extending fingers, the fingers having teeth formed by one or more forks extending vertically from the one or more fingers in a plane formed by the one or more fingers.

[0005] According to some possible implementations, the comb driver finger assembly may include a base element, finger elements attached to the base element and extending in a first direction, and at least one fork element attached to the finger elements and extending in a plane of the finger elements and in a second direction perpendicular to the first direction.

[0006] According to some possible implementations, the microelectromechanical device (MEMS) may include a stator comb comprising one or more first fingers, wherein at least one of the first or more fingers is associated with a first tooth profile formed by one or more first forks, and wherein the first or more forks extend from the first or more fingers in a first plane formed by the first or more fingers. The MEMS may also include a rotor comb comprising one or more second fingers, wherein at least one of the second or more fingers is associated with a second tooth profile formed by one or more second forks, wherein the second or more forks extend from the second or more fingers in a second plane formed by the second or more fingers, and wherein the first or more fingers are configured to interleave with the second or more fingers. The MEMS may include movable elements mounted to the rotor comb. Attached Figure Description

[0007] Figure 1 This is a schematic diagram of the example finger comb described in this article.

[0008] Figure 2A-2D This is a schematic diagram illustrating examples of the rotor's comb fingers and the stator's comb fingers as described in this article.

[0009] Figure 2E-2H These are characteristic curves of examples of the rotor's comb fingers and the stator's comb fingers described in this article.

[0010] Figure 3 This is a schematic diagram of an example of the microelectromechanical system described in this article.

[0011] Figure 4A-4G This is a schematic diagram illustrating an example of the toothed comb finger shape described in this article. Detailed Implementation

[0012] Exemplary embodiments are described in detail below with reference to the accompanying drawings. The same reference numerals in different drawings may identify the same or similar elements.

[0013] As described above, in some systems, it may be desirable to actuate an element attached to a linear comb driver to a set of discrete positions, rather than a continuous range of positions. In some systems, it may be desirable to actuate the element attached to the linear comb driver with greater precision, accuracy, and / or stability for a set of discrete positions within a continuous range of positions, rather than actuating the element to any position within the continuous range with approximately the same precision, accuracy, and / or stability. For example, when a linear comb driver is attached to a mirror in an optical switching device, the linear comb driver can actuate the mirror to align with different ports. Alignment with each port can represent different discrete positions of the linear comb driver (e.g., discrete positions of the rotor relative to the stator). In such an example, when the linear comb driver is actuated to positions between one or more discrete positions aligned with different ports, the optical switching device may not be able to accurately propagate one or more light beams.

[0014] In other words, at discrete alignment positions of a linear comb actuator (e.g., positions corresponding to optical port alignment), the optical switching device can align the optical path from, for example, one or more inputs to, for example, one or more outputs (e.g., switching the beam). Conversely, at positions other than discrete alignment positions, the optical switching device can intentionally misalign the optical path between the two ports by directing the beam from, for example, an input into, for example, arbitrary space (e.g., dropping the beam). The precision, accuracy, and stability required for intentionally aligning the ports are far greater than the precision, accuracy, and / or stability required for intentionally misaligning the ports. Alternatively, discrete alignment positions may include the location of the projected beam (e.g., a sink, a pouring spout, etc.), so the precision, accuracy, and / or stability at positions other than discrete alignment positions may be less relevant.

[0015] The stability of a linear comb actuator, defined as its ability to precisely actuate and / or maintain the alignment of an attached movable element (e.g., in the case of an optical switching device, such as a mirror) at a specific position, can be important for ensuring the efficient operation of a system using a linear comb actuator. The motion of a linear comb actuator can be modeled based on equations of the following form:

[0016]

[0017] Where K represents the mechanical stiffness of the linear comb actuator, x represents the displacement, C represents the capacitance between the movable comb of the rotor and the fixed comb of the stator, and V represents the drive voltage. In terms of resisting mechanical disturbances (e.g., displacement disturbances δx, which are caused by vibration, shock, and / or similar factors), the response force can be simulated based on equations of the following form:

[0018]

[0019] Here, δF represents the resistance to mechanical disturbances. Stability can be based on the ratio of response force to mechanical disturbance, resulting in an equation of the following form:

[0020]

[0021] Where S m This indicates the mechanical stability, which depends on the mechanical stiffness and comb design. The relative stability value based on mechanical stiffness is defined by the following formula:

[0022]

[0023] Where S m This is a relative stability value. A relative stability value less than 1 indicates that the actuation of the linear comb actuator results in a loss of stability. In contrast, a relative stability value greater than 1 indicates that the linear comb actuator is more stable due to comb actuation. Therefore, a larger value indicates higher stability of the linear comb actuator.

[0024] Because linear comb actuators are subjected to electrostatic forces from applied voltage or electric fields, their overall stability is based not only on mechanical stability but also on electrical stability. For example, based on a voltage disturbance δV, electrical stability can take the following form:

[0025]

[0026]

[0027] In addition, the greater electrical stability S e This leads to a higher level of stability in linear comb actuators. Therefore, to increase the overall stability of a linear comb actuator, higher comb stiffness and / or improved drive circuit stability can be used. However, achieving higher comb stiffness may require larger combs, which could increase cost and / or hinder application in micrometer or nanometer-scale systems (e.g., optical devices). Furthermore, using drive circuits with higher stability levels may further increase cost and / or limit the selection of components that can be used. Moreover, as mentioned above, for a linear comb actuator that will actuate to a set of discrete locations, increasing the stability at those discrete locations may be more useful than increasing the overall stability of the comb actuator.

[0028] Some aspects described herein utilize toothed comb fingers in linear comb actuators to achieve a higher level of stability at discrete locations. For example, a linear comb actuator may include comb fingers in both the rotor and stator, having forks forming toothed patterns. In this case, the forks may form peaks of the toothed pattern, and the space between the forks may form valleys adjacent to the peaks. When actuated, the linear comb actuator can achieve a higher level of stability at locations where the rotor and stator forks are aligned (e.g., when the rotor peaks are aligned with the stator peaks, and the rotor valleys with the stator valleys) compared to the stability achieved at misaligned (or mismatched) locations, and / or compared to the stability achievable using similar material constructions in other linear comb actuators with uniform comb fingers.

[0029] Figure 1 This is a schematic diagram of an example comb with fingers 100. (Example:) Figure 1 As shown, the comb 100 includes a base element 110, a finger element 120, and a set of fork elements 130.

[0030] like Figure 1 As further shown, the finger element 120 may extend in a first direction perpendicular to the first plane. For example, the finger element 120 extends from the base element 110 in the X direction perpendicular to the YZ plane. Furthermore, the fork element 130 extends in a second direction perpendicular to a second plane orthogonal to the first plane. For example, the fork element 130 extends in the Y direction perpendicular to the XZ plane. In some embodiments, the fork element 130 may form a specific profile shape (e.g., the fork element 130 extends within the plane of the finger 120). For example, in a third plane (e.g., the XY plane), the fork element 130 may form a rectangular shape. Although some aspects are described herein based on rectangular shapes or profiles, other profile shapes are also contemplated as described in more detail herein. Furthermore, although some aspects are described based on shapes or profiles in the XY plane, shapes or profiles in other planes may be rectangular or non-rectangular to achieve a specific level of stability at a particular location.

[0031] like Figure 1As further shown, the fork element 130 can be associated with a specific height h. For example, a linear comb driver may include a fork element 130 having a height of, for example, 5 micrometers (μm) (e.g., for a silicon waveguide switch). Other heights are also possible for other applications. In some embodiments, the fork element 130 may have a width w of approximately 1 μm. Additionally or alternatively, the fork element 130 may have a depth d of approximately 1 μm. In some embodiments, as shown, the comb finger 100 may have multiple fork elements 130. For example, the comb finger 100 may have a first fork element 130 positioned at a first distance along the finger element 120 and a second fork element 130 positioned at a second distance along the finger element 120 (and separated from the first fork element 130 by a threshold distance). In this case, the fork elements 130 may be separated by a pitch p of approximately 1.5 μm. Although some embodiments have been described herein according to a particular set of dimensions or ranges of dimensions, other sets or ranges of dimensions are also possible.

[0032] In some embodiments, each fork element 130 on the comb finger 100 may have the same height. Additionally or alternatively, the first fork element 130 on the comb finger 100 may have a first height, while the second fork element 130 on the comb finger 100 may have a second height. Additionally or alternatively, the first fork element 130 on the first comb finger of the linear comb driver may have a first height, and the second fork element 130 on the second comb finger 100 of the linear comb driver may have a second height. Similarly, the fork elements 130 may have the same or different widths, the same or different depths, etc. Similarly, multiple sets of fork elements 130 may have the same or different pitches. Similarly, the comb finger 100 may have a common number of fork elements 130 (e.g., the same number) or a different number of fork elements 130. In these cases, the configuration of one or more fork elements 130 (e.g., height, width, depth, pitch, shape, etc.) can be selected at least in part based on a set of alignment positions to be aligned by the linear comb driver, the stability requirements of the linear comb driver, and / or the like.

[0033] As mentioned above, Figure 1 Provided as an example. Other examples may be provided. Figure 1 The descriptions differ from those in the text. Figure 1 The number and arrangement of the devices or components shown are provided as examples.

[0034] Figure 2A-2D This is a schematic diagram of example 200 of the rotor's comb fingers and the stator's comb fingers. (See example 200.) Figure 2AAs shown, Example 200 includes movable comb fingers 210 (e.g., comb fingers of the rotor of a linear comb driver) and fixed comb fingers 220 (e.g., comb fingers of the stator of a linear comb driver). Figure 2A As further shown, the movable comb finger 210 is configured to move linearly relative to the fixed comb finger 220. For example, the movable comb finger 210 can move in the X direction perpendicular to the YZ plane (e.g., in the direction of the complementary interleaved comb fingers of the movable comb finger 210 and the fixed comb finger 220).

[0035] like Figure 2B As shown, based on the displacement of the movable comb finger 210 in the X direction, the corresponding forks of the movable comb finger 210 and the fixed comb finger 220 can be aligned. In this position, the linear comb actuator can achieve a relatively high level of alignment at alignment point P1. In contrast, as... Figure 2C As shown, when the movable comb finger 210 moves further in the X direction, the corresponding forks of the movable comb finger 210 and the fixed comb finger 220 may become misaligned. In some embodiments, the alignment position between the forks of the movable comb finger 210 and the fixed comb finger 220 can be associated with a tolerance less than or equal to, for example, a threshold percentage alignment of the optical path between two optical ports in an electro-optical system. Figure 2D As shown, based on the further movement of the movable comb finger 210 in the X direction, the respective forks of the movable comb finger 210 and the fixed comb finger 220 are aligned again at the alignment position P2. In this way, a linear comb driver with toothed forks on its comb fingers can have one or more discrete alignment positions.

[0036] While some implementations are shown here with a specific number of alignment positions (e.g., 1 alignment position, 2 alignment positions, 3 alignment positions, etc.), other numbers of alignment positions are also conceivable. Furthermore, although a linear comb driver can have a specific number of alignment positions, it can be configured to operate only at a subset of the alignment positions. For example, a linear comb driver with 4 alignment positions can be used in a MEMS system where the linear comb driver actuates only to 3 alignment positions (e.g., for switching to 3 ports). Additionally or alternatively, a linear comb driver with a set of alignment positions can also be used at misaligned positions (e.g., with poorer stability than that obtained at a set of alignment positions).

[0037] Figure 2E-2H Features of a two-stage linear comb actuator with toothed forks are shown, such as a linear comb actuator including movable comb fingers 210 and fixed comb fingers 220. Figure 2E As shown, at alignment positions P1 and P2, the two-stage linear comb driver has a negative capacitance derivative, as... Figure 2FAs shown, compared to a linear comb actuator with uniform comb fingers (which may be referred to as a uniform or single-stage linear comb actuator, for example), this results in increased mechanical stability (e.g., higher stability values). While a uniform linear comb actuator achieves relatively constant mechanical stability at all possible positions, a two-stage linear comb actuator achieves approximately 40% improvement in mechanical stability at P1 and approximately 270% improvement at P2. In this way, using a multi-stage linear comb actuator can improve the mechanical stability of applications with discrete alignment positions.

[0038] like Figure 2G As shown, at P1 and P2, the driving voltage derivative of the two-stage linear comb is larger (positive) compared to the uniform linear comb. Therefore, as Figure 2H As shown, the two-stage linear comb achieves higher electrical stability at P1 and P2 than the uniform linear comb. For example, at P1 and P2, the electrical stability of the two-stage linear comb is improved by 65% ​​and 250% respectively compared to the uniform linear comb. In this way, the use of a multi-stage linear comb actuator can improve the electrical stability of discrete alignment applications.

[0039] As mentioned above, Figure 2A-2H This is provided as an example. Other examples may differ from the description of 2A-2H. Figure 2A-2D The number and arrangement of the devices or components shown are provided as examples.

[0040] Figure 3 This is a schematic diagram of an exemplary microelectromechanical system (MEMS) 300. (As shown...) Figure 3 As shown, the MEMS 300 includes a rotor 310, a stator 320, and a movable element 330 attached to the rotor 310. Figure 3 As further shown, the rotor 310 may include a base 312 having a set of fingers 314 (and each finger 314 may include one or more forks 316), and the stator 322 may include a base 322 having a set of fingers 324 (and each finger 324 may include one or more forks 326).

[0041] like Figure 3As further shown in the top and side views, the rotor 310 is movable relative to the stator 320. The rotor 310 and stator 320 may include a conductive material, allowing electrostatic forces to be used to generate linear motion between the rotor 310 and stator 320. The rotor 310 and stator 320 should not contact each other, otherwise there is a risk of electrical short circuit. The rotor 310 may include a linear base 312 to which a set of fingers 314 may be attached and extend. Each finger may include one or more forks 316 that may extend in the plane of the finger such that the forks 316 do not change the pitch between adjacent fingers 314. The stator 320 may have a similar structure, that is, the stator 320 may include a linear base 322, a set of fingers 324 may be attached to and extend the linear base 322, and each finger may include one or more forks 326, which may extend in the plane of the finger such that the forks 326 do not change the pitch between adjacent fingers 324.

[0042] The rotor 310 and stator 320 can be of complementary construction, such that the fingers 314 and 324 can be staggered (e.g., to enhance the electrostatic force between the rotor 310 and stator 320), and the forks 316 and 326 can be aligned or misaligned by the linear movement of the rotor 310 relative to the stator 320. The fingers 314 and 324 can be equidistant and can be complementary (e.g., in shape, size, orientation, etc.).

[0043] Movement of the rotor 310 relative to the stator 320 can move the movable element 330 between a set of discrete positions defined by the forks 350 of the comb fingers 240 of the rotor 310 and / or the stator 320. In this way, the linear comb actuator of the MEMS 300 can align the movable element 330 at this set of discrete positions. In some embodiments, the movable element 330 can be a specific type of electrical component, optical component, electro-optic component, and / or the like. For example, the movable element 330 can be a mirror, waveguide, prism, grating, light emitter, light receiver, MEMS device, optical MEMS device, and / or the like. In some embodiments, the MEMS 300 can be included in an electro-optic device. For example, the MEMS 300 can be included in an optical switching device that includes a set of optical ports that can be aligned (e.g., in the optical path) to the movable element 330 when the movable element 330 is actuated by the MEMS 300 to this set of discrete positions. In this case, the pitch between the forks and / or between the discrete positions of the group can correspond to the pitch between the ports of the group of optical ports.

[0044] As mentioned above, Figure 3 Provided as an example. Other examples may be provided. Figure 3 The descriptions differ from those in the text. Figure 3 The number and arrangement of devices shown are provided as an example. In reality, with... Figure 3 Compared to the apparatus shown, there can be more apparatuses, fewer apparatuses, different apparatuses, or apparatuses with different arrangements.

[0045] Figure 4A-4G These are schematic diagrams of examples 400-460 of the toothed comb finger shape. For example, Figure 4A Includes the example 400 with a single fork on the comb fingers. In contrast, Figure 4B Example 410 includes a set of two forks on the comb fingers. In this case, each fork of example 410 is associated with the same height h. Conversely, Figure 4C Example 420 includes a first fork and a second fork with different heights h1 and h2 on the comb fingers. Similarly, Figure 4D Example 430 includes a set of three forks with different pitches. For example, the first and second forks may have a first pitch p1, and the second and third forks may have a second pitch p2.

[0046] Figure 4E Example 440 includes a fork with a toothed profile that has a non-rectangular outline. For example, in the first plane, as shown, the toothed profile can be a triangular outline, such as... Figure 4E As shown; circular outline, as Figure 4F And as shown in Example 450 (e.g., which includes a circular profile and a circular top post profile); and / or the like. In some embodiments, the multiple forks in the linear comb drive can have multiple different shapes in one or more planes. In some embodiments, different tooth profiles of the forks in rotor 310 can correspond to different tooth profiles of the forks in stator 320 to provide different alignment stability. Figure 4F As an example of rotor fingers, identical stator fingers may not allow two forks to be aligned with their counterparts; however, complementary stator fingers (e.g., stator fingers with forks in the opposite order to the rotor fingers) may allow two forks to be aligned with their counterparts. The alignment of one or more rotor forks and one or more stator forks with non-complementary tooth profiles may or may not be the desired alignment position. Figure 4G Example 460 includes a linear comb drive that incorporates a combination of multi-level profiles and uniform-level profiles. For example, one of the stators or rotors may have a uniform profile, while the other may have a non-uniform profile, to achieve improved stability at discrete locations of the linear comb drive relative to a linear comb drive that has only a uniform-level profile.

[0047] As mentioned above, Figure 4A-4G This is provided as an example. Other examples may differ from the one provided. Figure 4A-4G The content described. Figure 4A-4G The number and arrangement of the devices or components shown are provided as examples.

[0048] The foregoing disclosure provides illustrations and descriptions, but is not intended to be exhaustive or to limit the embodiments to the precise forms disclosed. Modifications and variations can be made based on the foregoing disclosure, or modifications and variations can be derived from practice of the embodiments. Furthermore, any embodiments described herein can be combined unless the foregoing disclosure expressly provides reasons why one or more embodiments cannot be combined.

[0049] As used here, depending on the context, satisfying the threshold can refer to a value greater than the threshold, more than the threshold, higher than the threshold, greater than or equal to the threshold, less than the threshold, less than the threshold, lower than the threshold, less than or equal to the threshold, equal to the threshold, etc., depending on the context.

[0050] Even though specific combinations of features are referenced in the claims and / or disclosed in the specification, these combinations are not intended to limit the disclosure of various embodiments. In fact, many of these features can be combined in ways not specifically stated in the claims and / or not disclosed in the specification. Although each dependent claim listed below may directly depend on only one claim, the disclosure of various embodiments includes combinations of each dependent claim with each other claim in the claim set.

[0051] Unless explicitly stated otherwise, the elements, actions, or instructions used herein should not be construed as critical or necessary. Furthermore, as used herein, the articles “a” and “one” are intended to include one or more items and may be used interchangeably with “one or more.” Furthermore, as used herein, the article “the” is intended to include one or more items associated with the article “the” and may be used interchangeably with “the one or more.” Furthermore, as used herein, the term “group” is intended to include one or more items (e.g., related items, unrelated items, a combination of related and unrelated items, etc.) and may be used interchangeably with “one or more.” When referring to only one item, the phrase “only one” or similar language is used. Furthermore, as used herein, the terms “having,” “having,” “with,” etc., are intended to be open-ended terms. Furthermore, the phrase “based on” is intended to mean “at least partially based on” unless explicitly stated otherwise. Furthermore, as used herein, the term “or” when used in series is intended to be inclusive and may be used interchangeably with “and / or” unless explicitly stated otherwise (e.g., if used in conjunction with “any” or “only one of them”). Furthermore, for ease of description, spatially relative terms such as “down,” “below,” “up,” “above,” etc., may be used herein to describe the relationship of one element or feature to another element or feature shown in the figures. In addition to the orientations described in the figures, spatially related terms are intended to include different orientations of devices, apparatuses, and / or elements in use or operation. The device may be oriented in other ways (rotated 90 degrees or in other directions), and the spatially relative descriptors used herein shall be interpreted accordingly.

Claims

1. A linear comb driver, comprising: stator; and Rotor, At least one of the stator or the rotor includes a comb having one or more horizontally extending fingers, the fingers having teeth formed by one or more forks, the forks extending vertically from the one or more fingers in a plane formed by the one or more fingers. The one or more forks include a first set of forks attached to the stator via at least one of the one or more horizontally extending fingers. The one or more forks include a second set of forks attached to the rotor via at least one of the one or more horizontally extending fingers, and The rotor is configured to move linearly relative to the stator.

2. The linear comb driver according to claim 1, further comprising: Movable elements attached to the rotor.

3. The linear comb driver according to claim 2, wherein, The tooth profile is configured to provide a higher stability value for the movable element at a first or more positions than at a second or more positions, for the linear comb actuator. The first one or more positions are defined by the alignment of the one or more forks of the stator or rotor with another one or more forks, and the second one or more positions are defined by the misalignment of the one or more forks with another one or more forks.

4. A comb-type driver finger assembly, comprising: Base components; A finger element, which is attached to a base element and extends along a first direction; and At least one fork element is attached to the finger element and extends in the plane of the finger element along a second direction perpendicular to the first direction. The at least one fork element includes a first set of fork elements attached to the stator via the finger element, the first set of fork elements being configured to align with a second set of fork elements attached to the rotor via another finger element; The comb-type driver finger assembly is configured to move linearly along the first direction.

5. The comb-type driver finger assembly according to claim 4, wherein, The comb-type driver finger assembly includes multiple finger elements, and Each of the plurality of finger elements includes a single fork.

6. The comb-type driver finger assembly according to claim 4, wherein, The first set of fork elements includes a plurality of forks, which are arranged at different distances along the finger element in a first direction and are separated by a threshold distance in the first direction.

7. The comb-type driver finger assembly according to claim 4, wherein, The at least one fork-shaped element is associated with a rectangular shape.

8. The comb-type driver finger assembly according to claim 4, wherein, The at least one fork-shaped element is associated with a non-rectangular shape.

9. The comb-type driver finger assembly according to claim 4, The first fork element in the first set of fork elements is associated with a first shape, and the second fork element in the first set of fork elements is associated with a second shape.

10. The comb-type driver finger assembly according to claim 4, The first fork element in the first set of fork elements is associated with a first height in the second direction, and the second fork element in the first set of fork elements is associated with a second height in the second direction.

11. A microelectromechanical device, comprising: Stator comb, including the first or more finger sections, At least one of the first or more fingers is associated with a first tooth shape formed by the first or more forks. The first or more forks extend from the first or more fingers in a first plane formed by the first or more fingers. Rotary comb, including a second or more fingers, At least one of the second or more fingers is associated with a second tooth shape formed by the second or more forks. The second or more forks extend from the second or more fingers in a second plane formed by the second or more fingers. The first or more fingers are configured to intersect with the second or more fingers, and The rotor comb is configured to move linearly relative to the stator comb; and Movable elements mounted on the rotor comb.

12. The microelectromechanical device according to claim 11, wherein, The first tooth profile includes one or more peaks formed by the first one or more forks and one or more valleys adjacent to the first one or more peaks formed by the first one or more forks; and The second tooth shape includes a second or more peaks formed by a second or more forks and a second or more valleys adjacent to the second or more peaks formed by the second or more forks.

13. The microelectromechanical device according to claim 11, wherein, The first tooth profile and the second tooth profile are configured such that the microelectromechanical device provides a higher stability value for the movable element at a first or more locations than at a second or more locations. The first one or more positions are defined by the alignment of the first one or more forks with the second one or more forks, and the second one or more positions are defined by the misalignment of the first one or more forks with the second one or more forks.

14. The microelectromechanical device of claim 13, wherein the first-order capacitance derivatives of the first one or more forks and the second one or more forks are first values ​​at specific locations of the first one or more locations, and the first-order capacitance derivatives of the first one or more forks and the second one or more forks are second values ​​at specific locations of the second one or more locations, and The first value is greater than the second value.

15. The microelectromechanical device according to claim 13, wherein, The first-order voltage derivatives of the first or more forks and the second or more forks are first values ​​at specific locations of the first or more forks, and the first-order voltage derivatives of the first or more forks and the second or more forks are second values ​​at specific locations of the second or more forks. The first value is greater than the second value.

16. The microelectromechanical device according to claim 13, further comprising: A set of optical ports that can be aligned to movable elements, and The pitch between the positions of the first or more locations corresponds to the pitch between the ports of the group of optical ports.

17. The microelectromechanical device according to claim 13, wherein, The first or more forks include a first number of forks, and the second or more forks include a second number of forks. The first quantity and the second quantity are common quantities.

18. The microelectromechanical device according to claim 11, wherein, The movable element is at least one of the following: Reflector waveguide, Prism, grating, Light emitter, Optical receiver, Another microelectromechanical device, or Optical microelectromechanical devices.

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