具有多面加热器配置的相变开关

By employing a multi-faceted heater configuration in the phase-change switching device, the performance parameter challenge of phase-change switch design in high-frequency applications is solved, achieving efficient current carrying and blocking capabilities within a given area, reducing power consumption and improving linearity.

CN113517394BActive Publication Date: 2026-07-17INFINEON TECHNOLOGIES AG

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
INFINEON TECHNOLOGIES AG
Filing Date
2021-04-07
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing semiconductor switching technologies struggle to maintain good on/off ratios, isolation and insertion losses, on-resistance, and turn-off capacitance in high-frequency applications, especially in modern electronic applications such as 5G wireless communication. Phase-change switch designs struggle to meet design requirements for RON, COFF, power consumption, and linearity while maintaining device area requirements.

Method used

A phase change switching device with a multi-faceted heater configuration achieves uniform heating control of the phase change material by setting heating elements on two opposite outer sides of the phase change material strip. This includes multiple phase change material strips and heating elements arranged alternately to form a multi-faceted heating structure, ensuring improved current carrying capacity and blocking capability within a given area.

Benefits of technology

This achieves improved performance parameters of phase-change switching devices in high-frequency applications, including lower power consumption, improved linearity, and reduced chip area, while also improving the performance of on-resistance and off-capacitance through uniform temperature distribution.

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Abstract

本公开的各实施例涉及具有多面加热器配置的相变开关。开关器件包括:被设置在衬底之上的第一RF端子和第二RF端子;连接在第一RF端子和第二RF端子之间的一个或多个相变材料带;将一个或多个相变材料带与衬底分开的绝热材料区域;以及包括一个或多个加热元件的加热器结构,加热元件被配置成通过向一个或多个相变材料带施加热量来控制第一RF端子和第二RF端子之间的导电连接。一个或多个相变材料带中的每个相变材料带包括第一外面和与第一外面相对的第二外面。对于一个或多个相变材料带中的每个相变材料带,第一外面和第二外面两者的至少部分被设置成抵靠加热元件中的一个加热元件。
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