Component replacement system and component replacement device

Abstract

The present application provides a component replacement system and a component replacement device capable of reducing the area of a system in the manufacture of a semiconductor device. A component replacement system that performs replacement of a consumable component includes a component storage device and a component replacement device. The component storage device stores a consumable component before use. The component replacement device is connected to a processing device and the component storage device, and is capable of replacing a consumable component after use installed in the processing device with a consumable component before use stored in the component storage device. Furthermore, the component replacement device is capable of moving to a position of the processing device in which a consumable component to be replaced is installed, and connecting to the processing device. Furthermore, the component storage device is capable of moving to a position of the component replacement device connected to the processing device in which a consumable component to be replaced is installed, and connecting to the component replacement device.

Description

Technical Field

[0001] Various aspects and embodiments of the present invention relate to component replacement systems and component replacement devices. Background Technology

[0002] Inside the substrate processing apparatus, there are consumable parts that are consumed during substrate processing. When the consumption of these consumable parts exceeds a preset limit, they are replaced with the previous consumable parts. During the replacement of consumable parts, substrate processing in the apparatus is stopped, and the container of the processing apparatus is opened to the atmosphere. Then, the used consumable parts are manually removed, and the previous consumable parts are installed. The container is then closed again, a vacuum is created inside, and substrate processing begins again.

[0003] As mentioned above, during the replacement of consumable parts, the interior of the processing unit is exposed to the atmosphere. Therefore, a vacuum needs to be drawn inside the processing unit after the consumable parts are replaced, which prolongs the processing downtime. In addition, there are large components among the consumable parts, so manual replacement is time-consuming.

[0004] To avoid the aforementioned problems, a replacement station is known that includes a pre-use consumable component and a replacement operation unit for replacing the consumable component (for example, see Patent Document 1 below). In such a replacement station, the processing device is connected to the replacement station, and after evacuating the replacement station, a shut-off valve between the processing device and the replacement station is opened. Then, the used consumable component is removed from the processing device using the replacement operation unit within the replacement station and replaced with the pre-use consumable component housed in the replacement station. Thus, the consumable component can be replaced without opening the interior of the processing device to the atmosphere, shortening processing downtime. Furthermore, since the replacement of the consumable component is performed by the replacement operation unit instead of manually, the replacement of the consumable component can be completed in a short time.

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent Application Publication No. 2017-85072 Summary of the Invention

[0008] The technical problem that the invention aims to solve

[0009] The present invention provides a component replacement system and component replacement device that can reduce the system setup area in the manufacture of semiconductor devices.

[0010] Technical solutions for solving technical problems

[0011] One aspect of the present invention is a component replacement system for replacing consumable components, comprising a component storage device and a component replacement device. The component storage device stores consumable components before use. The component replacement device is connected to a processing device and the component storage device, and is capable of replacing used consumable components installed in the processing device with unused consumable components stored in the component storage device. Furthermore, the component replacement device can be moved to a position where a processing device with a consumable component to be replaced is installed, and connected to that processing device. Additionally, the component storage device can be moved to a position where the component replacement device is connected to the processing device with the consumable component to be replaced, and connected to that component replacement device.

[0012] Invention Effects

[0013] According to various aspects and embodiments of the present invention, the system installation area in the manufacture of semiconductor devices can be reduced. Attached Figure Description

[0014] Figure 1 This is a system configuration diagram illustrating an example of a manufacturing system according to one embodiment of the present invention.

[0015] Figure 2 This is a schematic cross-sectional view showing an example of a processing device.

[0016] Figure 3 This is a schematic cross-sectional view showing an example of a component replacement device.

[0017] Figure 4 It means Figure 3 The figure shows an example of a component replacement device in section AA.

[0018] Figure 5 This is an enlarged cross-sectional view showing an example of the connection between the processing device and the component replacement device.

[0019] Figure 6 This is an enlarged cross-sectional view showing an example of the connection between the processing device and the component replacement device.

[0020] Figure 7 This is a schematic cross-sectional view showing an example of a component storage device.

[0021] Figure 8 This is a schematic cross-sectional view showing an example of a jig storage device.

[0022] Figure 9 This is a diagram illustrating the steps for replacing consumable parts.

[0023] Figure 10 This is a diagram illustrating the steps for replacing consumable parts.

[0024] Figure 11This is a diagram illustrating the steps for replacing consumable parts.

[0025] Figure 12 This is a diagram illustrating the steps for replacing consumable parts.

[0026] Figure 13 This is a diagram illustrating the steps for replacing consumable parts.

[0027] Figure 14 This is a diagram illustrating the steps for replacing consumable parts.

[0028] Figure 15 This is a diagram illustrating the steps for replacing consumable parts.

[0029] Figure 16 This is a diagram illustrating the steps for replacing consumable parts.

[0030] Figure 17 This is a diagram illustrating the steps for replacing consumable parts.

[0031] Figure 18 This is a diagram illustrating the steps for replacing consumable parts.

[0032] Figure 19 This is a block diagram representing an example of a control device.

[0033] Figure 20 This is a diagram representing an example of a management table.

[0034] Figure 21 This is a flowchart illustrating an example of the processing of a control device.

[0035] Figure 22 This is a flowchart illustrating an example of the processing of a control device.

[0036] Figure 23 This is a flowchart illustrating an example of the processing of a component replacement device.

[0037] Figure 24 This is a flowchart illustrating an example of the processing of a component replacement device.

[0038] Figure 25 This is a flowchart illustrating an example of the processing of a component storage device and a fixture storage device.

[0039] Explanation of reference numerals in the attached figures

[0040] W substrate

[0041] 10 Manufacturing System

[0042] 20 Control devices

[0043] 210 Management Table

[0044] 30 processing groups

[0045] 31 Vacuum Delivery Chamber

[0046] 32 Load Locking Chamber

[0047] 33 Atmospheric Transport Chamber

[0048] 331 Loading end

[0049] 40 Processing Unit

[0050] 41 chambers

[0051] 42 Support section

[0052] 421 Lower electrode

[0053] 422 Electrostatic Chuck

[0054] 423 Edge ring

[0055] 43 Upper electrode spray head assembly

[0056] 44 Gas Supply Department

[0057] 45 RF Power Supply Department

[0058] 46 Exhaust System

[0059] 50-part replacement device

[0060] 510 upper container

[0061] 511 lower container

[0062] 513 Gate

[0063] 52 Operating the robot

[0064] 520 manipulator

[0065] 53 Conveyor Robots

[0066] 530 Conveyor Arm

[0067] 56. Mobile mechanism

[0068] 60-part storage device

[0069] 610 upper container

[0070] 611 lower container

[0071] 613 Gate

[0072] 62 boxes

[0073] 66. Mobile mechanism

[0074] 70 Fixture Storage Device

[0075] 710 upper container

[0076] 711 lower container

[0077] 713 Gate

[0078] 72 boxes

[0079] 76. Mobile mechanism

[0080] 80 Consumable Parts

[0081] 81 End effector

[0082] 82. Holding component. Detailed Implementation

[0083] Hereinafter, embodiments of the component replacement system and component replacement apparatus will be described in detail with reference to the accompanying drawings. Furthermore, the component replacement system and component replacement apparatus of the present invention are not limited to the embodiments described below.

[0084] However, during the mass production process, the substrate is processed using multiple processing units. Therefore, consumable parts are replaced in processing units located in different locations. Consequently, the replacement station carrying the consumable parts before use needs to be moved to the processing unit where the consumable parts need to be replaced.

[0085] When a replacement station only stores one pre-use consumable part, the station cannot begin the next replacement operation immediately after the consumable part is replaced until a pre-use consumable part is replenished. Therefore, a processing device with consumable parts due for replacement will cause processing to stall until the consumable part is replaced, thus reducing processing productivity. In contrast, when a replacement station stores multiple pre-use consumable parts, it can continuously replace consumable parts until all stored pre-use consumable parts are used up, thereby preventing a decrease in processing productivity.

[0086] However, as the number of consumable parts stored in the replacement station increases, the replacement station becomes larger. Consequently, the width of the movement path of the replacement station needs to be increased, and the overall installation area of ​​the semiconductor device manufacturing system increases.

[0087] Therefore, the present invention provides a technique that can reduce the system footprint in the manufacture of semiconductor devices.

[0088] [The Structure of Manufacturing System 10]

[0089] Figure 1This is a system configuration diagram illustrating an example of a manufacturing system 10 according to one embodiment of the present invention. Manufacturing system 10 is an example of a component replacement system. In one embodiment, manufacturing system 10 includes a control device 20, multiple processing groups 30, multiple component replacement devices 50, multiple component storage devices 60, and multiple fixture storage devices 70. The control device 20 communicates with each of the processing groups 30, component replacement devices 50, component storage devices 60, and fixture storage devices 70, and controls each of these devices.

[0090] Each processing unit 30 has a vacuum transport chamber 31, multiple processing devices 40-1 to 40-6, multiple load locking chambers 32, and an atmospheric transport chamber 33. Furthermore, in the following text, when referring to the multiple processing devices 40-1 to 40-6 collectively without distinguishing between each one, they will be referred to as processing device 40.

[0091] The vacuum transport chamber 31 is connected to multiple processing devices 40 and multiple load locking chambers 32. In this embodiment, the vacuum transport chamber 31 is connected to six processing devices 40, but it can also be connected to five or fewer processing devices 40, or even seven or more processing devices 40. Furthermore, in this embodiment, the vacuum transport chamber 31 is connected to two load locking chambers 32, but it can also be connected to one load locking chamber 32, or even three or more load locking chambers 32.

[0092] Each processing unit 40 performs processes such as etching and film deposition on the substrate W under a low-pressure environment. Each processing unit 40 is equipped with consumable parts consumed during the processing of the substrate W. Each processing unit 40 and the vacuum transport chamber 31 are separated by a gate valve 400. Furthermore, each processing unit 40 is provided with a gate 401 for the discharge of used consumable parts and the loading of consumable parts before use. Each processing unit 40 can be a unit that performs the same step in the manufacturing process, or it can be a unit that performs different steps.

[0093] Each load locking chamber 32 has a gate 320 and a gate 321 to switch the internal pressure from a preset vacuum level to atmospheric pressure, or from atmospheric pressure to a preset vacuum level. The load locking chamber 32 and the vacuum delivery chamber 31 are separated by the gate 320. In addition, the load locking chamber 32 and the atmospheric delivery chamber 33 are separated by the gate 321.

[0094] A robot arm 310 is disposed within a vacuum transfer chamber 31. The vacuum transfer chamber 31 is maintained at a preset vacuum level. In this embodiment, the robot arm 310 removes the substrate W before processing from a load locking chamber 32, which is depressurized to a preset vacuum level, and transfers it to any processing device 40. Furthermore, the robot arm 310 removes the processed substrate W from the processing device 40 and transfers it to another processing device 40 or the load locking chamber 32.

[0095] A robotic arm 330 is installed inside the atmospheric transport chamber 33. Furthermore, the atmospheric transport chamber 33 is equipped with multiple load ports 331 connected to containers (e.g., FOUP: Front Opening Unified Pod) capable of holding multiple pre-processed or post-processed substrates W. The robotic arm 330 removes the pre-processed substrate W from the container connected to the load port 331 and transports it to the load locking chamber 32. Similarly, the robotic arm 330 removes the post-processed substrate W from the load locking chamber 32 and transports it to the container connected to the load port 331. Additionally, an alignment unit may be provided in the atmospheric transport chamber 33 for adjusting the orientation of the substrate W removed from the container connected to the load port 331.

[0096] Each component replacement device 50 has a robotic arm and a moving mechanism for replacing consumable components. Based on instructions from the control device 20, it moves to the position of the processing device 40 containing the consumable component to be replaced and connects to that processing device 40. Each component storage device 60 has multiple pre-use consumable components and a moving mechanism. Based on instructions from the control device 20, it moves to the position of the component replacement device 50 connected to the processing device 40 containing the consumable component to be replaced and connects to that component replacement device 50. Each fixture storage device 70 has a fixture and a moving mechanism for replacing consumable components. Based on instructions from the control device 20, it moves to the position of the component replacement device 50 connected to the processing device 40 containing the consumable component to be replaced and connects to that component replacement device 50.

[0097] The robotic arm of the component replacement device 50 removes a fixture for replacing consumable components from the fixture storage device 70, uses the fixture to remove the used consumable component from the processing device 40, and stores the removed consumable component in the component storage device 60. Then, the robotic arm of the component replacement device 50 removes the unused consumable component from the component storage device 60 and installs the removed consumable component into the processing device 40. Thus, the used consumable component is replaced with the unused consumable component within the processing device 40.

[0098] As described above, in the manufacturing system 10 of this embodiment, the component replacement device 50 for replacing consumable components and the component storage device 60 for storing multiple consumable components move to the location of the processing device 40 that has the consumable components that need to be replaced. Therefore, compared to a replacement station equipped with the component replacement device 50 and the component storage device 60, the component replacement device 50 and the component storage device 60 can be miniaturized. Consequently, the width of the passageway for the component replacement device 50 and the component storage device 60 to move can be narrowed. This reduces the overall installation area of ​​the manufacturing system 10.

[0099] [Configuration of the processing device 40]

[0100] Figure 2 This is a schematic cross-sectional view showing an example of the processing apparatus 40. In this embodiment, the processing apparatus 40 includes a chamber 41, a gas supply unit 44, an RF (Radio Frequency) power supply unit 45, and an exhaust system 46.

[0101] The chamber 41 has a support portion 42 and an upper electrode spray head assembly 43. The support portion 42 is disposed in the lower region of the processing space 41s within the chamber 41. The upper electrode spray head assembly 43 is disposed above the support portion 42 and functions as part of the top plate of the chamber 41.

[0102] The support portion 42 is configured to support the substrate W in the processing space 41s. In this embodiment, the support portion 42 includes a lower electrode 421 and an electrostatic chuck 422. The electrostatic chuck 422 is configured to be disposed on the lower electrode 421 and to support the substrate W on its upper surface. An edge ring 423 is provided on the upper surface of the peripheral portion of the lower electrode 421. The edge ring 423 is disposed on the upper surface of the peripheral portion of the lower electrode 421 to surround the electrostatic chuck 422 and the substrate W. The edge ring 423 is an example of a consumable component.

[0103] Through holes for the lifting pin 47 to pass through are formed at the bottom of the chamber 41, at the lower electrode 421, and at the electrostatic chuck 422. The lifting pin 47 is raised and lowered by the drive unit 470 when the substrate W is fed in and when the substrate W is discharged. Thus, the robotic arm 310 can receive the substrate W before processing into the chamber 41 and place it on the electrostatic chuck 422, and the processed substrate W can be handed over to the robotic arm 310 for discharge from the chamber 41.

[0104] The upper electrode spray head assembly 43 is configured to supply one or more types of gas from the gas supply unit 44 into the processing space 41s. In this embodiment, the upper electrode spray head assembly 43 includes an electrode support 43d and an upper electrode 43e. The upper electrode 43e is fixed to the electrode support 43d by a fixing member 43f such as a threaded member. The electrode support 43d has a gas inlet 43a and a gas diffusion chamber 43b, and the gas supply unit 44 and the gas diffusion chamber 43b are in fluid communication via the gas inlet 43a.

[0105] Multiple gas outlets 43c are formed in the electrode support portion 43d and the upper electrode 43e, and the gas diffusion chamber 43b and the processing space 41s are fluidly connected through the multiple gas outlets 43c. In this embodiment, the upper electrode spray head assembly 43 is configured to supply one or more types of gas from the gas inlet 43a into the processing space 41s through the gas diffusion chamber 43b and the multiple gas outlets 43c.

[0106] The gas supply unit 44 includes multiple gas sources 440a-440c, multiple flow controllers 441a-441c, and multiple valves 442a-442c. Gas source 440a is, for example, a supply source for processed gas, gas source 440b is, for example, a supply source for cleaning gas, and gas source 440c is, for example, a supply source for inactive gas. In this embodiment, the inactive gas is, for example, nitrogen. Flow controllers 441a-441c can include, for example, mass flow controllers or pressure-controlled flow controllers. Furthermore, the gas supply unit 44 may include one or more flow modulators that modulate or pulse the flow rate of one or more processed gases.

[0107] The RF power supply unit 45 supplies RF power, such as one or more RF signals, to one or more electrodes, such as the lower electrode 421, the upper electrode spray head assembly 43, or both the lower electrode 421 and the upper electrode spray head assembly 43. In this embodiment, the RF power supply unit 45 includes two RF generation units 450a and 450b and two matching circuits 451a and 451b. The RF power supply unit 45 in this embodiment is configured to supply a first RF signal from the RF generation unit 450a to the lower electrode 421 via the matching circuit 451a. The RF spectrum includes a portion of the electromagnetic spectrum in the range of 3 Hz to 3000 GHz. For electronic material processing such as semiconductor processing, the frequency of the RF spectrum used for plasma generation is preferably in the range of 100 kHz to 3 GHz, more preferably in the range of 200 kHz to 150 MHz. For example, the frequency of the first RF signal can be in the range of 27 MHz to 100 MHz.

[0108] Furthermore, the RF power supply unit 45 in this embodiment is configured to supply the second RF signal from the RF generation unit 450b to the lower electrode 421 via the matching circuit 451b. For example, the frequency of the second RF signal can be in the range of 400 kHz to 13.56 MHz. Alternatively, the RF power supply unit 45 may have a DC (Direct Current) pulse generation unit instead of the RF generation unit 450b.

[0109] Furthermore, although the illustrations are omitted, other embodiments are considered here. For example, in the RF power supply unit 45 of the alternative embodiment, the RF generation unit may supply a first RF signal to the lower electrode 421, and other RF generation units may supply a second RF signal to the lower electrode 421. Additionally, other RF generation units may supply a third RF signal to the upper electrode spray head assembly 43. Furthermore, in other alternative embodiments, a DC voltage may be applied to the upper electrode spray head assembly 43. Additionally, in various embodiments, the amplitudes of one or more RF signals (i.e., the first RF signal, the second RF signal, etc.) may be pulsed or modulated. Amplitude modulation may include processing the pulsed amplitude of the RF signal between on-state and off-state, or between multiple different on-states. Furthermore, the phase matching of the RF signals may be controlled, allowing the phase matching of the amplitude modulation of multiple RF signals to be synchronized or asynchronous.

[0110] The exhaust system 46 is connected, for example, to an exhaust port 41e located at the bottom of the chamber 41. The exhaust system 46 may include a vacuum pump such as a pressure pump, a turbomolecular pump, a roughing pump, or a combination thereof.

[0111] [Component Replacement Device 50]

[0112] Figure 3 This is a schematic cross-sectional view showing an example of the component replacement device 50. Figure 4 It means Figure 3 This is a diagram illustrating an example of a cross-section AA of the component replacement device 50. The component replacement device 50 includes an upper container 510, a lower container 511, and a moving mechanism 56. The upper container 510 is provided with an opening 512a connected to the processing device 40 and a gate 513a for opening and closing the opening 512a. Furthermore, the upper container 510, for example... Figure 4The device shown has an opening 512b connected to the component storage device 60 and a gate 513a for opening and closing the opening 512b. Furthermore, the upper container 510 has an opening 512c connected to the fixture storage device 70 and a gate 513c for opening and closing the opening 512c. The opening 512a is an example of a first component conveying port, and the gate 513a is an example of a first gate. Furthermore, the opening 512b is an example of a second component conveying port, and the gate 513b is an example of a second gate.

[0113] The upper container 510 houses an operating robot 52a, an operating robot 52b, and a conveying robot 53. Furthermore, in the following text, when referring to both operating robots 52a and 52b collectively without distinguishing between them, they will be collectively referred to as operating robot 52.

[0114] Robot 52a has a manipulator arm 520a, and robot 52b has a manipulator arm 520b. End effectors are mounted at the front ends of manipulator arms 520a and 520b. Robots 52a and 52b utilize the end effectors mounted at the front ends of manipulator arms 520a and 520b to perform tasks such as sensing, retrieving consumable parts, and installing consumable parts within the processing unit 40.

[0115] The conveying robot 53 has a conveying arm 530. A holding member for holding consumable parts is installed at the front end of the conveying arm 530. The conveying robot 53 uses the holding member installed at the front end of the conveying arm 530 to hold the consumable parts unloaded by the operating robot 52. Then, the conveying robot 53 delivers the held consumable parts from the processing device 40 and stores the consumable parts delivered from the processing device 40 in the parts storage device 60. In addition, the conveying robot 53 uses the holding member installed at the front end of the conveying arm 530 to deliver consumable parts before use from the parts storage device 60. Then, the conveying robot 53 delivers the consumable parts before use from the parts storage device 60 into the processing device 40. The consumable parts before use delivered into the processing device 40 are mounted in the processing device 40 by end effectors installed at the front ends of the operating arms 520a and 520b.

[0116] The lower container 511 is equipped with an exhaust device 554, a gas supply device 556, a communication unit 557, a control unit 558, and a storage unit 559. The communication unit 557 is, for example, a wireless communication loop that communicates wirelessly with the control device 20, the component storage device 60, and the fixture storage device 70. A sensor 551 is provided on the outer wall of the component replacement device 50. The sensor 551 senses the surroundings of the component replacement device 50 and outputs the sensing results to the control unit 558. In this embodiment, the sensor 551 is, for example, an image sensor that outputs an image of the surroundings of the component replacement device 50 to the control unit 558. The sensor 551 is an example of a first sensor.

[0117] The exhaust device 554 is connected to the space inside the upper container 510 via valve 552. The exhaust device 554 draws gas from the upper container 510 via valve 552 and discharges the drawn gas to the outside of the component replacement device 50. As a result, the pressure inside the upper container 510 can be reduced to a preset vacuum level.

[0118] Furthermore, the exhaust device 554 is connected to the opening 512a via valve 553a and pipe 550a. After connecting the component replacement device 50 and the processing device 40, the exhaust device 554 exhausts the air at the connection between the component replacement device 50 and the processing device 40 via pipe 550a and valve 553a. This allows the pressure at the connection between the component replacement device 50 and the processing device 40 to a preset vacuum level before opening the gate 513a.

[0119] Figure 5 and Figure 6 This is an enlarged cross-sectional view showing an example of the connection between the processing device 40 and the component replacement device 50. A protrusion 410 is provided on the side of the chamber 41 of the processing device 40, which is connected to the component replacement device 50. Furthermore, a recess 514 with a shape corresponding to the protrusion 410 is provided on the side of the component replacement device 50, which is connected to the processing device 40. When the processing device 40 and the component replacement device 50 are connected, the protrusion 410 and the recess 514 are, for example, as shown in the diagram. Figure 6 The parts are fitted together as shown to help align the processing device 40 with the component replacement device 50.

[0120] Furthermore, an O-ring or other sealing component 515 is provided on the side of the component replacement device 50 to surround the opening 512a. This improves the airtightness of the space 90 surrounded by the chamber 41, gate 401, opening 512a, and gate 513a. After connecting the processing device 40 and the component replacement device 50, the gas inside the space 90 is vented via the piping 550a, thereby reducing the pressure inside the space 90 to a preset vacuum level. By reducing the pressure inside the space 90, the connection between the processing device 40 and the component replacement device 50 becomes more secure. Moreover, when the connection between the processing device 40 and the component replacement device 50 is disconnected, the pressure inside the space 90 is restored to atmospheric pressure by opening a valve (not shown) connected to the piping 550a.

[0121] return Figure 4 Continuing the explanation, the exhaust device 554 is connected to the opening 512b via valve 553b and pipe 550b. After connecting the component replacement device 50 and the component storage device 60, the exhaust device 554 exhausts the air at the connection between the component replacement device 50 and the component storage device 60 via pipe 550b and valve 553b. This allows the pressure at the connection between the component replacement device 50 and the component storage device 60 to a preset vacuum level before opening the gate 513b. Furthermore, a [missing information - likely a device or feature] is also provided at the connection between the component replacement device 50 and the component storage device 60. Figure 5 and Figure 6 The recesses and protrusions shown are used to help align the parts replacement device 50 with the parts storage device 60.

[0122] Additionally, the exhaust device 554, for example, Figure 4 As shown, it is connected to the opening 512c via valve 553c and pipe 550c. After connecting the component replacement device 50 to the fixture storage device 70, the exhaust device 554 exhausts the air at the connection between the component replacement device 50 and the fixture storage device 70 via pipe 550c and valve 553c. This allows the pressure at the connection between the component replacement device 50 and the fixture storage device 70 to a preset vacuum level before opening the gate 513c. Furthermore, a [missing information - likely a device or feature] is also provided at the connection between the component replacement device 50 and the fixture storage device 70. Figure 5 and Figure 6 The recesses and protrusions shown are used to help align the parts replacement device 50 with the jig storage device 70.

[0123] The upper container 510 is connected to a gas supply device 556 via a valve 555. The gas supply device 556 supplies an inert gas, such as nitrogen, to the upper container 510 via the valve 555. The control unit 558 controls the supply of gas to the upper container 510 via the valve 555, thereby maintaining a pressure in the upper container 510 that is higher than the pressure inside the processing device 40. This prevents particles from the processing device 40 from entering the upper container 510. The valve 555 is an example of a pressure regulating mechanism.

[0124] Additionally, inactive gas can also be supplied to the connection between the component replacement device 50 and the processing device 40. This creates a flow of gas from the connection between the component replacement device 50 and the processing device 40 to the processing device 40, and a flow of gas from the connection between the component replacement device 50 and the processing device 40 to the component replacement device 50. This suppresses the intrusion of particles from the processing device 40 into the upper container 510, and also suppresses the intrusion of particles from the upper container 510 into the processing device 40. The opening and closing of valves 552, 553a-553c, and 555 are controlled by the control unit 558.

[0125] The storage unit 559 is a ROM (Read Only Memory), HDD (Hard Disk Drive), or SSD (Solid State Drive), etc., which stores data and programs used by the control unit 558. The control unit 558 is, for example, a CPU (Central Processing Unit) or DSP (Digital Signal Processor), etc., which reads and executes the programs stored in the storage unit 559 to control the various parts of the component changing device 50.

[0126] The control unit 558 controls the moving mechanism 56, for example, by using the sensing results of the sensor 551, to move the component changing device 50 to the position of the processing device 40 indicated by the control device 20. The control unit 558 is an example of a first control unit, and the moving mechanism 56 is an example of a first moving mechanism.

[0127] The moving mechanism 56 is connected to the main body 560 and wheels 561. The main body 560 houses a power source such as a battery, a steering mechanism, etc. The wheels 561 rotate via the power source within the main body 560, causing the part changing device 50 to move in a direction controlled by the steering mechanism within the main body 560. Furthermore, the moving mechanism 56 need only be capable of moving the part changing device 50; alternatively, the part changing device 50 can be moved by methods other than wheels 561, such as a walking type.

[0128] [Component Storage Device 60]

[0129] Figure 7 This is a schematic cross-sectional view showing an example of a component storage device 60. The component storage device 60 has an upper container 610, a lower container 611, and a moving mechanism 66. The upper container 610 is provided with an opening 612 connected to a component replacement device 50 and a gate 613 for opening and closing the opening 612. A mounting platform 63 and a drive unit 64 are provided inside the upper container 610. A box 62 is mounted on the mounting platform 63, and multiple consumable components 80 are arranged vertically within the box 62 before use. The box 62 provides space to store at least one used consumable component 80. In this embodiment, multiple types of consumable components 80 are stored in the box 62. The consumable component 80 may be, for example, an edge ring 423, an upper electrode 43e, etc.

[0130] The platform 63 is raised and lowered by the drive unit 64. Thus, the conveying robot 53 within the component replacement device 50, which is connected to the component storage device 60, can retrieve the pre-use consumable component 80 from the box 62 through the opening 612, and can store the used consumable component 80 in the box 62. When all the consumable components 80 in the box 62 are used consumable components 80, the box 62 is replaced with a box 62 containing the pre-use consumable components 80.

[0131] An exhaust device 652, a gas supply device 654, a communication unit 655, a control unit 656, and a storage unit 657 are provided inside the lower container 611. The communication unit 655 is, for example, a wireless communication loop that communicates wirelessly with the control device 20 and the component replacement device 50. A sensor 650 is provided on the outer wall of the component storage device 60. The sensor 650 senses the area around the component storage device 60 and outputs the sensing result to the control unit 656. In this embodiment, the sensor 650 is, for example, an image sensor that outputs an image of the area around the component storage device 60 to the control unit 656. The sensor 650 is an example of a second sensor.

[0132] The exhaust device 652 is connected to the space inside the upper container 610 via valve 651. The exhaust device 652 draws gas from the upper container 610 via valve 651 and discharges the drawn gas to the outside of the component storage device 60. As a result, the pressure inside the upper container 610 can be reduced to a preset vacuum level.

[0133] The gas supply device 654 is connected to the upper container 610 via valve 653. The gas supply device 654 supplies a non-reactive gas, such as nitrogen, into the upper container 610 via valve 653. By supplying gas into the upper container 610, the pressure inside the upper container 610 can be maintained at a higher level than the pressure inside the upper container 510 of the component replacement device 50. This prevents particles from entering the upper container 510 of the component replacement device 50.

[0134] Additionally, inactive gas can also be supplied to the connection between the component storage device 60 and the component replacement device 50. This creates gas flow from the connection between the component storage device 60 and the component replacement device 50 to the upper container 610, and gas flow from the connection between the component storage device 60 and the component replacement device 50 to the upper container 510. This suppresses the intrusion of particles from the component replacement device 50 into the upper container 610, and also suppresses the intrusion of particles from the upper container 610 into the upper container 510. The opening and closing of valves 651 and 653 are controlled by the control unit 656.

[0135] The storage unit 657 is a ROM, HDD, or SSD, etc., which stores data and programs used by the control unit 656. The control unit 656 is, for example, a CPU, DSP, or other processor, which controls the various parts of the component storage device 60 by reading and executing the programs stored in the storage unit 657.

[0136] The control unit 656 controls the moving mechanism 66, for example, by using the sensing results of the sensor 650, to move the component storage device 60 to the position of the component replacement device 50 connected to the processing device 40 as indicated by the control device 20. The control unit 656 is an example of a second control unit, and the moving mechanism 66 is an example of a second moving mechanism.

[0137] The moving mechanism 66 has a main body 660 and wheels 661. A power source, such as a battery, and a steering mechanism are provided within the main body 660. The wheels 661 rotate via the power source within the main body 660, causing the component storage device 60 to move in a direction controlled by the steering mechanism within the main body 660. Furthermore, the moving mechanism 66 can move the component storage device 60 as long as it is capable of doing so; alternatively, it can move the component storage device 60 using methods other than the wheels 661, such as a walking type.

[0138] [Jig Storage Device 70]

[0139] Figure 8This is a schematic cross-sectional view showing an example of a jig storage device 70. The jig storage device 70 has an upper container 710, a lower container 711, and a moving mechanism 76. The upper container 710 is provided with an opening 712 connected to the component replacement device 50 and a gate 713 for opening and closing the opening 712. A mounting platform 73 and a drive unit 74 are provided inside the upper container 710. A box 72 is mounted on the mounting platform 73, and multiple end effectors 81 and multiple holding members 82 are arranged vertically in the box 72.

[0140] The platform 73 is raised and lowered by the drive unit 74. Thus, the operating robot 52 within the component replacement device 50, which is connected to the fixture storage device 70, can install the end effector 81 from the box 72 onto the front end of the operating arm 520a via the opening 712. Furthermore, the conveying robot 53 can install the holding member 82 from the box 72 onto the front end of the conveying arm 530 via the opening 712.

[0141] The lower container 711 is equipped with an exhaust device 752, a gas supply device 754, a communication unit 755, a control unit 756, and a storage unit 757. The communication unit 755 is, for example, a wireless communication loop that communicates wirelessly with the control device 20 and the component replacement device 50. A sensor 750 is provided on the outer wall of the fixture storage device 70. The sensor 750 senses the area around the fixture storage device 70 and outputs the sensing results to the control unit 756. In this embodiment, the sensor 750 is, for example, an image sensor that outputs an image of the area around the fixture storage device 70 to the control unit 756.

[0142] The exhaust device 752 is connected to the space inside the upper container 710 via valve 751. The exhaust device 752 draws gas from the upper container 710 via valve 751 and discharges the drawn gas to the outside of the fixture storage device 70. As a result, the pressure inside the upper container 710 can be reduced to a preset vacuum level.

[0143] The gas supply device 754 is connected to the upper container 710 via valve 753. The gas supply device 754 supplies a non-reactive gas, such as nitrogen, into the upper container 710 via valve 753. By supplying gas into the upper container 710, the pressure inside the upper container 710 can be maintained at a higher level than the pressure inside the upper container 510 of the component replacement device 50. This prevents particles from entering the upper container 710.

[0144] Additionally, inactive gas can also be supplied to the connection between the fixture storage device 70 and the component replacement device 50. This creates gas flow from the connection between the fixture storage device 70 and the component replacement device 50 to the upper container 710, and gas flow from the connection between the fixture storage device 70 and the component replacement device 50 to the upper container 510. This suppresses the intrusion of particles from the component replacement device 50 into the upper container 710, and also suppresses the intrusion of particles from the upper container 710 into the upper container 510. The opening and closing of valves 751 and 753 are controlled by the control unit 756.

[0145] The storage unit 757 is a ROM, HDD, or SSD, etc., which stores data and programs used by the control unit 756. The control unit 756 is, for example, a CPU, DSP, or other processor, which reads and executes the programs stored in the storage unit 757 to control the various parts of the fixture storage device 70.

[0146] The control unit 756 controls the moving mechanism 76, for example, by using the sensing results of the sensor 750, to move the jig storage device 70 to the position of the component replacement device 50 connected to the processing device 40 as indicated by the control device 20.

[0147] The moving mechanism 76 has a main body 760 and wheels 761. A power source, such as a battery, and a steering mechanism are provided within the main body 760. The wheels 761 rotate via the power source within the main body 760, causing the jig storage device 70 to move in a direction controlled by the steering mechanism within the main body 760. Furthermore, the moving mechanism 76 is only required to move the jig storage device 70; alternatively, it can move the jig storage device 70 using methods other than the wheels 761, such as a walking type.

[0148] [Steps to replace consumable part 80]

[0149] Next, refer to Figures 9-18 The replacement procedure for consumable part 80 is explained.

[0150] First, the component replacement device 50, the component storage device 60, and the fixture storage device 70 move to the position of the processing device 40, which has the consumable component 80 to be replaced, according to the instruction of the control device 20. Then, the component replacement device 50 connects to the processing device 40, which has the consumable component 80 to be replaced, and the component storage device 60 and the fixture storage device 70 connect to the component replacement device 50. Then, the processing device 40, the component replacement device 50, the component storage device 60, and the fixture storage device 70 adjust their internal pressures and open the gate.

[0151] Moreover, for example, Figure 9As shown, end effectors 81 for sensing are installed at the front ends of the manipulator arms 520a of robot 52a and 520b of robot 52b. The end effectors 81 for sensing are, for example, image sensors, distance sensors, etc. A consumable part 80 is installed in the processing unit 40 after use. Figure 9 In the example, edge ring 423). Consumable parts 80 (before use) are stored in the box 62 of the part storage device 60. Figure 9 In the example, it is the edge ring 423').

[0152] Next, the operating robots 52a and 52b are, for example, as follows: Figure 10 As shown, an end effector 81, such as an image sensor, is used to sense the used edge ring 423 within the processing unit 40. The sensing result is output to the control unit 558 within the part replacement device 50. Based on the sensing result, the control unit 558 determines whether the replacement of the edge ring 423, performed by the operating robots 52a and 52b, can be performed. If it is determined that the replacement of the edge ring 423, performed by the operating robots 52a and 52b, cannot be performed, the control unit 558 notifies the operator of the manufacturing system 10 of this situation. For example, if the edge ring 423 has a large amount of reaction byproducts (so-called deposits) attached to it, or if the edge ring 423 has been deformed, the control unit 558 determines that the replacement of the edge ring 423, performed by the operating robots 52a and 52b, cannot be performed. The control unit 558 is an example of a determination unit.

[0153] If it is determined that the edge ring 423 can be replaced, for example, Figure 11 As shown, end effectors 81 for removing the edge ring 423 are mounted at the front ends of manipulator arms 520a and 520b. Furthermore, a retaining member 82 for holding the edge ring 423 is mounted at the front end of the conveyor arm 530 of the conveyor robot 53.

[0154] Next, for example, Figure 12 As shown, the tips of the operating arms 520a and 520b penetrate into the processing device 40, and the edge ring 423 inside the processing device 40 is removed using the operating arms 520a and 520b. When the edge ring 423 is removed, for example as... Figure 13 As shown, the edge ring 423 is clamped by the end effector 81 at the front end of the manipulator 520a and the end effector 81 at the front end of the manipulator 520b. Then, the edge ring 423 is lifted by raising the manipulators 520a and 520b, and the edge ring 423 is removed from the lower electrode 421.

[0155] Then, for example, Figure 14As shown, a retaining member 82, mounted on the front end of the conveying arm 530, is inserted between the raised edge ring 423 and the lower electrode 421. Then, operating arms 520a and 520b descend, thereby placing the edge ring 423 onto the retaining member 82. Then, for example, as... Figure 15 As shown, the end effectors 81 at the front ends of manipulators 520a and 520b exit from the edge ring 423.

[0156] Next, the conveyor robot 53, for example... Figure 16 As shown, the used edge ring 423 on component 82 is stored in the box 62 of component storage device 60. Then, the conveying robot 53 removes the unused edge ring 423' from the box 62, for example, as shown. Figure 17 As shown, it is fed into the processing device 40. Alternatively, before removing the edge ring 423' from the box 62, the end effectors 81 at the front ends of the operating arms 520a and 520b and the retaining member 82 at the front end of the conveying arm 530 can be cleaned. This prevents deposits or the like from being shed from the edge ring 423 after use from becoming particles and adhering to the edge ring 423 before use via the end effector 81 or the retaining member 82. Cleaning can be performed, for example, by gas purging using the injection of inactive gas.

[0157] Then, the edge ring 423 is clamped by the end effector 81 at the front end of the operating arm 520a and the end effector 81 at the front end of the operating arm 520b. Then, the operating arms 520a and 520b rise, thereby lifting the edge ring 423 from the holding member 82 at the front end of the conveying arm 530. Then, the holding member 82 moves away from the lifted edge ring 423' and the lower electrode 421, and the operating arms 520a and 520b descend to mount the edge ring 423 onto the lower electrode 421.

[0158] Then, for example, Figure 18 As shown, the end effectors 81 at the front ends of manipulators 520a and 520b separate from the edge ring 423. Then, the end effectors 81 and holding member 82 are returned to the housing 72. Then, the gates of the processing device 40, the component changing device 50, the component storage device 60, and the fixture storage device 70 are closed. Then, the connections between the processing device 40 and the component changing device 50, between the component changing device 50 and the component storage device 60, and between the component changing device 50 and the fixture storage device 70 are respectively released.

[0159] Furthermore, when replacing the upper electrode 43e, which is a consumable component 80, firstly, the holding member 82, installed at the front end of the conveying arm 530, is inserted below the upper electrode 43e. Then, the conveying arm 530 rises, and the holding member 82 contacts the lower surface of the upper electrode 43e. Then, the threaded fasteners 43f, etc., are removed by the end effectors 81 installed at the front ends of the operating arms 520a and 520b. Thus, the upper electrode 43e is conveyed out of the processing device 40 by the conveying arm 530 using the holding member 82 and stored in the component storage device 60.

[0160] Then, the unused upper electrode 43e is sent from the component storage device 60 and into the processing device 40, and conveyed to the lower surface of the electrode support 43d. Then, the upper electrode 43e is fixed to the electrode support 43d by the end effector 81 mounted on the front end of the operating arms 520a and 520b and the mounting fixing member 43f. In this way, the upper electrode 43e is replaced.

[0161] [Composition of control device 20]

[0162] Figure 19 This is a block diagram illustrating an example of a control device 20. The control device 20 includes a storage unit 21, a control unit 22, a wireless communication unit 23, and a wired communication unit 24. The wireless communication unit 23 is, for example, a wireless communication loop, which communicates wirelessly with the component replacement device 50, the component storage device 60, and the fixture storage device 70 via an antenna 25. The wired communication unit 24 is, for example, a NIC (Network Interface Card), which communicates with each processing group 30. Furthermore, the control device 20 can also communicate wirelessly with each processing group 30.

[0163] Storage unit 21 is a ROM, HDD, or SSD, etc., and stores data and programs used by control unit 22. For example, data stored in storage unit 21... Figure 20 The management table 210 shown is an example of this.

[0164] Figure 20 This is a diagram illustrating an example of management table 210. In management table 210, a separate table 212 is stored for each processing device 40 identified by its processing device ID 211. The separate table 212 stores the component ID, replacement date and time, RF cumulative time, and next replacement date. The component ID is information identifying each consumable component 80. The replacement date and time is the moment when the consumable component 80 was replaced. The RF cumulative time is information indicating the cumulative processing time performed in the processing device 40 using RF signals. The next replacement date is the date and time of the next replacement of the consumable component 80.

[0165] The control unit 22 is, for example, a processor such as a CPU or DSP, which reads and executes the program in the storage unit 21 to control the entire control device 20.

[0166] [Processing of control device 20]

[0167] Figure 21 and Figure 22 This is a flowchart illustrating an example of the processing of the control device 20. Figure 21 An example of the processing by the control device 20 is shown when a part replacement device 50, a part storage device 60, and a part storage device 70 are selected to move to a processing device 40 having a consumable part 80 that is to be replaced. Figure 22 An example of the control device 20's processing is shown after the component replacement device 50, component storage device 60 and 70 are moved to the position of the processing device 40 that is the replacement object of the consumable component 80. Figure 21 and Figure 22 The illustrated process is implemented by the control unit 22 of the control device 20 executing the program read from the storage unit 21. Furthermore, Figure 22 The process between the control device 20, a processing device 40 and a component replacement device 50 is illustrated.

[0168] exist Figure 21 In the illustrated process, firstly, the control unit 22 determines whether there is a consumable component 80 whose replacement period is due within a preset time period from the current time (S100). For example, the control unit 22 refers to the "Next Replacement Period" column of the management table 210 to determine whether there is a consumable component 80 whose replacement period is due within a preset time period from the current time. If there is no consumable component 80 whose replacement period is due within a preset time period from the current time (S100: No), the control unit 22 executes the process shown in step S100 again.

[0169] On the other hand, if a consumable part 80 has a replacement period within a preset time from the current moment (S100), the part replacement device 50, part storage device 60, and jig storage device 70 that have not been assigned a replacement operation are identified. Then, the control unit 22 instructs the identified part replacement device 50, part storage device 60, and jig storage device 70 to move to the position of the processing device 40 for the consumable part 80 whose replacement period is within the preset time (S101). Then, the control unit 22 executes the process shown in step S100 again.

[0170] exist Figure 22In the illustrated process, firstly, the control unit 22 determines whether the process of using RF power has been performed in the processing device 40 (S200). If the process of using RF power has not been performed (S200: No), the control unit 22 executes the process shown in step S200 again.

[0171] On the other hand, when RF power usage processing is performed (S200: Yes), the control unit 22 updates all "RF cumulative time" in the single table 212 corresponding to the processing device ID 211 of the processing device 40 that performed RF power usage processing in the management table 210. Then, the control unit 22 infers the "next replacement period" for all consumable components 80 in the single table 212 where the "RF cumulative time" has been updated, and updates the "next replacement period" of all consumable components 80 in the single table 212 with the inferred "next replacement period" (S201). Thus, the "next replacement period" corresponding to each consumable component 80 is updated according to the actual processing time of RF power usage.

[0172] Next, the control unit 22 determines, based on the updated "next replacement period", whether the processing of the last batch before the replacement period of the consumable component 80 has ended (S202). If the processing of the last batch before the replacement period of the consumable component 80 in the processing device 40 has not ended (S202: No), the control unit 22 executes the processing shown in step S200 again.

[0173] On the other hand, when the last batch of processing before the replacement period of the consumable component 80 in the processing device 40 is completed (S202: Yes), the control unit 22 instructs the processing device 40 to prepare for the replacement of the consumable component 80 (S203). In the preparation for the replacement of the consumable component 80, processes such as exhausting the processing gas in the chamber 41, cleaning the chamber 41, and adjusting the pressure in the chamber 41 are performed.

[0174] Next, the control unit 22 determines whether a connection notification has been received from the component replacement device 50 (S204). Furthermore, the component replacement device 50... Figure 21 The illustrated process begins, moving the device 40 to the location of the processing unit 40, which has the consumable component 80 to be replaced. If no connection notification is received from the component replacement device 50 (S204: No), the control unit 22 executes the process shown in step S204 again.

[0175] On the other hand, upon receiving a connection notification from the component replacement device 50 (S204: Yes), the control unit 22 instructs the component replacement device 50 to vent the gas in the space 90 of the connection portion between the processing device 40 and the component replacement device 50 (S205). The control unit 558 of the component replacement device 50 controls the valve 553a and the venting device 554a to vent the gas in the space 90 of the connection portion between the processing device 40 and the component replacement device 50.

[0176] Next, the control unit 22 determines whether the pressure P inside the processing device 40 has reached the preset pressure P1 based on the measurement values ​​of the sensors in the processing device 4 (S206). If the pressure P inside the processing device 40 has not reached the pressure P1 (S206: No), the control unit 22 executes the process shown in step S206 again.

[0177] When the pressure P within the processing unit 40 becomes pressure P1 (S206: Yes), the control unit 22 sends a door opening request to the component replacement device 50, requesting that the gate 513a be opened (S207). Then, the control unit 22 determines whether it has received a door opening notification from the component replacement device 50 indicating that the opening of the gate 513a has been completed (S208). If no door opening notification has been received (S208: No), the control unit 22 executes the process shown in step S208 again.

[0178] On the other hand, upon receiving a door opening notification (S208: Yes), the control unit 22 controls the processing device 40 to open the gate 401 (S209). Then, the control unit 22 sends a replacement start instruction indicating the start of replacement of the consumable component 80 to the component replacement device 50 (S210).

[0179] Furthermore, after the replacement start instruction is sent in step S210, the replacement of the consumable component 80 begins using the component replacement device 50. At this time, the control unit 22 can control the processing device 40 to clean the chamber 41 from the time the used consumable component 80 is discharged until the new consumable component 80 is inserted. This allows for the removal of deposits and other contaminants that fell into the chamber 41 when the used consumable component 80 was discharged, before the new consumable component 80 is inserted.

[0180] Next, the control unit 22 determines whether it has received a replacement completion notification from the component replacement device 50 indicating that the replacement of the consumed component 80 is complete (S211). If no replacement completion notification is received from the component replacement device 50 (S211: No), the control unit 22 executes the process shown in step S211 again.

[0181] On the other hand, upon receiving a replacement completion notification from the component replacement device 50 (S211: Yes), the control unit 22 controls the processing device 40 to close the gate 401 (S212). Then, the control unit 22 sends a replacement confirmation notification to the component replacement device 50 (S213). Then, the control unit 22 instructs the component replacement device 50 to stop the venting of gas in the space 90 of the connection between the processing device 40 and the component replacement device 50 (S214). The control unit 558 of the component replacement device 50 controls the valve 553a and the venting device 554a to stop the venting of gas in the space 90 of the connection between the processing device 40 and the component replacement device 50, returning the space 90 to atmospheric pressure.

[0182] Next, the control unit 22 deletes the record containing the "Part ID" of the replaced consumable part 80 from single table 212 within the management table 210. Then, the control unit 22 generates a new record in the management table 210 containing the "Part ID" of the consumable part 80 before it was replaced with the used consumable part 80 (S215). In the newly generated record, the current date and time are recorded in the "Replacement Date and Time" column, and 0 is recorded in the "RF Cumulative Time" column.

[0183] Then, the control unit 22 infers the replacement period of the previously used consumable component 80 and registers the inferred replacement period in the newly generated record's "next RF cumulative time" (S216). Then, the control unit 22 executes the process shown in step S200 again.

[0184] [Processing of component replacement device 50]

[0185] Figure 23 and Figure 24 This is a flowchart illustrating an example of the processing of the component replacement device 50. The component replacement device 50 is, for example, instructed from the control device 20 to move towards a position of a processing device 40 having a consumable component 80 as the replacement object. When movement towards the processing device 40 begins, it starts at… Figure 23 and Figure 24 The processing illustrated. Figure 23 and Figure 24 The illustrated process is implemented by the control unit 558 executing the program read from the storage unit 559.

[0186] First, the control unit 558 controls the valve 552 and the exhaust device 554 to begin venting the gas in the upper container 510, thereby initiating the adjustment of the pressure in the upper container 510 (S300). Then, based on the sensing result of the sensor 551, the control unit 558 determines whether the component replacement device 50 is connected to the processing device 40 (S301). If the component replacement device 50 is not connected to the processing device 40 (S301: No), the control unit 558 executes the process shown in step S301 again.

[0187] On the other hand, if the component replacement device 50 is connected to the processing device 40 (S301: Yes), the control unit 558 determines whether the component replacement device 50 is connected to the component storage device 60 and the fixture storage device 70 (S302). For example, the control unit 558 determines whether it has received a connection notification from the component storage device 60 and the fixture storage device 70 indicating that it is connected to the component replacement device 50, thereby determining whether the component replacement device 50 is connected to the component storage device 60 and the fixture storage device 70. If the component replacement device 50 is not connected to the component storage device 60 and the fixture storage device 70 (S302: No), the control unit 558 again executes the process shown in step S302.

[0188] On the other hand, when the component replacement device 50 is connected to the component storage device 60 and the fixture storage device 70 (S302: Yes), the control unit 558 controls the valve 555 and the gas supply device 556 to supply inactive gas into the upper container 510. Then, the control unit 558 determines whether the pressure P in the upper container 510 has reached the preset pressure P2 (S303). In this embodiment, pressure P2 is a pressure higher than the pressure P1 in the processing device 40 that is adjusted when replacing the consumable component 80. If the pressure P in the upper container 510 has not reached pressure P2 (S303: No), the control unit 558 executes the process shown in step S303 again.

[0189] On the other hand, when the pressure P inside the upper container 510 becomes pressure P2 (S303: Yes), the control unit 558 opens the gate 513b between the component storage device 60 and the gate 513c between the component storage device 70 and the fixture storage device 60 (S304). Then, the control unit 558 controls the operating robots 52a and 52b to insert the tips of the operating arms 520a and 520b into the box 72 of the fixture storage device 70. Then, the control unit 558 installs end effectors 81 for sensing at the tips of the operating arms 520a and 520b (S305). Then, the control unit 558 sends a connection notification indicating that the component replacement device 50 has been connected to the processing device 40 to the control device 20 via the communication unit 557 (S306).

[0190] Next, the control unit 558 determines whether a door opening request has been received from the control device 20 via the communication unit 557 (S307). If no door opening request has been received (S307: No), the control unit 558 executes the process shown in step S307 again. On the other hand, if a door opening request has been received (S307: Yes), the control unit 558 opens the gate 513a between the component replacement device 50 and the processing device 40 (S308).

[0191] Next, the control unit 558 determines whether a replacement start instruction has been received from the control device 20 via the communication unit 557 (S309). If no replacement start instruction has been received (S309: No), the control unit 558 executes the process shown in step S309 again. On the other hand, if a replacement start instruction has been received (S309: Yes), the control unit 558 controls the operating arms 520a and 520b, which are equipped with sensing end effectors 81 at their front ends, to perform sensing within the processing device 40 (S310). In step S309, information indicating the state of the consumable component 80 within the processing device 40 is acquired, and the reference position within the component replacement device 50 is aligned with the reference position within the processing device 40 (teaching).

[0192] Next, based on the sensing results from step S309, the control unit 558 determines whether the replacement of the consumable part 80 instructed from the control device 20 can be performed (S311). If it is determined that the replacement of the consumable part 80 cannot be performed due to a large amount of deposits on the consumable part 80 or deformation of the consumable part 80 (S311: No), the control unit 558 notifies the control device 20 of an error via the communication unit 557 (S312). Thus, the process shown in this flowchart ends. Furthermore, in the case of an error notification, the control device 20 notifies the operator of the manufacturing system 10 of the error. The operator instructs the operator to replace the consumable part 80 manually. In addition, in the case of an error notification from the control device 20, the operator can obtain the sensing results from the part replacement device 50. Then, the operator can also use the sensing results to remotely operate the operating robot 52a, operating robot 52b, and conveying robot 53, thereby performing the replacement operation of the consumable part 80.

[0193] On the other hand, if it is determined that the consumable part 80 can be replaced (S311: Yes), the control unit 558 controls the operating robots 52a and 52b to remove the end effector 81 for sensing from the front ends of the operating arms 520a and 520b. Then, the control unit 558 installs the end effector 81 for installing and removing the consumable part 80 at the front ends of the operating arms 520a and 520b. Figure 24 (S312). Then, the control unit 558 controls the conveying robot 53 to install the retaining member 82 at the front end of the conveying arm 530 (S313).

[0194] Next, the control unit 558 inserts the front ends of the operating arms 520a and 520b into the processing device 40, controls the operating arms 520a and 520b with end effectors 81 installed at their front ends, and discharges the used consumable parts 80 (S313).

[0195] Next, the control unit 558 controls the conveying robot 53 to insert the holding member 82 at the front end of the conveying arm 530 under the consumable part 80 removed by the operating arms 520a and 520b. Then, the control unit 558 controls the operating robots 52a and 52b to hold the removed consumable part 80 with the holding member 82. Then, the control unit 558 controls the conveying robot 53 to send the used consumable part 80 out of the processing device 40 (S315). Then, the control unit 558 controls the conveying robot 53 to store the used consumable part 80 in the box 62 of the part storage device 60.

[0196] Next, the control unit 558 controls the conveying robot 53 to remove the consumable part 80 before use from the box 62 of the part storage device 60 and send it into the processing device 40 (S316). Then, the control unit 558 controls the operating robots 52a and 52b to lift the consumable part 80 before use held by the holding member 82. Then, the control unit 558 controls the conveying robot 53 to move the conveying arm 530 away from the processing device 40. Then, the control unit 558 controls the operating robots 52a and 52b to install the consumable part 80 before use (S317). Then, the control unit 558 controls the operating robots 52a and 52b to move the operating arms 520a and 520b away from the processing device 40.

[0197] Next, control unit 558 closes gates 513a, 513b, and 513c (S318). Then, control unit 558 controls valve 552 and venting device 554 to stop the venting of gas in the upper container 510, and controls valve 555 and gas supply device 556 to stop supplying inactive gas into the upper container 510. Furthermore, control unit 558 controls valves 553a, 553b, and 553c to stop the venting of gas at the connection to the component replacement device 50. Then, control unit 558 sends a replacement completion notification indicating that the replacement of consumable component 80 has been completed (S319) to control device 20, component storage device 60, and fixture storage device 70 via communication unit 557. Thus, the process shown in this flowchart ends.

[0198] [Handling of component storage device 60]

[0199] Figure 25 This is a flowchart illustrating an example of the processing of the component storage device 60. For example, the component storage device 60 is instructed from the control device 20 to move towards a processing device 40 having a consumable component 80 that is to be replaced. Upon initiating movement towards the processing device 40, the process begins... Figure 25 The processing illustrated. Figure 25 The illustrated process is implemented by the control unit 656 executing the program read from the storage unit 657.

[0200] First, the control unit 656 controls the valve 651 and the venting device 652 to begin venting the gas in the upper container 610, thereby initiating the adjustment of the pressure in the upper container 610 (S400). Then, based on the sensing result of the sensor 650, the control unit 656 determines whether the component storage device 60 is connected to the component replacement device 50 (S401). If the component storage device 60 is not connected to the component replacement device 50 (S401: No), the control unit 656 again executes the process shown in step S401.

[0201] On the other hand, when the component storage device 60 is connected to the component replacement device 50 (S401: Yes), the control unit 656 sends a connection notification indicating that the component storage device 60 is connected to the component replacement device 50 (S402). Then, the control unit 656 controls the valve 653 and the gas supply device 654 to supply inactive gas into the upper container 610. Then, the control unit 656 determines whether the pressure P in the upper container 610 has reached the preset pressure P3 (S403). In this embodiment, pressure P3 is a pressure higher than the pressure P2 in the component replacement device 50 that is adjusted when replacing consumable parts 80. If the pressure P in the upper container 610 has not reached pressure P3 (S403: No), the control unit 656 again executes the process shown in step S403.

[0202] On the other hand, when the pressure P inside the upper container 610 becomes pressure P3 (S403: Yes), the control unit 656 opens the gate 613 (S404). Then, the control unit 656 controls the drive unit 64 to raise and lower the box 62 in accordance with the feeding of used consumable parts 80 and the feeding of unused consumable parts 80 by the conveying robot 53 of the parts changing device 50 (S405).

[0203] Next, the control unit 656 determines whether a replacement completion notification has been received from the component replacement device 50 via the communication unit 655 (S406). If no replacement completion notification has been received (S406: No), the control unit 656 executes the process shown in step S405 again. On the other hand, if a replacement completion notification has been received (S406: Yes), the control unit 656 closes the gate 613 (S406). Then, the control unit 656 controls the valve 651 and the venting device 652 to stop the venting of gas in the upper container 610, and controls the valve 653 and the gas supply device 654 to stop the supply of inactive gas to the upper container 610. Thus, the process shown in this flowchart ends.

[0204] [Handling of jig storage device 70]

[0205] The jig storage device 70 can be used for processing Figure 25 To illustrate, therefore refer to Figure 25 The jig storage device 70 is instructed from the control device 20 to move towards the position of the processing device 40, which has a consumable part 80 that is to be replaced. When movement towards the processing device 40 begins, the jig storage device 70... Figure 25 The processing illustrated. Figure 25 The illustrated process is implemented by the control unit 756 executing the program read from the storage unit 757.

[0206] First, the control unit 756 controls the valve 751 and the venting device 752 to begin venting the gas in the upper container 710, thereby initiating the adjustment of the pressure in the upper container 710 (S400). Then, based on the sensing result of the sensor 750, the control unit 756 determines whether the fixture storage device 70 is connected to the parts replacement device 50 (S401). If the fixture storage device 70 is not connected to the parts replacement device 50 (S401: No), the control unit 756 again executes the process shown in step S401.

[0207] On the other hand, if the jig storage device 70 is connected to the component replacement device 50 (S401: Yes), the control unit 756 sends a connection notification indicating that the jig storage device 70 is connected to the component replacement device 50 (S402). Then, the control unit 756 controls the valve 753 and the gas supply device 754 to supply inactive gas into the upper container 710. Then, the control unit 756 determines whether the pressure P in the upper container 710 has reached the preset pressure P3 (S403). If the pressure P in the upper container 710 has not reached pressure P3 (S403: No), the control unit 756 executes the process shown in step S403 again.

[0208] On the other hand, when the pressure P inside the upper container 710 becomes pressure P3 (S403: Yes), the control unit 756 opens the gate 713 (S404). Then, the control unit 756 controls the drive unit 74 in accordance with the entry and exit of the end effector 81 and the holding component 82 performed by the conveying robot 53 of the component changing device 50, so that the box 72 is raised and lowered (S405).

[0209] Next, the control unit 756 determines whether a replacement completion notification has been received from the component replacement device 50 via the communication unit 755 (S406). If no replacement completion notification has been received (S406: No), the control unit 756 executes the process shown in step S405 again. On the other hand, if a replacement completion notification has been received (S406: Yes), the control unit 756 closes the gate 713 (S406). Then, the control unit 756 controls the valve 751 and the venting device 752 to stop the venting of gas in the upper container 710, and controls the valve 753 and the gas supply device 754 to stop the supply of inactive gas to the upper container 710. Thus, the process shown in this flowchart ends.

[0210] The above describes one embodiment. As described above, this embodiment is a manufacturing system 10 for replacing consumable components 80, which includes a component replacement device 50 and a component storage device 60. The component storage device 60 stores the consumable component 80 before use. The component replacement device 50 is connected to the processing device 40 and the component storage device 60, and exchanges the used consumable component 80 installed in the processing device 40 with the unused consumable component 80 stored in the component storage device 60. Furthermore, the component replacement device 50 can be moved to the position of the processing device 40 where the consumable component 80 to be replaced is installed, and connected to the processing device 40. Furthermore, the component storage device 60 can be moved to the position of the component replacement device 50 connected to the processing device 40 where the consumable component 80 to be replaced is installed, and connected to the component replacement device 50. As a result, the installation area of ​​the semiconductor device manufacturing system 10 can be reduced.

[0211] Furthermore, the component replacement device 50 in the above embodiment includes an operating robot 52 and a conveying robot 53. The conveying robot 53 transports consumable components 80 between the processing unit 40 and the component storage unit 60 via the component replacement device 50. The operating robot 52 unloads the used consumable components 80 from the processing unit 40 and places them on the conveying robot 53, while the unused consumable components 80 placed on the conveying robot 53 are installed in the processing unit 40. Thus, the used consumable components 80 can be replaced with the unused consumable components 80.

[0212] Furthermore, the manufacturing system 10 in the above embodiment also includes a fixture storage device 70. The fixture storage device 70 stores an end effector 81 that can be mounted on the front end of the operating robot 52 and can travel to a position connected to a component replacement device 50 that is connected to a processing device 40 on which a consumable part 80 is to be replaced. The operating robot 52 removes and installs the end effector 81 suitable for replacing the consumable part 80, and uses the installed end effector 81 to replace the consumable part 80. By replacing the end effector 81 mounted on the front end of the operating robot 52, different types of consumable parts 80 can be replaced using a single operating robot 52.

[0213] Furthermore, in the above embodiment, the end effector 81 includes a sensor. Before replacing the consumable part 80, the operating robot 52 uses the sensor mounted at its front end to sense the state within the processing unit 40. The part replacement device 50 has a control unit 558 that determines whether the consumable part 80 can be replaced based on the sensing results of the operating robot 52. If the replacement of the consumable part 80 can be performed, the operating robot 52 performs the replacement; if the replacement cannot be performed, the operator is notified. Thus, the replacement of the consumable part 80 can be performed.

[0214] Furthermore, in the above embodiment, the jig storage device 70 stores a retaining member 82 that can be installed at the front end of the conveying robot 53. The conveying robot 53 removes and installs the retaining member 82, which is used to replace the consumable part 80 to be replaced, from the jig storage device 70, and uses the installed retaining member 82 to transport the consumable part 80 to be replaced. By replacing the retaining member 82 installed at the front end of the conveying robot 53, different types of consumable parts 80 can be replaced using a single conveying robot 53.

[0215] Furthermore, in the above embodiment, the component storage device 60 stores multiple types of consumable components 80 before use, with at least one of each type stored. This allows for rapid replacement of the consumable components 80.

[0216] Furthermore, the component replacement device 50 in the above embodiment includes a valve 555 for controlling the pressure within the component replacement device 50. When replacing a used consumable component 80 installed in the processing device 40, the valve 555 controls the pressure within the component replacement device 50 so that the pressure within the component replacement device 50 becomes higher than the pressure within the processing device 40. This prevents particles from the processing device 40 from entering the component replacement device 50.

[0217] Furthermore, in the above-described embodiments, the component replacement device 50 includes a moving mechanism 56, a sensor 551, and a control unit 558, while the component storage device 60 includes a moving mechanism 66, a sensor 650, and a control unit 656. The moving mechanism 56 has a power source that enables the component replacement device 50 to move. The sensor 551 senses the surroundings of the component replacement device 50. The control unit 558 uses the sensing results from the sensor 551 to control the moving mechanism 56, thereby moving the component replacement device 50 to a position where the processing device 40, on which the consumable component 80 to be replaced, is mounted. The moving mechanism 66 has a power source that enables the component storage device 60 to move. The sensor 650 senses the surroundings of the component storage device 60. The control unit 656 uses the sensing results from the sensor 650 to control the moving mechanism 66, thereby moving the component storage device 60 to a position connected to the component replacement device 50, on which the processing device 40, on which the consumable component 80 to be replaced, is mounted. Thus, the component replacement device 50 and the component storage device 60 can move independently.

[0218] Furthermore, the above-described embodiment is a component replacement device 50 for replacing consumable components 80, which includes an opening 512a, an opening 512b, a transport robot 53, and a moving mechanism 56. The opening 512a is connected to the processing device 40 via a gate 513a. The opening 512b is connected to a component storage device 60 that stores the unused consumable components 80 via a gate 513b. The operating robot 52 replaces the used consumable components 80 installed in the processing device 40 with the unused consumable components 80 stored in the component storage device 60. The moving mechanism 56 moves the component replacement device 50 to the position where the processing device 40, containing the consumable component 80 to be replaced, is installed. Moreover, the component replacement device 50 and the component storage device 60 can move independently of each other. This reduces the installation area of ​​the semiconductor device manufacturing system 10.

[0219] [in addition]

[0220] Furthermore, the technology disclosed in this invention is not limited to the above-described embodiments, and various modifications can be made within the scope of its spirit.

[0221] For example, in the above embodiment, multiple types of consumable parts 80 are stored in the box 62 of the part storage device 60, but the disclosed technology is not limited to this. Alternatively, multiple consumable parts 80 of the same type may be stored in the box 62. Furthermore, the part storage device 60 may be prepared according to the types of consumable parts 80 stored in the box 62. Thus, by storing consumable parts 80 with approximately the same replacement cycle in the box 62, the gate 613 of the part storage device 60 can be prevented from opening futilely. This also prevents particles from adhering to the unused consumable parts 80 inside the box 62.

[0222] Furthermore, in the above-described embodiment, the operating robot 52 and the conveying robot 53 of the component replacement device 50 contact the consumable component 80 before use and the consumable component 80 after use, but the disclosed technology is not limited to this. Alternatively, the operating robot 52 and the conveying robot 53 that contact the consumable component 80 before use, and the operating robot 52 and the conveying robot 53 that contact the consumable component 80 after use, may be separately provided within the component replacement device 50. This prevents deposits or the like from being detached from the consumable component 80 from becoming particles and adhering to the consumable component 80 before use via the operating robot 52 or the conveying robot 53.

[0223] Furthermore, in the above embodiment, the consumable component 80 before use and the consumable component 80 after use are stored in the box 62 of the component storage device 60; however, the disclosed technology is not limited to this. Alternatively, the box 62 may be divided into a space for storing the consumable component 80 before use and a space for storing the consumable component 80 after use. This prevents deposits detached from the consumable component 80 from adhering as particles to the consumable component 80 before use.

[0224] Furthermore, in the above embodiment, the component replacement device 50, the component storage device 60, and the fixture storage device 70 begin venting within the device after receiving an instruction from the control device 20; however, the disclosed technology is not limited to this. For example, the component replacement device 50, the component storage device 60, and the fixture storage device 70 may perform venting before receiving an instruction from the control device 20, causing the pressure within the device to reach a preset pressure P. This allows for a more rapid initiation of replacement of the consumable component 80.

[0225] Furthermore, in the component replacement device 50, component storage device 60, and fixture storage device 70 of the above embodiments, the gas discharged by the exhaust device is discharged to the outside of each device; however, the disclosed technology is not limited to this. For example, each device may be connected to a gas treatment device that processes the exhaust gas disposed outside each device via a flexible hose, and the gas discharged from each device may be transported to the gas treatment device. This facilitates the recycling of the gas discharged from each device.

[0226] Furthermore, in the component replacement device 50, component storage device 60, and fixture storage device 70 of the above embodiments, the gas inside each device is vented through an exhaust device within each device; however, the disclosed technology is not limited to this. For example, each device may be connected to an exhaust device located outside the device via a flexible hose, and the gas inside each device may be vented through this exhaust device. Therefore, the component replacement device 50, component storage device 60, and fixture storage device 70 can be miniaturized.

[0227] Furthermore, in the above embodiment, the same component replacement device 50 is used to remove the used consumable component 80 from the processing device 40 and to insert the unused consumable component 80 into the processing device 40. However, the disclosed technology is not limited to this. For example, it is also possible to prepare a component replacement device 50 that removes the used consumable component 80 from the processing device 40 and a component replacement device 50 that inserts the unused consumable component 80 into the processing device 40. This prevents deposits detached from the used consumable component 80 from becoming particles and adhering to the unused consumable component 80.

[0228] Alternatively, in this case, the component replacement device 50, which delivers the consumable component 80 before use to the processing device 40, can also be connected to the vacuum transport chamber 31 and the atmospheric transport chamber 33. The component replacement device 50 connected to the vacuum transport chamber 31 delivers the consumable component 80 before use to the robotic arm 310 within the vacuum transport chamber 31. The robotic arm 310 then delivers the received consumable component 80 before use to the processing device 40 where the consumable component 80 needs replacement. Furthermore, the component replacement device 50 connected to the atmospheric transport chamber 33 delivers the consumable component 80 before use to the robotic arm 330 within the atmospheric transport chamber 33. The robotic arm 330 then delivers the consumable component 80 before use to the load locking chamber 32. The consumable component 80 delivered to the load locking chamber 32 is then delivered by the robotic arm 310 within the vacuum transport chamber 31 to the processing device 40 where the consumable component 80 needs replacement. When the component replacement device 50 is connected to the atmospheric delivery chamber 33, it is not necessary to install exhaust devices in the component replacement device 50, the component storage device 60 and the fixture storage device 70, so that each device can be miniaturized.

[0229] Alternatively, in the embodiments described above, the component replacement device 50, when connected to the processing device 40, may charge the battery within the moving mechanism 56 via a power supply from the processing device 40. Furthermore, the component storage device 60 and the fixture storage device 70 may charge the batteries within the moving mechanisms 66 and 76 via the component replacement device 50 connected to the processing device 40.

[0230] Furthermore, the embodiments disclosed herein are illustrative in all respects and should not be considered restrictive. In fact, the above embodiments can be implemented in various ways. Moreover, the above embodiments can be omitted, substituted, and modified in various ways without departing from the scope and spirit of the appended claims.

Claims

1. A component replacement system for replacing consumable parts, characterized in that: The consumable component is installed in any of the multiple processing units. The component replacement system includes: A component storage device for storing consumable parts before use; and A component replacement device, which can be connected to the processing device and the component storage device, is capable of replacing used consumable components installed in the processing device with unused consumable components stored in the component storage device. The component storage device and the component replacement device can move independently of each other. The component replacement device can be moved to a position where a processing device is installed containing the consumable component to be replaced, and connect to that processing device. The component storage device can be moved to the position of the component replacement device connected to the processing device on which the consumable component to be replaced is installed, and connected to the component replacement device.

2. The component replacement system as described in claim 1, characterized in that: The component replacement device includes: A conveyor arm that conveys consumable parts between the processing unit and the part receiving unit via the part changing device; and An operating arm removes used consumable parts from the processing device and places them on the conveying arm, and installs the unused consumable parts placed on the conveying arm into the processing device.

3. The component replacement system as described in claim 2, characterized in that: It also includes a jig storage device that can store an end effector that can be installed at the front end of the operating arm and can travel to a position connected to the component replacement device, which is equipped with a processing device for replacing consumable parts, and connect to the component replacement device. The operating arm removes and installs the end effector, which is used to replace the consumable part to be replaced, from the fixture storage device, and uses the installed end effector to replace the consumable part to be replaced.

4. The component replacement system as described in claim 3, characterized in that: The end effector includes sensors. Before replacing consumable parts, the operating arm uses sensors mounted at its front end to sense the state within the processing device. The component replacement device has a judgment unit that determines whether a consumable component can be replaced based on the sensing results of the operating arm. If the consumable component can be replaced, the operating arm performs the replacement. If the consumable component cannot be replaced, the operator is notified of the situation.

5. The component replacement system as described in claim 3 or 4, characterized in that: The fixture storage device houses a retaining component that can be installed at the front end of the conveying arm. The conveying arm removes a retaining component suitable for replacing the consumable part to be replaced from the fixture storage device, and uses the removed retaining component to convey the consumable part to be replaced.

6. The component replacement system as described in any one of claims 1 to 4, characterized in that: The component storage device can store multiple types of consumable components before use, and can store at least one of each type.

7. The component replacement system as described in any one of claims 1 to 4, characterized in that: The component storage device stores multiple single-type consumable components before use.

8. The component replacement system as described in any one of claims 1 to 4, characterized in that: The component replacement device has a pressure regulating mechanism for controlling the pressure within the component replacement device. The pressure regulating mechanism controls the pressure in the component replacement device when replacing used consumable parts installed in the processing device, so that the pressure in the component replacement device becomes higher than the pressure in the processing device.

9. The component replacement system as described in any one of claims 1 to 4, characterized in that: The component replacement device includes: The first moving mechanism has a power source that enables the component replacement device to move; A first sensor that senses the area around the component replacement device; and The first control unit uses the sensing results of the first sensor to control the first moving mechanism, thereby moving the component replacement device to a position where a processing device is installed with a consumable component to be replaced. The component storage device includes: The second moving mechanism has a power source that enables the component storage device to move; A second sensor that senses the area around the component storage device; and The second control unit uses the sensing results of the second sensor to control the second moving mechanism to move the component storage device to the position of the component replacement device connected to the processing device on which the consumable component to be replaced is installed.

10. A component replacement device for replacing consumable parts, characterized in that: The consumable component is installed in any of the multiple processing units. The component replacement device includes: The first component conveying port is connected to the processing device via the first gate; The second component conveying port is connected to the component storage device for storing consumable components before use via the second gate; A conveyor arm that replaces used consumable parts installed in the processing device with unused consumable parts stored in the component storage device; and A moving mechanism that moves the component replacement device to a position where a processing device is installed with the consumable component to be replaced. The component replacement device and the component storage device can move independently of each other.

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