Superheated water vapor production apparatus

Abstract

The present invention provides a superheated steam generating apparatus that is small in size and generates superheated steam with controlled temperature and supply. The superheated steam generating apparatus (1) includes: a burner (2) having a combustion section (32) on its outer periphery and an injection section (31) on its central part, wherein the combustion section generates superheated steam (42) by burning hydrogen-containing gas using oxygen-containing gas, and the injection section injects water or steam, and the injection section (31) is surrounded by the combustion section in a ring shape; and a cooling medium flow controller (5a) that controls the flow rate of water or steam, thereby controlling the temperature and generation of superheated steam (42) by controlling the amount of water or steam supplied to the superheated steam (42).

Description

Technical Field

[0001] This invention relates to an apparatus for generating superheated steam. Background Technology

[0002] Patent document 1 describes the use of combustion gas generated by burning hydrogen with oxygen as superheated steam.

[0003] For example, superheated steam at 600°C to approximately 2000°C is used in heat treatment processes for metallic and inorganic materials, such as sintering, degreasing, cleaning, and drying. Furthermore, superheated steam below 600°C is used for waste volume reduction, heating equipment in mold forming, and for cooking, deodorizing, and sterilizing food.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent No. 5716950.

[0007] The temperature of superheated steam generated by burning hydrogen with oxygen is very high. For practical application, the temperature needs to be reduced and properly controlled. In Patent Document 1, as a method to reduce the temperature of superheated steam reaching 3000°C, an additional regulating chamber is set up to spray water and the superheated steam is made to absorb heat by flowing through a honeycomb structure or a serpentine flow path. However, there are problems: the temperature and flow rate of the superheated steam are not easy to control, and the equipment becomes large-scale. Summary of the Invention

[0008] Therefore, the problem of the present invention is to provide a small-scale superheated steam generating apparatus that allows for easy control of the temperature and flow rate of superheated steam.

[0009] To solve the above problems, one aspect of the superheated steam generating apparatus of the present invention is characterized by comprising:

[0010] A burner having a combustion section on its outer periphery and an injection section in its central part, the combustion section generating superheated steam by burning hydrogen-containing gas with oxygen-containing gas, and the injection section injecting water or steam, the injection section being surrounded in a ring by the combustion section; and

[0011] A cooling medium flow controller that controls the flow rate of the water or steam.

[0012] The temperature and amount of superheated steam generated are controlled by controlling the amount of water or steam supplied to the superheated steam.

[0013] According to the present invention, the temperature and generation amount of superheated steam generated by burning hydrogen-containing gas with oxygen-containing gas can be controlled by the calorific value of the hydrogen-containing gas and the oxygen-containing gas, as well as the amount of heat supplied by water or steam relative to the combustion gas (exhaust gas). Attached Figure Description

[0014] Figure 1 This is a diagram illustrating a superheated steam generating apparatus according to one embodiment.

[0015] Figure 2 yes Figure 1 The water supply mechanism in the burner of the superheated steam generating apparatus shown is a schematic cross-sectional view of a two-fluid spray configuration.

[0016] Figure 3 yes Figure 1 The water or steam supply mechanism in the burner of the superheated steam generating apparatus shown is a schematic cross-sectional view of a single-fluid spray mode.

[0017] Figure 4 This diagram illustrates the relationship between the spray angle of the mist water and the spray angle of the superheated steam.

[0018] Figure 5 This is a chart illustrating the relationship between the hydrogen-to-oxygen combustion ratio and the hydrogen and oxygen concentrations within the superheated steam demand unit.

[0019] (Symbol Explanation)

[0020] 1. Superheated Steam Generation Equipment

[0021] 2. Burner

[0022] 4. Supply Management

[0023] 4a Cooling medium supply pipe

[0024] 4b Hydrogen gas supply pipe

[0025] 4c Oxygen-containing gas supply tube

[0026] 5. Flow controller

[0027] 5a Cooling medium flow controller

[0028] 5b Hydrogen-containing gas flow controller

[0029] 5c Oxygen-containing gas flow controller

[0030] 6. Control Department

[0031] 7 Temperature sensor

[0032] 10. Superheated Steam Demand Unit

[0033] 21 First tube

[0034] 21a airflow tube

[0035] 22 Second tube

[0036] 23 Third pipe

[0037] 25 Cooling medium supply port

[0038] 25a Cooling medium flow path

[0039] 25b Injection Hole

[0040] 26. Airflow supply port

[0041] 26a Airflow path

[0042] 27 First Supply Port

[0043] 28 Second Supply Port

[0044] 30a Dual-Fluid Spray Nozzle

[0045] 30b Single-fluid spray nozzle

[0046] 31. Jet section

[0047] 32 Combustion section

[0048] 37 First flow path

[0049] 38 Second Flow Path

[0050] 41. Water mist

[0051] 42 Superheated Steam

[0052] x Spray angle of the mist water

[0053] y. Injection angle of superheated steam Detailed Implementation

[0054] Hereinafter, embodiments of the superheated steam generating apparatus 1 of the present invention will be described with reference to the accompanying drawings. Furthermore, in this disclosure, superheated steam 42 refers to steam heated to a temperature of 100°C or higher under one atmosphere.

[0055] [Implementation Method]

[0056] Reference Figures 1 to 4 The superheated steam generating apparatus 1 according to one embodiment will be described. Figure 1 This is a diagram illustrating, schematically, one embodiment of a superheated steam generating apparatus 1. Figure 2 yes Figure 1 The water supply mechanism in the burner 2 of the superheated steam generating apparatus 1 shown is a schematic cross-sectional view of a two-fluid spray mode. Figure 3 yes Figure 1 The water or steam supply mechanism in the burner 2 of the superheated steam generating apparatus 1 shown is a schematic cross-sectional view of a single-fluid spray mode. Figure 4 This diagram illustrates the relationship between the spray angle of the mist water 41 and the spray angle of the superheated steam 42.

[0057] like Figure 1 As shown, the superheated steam generating apparatus 1 includes a burner 2, a supply pipe 4, a flow controller 5, a control unit 6, and a temperature sensor 7. The superheated steam 42 generated by the superheated steam generating apparatus 1 is supplied to the superheated steam demand device 10 that requires the superheated steam 42.

[0058] The control unit 6 is electrically connected to the temperature sensor 7 and the flow controller 5. The control unit 6 is, for example, configured as a computer including a CPU (Central Processing Unit), RAM (Random Access Memory), and ROM (Read-Only Memory). The superheated steam demand device 10 is a device that requires superheated steam 42. The front end of the burner 2 is disposed in the superheated steam demand device 10.

[0059] like Figure 1 As shown, a supply pipe 4 is connected to the base side of the burner 2. The supply pipe 4 has a cooling medium supply pipe 4a, a hydrogen-containing gas supply pipe 4b, and an oxygen-containing gas supply pipe 4c. The cooling medium supply pipe 4a is connected to the cooling medium supply port 25 of the burner 2 to supply water or steam as the cooling medium to the burner 2. The hydrogen-containing gas supply pipe 4b is connected, for example, to the first supply port 27 of the burner 2 to supply hydrogen-containing gas to the burner 2. The oxygen-containing gas supply pipe 4c is connected, for example, to the second supply port 28 of the burner 2 to supply oxygen-containing gas to the burner 2. Here, the "steam" used as the cooling medium is preferably "low-temperature steam" of 100°C to 300°C generated in a boiler or the like. Because the temperature of the steam is low, the effect of reducing the temperature of the superheated steam 42 is significant. In addition, the "hydrogen-containing gas" mentioned here includes not only hydrogen and pure hydrogen, but also hydrocarbon gases such as methane, propane, butane, and city gas. In addition, the "oxygen-containing gas" includes not only oxygen and pure oxygen, but also air and oxygen-enriched air.

[0060] The flow controller 5 is, for example, a mass flow controller. The flow controller 5 includes a cooling medium flow controller 5a, a hydrogen-containing gas flow controller 5b, and an oxygen-containing gas flow controller 5c. The cooling medium flow controller 5a is located midway through the cooling medium supply pipe 4a and controls the flow rate of water or steam. The hydrogen-containing gas flow controller 5b is located midway through the hydrogen-containing gas supply pipe 4b and controls the flow rate of hydrogen-containing gas. The oxygen-containing gas flow controller 5c is located midway through the oxygen-containing gas supply pipe 4c and controls the flow rate of oxygen-containing gas. By controlling the respective flow rates of the hydrogen-containing gas and the oxygen-containing gas using the hydrogen-containing gas flow controller 5b and the oxygen-containing gas flow controller 5c, the amount of combustion of the hydrogen-containing gas using the oxygen-containing gas is controlled.

[0061] like Figure 2 As shown, the burner 2 has multiple pipes 21a, 22, and 23 arranged concentrically around and around the first pipe 21. The first pipe 21 has a cooling medium supply port 25 and an airflow supply port 26, and is located in the center of the burner 2. An airflow pipe 21a is arranged outside the first pipe 21, and the airflow pipe 21a has an airflow supply port 26. A second pipe 22 is arranged outside the airflow pipe 21a, and the second pipe 22 has a first supply port 27. A first flow path 37 is formed in the gap between the airflow pipe 21a and the second pipe 22. For example, hydrogen-containing gas flows in the first flow path 37. A third pipe 23 is arranged outside the second pipe 22, and the third pipe 23 has a second supply port 28. A second flow path 38 is formed in the gap between the second pipe 22 and the third pipe 23. For example, oxygen-containing gas flows in the second flow path 38. Alternatively, it may be configured such that oxygen-containing gas flows in the first flow path 37, while hydrogen-containing gas flows in the second flow path 38.

[0062] A cooling pipe (not shown) is disposed on the outside of the third pipe 23. The cooling pipe forms a cooling flow path (not shown) for the flow of coolant (e.g., cooling water). In addition, in order to prevent thermal deformation, the first pipe 21, the airflow pipe 21a, the second pipe 22, the third pipe 23 and the cooling pipe constituting the burner 2 are made of heat-resistant metal or the like.

[0063] A spray section 31 and a combustion section 32 are provided at the front end of the burner 2. The spray section 31 is located at the center of the burner 2, and the combustion section 32 is located at the outer periphery of the burner 2. When viewed axially from the burner 2, the spray section 31 is surrounded by the combustion section 32 in a circular shape. The spray section 31 is located at the front end of the first pipe 21 and has at least one tiny spray hole 25b. The spray section 31 sprays liquid water flowing in the first pipe 21 through the spray hole 25b, thereby generating a mist of water 41. When viewed from the side, the mist of water 41 forms a fan shape.

[0064] For example, such as Figure 2As shown, the burner 2 may have a dual-fluid spray nozzle 30a, which uses liquid water as a cooling medium to control the temperature of the superheated steam 42, and sprays the liquid water together with hydrogen-containing gas, oxygen-containing gas, or steam from the injection hole 25b. At this time, as... Figure 2 As shown, the first pipe 21 and the airflow pipe 21a can be configured as a so-called dual-pipe structure with a cooling medium flow path 25a and an airflow flow path 26a. The cooling medium flow path 25a is connected to the cooling medium supply port 25 to supply liquid water, and the airflow flow path 26a is connected to the airflow supply port 26 to supply hydrogen-containing gas, oxygen-containing gas, or steam. As a result, due to the high-speed flow of hydrogen-containing gas, oxygen-containing gas, or steam, the liquid water is sheared, thereby reducing the particle size of the mist water 41 (i.e., it can be micronized) and making the particles of the mist water 41 uniformly dispersed. Therefore, it is easier to homogenize and control the temperature of the superheated steam 42.

[0065] In addition, for example, such as Figure 3 As shown, the burner 2 may have a single-fluid spray nozzle 30b, which uses water or steam as a cooling medium to cool the superheated steam 42, and sprays the water or steam from the injection hole 25b by applying pressure to the water or steam. At this time, the liquid water or steam is pressurized by a pressurizing device (e.g., a pump) not shown. Therefore, since the structure of the injection section 31 is simplified, it is possible to generate mist water 41 at low cost. Furthermore, in Figure 3 In the case of the single-fluid spray nozzle 30b shown, the first flow path 37 is formed in the gap between the first tube 21 and the second tube 22.

[0066] The combustion section 32 is located at the front end of the first flow path 37 and the second flow path 38, and is configured as a so-called dual-tube structure, injecting hydrogen-containing gas and oxygen-containing gas from the front ends of the first flow path 37 and the second flow path 38. Figure 4 As shown, the combustion section 32 uses oxygen-containing gas to burn hydrogen-containing gas, thereby generating a combustion flame, and superheated steam 42 is generated as a result of the combustion. The adiabatic theoretical flame temperature of the combustion flame is approximately 3000°C, and the temperature of the superheated steam 42 is also at a similarly high temperature. Therefore, the combustion section 32 generates high-temperature superheated steam 42. Furthermore, the superheated steam 42 generated by the combustion section 32 forms a fan shape when viewed from the side.

[0067] When the mist water 41 sprayed from the spray section 31 is applied to the superheated steam 42 generated by the combustion section 32, the mist water 41, in the process of changing from a liquid state to a gaseous state of water vapor, absorbs heat from the superheated steam 42, thus causing the temperature of the superheated steam 42 to decrease. The water vapor formed by the change of the mist water 41 into a gaseous state thus mixes with the superheated steam 42. If a large amount of mist water 41 is applied to the superheated steam 42, the temperature decrease of the superheated steam 42 is promoted, and the amount of superheated steam 42 generated can be increased. Conversely, if a small amount of mist water 41 is applied to the superheated steam 42, the temperature decrease of the superheated steam 42 and the amount of superheated steam generated can be suppressed.

[0068] Based on the above structure, the temperature and generation rate of the superheated steam 42 can be controlled according to the amount of water or steam supplied to the superheated steam 42, thus enabling the production of superheated steam 42 with the desired temperature and supply rate. Furthermore, in terms of appearance, it is essentially unchanged from a conventional burner, making it compact and very easy to use.

[0069] Furthermore, if the combustion rate in the combustion section 32 is increased, the temperature drop of the superheated steam 42 is suppressed, and the amount of superheated steam 42 generated increases. Conversely, if the combustion rate in the combustion section 32 is decreased, the temperature drop of the superheated steam 42 is promoted, and the amount of superheated steam 42 generated decreases. Therefore, by controlling the combustion rate of hydrogen-containing gas using oxygen-containing gas in the combustion section 32, the temperature and generation amount of superheated steam 42 can also be controlled.

[0070] like Figure 2 and Figure 3 As shown, the front end of the spray section 31 is configured to be located upstream of the front end of the combustion section 32 in the water spray direction. Therefore, since the front end of the spray section 31 is located behind the front end of the combustion section 32, which has a higher temperature, the spray section 31 is less likely to be exposed to high temperatures, thereby improving the durability of the spray section 31.

[0071] like Figure 4 As shown, the spray angle x of the mist water 41 is configured to be smaller than the spray angle y of the superheated steam 42. Therefore, since the mist water 41 is dispersed within the range of the superheated steam 42, the mist water 41 contributes to the temperature control of the superheated steam 42 without waste, thereby enabling the temperature of the superheated steam 42 to be homogenized.

[0072] like Figure 1As shown, a temperature sensor 7 is provided downstream of the injection section 31 in the injection direction. The temperature sensor 7 measures the temperature of the superheated steam 42 after the application of mist water 41 relative to the superheated steam 42 ejected from the combustion section 32. The control section 6 controls the flow rate of water or steam in the cooling medium flow controller 5a based on the measured temperature of the superheated steam 42 measured by the temperature sensor 7, so that the superheated steam 42 reaches the desired temperature. If the supply of mist water 41 increases, the temperature decrease of the superheated steam 42 is promoted, and the amount of superheated steam 42 generated increases. Conversely, if the supply of mist water 41 decreases, the temperature decrease of the superheated steam 42 and the amount of superheated steam generated are suppressed. Furthermore, if the combustion rate is increased in the combustion section 32, the temperature decrease of the superheated steam 42 is suppressed, and the amount of superheated steam 42 generated increases. Conversely, if the combustion rate is decreased in the combustion section 32, the temperature decrease of the superheated steam 42 is promoted, and the amount of superheated steam generated decreases. In this way, the temperature and supply can be controlled, thereby enabling the production of superheated steam 42 with the desired temperature and supply.

[0073] Reference Figure 5 The relationship between the hydrogen to oxygen combustion ratio and the hydrogen and oxygen concentrations within the superheated steam demand unit 10 is explained. The superheated steam demand unit 10 is, for example, a furnace. Figure 5 In the graph, the horizontal axis represents the combustion ratio of hydrogen to oxygen, the left vertical axis represents the hydrogen concentration (%) in the furnace, and the right vertical axis represents the oxygen concentration (%) in the furnace. The combustion ratio is the proportion of oxygen required for complete combustion of hydrogen, as defined above. When the combustion ratio is 1.0 (hydrogen:oxygen molar ratio of 2:1), it indicates complete combustion of hydrogen and oxygen. When the combustion ratio is less than 1.0 (indicated by the ● symbol), as the combustion ratio decreases, the hydrogen concentration in the furnace increases, indicating that the furnace becomes hydrogen-rich (reducing atmosphere). When the combustion ratio is greater than 1.0 (indicated by the ■ symbol), as the combustion ratio increases, the oxygen concentration in the furnace increases, indicating that the furnace becomes oxygen-rich (oxidizing atmosphere).

[0074] In the superheated steam generating apparatus 1, the supply of hydrogen-containing gas and / or oxygen-containing gas is controlled by controlling the hydrogen-containing gas flow controller 5b and / or the oxygen-containing gas flow controller 5c, thereby providing the superheated steam demand apparatus 10 with the hydrogen or oxygen remaining for the generation of superheated steam 42.

[0075] For example, if the combustion ratio is made less than 1.0 (complete combustion) (e.g., increasing the supply of hydrogen gas without changing the supply of oxygen-containing gas), the hydrogen in combustion becomes surplus and the amount of hydrogen supplied increases. The surplus hydrogen can be used for atmosphere control of the superheated steam demand unit 10. If the amount of surplus hydrogen is large, the atmosphere of the superheated steam demand unit 10 is reduced to a reducing atmosphere. Alternatively, to make the combustion ratio less than 1.0, in addition to increasing the supply of hydrogen gas, the supply of oxygen-containing gas can also be reduced.

[0076] Furthermore, if the combustion ratio is made greater than 1.0 (complete combustion) (for example, by increasing the supply of oxygen-containing gas without changing the supply of hydrogen-containing gas), the oxygen in the combustion becomes surplus, and the amount of oxygen supplied increases. This surplus oxygen can be used for atmosphere control in the superheated steam demand unit 10. If the amount of surplus oxygen is large, the atmosphere of the superheated steam demand unit 10 is oxidized to an oxidizing atmosphere. Additionally, to make the combustion ratio greater than 1.0, in addition to increasing the supply of oxygen-containing gas, the supply of hydrogen-containing gas can also be reduced.

[0077] Therefore, the amount of hydrogen or oxygen supplied as a surplus can be controlled by controlling the supply of hydrogen-containing gas and / or oxygen-containing gas, thereby controlling the atmosphere of the superheated steam demand unit 10 (e.g., a furnace). If the amount of surplus hydrogen is large, the atmosphere of the superheated steam demand unit 10 is reduced to a reducing atmosphere; if the amount of surplus oxygen is large, the atmosphere of the superheated steam demand unit 10 is oxidized to an oxidizing atmosphere.

[0078] Although specific embodiments and numerical values ​​of the present invention have been described, the present invention is not limited to the above embodiments, and can be implemented with various modifications within the scope of the present invention.

[0079] The present invention and its embodiments are summarized below.

[0080] The superheated steam generating apparatus 1 of this invention is characterized by comprising:

[0081] Burner 2, wherein a combustion section 32 is provided on the outer periphery and an injection section 31 is provided in the center, the combustion section 32 generates superheated steam 42 by burning hydrogen-containing gas with oxygen-containing gas, and the injection section 31 injects water or steam, the injection section 31 being surrounded in a ring by the combustion section 32; and

[0082] Cooling medium flow controller 5a, the cooling medium flow controller 5a monitors the flow rate of the water or the steam.

[0083] The temperature and generation of the superheated steam 42 are controlled by controlling the amount of water or steam supplied to the superheated steam 42.

[0084] Based on the above structure, the temperature and generation rate of the superheated steam 42 can be controlled according to the amount of water or steam supplied to the superheated steam 42. Therefore, it is possible to produce superheated steam 42 with controlled temperature and supply rate. Furthermore, in terms of appearance, it is basically no different from a conventional burner, thus the burner is small and very easy to use.

[0085] Furthermore, in one embodiment of the superheated steam generating apparatus 1,

[0086] By controlling the amount of combustion of the hydrogen-containing gas using the oxygen-containing gas in the combustion section 32, the temperature and generation amount of the superheated steam 42 can be controlled.

[0087] According to the above embodiment, the temperature and amount of superheated steam 42 generated can be controlled based on the amount of combustion in the combustion section 32.

[0088] Furthermore, in one embodiment of the superheated steam generating apparatus 1,

[0089] The burner 2 has a dual-fluid spray nozzle 30a, which sprays the water together with the hydrogen-containing gas or the oxygen-containing gas to generate a mist of water 41.

[0090] According to the above embodiment, by making the water into a mist, the water particles can be evenly dispersed, and the particle size of the mist water 41 can be reduced (i.e., it can be micronized). Therefore, it is easier to homogenize and control the temperature of the superheated steam 42. Furthermore, if hydrogen-containing gas or oxygen-containing gas is used as a high-speed gas flow, then the hydrogen-containing gas or oxygen-containing gas will help combustion in the combustion section 32, thereby enabling it to be used as superheated steam 42.

[0091] Furthermore, in one embodiment of the superheated steam generating apparatus 1,

[0092] The burner 2 has a single-fluid spray nozzle 30b, which sprays water or steam by applying pressure to the water or steam to generate a mist of water 41.

[0093] According to the above embodiment, the structure of the spray section 31 that generates mist water 41 is simple, and therefore, mist water 41 can be generated at low cost.

[0094] Furthermore, in one embodiment of the superheated steam generating apparatus 1,

[0095] The spray angle x of the mist water 41 is smaller than the spray angle y of the superheated steam 42.

[0096] According to the above embodiment, since the mist water 41 is dispersed within the range of the superheated steam 42, the mist water 41 can contribute to the temperature control of the superheated steam 42 without waste, thereby enabling the temperature of the superheated steam 42 to be uniform.

[0097] Furthermore, in one embodiment of the superheated steam generating apparatus 1,

[0098] The superheated steam generating device includes a temperature sensor 7 and a control unit 6. The temperature sensor 7 measures the temperature of the superheated steam 42, and the control unit 6 controls the cooling medium flow controller 5a.

[0099] The control unit 6 controls the flow rate of the water or the steam in the cooling medium flow controller 5a based on the measured temperature of the superheated steam 42.

[0100] According to the above embodiments, it is possible to provide superheated steam 42 with a desired temperature and supply quantity to the superheated steam demand device 10 that requires superheated steam 42.

[0101] Furthermore, in one embodiment of the superheated steam generating apparatus 1,

[0102] The steam is low-temperature water vapor.

[0103] According to the above implementation method, since the temperature of the steam is low, the effect of reducing the temperature of the superheated steam 42 is greater.

[0104] Furthermore, in one embodiment of the superheated steam generating apparatus 1,

[0105] The hydrogen-containing gas is hydrogen, and / or the oxygen-containing gas is oxygen.

[0106] According to the above embodiments, it is possible to suppress CO, CO2, and NO produced by combustion. x Impurities, in particular, can be eliminated by using only hydrogen and oxygen to produce pure superheated steam 42, free of impurities.

[0107] Furthermore, in one embodiment of the superheated steam generating apparatus 1,

[0108] By controlling the supply of the hydrogen-containing gas and / or the oxygen-containing gas, an atmosphere containing hydrogen or oxygen that is not used to generate the superheated steam 42 and becomes surplus is supplied to the superheated steam demand device 10.

[0109] According to the above embodiment, the surplus hydrogen or oxygen is supplied to the superheated steam demand device 10 (e.g., a furnace) for atmosphere control. If the amount of surplus hydrogen is large, the atmosphere of the superheated steam demand device 10 is reduced to a reducing atmosphere; if the amount of surplus oxygen is large, the atmosphere of the superheated steam demand device 10 is oxidized to an oxidizing atmosphere.

Claims

1. A superheated steam generating apparatus, characterized in that, A burner having a combustion section on its outer periphery and an injection section in its central part, the combustion section generating superheated steam by burning hydrogen-containing gas with oxygen-containing gas, and the injection section injecting water or steam, the injection section being surrounded in a ring by the combustion section; and A cooling medium flow controller that controls the flow rate of the water or the steam. By controlling the amount of water or steam supplied to the superheated steam, the temperature and amount of superheated steam generated can be controlled. The front end of the injection section is located upstream of the front end of the combustion section in the direction of water or steam injection.

2. The superheated steam generating apparatus as described in claim 1, characterized in that, By controlling the amount of combustion of the hydrogen-containing gas using the oxygen-containing gas in the combustion section, the temperature and generation amount of the superheated steam can be controlled.

3. The superheated steam generating apparatus as described in claim 1 or 2, characterized in that, The burner has a dual-fluid spray nozzle that sprays water together with the hydrogen-containing gas or the oxygen-containing gas to generate a mist of water.

4. The superheated steam generating apparatus as described in claim 3, characterized in that, The spray angle of the mist water is smaller than the spray angle of the superheated steam.

5. The superheated steam generating apparatus as described in claim 1 or 2, characterized in that, The burner has a single-fluid spray nozzle that sprays the water or steam by applying pressure to the water or steam, thereby generating a mist of water.

6. The superheated steam generating apparatus as described in claim 5, characterized in that, The spray angle of the mist water is smaller than the spray angle of the superheated steam.

7. The superheated steam generating apparatus as described in claim 1, characterized in that, The superheated steam generating device includes a temperature sensor and a control unit. The temperature sensor measures the temperature of the superheated steam, and the control unit controls the cooling medium flow controller. The control unit controls the flow rate of the water or the steam in the cooling medium flow controller based on the measured temperature of the superheated steam.

8. The superheated steam generating apparatus as described in claim 1, characterized in that, The steam is low-temperature water vapor.

9. The superheated steam generating apparatus as described in claim 1, characterized in that, The hydrogen-containing gas is hydrogen, and / or the oxygen-containing gas is oxygen.

10. The superheated steam generating apparatus as described in claim 1, characterized in that, By controlling the supply of the hydrogen-containing gas and / or the oxygen-containing gas, an atmosphere containing excess hydrogen or oxygen that is not used to generate the superheated steam is supplied to the superheated steam demand unit.

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