Protective member peeling apparatus and tape attaching apparatus

Abstract

The present application provides a protective member peeling apparatus and a tape attaching apparatus capable of detecting the presence or absence of a residual protective member. An apparatus for peeling a protective member from a workpiece to which the protective member is attached on a front surface includes: a chuck table that holds the workpiece from a back surface side; a peeling unit that peels the protective member attached on the front surface of the workpiece held by the chuck table from the workpiece; a protective member detection unit that detects whether or not the protective member is present on the front surface of the workpiece after the peeling unit peels the protective member; and a notification unit that notifies of a case where the protective member detection unit detects the protective member.

Description

Technical Field

[0001] This invention relates to a protective component peeling device and a tape pasting device. Background Technology

[0002] Semiconductor device wafers, resin encapsulation substrates, and plate-shaped workpieces on which various devices are formed are ground thinner and diced along predetermined dicing lines to manufacture individual device chips. During grinding or dicing, the workpiece is held on one side by a chuck stage while being processed from the other side. At this time, the side held by the chuck stage is protected by adhesive tape, resin sheets, liquid resin that cures under external stimuli, etc.

[0003] When the workpiece is being ground and then separated on the so-called back side, the protective parts are replaced because it is being separated from the front side. Therefore, a tape-applying machine with a replacement function is used.

[0004] The tape applicator includes: an applicating unit that applies, for example, a dicing tape to the back side of a workpiece having a protective member on the front side; and a peeling device that peels off the protective member on the front side after the dicing tape has been applied by the applicating unit (see, for example, Patent Document 1).

[0005] Patent Document 1: Japanese Patent Application Publication No. 2012-028478

[0006] However, due to the diversity of protective components and the variation in the design of the front side (e.g., electrode bumps with a height of more than 100 μm), the peeling device shown in Patent Document 1 has the problem of making it difficult to peel off the protective components.

[0007] Furthermore, the peeling device shown in Patent Document 1 sometimes peels only the surface layer in the case of multiple protective components, leaving the lower layers behind. If the workpiece is transported to the cutting process with the lower layer of the protective components remaining, problems such as misalignment or damage to the cutting tool due to the cutting of the protective components may occur during cutting. Summary of the Invention

[0008] Therefore, the object of the present invention is to provide a protective component peeling device and a bonding device capable of detecting the presence or absence of protective component residue.

[0009] According to one aspect of the invention, a protective component peeling device is provided, which peels a protective component from a workpiece to which a protective component is attached on a first surface. The protective component peeling device comprises: a chuck table that holds the workpiece from a second surface opposite to the first surface; a peeling unit that peels the protective component attached to the first surface of the workpiece held by the chuck table from the workpiece; a protective component detection unit that detects whether the protective component is present on the first surface of the workpiece after the peeling unit has peeled the protective component; and a notification unit that notifies the protective component detection unit that the protective component has been detected.

[0010] Preferably, the protective component detection unit is selected from any one of an optical sensor, an ultrasonic sensor, or a camera.

[0011] Preferably, the protective component is formed of two or more layers of resin. The protective component detection unit identifies whether all the resin layers remain or only the exposed resin surfaces of the resin layers have been peeled off. Based on the identification result, the peeling unit is used again to peel off the remaining protective component.

[0012] According to another aspect of the invention, a tape-adhesive device is provided for peeling a protective member adhered to a first surface of a workpiece from the workpiece, wherein the tape-adhesive device comprises: a tape-adhesive unit that adheres a tape to a second surface of the workpiece opposite to the first surface; and a protective member peeling device that peels the protective member from the first surface of the workpiece, the protective member peeling device comprising: a chuck table that holds the workpiece from the second surface side; a peeling unit that peels the protective member adhered to the first surface of the workpiece held by the chuck table from the workpiece; a protective member detection unit that detects whether the protective member is present on the first surface of the workpiece after the peeling unit has peeled the protective member; and a notification unit that notifies the protective member detection unit of the detection of the protective member.

[0013] This invention enables the detection of any residual protective components. Attached Figure Description

[0014] Figure 1 This is a perspective view of a workpiece in which a protective component is peeled off by the protective component peeling device according to the embodiment.

[0015] Figure 2 yes Figure 1 A cross-sectional view of the main part of the workpiece shown.

[0016] Figure 3This is a side view schematically showing the outline structure of the adhesive unit with adhesive device according to the embodiment, using a partial cross-section.

[0017] Figure 4 This is a perspective view schematically showing the outline structure of the protective component peeling device according to an embodiment.

[0018] Figure 5 It is shown Figure 4 The diagram shows a cross-sectional view of a protective component stripping device that detects whether the front of the workpiece held on the chuck table has a protective component.

[0019] Figure 6 It is shown Figure 4 The diagram shows a cross-sectional view of the protective component peeling device in the state of heat-sealing the protective component attached to the front side of the workpiece held by the chuck table.

[0020] Figure 7 It is shown Figure 4 The cross-sectional view shown illustrates an example of a protective component removal device removing a protective component from the front of a workpiece held by a chuck table.

[0021] Figure 8 It is shown Figure 4 The illustrated protective component peeling device is shown in cross-section as an example of a device that checks the presence of a protective component after peeling off a protective component that is attached to the front side of the workpiece held in the chuck table.

[0022] Figure 9 It is shown Figure 4 The cross-sectional view shown is another example of the protective component peeling device peeling off the protective component from the front of the workpiece held by the chuck table.

[0023] Figure 10 It is shown Figure 4 The cross-sectional view shown is another example of a protective component removal device used to check whether a protective component is present after the protective component is removed from the front of the workpiece held by the chuck table.

[0024] Figure 11 It is shown Figure 4 The illustrated protective component stripping device is a cross-sectional view of an example of a protective component stripping device that removes a portion of the protective component remaining on the front side of the workpiece held by the chuck table.

[0025] Label Explanation

[0026] 1: Protective component peeling device; 3: Peeling unit; 10: Chuck worktable; 70: Protective component detection unit; 100: With adhesive device; 101: With adhesive unit; 182: Notification unit; 200: Workpiece; 203: Front side (one side); 207: Back side (the other side); 210: Protective component; 211: Resin sheet (layer of resin); 212: Resin layer (layer of resin); 213: Resin film (layer of resin, resin exposed on the side). Detailed Implementation

[0027] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the structural elements described below include substantially the same structural elements readily conceived by those skilled in the art. Moreover, the structures described below can be appropriately combined. Additionally, various omissions, substitutions, or modifications to the structure can be made without departing from the spirit of the present invention.

[0028] The protective component peeling device and the adhesive tape device according to embodiments of the present invention will be described with reference to the accompanying drawings. Figure 1 This is a perspective view of a workpiece in which a protective component is peeled off by the protective component peeling device according to the embodiment. Figure 2 yes Figure 1 A cross-sectional view of the main part of the workpiece shown. Figure 3 This is a side view schematically showing the outline structure of the adhesive unit with adhesive device according to the embodiment, using a partial cross-section. Figure 4 This is a perspective view schematically showing the outline structure of the protective component peeling device according to an embodiment.

[0029] The implementation method is in Figure 3 and Figure 4 Part of the adhesive device 100 is shown in the image. Figure 4 The protective component peeling device 1 shown is from Figure 1 The workpiece 200 shown is peeled off in Figure 2 The device shown is a portion of the protective component 210. The workpiece 200 to which the protective component 210 is peeled off by the protective component peeling device 1 of the embodiment is a wafer such as a disc-shaped semiconductor wafer or optical device wafer with a substrate 201 such as silicon (Si), sapphire (Al2O3), gallium arsenide (GaAs) or silicon carbide (SiC).

[0030] The workpiece 200 has devices 204 formed in each region of a surface 203, which is divided by multiple intersecting predetermined dividing lines 202. For example... Figure 2As shown, each device 204 has a bump 205, which is connected to the electrodes of each device 204 and protrudes beyond the front surface 203. The device 204 is, for example, an integrated circuit (IC) or LSI (Large Scale Integration) such as an integrated circuit, an image sensor (CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor) such as a CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor), or a MEMS (Micro Electro Mechanical System). The bump 205 is made of a conductive metal and is formed in a spherical shape in the embodiment. The bump 205 electrically connects the device 204 to the electrodes of the substrate on which the device 204 is mounted. In the embodiment, the workpiece 200 has a bump 205 protruding beyond the front surface 203, thereby forming a bump-and-dip surface on the front surface 203. Furthermore, in the embodiment, the workpiece 200 has a bump 205 and a bump-and-dip surface on the front surface 203, but in this invention, the bump 205 may not be present. In addition, in this invention, the workpiece 200 is not limited to a wafer, but may also be a rectangular resin-encapsulated substrate, ceramic plate or glass plate, etc., having multiple resin-sealed devices.

[0031] Alternatively, the workpiece 200 may also have a functional layer 206 laminated on the front side of the substrate 201. The functional layer 206 comprises a low-dielectric-constant insulating film (hereinafter referred to as a Low-k film) made of inorganic materials such as SiOF and BSG (SiOB) or polymeric materials such as polyimide and parylene, i.e., organic materials, and a conductive film made of a conductive metal. The Low-k film and the conductive film are laminated to form a device 204. The conductive film constitutes the circuitry of the device 204. Therefore, the device 204 is composed of mutually laminated Low-k films and conductive films laminated between the Low-k films. Furthermore, the functional layer 206 that divides the predetermined lines 202 is composed of a Low-k film and does not have a conductive film except for the TEG (Test Element Group). The TEG is an evaluation element used to identify design and manufacturing problems arising in the device 204.

[0032] In one embodiment, a protective member 210 is attached to the front side of the workpiece 200. The back side 207 is ground while the front side 203 is held on the chuck table of the grinding device through the protective member 210. After thinning to a predetermined finished thickness, the workpiece 200 is divided into individual components 204 along the predetermined dividing line 202.

[0033] In the implementation method, such as Figure 2 As shown, the protective component 210 has a resin sheet 211, a resin layer 212, and a resin film 213. The resin sheet 211, resin layer 212, and resin film 213, formed of two or more layers of resin, are the resins of each layer of the protective component 210. In this embodiment, the resin sheet 211 is made of a thin, flexible synthetic resin (PO (Polyolefin) in this embodiment) and is formed in a sheet shape. The resin sheet 211 is in close contact with the surface of the front side 203 and the surface of the protrusion 205 of the workpiece 200 and is adhered to them.

[0034] In this embodiment, resin layer 212 is composed of a UV-curable liquid resin that cures upon exposure to ultraviolet light, and is laminated on resin sheet 211. Resin film 213 is composed of a thin, flexible synthetic resin (PO (Polyolefin) in this embodiment) and is formed in a film-like shape. Resin film 213 is laminated on resin layer 212.

[0035] The protective component 210 is configured such that after the resin sheet 211 is in close contact with the front surface 203 and the surface of the bump of the workpiece 200, liquid resin constituting the resin layer 212 is applied to the resin sheet 211, the surface of the liquid resin is formed flat along the front surface of the substrate 201, the liquid resin is cured by irradiation with ultraviolet light, and a resin film 213 is laminated on the resin layer 212.

[0036] The adhesive device 100 of the embodiment is used to attach adhesive to the other side, i.e., the back side 207, of the workpiece 200 after grinding. Figure 3 The device shown is for peeling the protective member 210, which is attached to the front side 203, from the front side 203 of the workpiece 200 after the tape 220 is applied. Additionally, the back side 207 is the back side of the front side 203 of the workpiece 200. The tape application device 100 has... Figure 3 The attached unit 101 shown Figure 4 The protective component peeling device 1 shown and Figure 3 and Figure 4 The control unit 180 shown.

[0037] In one embodiment, the tape bonding unit 101 is a device for bonding tape 220 to the back surface 207 of the workpiece 200 and bonding an annular frame 221 with an inner diameter larger than the outer diameter of the workpiece 200 to the outer edge of tape 220. Furthermore, tape 220 is formed by laminating a paste layer and a substrate layer. The paste layer is made of an adhesive synthetic resin adhered to the back surface 207 of the workpiece 200, and the substrate layer is made of a non-adhesive synthetic resin. In one embodiment, tape 220 is formed as a long, sheet-like component and wound into a roller with release paper 222 adhered to the paste layer. In one embodiment, tape 220 is wound into a roller with the release paper 222 located on the inner circumferential side. Additionally, the release paper 222 protects the paste layer of tape 220. In one embodiment, tape 220 is sequentially peeled from its ends by tape bonding unit 101 and adhered to the back surface 207 of the workpiece 200 and the annular frame 221.

[0038] like Figure 3 As shown, the adhesive unit 101 includes a device base 102, a holding part 110, a feeding unit 120, a peeling paper winding unit 130, an adhesive unit 140, a tape cutting part 150, a tape winding unit 160, and a plurality of conveying rollers 170.

[0039] The device base 102 supports the various parts of the adhesive unit 101. In this embodiment, the upper surface of the device base 102 is parallel to both the X-axis direction (parallel to the horizontal direction) and the Y-axis direction (parallel to the horizontal direction and perpendicular to the X-axis direction).

[0040] The holding part 110 includes: a holding surface 111 disposed at the center of the upper surface of the device base 102 in the X-axis direction and on which the workpiece 200 is placed; and a frame holding surface 112 disposed on the outer periphery of the holding surface 111 and on which an annular frame 221 is placed. The holding surface 111 and the frame holding surface 112 are arranged in a position parallel to and coaxial with each other in the X-axis and Y-axis directions. The holding part 110 places the workpiece 200 on the holding surface 111 with the front side 203 side therebetween the protective member 210. The holding part 110 uses a suction source (not shown) to attract and hold the workpiece 200 placed on the holding surface 111. In addition, the holding part 110 is flexibly raised and lowered in the Z-axis direction (not shown) perpendicular to the X-axis and Y-axis directions by means of a Z-axis moving mechanism (not shown).

[0041] The delivery unit 120 sequentially delivers the roll-shaped strip 220 from one end onto the holding surfaces 111 and 112 of the holding portion 110 provided on the device base 102. In this embodiment, the delivery unit 120 is disposed on one end of the device base 102 in the X-axis direction. The delivery unit 120 is formed as a cylinder with its axis parallel to the Y-axis direction and is rotatably disposed about its axis. The delivery unit 120 provides the strip 220 in a roll-shaped manner, with the substrate layer on the outer side and the paste layer on the inner side wound around its outer peripheral surface.

[0042] The release paper winding unit 130 winds the release paper 222 peeled from the tape 220 delivered by the delivery unit 120. In this embodiment, the release paper winding unit 130 is disposed below the delivery unit 120. The release paper winding unit 130 is formed as a cylinder with its axis parallel to the Y-axis direction, and is driven by a motor or other drive device (not shown) to rotate around its axis, thereby winding the release paper 222 peeled from the tape 220 on its outer peripheral surface.

[0043] The adhesive unit 140 adheres the tape 220 provided from the feed unit 120 to the holding surface 111 of the holding portion 110 to the workpiece 200 held by the holding surface 111 of the holding portion 110 and the annular frame 221 placed on the frame holding surface 112. The adhesive unit 140 is disposed above the holding surfaces 111 and 112 of the holding portion 110. The adhesive unit 140 includes: an adhesive roller 141, which is formed as a cylinder with its axis parallel to the Y-axis direction; and a roller support member 142, which supports the adhesive roller 141 so that it can rotate freely about its axis and is disposed movable freely in the X-axis and Z-axis directions by a moving mechanism (not shown). The adhesive unit 140 moves in the X-axis direction in a lowered state by the moving mechanism, thereby adhering the tape 220 to the workpiece 200 and the annular frame 221 held by the holding surfaces 111 and 112 raised by the Z-axis moving mechanism.

[0044] After the tape 220 is attached to the workpiece 200 and the annular frame 221, the tape cutting portion 150 cuts off the portion of the tape 220 located between the inner and outer edges of the annular frame 221. The tape cutting portion 150 is disposed above the holding surface 111 of the holding portion 110.

[0045] In one embodiment, the belt cutting section 150 includes a cutting blade 152 and a moving mechanism 153. The cutting blade 152 cuts the belt 220 with its tip.

[0046] The moving mechanism 153 moves the cutting blade 152 along the surface of the substrate layer of the tape 220. The moving mechanism 153 is capable of moving the cutting blade 152 along the Z-axis direction and also capable of moving the cutting blade 152 circumferentially around an axis parallel to the Z-axis direction. The moving mechanism 153 includes: a rotating shaft 151 disposed at the center of the holding surface 111 of the holding portion 110 and rotating about the axis by a drive device such as an electric motor (not shown); an arm 154 extending from the rotating shaft 151 parallel to the holding surface 111 of the holding portion 110 toward the outer edge and supporting the cutting blade 152 at its front end; and a cylinder 155 that raises and lowers the arm 154 together with the rotating shaft 151.

[0047] The tape winding unit 160 winds the unwanted portion of the tape 220 after it has been cut between the inner and outer edges of the annular frame 221 by the tape cutting section 150. In this embodiment, the tape winding unit 160 is disposed on the other end of the device base 102 in the X-axis direction. The tape winding unit 160 is formed as a cylinder with its axis parallel to the Y-axis direction, and is driven by a drive device such as a motor (not shown) to rotate around its axis, thereby winding the tape 220 on its outer peripheral surface.

[0048] Multiple conveyor rollers 170 are arranged between the feed unit 120 and the belt winding unit 160 to transport the belt 220 from the feed unit 120 to the belt winding unit 160, and to apply tension to the belt 220 to prevent slack. The multiple conveyor rollers 170 are formed as cylinders with their axes parallel to the Y-axis direction, and are rotatably arranged about their axes.

[0049] A pair of conveyor rollers 170 are arranged between the feed unit 120 and the holding part 110, and at a position lower than the feed unit 120. The pair of conveyor rollers 170 cause the strip 220 with the release paper 222 pasted from the feed unit 120 to pass between their outer peripheral surfaces, peeling the release paper 222 from the strip 220, and feeding the release paper 222 peeled from the strip 220 to the release paper winding unit 130, and feeding the strip 220 with the release paper 222 peeled off with the paste layer facing downward.

[0050] Additionally, a pair of conveyor rollers 170 are arranged between the pair of conveyor rollers 170 disposed between the feed unit 120 and the belt winding unit 160 and the holding part 110. This pair of conveyor rollers 170 allows the belt 220 to pass between their outer peripheral surfaces, feeding the belt 220 onto the holding surface 111 of the holding part 110 in the X-axis direction in a manner parallel to the holding surface 111 of the holding part 110.

[0051] Additionally, a pair of conveyor rollers 170 are arranged between the holding portion 110 and the belt winding unit 160, and at a position lower than the belt winding unit 160. This pair of conveyor rollers 170 allows the belt 220 to pass between their outer peripheral surfaces, feeding the belt 220 toward the belt winding unit 160.

[0052] Regarding the aforementioned tape-adhesive unit 101, after the workpiece 200 is placed on the holding surface 111 with its front side facing up and the annular frame 221 is placed on the frame holding surface 112, the workpiece 200 is attracted and held on the holding surface 111. The tape-adhesive unit 101 raises the holding portion 110 relative to the conveying roller 170 and lowers the tape-adhesive unit 140, moving it along the X-axis direction to adhere the tape 220 to the workpiece 200 and the annular frame 221. While the holding portion 110 is raised, the tape-adhesive unit 101 raises the tape-adhesive unit 140, and the moving mechanism 153 rotates the cutting blade 152 around the axis of rotation 151 and lowers the cutting blade 152. The tape-adhesive unit 101 cuts the tape 220 while rotating around the axis of rotation 151, causing the tip of the cutting blade 152 to cut into the portion of the tape 220 located between the inner and outer edges of the annular frame 221.

[0053] The tape pasting unit 101 rotates the rotating shaft 151 of the tape cutting section 150 at least once around its axis, cutting the tape 220 within the entire circumference of the rotating shaft 151. After cutting the tape 220, the tape pasting unit 101 raises the tape cutting section 150 and lowers the holding section 110 relative to the conveying roller 170, and uses the tape winding unit 160 to wind an amount of tape equivalent to that pasted onto one workpiece 200. After moving the tape 220 by an amount equivalent to one workpiece 200, the attraction holding of the holding surface 111 is released, ending the tape pasting operation.

[0054] The protective component peeling device 1 of the embodiment is a device for peeling the protective component 210 from a workpiece 200 on which the protective component 210 is attached to the front side 203. In the embodiment, the protective component peeling device 1 is a device that attaches the heat seal 230 to the protective component 210 attached to the front side 203 of the workpiece 200 and peels the protective component 210 from the front side 203 of the workpiece 200.

[0055] Furthermore, in this embodiment, the heat seal 230 does not exert adhesive force at room temperature, but rather exerts adhesive force by being heated, and is formed into a long, sheet-like component. The heat seal 230 has: a substrate layer, which is composed of a substrate such as PET (Polyethylene Terephthalate) resin; and an adhesive layer, which is laminated on the substrate layer and is composed of a paste or the like that that can melt due to heat, and exhibits adhesive force by being heated.

[0056] like Figure 4 As shown, the protective component peeling device 1 has a base 2 extending along the X-axis direction parallel to the horizontal direction, a chuck worktable 10 disposed on the base 2, a worktable moving mechanism 20, a heat sealing providing mechanism 30, a peeling unit 3, and a protective component detection unit 70.

[0057] The base 2 supports the various parts of the protective component peeling device 1. In this embodiment, the upper surface of the base 2 is arranged parallel to both the X-axis direction, which is parallel to the horizontal direction, and the Y-axis direction, which is parallel to the horizontal direction and perpendicular to the X-axis direction.

[0058] The chuck table 10 holds the workpiece 200 from the back side 207. The chuck table 10 is mounted on the upper surface of the base 2 via a table moving mechanism 20, and has a holding surface 11 parallel to both the X-axis and Y-axis directions, on which the back side 207 of the workpiece 200 is placed via a belt 220. The holding surface 11 of the chuck table 10 is made of porous ceramic or the like, and the workpiece 200 placed on the holding surface 11 is held by an attraction source (not shown) via the belt 220. The chuck table 10 moves along the X-axis direction via the table moving mechanism 20 mounted on the upper surface of the base 2.

[0059] The heat-sealing feeding mechanism 30 includes a spool 31, a pair of guide rollers 32, and a pair of feed rollers 33. The spool 31 is cylindrical and rotatably arranged about its axis, and winds the heat seal 230 into a roller shape such that the substrate layer is positioned on the outside and the adhesive layer is positioned on the inside. The axis of the spool 31 is parallel to the Y-axis direction. The spool 31 is given a counter-tension for winding the heat seal 230 by a tension-applying mechanism (not shown), and the tension is adjusted so that the pulled-out heat seal 230 does not slacken. The spool 31 winds the heat seal 230 with the adhesive layer of the heat seal 230 fed from the spool 31 facing downwards.

[0060] Guide rollers 32 guide the heat seal 230 pulled from the roll 31 downwards, each formed into a cylindrical shape and rotatably arranged around its axis. A pair of guide rollers 32 are arranged parallel to each other and fold back while passing the heat seal 230 between them, guiding the heat seal 230 downwards while applying tension. The axes of the pair of guide rollers 32 are parallel to the Y-axis direction.

[0061] The delivery rollers 33 are positioned below the guide rollers 32 and deliver the heat seal 230, guided by the guide rollers 32, toward the tape-adhesive mechanism 40. Each roller is cylindrical and rotatably arranged around its axis. A pair of delivery rollers 33 are arranged parallel to each other, and the heat seal 230 passes between them to deliver it toward the tape-adhesive mechanism 40 of the peeling unit 3. The axes of the pair of delivery rollers 33 are parallel to the Y-axis direction.

[0062] The peeling unit 3 peels the protective part 210, which is attached to the front side 203 of the workpiece 200 held by the chuck table 10, from the workpiece 200. The peeling unit 3 has an adhesive mechanism 40, a cutting part 50, and a horizontal movement mechanism 60.

[0063] The adhesive bonding mechanism 40 adheres the heat seal 230 to the protective component 210 that is attached to the front side 203 of the workpiece 200 held on the chuck table 10. The adhesive bonding mechanism 40 has a clamping unit 41 and an adhesive bonding unit 42.

[0064] The clamping unit 41 clamps the end of the heat seal 230 provided by the heat seal supply mechanism 30. The clamping unit 41 includes: a guide member 43 extending along a Z-axis direction perpendicular to both the X and Y axes; a cylinder 44 fixed to the upper end of the guide member 43; a fixed claw 45 formed by bending the lower end of the guide member 43; and a movable claw 46 disposed opposite the fixed claw 45, and freely supported on the guide member 43 in directions of approach and distance from the fixed claw 45. The clamping unit 41 clamps the end of the heat seal 230 by extending the piston rod 47 of the cylinder 44, thereby bringing the movable claw 46 closer to the fixed claw 45. The clamping unit 41 releases the end of the heat seal 230 by retracting the piston rod 47 of the cylinder 44, thereby releasing the clamp on the end of the heat seal 230.

[0065] The heat seal 230, whose end is held by the clamping unit 41, is attached by the adhesive unit 42 to the protective member 210 attached to the front side 203 of the workpiece 200 held on the chuck table 10. In this embodiment, the adhesive layer of the heat seal 230 faces downwards.

[0066] A tape-adhesive unit 42 is disposed between the feed roller 33 and the tape clamping unit 41, and a heater (not shown) is installed thereon. The tape-adhesive unit 42 presses the substrate layer of the heat seal 230 to make the adhesive layer come into close contact with the outer peripheral portion of the protective member 210, thereby adhering the heat seal 230 to the protective member 210. When adhering the heat seal 230 to the outer peripheral portion of the protective member 210, the tape-adhesive unit 42 is heated by the heater, locally heating the heat seal 230 adhered to the protective member 210 for adhesion. In this embodiment, the tape-adhesive unit 42 adheres the heat seal 230 to the protective member 210 along the X-axis direction. Figure 4 One end near the front side. Additionally, the adhesive unit 42 moves up and down along the Z-axis via a lifting mechanism (not shown).

[0067] The cutting section 50 cuts the heat seal 230 that is adhered by the adhesive bonding mechanism 40. In this embodiment, the heat seal 230 is cut at a position closer to the heat seal providing mechanism 30 than the portion adhered to the protective member 210. The cutting section 50 has a mounting platform 51 and a cutting blade (not shown).

[0068] The upper surface of the mounting stage 51 is formed flat along the horizontal direction, and the heat seal 230 provided by the heat seal providing mechanism 30 is provided on the upper surface. In addition, the mounting stage 51 has a groove 52 that is recessed from the upper surface and extends in a straight line along the Y-axis direction.

[0069] The cutting blade tip cuts into the groove 52 by being supplied to the heat seal 230 on the upper surface of the stage 51. The cutting blade moves along the Y-axis and Z-axis directions via a moving mechanism (not shown).

[0070] The worktable moving mechanism 20 is mounted on the base 2, causing the chuck worktable 10 to move along the X-axis. The horizontal moving mechanism 60 is mounted on the support plate 4 located above the base 2, causing the adhesive unit 42 and the cutting section 50 to move along the X-axis.

[0071] The worktable moving mechanism 20 and the horizontal moving mechanism 60 include: known ball screws 21 and 61, which are rotatably arranged about an axis and parallel to the X-axis direction; known pulse motors 22 and 62, which cause the ball screws 21 and 61 to rotate about an axis; and known guide rails 23 and 63, which support the chuck worktable 10 or the worktable with adhesive unit 42 and the worktable with cutting section 50 so that it can move freely along the X-axis direction.

[0072] The peeling unit 3 uses a clamping unit 41 to clamp the end of the heat seal 230, which is fed from the heat seal supply mechanism 30 toward the adhesive bonding mechanism 40. The peeling unit 3 uses an adhesive bonding unit 42 to press the end of the heat seal 230 against one end of the protective member 210 adhered to the front surface 203 of the workpiece 200 in the X-axis direction, and heats the heat seal 230 to thermally fuse it to one end of the protective member 210. The peeling unit 3 uses a moving mechanism to lower the cutting blade of the cutting section 50 into the groove 52, cutting into the heat seal 230. After the cutting blade penetrates the groove 52, it moves along the Y-axis direction to cut off the heat seal 230. The peeling unit 3 moves the clamping unit 41 and the chuck table 10 in opposite directions in the X-axis direction by moving the moving mechanisms 20 and 60. The heat seal 230 attached to the protective member 210 pulls the protective member 210 along the front side of the substrate 201, thereby peeling the protective member 210 from the workpiece 200.

[0073] Furthermore, in this embodiment, the protective member 210 has a resin sheet 211, a resin layer 212, and a resin film 213. Therefore, when it is peeled off from the workpiece 200 by the peeling unit 3, sometimes the resin film 213 and the resin layer 212 are peeled off, while the resin sheet 211 and the resin layer 212 remain on the front surface 203 of the workpiece 200. In this case, the resin sheet 211 and the resin layer 212 remain on the entire front surface 203 of the workpiece 200.

[0074] After the peeling unit 3 peels off the protective component 210, the protective component detection unit 70 detects whether at least a portion of the protective component 210 is present on the front surface 203 of the workpiece 200. In an embodiment, the protective component detection unit 70 is an optical sensor disposed above the holding surface 11 of the chuck table 10 and irradiates the workpiece 200 held by the chuck table 10 with laser light to measure the distance to the workpiece 200, or an ultrasonic sensor irradiating the workpiece 200 with ultrasonic waves to measure the distance to the workpiece 200.

[0075] The protective component detection unit 70, while the chuck table 10 is moving along the X-axis direction via the table moving mechanism 20, irradiates the workpiece 200 with laser light or ultrasonic waves, measuring the distance over the entire length of the workpiece 200 in the X-axis direction. The protective component detection unit 70 outputs the measured distance to the control unit 180. The control unit 180 compares the distance measured by the protective component detection unit 70 with a pre-stored distance between the protective component detection unit and the front surface 203 of the workpiece 200 after all protective components 210 have been removed, determining whether a protective component 210 is present on the front surface 203 of the workpiece 200. Thus, in this embodiment, the protective component detection unit 70, in cooperation with the control unit 180, detects whether a protective component 210 is present on the front surface 203 of the workpiece 200 by measuring the distance over the entire length of the workpiece 200 in the X-axis direction. Furthermore, the control unit 180 compares the distance measured by the protective component detection unit 70 with the pre-stored distance between the protective component detection unit and the front surface 203 of the workpiece 200 after all the protective components 210 have been peeled off, to identify whether all of the multiple layers of resin sheets 211, resin layers 212, and resin films 213 of the protective component 210 remain, or whether only the exposed resin film 213 of the multiple layers of resin sheets 211, resin layers 212, and resin films 213 has been peeled off. Thus, in this embodiment, the protective component detection unit 70, by measuring the aforementioned distance over the entire length of the workpiece 200 in the X-axis direction, cooperates with the control unit 180 to identify whether all of the multiple layers of resin sheets 211, resin layers 212, and resin films 213 of the protective component 210 remain on the front surface 203 of the workpiece 200, or whether only the exposed resin film 213 of the multiple layers of resin sheets 211, resin layers 212, and resin films 213 has been peeled off.

[0076] The control unit 180 controls each of the aforementioned structural elements constituting the tape-adhesive device 100. Specifically, the control unit 180 causes the tape-adhesive device 100 to perform the action of adhering the tape 220 to the workpiece 200 and the action of peeling off the protective component 210. The control unit 180 is a computer capable of executing computer programs, and it includes: an arithmetic processing unit having a microprocessor such as a CPU (central processing unit); a storage device having a memory such as ROM (read-only memory) or RAM (random access memory); and an input / output interface device.

[0077] The arithmetic processing unit of the control unit 180 executes a computer program stored in the ROM on the RAM, generating control signals for controlling the adhesive tape device 100. The arithmetic processing unit of the control unit 180 outputs the generated control signals to various structural elements of the adhesive tape device 100 via an input / output interface device. Furthermore, the control unit 180 is coupled with a liquid crystal display device, etc., that displays the status and image of the adhesive tape application. Figure 4 The display unit 181 shown includes an input unit used when the operator registers processing information, and at least one of sound and light to notify the operator. Figure 3 and Figure 4 The notification unit 182 shown is connected. The input unit consists of at least one of a touch panel and a keyboard, which are disposed on the display unit 181.

[0078] Next, an example of the peeling action of the protective component peeling device 1 will be described. Figure 5 It is shown Figure 4 The diagram shows a cross-sectional view of the protective component stripping device detecting whether a protective component is present on the front side of the workpiece held by the chuck table. Figure 6 It is shown Figure 4 The diagram shows a cross-sectional view of the protective component peeling device in the state of heat-sealing the protective component attached to the front side of the workpiece held by the chuck table. Figure 7 It is shown Figure 4 The cross-sectional view shown illustrates an example of a protective component removal device removing a protective component from the front of a workpiece held by a chuck table. Figure 8 It is shown Figure 4 The illustrated protective component peeling device is shown in cross-section as an example of a device that checks the presence of a protective component after peeling off a protective component that is attached to the front side of the workpiece held in the chuck table. Figure 9 It is shown Figure 4 The cross-sectional view shown is another example of the protective component peeling device peeling off the protective component from the front of the workpiece held by the chuck table. Figure 10 It is shown Figure 4 The cross-sectional view shown is another example of a protective component removal device used to check whether a protective component is present after the protective component is removed from the front of the workpiece held by the chuck table. Figure 11 It is shown Figure 4 The illustrated protective component stripping device is a cross-sectional view of an example of a protective component stripping device that removes a portion of the protective component remaining on the front side of the workpiece held by the chuck table.

[0079] First, the protective component peeling device 1 transports the workpiece 200, on which the tape 220 has been attached to the back surface 207 by the tape attaching unit 101, and places the workpiece 200 with its back surface 207 side on the holding surface 11 of the chuck table 10. The protective component peeling device 1 attracts and holds the workpiece 200 on the holding surface 11 by the chuck table 10, and moves one end of the workpiece 200 in the X-axis direction on the chuck table 10 as follows by the table moving mechanism 20. Figure 5 The protective component detection unit 70 is positioned below it as shown by the solid line. While measuring the aforementioned distance using the protective component detection unit 70, the protective component peeling device 1 moves the chuck table 10 along the X-axis direction via the table moving mechanism 20, so that the protective component detection unit 70 is positioned as shown by the solid line. Figure 5 As shown by the dashed line, it is located above the other end of the workpiece 200 in the X-axis direction on the chuck table 10, so that the protective component detection unit 70 can detect whether there is a protective component 210.

[0080] The protective component peeling device 1 uses the protective component detection unit 70 to detect if all the multiple layers of resin sheet 211, resin layer 212, and resin film 213 containing the protective component 210 remain. Then, the heat seal 230 is delivered towards the clamping unit 41 of the peeling unit 3 using the heat seal supply mechanism 30. After the end of the heat seal 230 is clamped by the clamping unit 41, the protective component peeling device 1 uses a moving mechanism to lower the cutting blade with the cutting section 50 into the groove 52, cutting into the heat seal 230. The protective component peeling device 1 uses the moving mechanism to move the cutting blade along the Y-axis, cutting the heat seal 230, and then raises the cutting blade.

[0081] The protective component peeling device 1 positions one end of the workpiece 200 on the chuck worktable 10 in the X-axis direction below the adhesive unit 42 via the worktable moving mechanism 20. Figure 6 As shown, the adhesive unit 42 is lowered to press the heat seal 230 onto the workpiece 200 and adhere it to the protective component 210, and the heat seal 230 is heated to thermally fuse the heat seal 230 to the protective component 210.

[0082] The protective component peeling device 1, for example, uses a worktable moving mechanism 20 and a horizontal moving mechanism 60 to move the clamping unit 41 towards... Figure 7 The movement in the direction indicated by the arrow causes the clamping unit 41 and the chuck table 10 to move in opposite directions relative to each other in the X-axis direction, thereby peeling the protective component 210 off the front side 203 of the workpiece 200. The protective component peeling device 1 removes one end of the workpiece 200 on the chuck table 10 in the X-axis direction... Figure 8Positioned below the protective component detection unit 70 as shown by the solid line, the chuck table 10 is moved along the X-axis direction by the table moving mechanism 20 while the protective component detection unit 70 measures the aforementioned distance, so that the protective component detection unit 70 is positioned as shown by the solid line. Figure 8 Above the other end of the workpiece 200 in the X-axis direction on the chuck table 10, as shown by the dashed line, the presence of a protective component 210 is detected by the protective component detection unit 70. When the protective component detection unit 70 detects that there is no protective component 210 along the entire length in the X-axis direction, the protective component stripping device 1 ends the stripping operation.

[0083] In addition, such as Figure 9 As shown, the protective component peeling device 1 sometimes only peels off the resin film 213 of the protective component 210. In this case, as... Figure 10 As shown, the protective component peeling device 1 uses the protective component detection unit 70 to detect whether a protective component 210 is present. In this embodiment, the protective component peeling device 1 identifies whether only the exposed side of the resin film 213 in the multi-layered resin sheet 211, resin layer 212, and resin film 213 has been peeled off. After the protective component 210 is peeled off, when at least a portion of the protective component 210 is present on the front surface 203 of the workpiece 200, i.e., in this embodiment, the protective component detection unit 70 identifies that only the exposed side of the resin film 213 in the multi-layered resin sheet 211, resin layer 212, and resin film 213 has been peeled off, leaving the resin sheet 211 and resin layer 212 remaining on the front surface 203 of the workpiece 200, the protective component peeling device 1 activates the notification unit 182 to notify the operator. Therefore, the notification unit 182 notifies the operator that the protective component detection unit 70 has detected the protective component 210. In an embodiment, when it is identified that only the exposed side of the resin film 213 of the multi-layered resin sheet 211, resin layer 212, and resin film 213 has been peeled off, leaving the resin sheet 211 and resin layer 212 remaining on the front surface 203 of the workpiece 200, the protective component peeling device 1, based on the identification result of the protective component detection unit 70, after heat-sealing 230 is heat-fused to the resin layer 212 of the protective component 210, as follows: Figure 11 As shown, the clamping unit 41 and the chuck table 10 are moved in opposite directions along the X-axis, and the peeling unit 3 is used again to peel off the remaining resin sheet 211 and resin layer 212 of the protective component 210 from the front side 203 of the workpiece 200. The protective component peeling device 1 uses the protective component detection unit 70 to detect whether there is a protective component 210 along the entire length in the X-axis direction. When no protective component 210 is detected, the peeling operation ends.

[0084] The protective component peeling device 1 and the adhesive tape device 100 described above have the following effects: after the peeling unit 3 peels off the protective component 210, the protective component detection unit 70 detects whether the protective component 210 is present, thus enabling the detection of any residue of the protective component 210. Furthermore, since the protective component peeling device 1 and the adhesive tape device 100 detect whether the protective component 210 is present after the peeling unit 3 peels off the protective component 210, the presence of the protective component 210 can be reliably prevented from being fed into subsequent processes with any residue of the protective component 210.

[0085] Furthermore, the protective component peeling device 1 and the adhesive tape device 100 of the embodiment also have the following effects: by detecting whether the protective component 210 is present before peeling it off, even if an incorrect workpiece 200 without the protective component 210 is fed in, the peeling operation can be avoided, thereby detecting the protective component 210 without causing problems. In addition, when the protective component 210 has multiple layers of resin sheet 211, resin layer 212 and resin film 213, the protective component peeling device 1 and the adhesive tape device 100 of the embodiment can peel off again when all or a specific layer remains, thus simultaneously satisfying the requirements of efficient operation and detection of problems (peeling residue of the protective component 210, and abnormal conditions of the adhesive layers of resin sheet 211, resin layer 212 and resin film 213).

[0086] Furthermore, the present invention is not limited to the embodiments described above. That is, it can be implemented in various modifications without departing from the spirit of the present invention. For example, in the present invention, the protective member 210 may be composed of a non-adhesive substrate layer and an adhesive paste layer laminated on the substrate layer. In this case, it is preferable that when the protective member detection unit 70 detects residue of the paste layer on the front surface 203 of the workpiece 200 after the protective member 210 has been peeled off, the notification unit 182 is activated to stop the peeling operation without peeling off again. Thus, in the present invention, it is also possible that after the protective member 210 has been peeled off, when residue of the protective member 210 is detected on the front surface 203 of the workpiece 200, the notification unit 182 is activated to stop the peeling operation without peeling off again. Alternatively, in this invention, the protective component detection unit 70 may also be a camera unit that takes a picture of the front 203 side of the workpiece 200 to obtain a so-called color image containing the intensity of light R (red), light G (green), and light B (blue). In this case, it is preferable to perform pattern matching between the color image obtained by the camera unit and a regular color image obtained by taking a picture of the front 203 side of the workpiece 200 with the protective component 210 removed beforehand, and detect whether the protective component 210 is present.

Claims

1. A protective component peeling device for peeling a protective component from a workpiece to which a protective component is attached on a first surface, wherein, The protective component peeling device has the following features: A chuck table that holds the workpiece from the second side opposite to the first side; A peeling unit that peels the protective component from the first surface of the workpiece held by the chuck table. The protective component detection unit detects whether the protective component is present on the first surface of the workpiece after the peeling unit peels off the protective component. as well as The notification unit notifies the protection component detection unit of the status of the protection component. The protective component is formed of two or more layers of resin. The protective component detection unit is an optical or ultrasonic sensor that measures the distance between itself and the workpiece held by the chuck table.

2. The protective component peeling device according to claim 1, wherein, The peeling unit has an adhesive unit that heat-seales the protective component attached to the first side of the workpiece held on the chuck table. The protective component peeling device has a moving mechanism that moves the heat seal adhered to the protective component relative to the chuck table.

3. The protective component peeling device according to claim 1 or 2, wherein, The workpiece has a protrusion that protrudes beyond the first surface.

4. The protective component peeling device according to claim 1 or 2, wherein, The protective component detection unit identifies whether all the resin in the multi-layered structure remains, or only the resin on the exposed side of the multi-layered structure has been peeled off. Based on the identification result, the peeling unit is used again to peel off the remaining protective component.

5. A device for peeling a protective member adhered to a first surface of a workpiece from the workpiece, wherein, The adhesive tape device has the following features: A tape-adhesive unit is provided, which adheres the tape to a second surface of the workpiece opposite to the first surface; and The protective component peeling device according to any one of claims 1 to 4 peels the protective component from the first side of the workpiece.

Images