Integrated flexible micro / nano inductors and their fabrication methods

CN113871125BActive Publication Date: 2025-11-14NINGBO INST OF MATERIALS TECH & ENG CHINESE ACAD OF SCI
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Patent Information

Application Number
CN202111113391.4
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-09-23
Publication Date
2025-11-14
Estimated Expiration
2041-09-23

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Abstract

This invention discloses an integrated flexible micro / nano inductor and its fabrication method, relating to the fabrication of amorphous / nanocrystalline micro / nano inductor devices based on laser etching. The fabrication method includes: preparing an amorphous / nanocrystalline alloy; and, based on a high-precision, high-power laser etching process, performing integrated laser fine etching on the amorphous / nanocrystalline alloy according to the application scenario, shape, and size requirements, directly integrating it with the magnetic core structure to obtain a micro / nano-scale integrated flexible inductor device.
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Citation Information

Patent Citations

  • Method for processing amorphous metal material

    JP2008036643A

  • High speed laser cutting of amorphous metals

    US20150306706A1