Spectral filters, as well as image sensors and electronic devices that include spectral filters.

Abstract

A spectral filter is provided, comprising: a first unit filter having a first center wavelength in a first wavelength range; and a second unit filter having a second center wavelength in a second wavelength range, wherein the first unit filter includes two first metal reflective layers spaced apart from each other and comprising a first metal, and a first cavity disposed between the two first metal reflective layers, and wherein the second unit filter includes two second metal reflective layers spaced apart from each other and comprising a second metal different from the first metal, and a second cavity disposed between the two second metal reflective layers.

Description

[0001] Cross-references to related applications

[0002] This application is based on and claims priority to Korean Patent Application No. 10-2020-0081674 filed on July 2, 2020, and Korean Patent Application No. 10-2021-0060947 filed on May 11, 2021, the entire disclosure of which is incorporated herein by reference. Technical Field

[0003] Example embodiments of this disclosure relate to spectral filters and image sensors and electronic devices that include said spectral filters. Background Technology

[0004] Image sensors using spectral filters are important optical instruments in the field of optics. However, image sensors, which incorporate various optical components according to relevant technologies, are often large and bulky. Recently, to meet the demand for miniaturization of image sensors, research has been conducted on simultaneously implementing integrated circuits and optical elements on a single semiconductor chip. Summary of the Invention

[0005] One or more example embodiments provide spectral filters, as well as image sensors and electronic devices that include said spectral filters.

[0006] Additional aspects will be set forth in part in the description which follows, and will become clear in part from the description, or may be learned by practice of the exemplary embodiments.

[0007] According to one aspect of an example embodiment, a spectral filter is provided, comprising: a first unit filter having a first center wavelength in a first wavelength range; and a second unit filter having a second center wavelength in a second wavelength range, wherein the first unit filter includes two first metal reflective layers spaced apart from each other and including a first metal, and a first cavity disposed between the two first metal reflective layers, and wherein the second unit filter includes two second metal reflective layers spaced apart from each other and including a second metal different from the first metal, and a second cavity disposed between the two second metal reflective layers.

[0008] The first unit filter and the second unit filter can be arranged on a plane in a one-dimensional or two-dimensional manner.

[0009] The first center wavelength in the first wavelength range may be shorter than the second center wavelength in the second wavelength range.

[0010] The two first metal reflective layers may include one of aluminum (Al), silver (Ag), gold (Au) or titanium nitride (TiN), and the two second metal reflective layers may include one of copper (Cu), Ag, Au or TiN, which are different from the two first metal reflective layers.

[0011] The first unit filter may be included in a first filter array, which includes a plurality of first unit filters with different center wavelengths, and the second unit filter may be included in a second filter array, which includes a plurality of second unit filters with different center wavelengths.

[0012] The center wavelength of the first unit filter can be configured to be adjusted based on changing the thickness or effective refractive index of the first cavity, and the center wavelength of the second unit filter can be configured to be adjusted based on changing the thickness or effective refractive index of the second cavity.

[0013] The first unit filter may further include a first dielectric layer disposed above the first cavity and a second dielectric layer disposed below the first cavity, and the second unit filter may further include a third dielectric layer disposed below the second cavity and a fourth dielectric layer disposed above the second cavity.

[0014] Each of the first dielectric layer, the second dielectric layer, the third dielectric layer, and the fourth dielectric layer may include a single layer or multiple layers.

[0015] Each of the first dielectric layer, the second dielectric layer, the third dielectric layer, and the fourth dielectric layer may have a thickness ranging from 10 nm to 20,000 nm.

[0016] At least one of the thickness or effective refractive index of each of the first dielectric layer and the second dielectric layer can be adjusted based on the center wavelength of the first unit filter, and the thickness or effective refractive index of each of the third dielectric layer and the fourth dielectric layer can be adjusted based on the center wavelength of the second unit filter.

[0017] The spectral filter may further include: multiple microlenses disposed on the first unit filter and the second unit filter.

[0018] The spectral filter may further include a color filter disposed on the same plane as the first unit filter and the second unit filter.

[0019] The spectral filter may further include an additional filter disposed on the first unit filter and the second unit filter, the additional filter being configured to transmit a preset wavelength band.

[0020] The additional filter may include a color filter or a broadband filter.

[0021] The first unit filter may include a plurality of first unit filters, and the second unit filter may include a plurality of second unit filters. A short-wavelength absorption filter may be disposed in some of the plurality of first unit filters and the plurality of second unit filters, and a long-wavelength cutoff filter may be disposed in other of the plurality of first unit filters and the plurality of second unit filters.

[0022] According to another aspect of an example embodiment, a spectral filter is provided, comprising: at least one first unit filter having a first center wavelength in a first wavelength range; and at least one second unit filter having a second center wavelength in a second wavelength range, wherein the at least one first unit filter includes a plurality of metal reflective layers spaced apart from each other and at least one first cavity disposed between the plurality of metal reflective layers, and wherein the at least one second unit filter includes a plurality of Bragg reflective layers spaced apart from each other and at least one second cavity disposed between the plurality of Bragg reflective layers.

[0023] The at least one first unit filter and the at least one second unit filter can be arranged on a plane in a one-dimensional or two-dimensional manner.

[0024] The first center wavelength of the at least one first unit filter can be configured to be adjusted based on changing the thickness or effective refractive index of the at least one first cavity, and the second center wavelength of the at least one second unit filter can be configured to be adjusted based on changing the thickness or effective refractive index of the at least one second cavity.

[0025] The spectral filter may further include: a plurality of microlenses disposed on the at least one first unit filter and the at least one second unit filter.

[0026] The spectral filter may also include a color filter disposed on the plane.

[0027] The spectral filter may further include an additional filter disposed on the at least one first unit filter and the at least one second unit filter, the additional filter being configured to transmit a preset wavelength band.

[0028] According to another aspect of an example embodiment, an image sensor is provided, comprising: a spectral filter; and a pixel array configured to receive light transmitted through the spectral filter, wherein the spectral filter comprises: at least one first unit filter having a first center wavelength in a first wavelength range; and at least one second unit filter having a second center wavelength in a second wavelength range, wherein the at least one first unit filter comprises a plurality of first metal reflective layers spaced apart from each other and comprising a first metal, and at least one first cavity disposed between the plurality of first metal reflective layers, and wherein the at least one second unit filter comprises a plurality of second metal reflective layers spaced apart from each other and comprising a second metal different from the first metal, and at least one second cavity disposed between the plurality of second metal reflective layers.

[0029] The at least one first unit filter may further include a first dielectric layer disposed below the at least one first cavity and a second dielectric layer disposed above the at least one first cavity, and the at least one second unit filter may further include a third dielectric layer disposed below the at least one second cavity and a fourth dielectric layer disposed above the at least one second cavity.

[0030] The spectral filter may further include: a plurality of microlenses disposed on the at least one first unit filter and the at least one second unit filter.

[0031] The spectral filter may further include a color filter, and the at least one first unit filter, the at least one second unit filter, and the color filter may be arranged on the same plane.

[0032] The spectral filter may further include an additional filter disposed on the at least one first unit filter and the at least one second unit filter, the additional filter being configured to transmit a preset wavelength band.

[0033] The image sensor may also include a timing controller, a line decoder, and an output circuit.

[0034] An electronic device includes the image sensor.

[0035] The electronic device may be one of the following: mobile phone, smartphone, tablet computer, smart tablet computer, digital camera, video recorder, laptop computer, television, smart TV, smart refrigerator, security camera, robot, or medical camera.

[0036] According to another aspect of an example embodiment, an image sensor is provided, comprising: a spectral filter; and a pixel array configured to receive light transmitted through the spectral filter, wherein the spectral filter includes at least one first unit filter having a first center wavelength in a first wavelength range and at least one second unit filter having a second center wavelength in a second wavelength range, wherein the at least one first unit filter includes a plurality of metal reflective layers spaced apart from each other and at least one first cavity disposed between the plurality of metal reflective layers, and wherein the at least one second unit filter includes a plurality of Bragg reflective layers spaced apart from each other and at least one second cavity disposed between the plurality of Bragg reflective layers.

[0037] The spectral filter may further include: a plurality of microlenses disposed on the at least one first unit filter and the at least one second unit filter.

[0038] The spectral filter may further include a color filter, and the at least one first unit filter, the at least one second unit filter, and the color filter are disposed on the same plane.

[0039] The spectral filter may further include an additional filter disposed on the at least one first unit filter and the at least one second unit filter, the additional filter being configured to transmit a preset wavelength band.

[0040] The image sensor may also include a timing controller, a line decoder, and an output circuit.

[0041] An electronic device may include the image sensor.

[0042] The electronic device may be one of the following: mobile phone, smartphone, tablet computer, smart tablet computer, digital camera, video recorder, laptop computer, television, smart TV, smart refrigerator, security camera, robot, or medical camera.

[0043] According to another aspect of an example embodiment, a spectral filter is provided, comprising: a first unit filter having a first center wavelength in a first wavelength range; and a second unit filter having a second center wavelength in a second wavelength range, the second unit filter being disposed adjacent to the first unit filter in a horizontal direction, wherein the first unit filter includes two first metal reflective layers disposed vertically spaced apart from each other and including a first metal, and a first cavity disposed between the two first metal reflective layers, and wherein the second unit filter includes two second metal reflective layers disposed vertically spaced apart from each other and including a second metal different from the first metal, and a second cavity disposed between the two second metal reflective layers. Attached Figure Description

[0044] The above and / or other aspects, features, and advantages of exemplary embodiments of the present disclosure will become clearer from the following description taken in conjunction with the accompanying drawings, in which:

[0045] Figure 1 This is a block diagram of an image sensor according to an example embodiment;

[0046] Figure 2 It is along Figure 1 A schematic cross-sectional view of the spectral filter intercepted by line II-II′;

[0047] Figure 3A This is a cross-sectional view of a unit filter with a titanium oxide (TiO2) cavity between copper (Cu) reflective layers;

[0048] Figure 3B Is Figure 3A Cross-sectional view of a unit filter with a TiO2 dielectric layer in each of the upper and lower parts of the structure shown;

[0049] Figure 4 yes Figure 3A unit filters and Figure 3B The transmission spectrum curve of the unit filter;

[0050] Figure 5 This is a schematic cross-sectional view of a spectral filter according to another example embodiment;

[0051] Figure 6 yes Figure 5 The transmission spectrum curve of the spectral filter;

[0052] Figure 7 This is a schematic cross-sectional view of a spectral filter according to another example embodiment;

[0053] Figure 8 yes Figure 7The transmission spectrum curve of the spectral filter;

[0054] Figure 9 This is a schematic cross-sectional view of a spectral filter according to another example embodiment;

[0055] Figure 10 This is a schematic cross-sectional view of a spectral filter according to another example embodiment;

[0056] Figure 11 This is a schematic cross-sectional view of a spectral filter according to another example embodiment;

[0057] Figure 12 This is a schematic cross-sectional view of a spectral filter according to another example embodiment;

[0058] Figure 13 This is a schematic cross-sectional view of a spectral filter according to another example embodiment;

[0059] Figure 14 This is a schematic cross-sectional view of a spectral filter according to another example embodiment;

[0060] Figure 15 This is a schematic cross-sectional view of a spectral filter according to another example embodiment;

[0061] Figure 16 yes Figure 15 The transmission spectrum curve of the spectral filter;

[0062] Figure 17 This is a schematic cross-sectional view of a spectral filter according to another example embodiment;

[0063] Figure 18 This is a schematic cross-sectional view of a spectral filter according to another example embodiment;

[0064] Figure 19 This is a schematic cross-sectional view of a spectral filter according to another example embodiment;

[0065] Figure 20 It is available for use according to the example embodiment. Figure 19 A schematic cross-sectional view of the broadband filter with additional filters;

[0066] Figure 21 It is available as a possible embodiment according to another example. Figure 19 A schematic cross-sectional view of the broadband filter with additional filters;

[0067] Figure 22 This is a schematic cross-sectional view of a spectral filter according to another example embodiment;

[0068] Figure 23 It is applicable Figure 1A planar diagram of an example spectral filter for an image sensor;

[0069] Figure 24 It is applicable Figure 1 A planar view of another example of a spectral filter for an image sensor;

[0070] Figure 25 It is applicable Figure 1 A planar view of another example of a spectral filter for an image sensor;

[0071] Figure 26 This is a schematic block diagram of an electronic device including an image sensor according to an example embodiment;

[0072] Figure 27 yes Figure 26 A schematic block diagram of the camera module; and

[0073] Figure 28 , Figure 29 , Figure 30 , Figure 31 , Figure 32 , Figure 33 , Figure 34 , Figure 35 , Figure 36 and Figure 37 This is a view of various examples of electronic devices that utilize image sensors according to exemplary embodiments. Detailed Implementation

[0074] Reference will now be made in detail to the exemplary embodiments illustrated in the accompanying drawings, wherein similar reference numerals throughout the drawings denote similar elements. In this respect, the exemplary embodiments may take different forms and should not be construed as limited to the description set forth herein. Therefore, the exemplary embodiments are described below only with reference to the accompanying drawings to explain various aspects. The term “and / or” as used herein includes any and all combinations of one or more of the relevant listed items. Expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than modifying individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0075] For ease of explanation and clarity, the dimensions of each constituent element shown in the accompanying drawings may be enlarged. While embodiments have been described above, these embodiments are merely exemplary, and those skilled in the art to which this disclosure pertains can make various modifications and changes based on these descriptions.

[0076] When a component is disposed "above" or "on top of" another component, the component may include not only elements that directly contact the upper / lower / left / right side of the other component, but also elements disposed in a non-contact manner above / below / left / right of the other component. As used herein, the singular forms "a," "an," and "the" are intended to also include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "comprising" and / or "including" as used herein indicate the presence of the stated feature or component, but do not exclude the presence or addition of one or more other features or components.

[0077] In the context of describing this disclosure, the terms “a,” “an,” and “the,” and similar pronouns, should be interpreted to cover both singular and plural cases. Furthermore, the steps of all the methods described herein may be performed in any suitable order, unless otherwise indicated herein or explicitly stated otherwise by the context. This disclosure is not limited to the order of the described steps.

[0078] Furthermore, terms such as “section,” “unit,” “module,” and “block” used in the specification may refer to a unit for performing at least one function or operation, and the unit may be implemented by hardware, software, or a combination of hardware and software.

[0079] Furthermore, the connecting lines or connectors shown in the various figures are intended to represent the functional relationships and / or physical or logical couplings between various elements.

[0080] Any and all examples or language (such as "such as") provided herein are intended only to better illustrate this disclosure and do not limit the scope of this disclosure unless otherwise required.

[0081] Figure 1 This is a schematic block diagram of an image sensor 1000 according to an example embodiment.

[0082] refer to Figure 1 The image sensor 1000 may include a spectral filter 1100, a pixel array 4100, a timing controller (T / C) 4010, a line decoder 4020, and an output circuit 4030. The image sensor 1000 may include a charge-coupled device (CCD) image sensor or a complementary metal-oxide-semiconductor (CMOS) image sensor, but the embodiments are not limited thereto.

[0083] The spectral filter 1100 may include multiple unit filters that transmit light of different wavelength ranges and are arranged in a two-dimensional manner. The pixel array 4100 may include multiple pixels that detect light of different wavelengths transmitted through the unit filters. For example, the pixel array 4100 may include pixels arranged in a two-dimensional arrangement along multiple rows and columns. The row decoder 4020 may select one of the rows of the pixel array 4100 in response to a row address signal output from the timing controller 4010. The output circuit 4030 may output a light detection signal from the pixels arranged in the selected row, column by column. For this purpose, the output circuit 4030 may include a column decoder and an analog-to-digital converter (ADC). For example, the output circuit 4030 may include multiple ADCs arranged for each column between the column decoder and the pixel array 4100, or a single ADC arranged at the output of the column decoder. The timing controller 4010, the row decoder 4020, and the output circuit 4030 may be implemented by a single chip or separate chips. The processor for processing the image signal output through the output circuit 4030 can be implemented by a single chip having a timing controller 4010, a line decoder 4020, and the output circuit 4030. The pixel array 4100 may include multiple pixels that detect light of different wavelengths, and the pixels may be arranged in various ways.

[0084] The spectral filter 1100 of the image sensor 1000 is described in detail below. Figure 2 It is along Figure 1 A schematic cross-sectional view of the spectral filter intercepted by line II-II′.

[0085] refer to Figure 1 and Figure 2 The spectral filter 1100 may include multiple unit filters arranged in a one-dimensional or two-dimensional manner. Figure 2 Examples of cross sections for the six unit filters 111, 112, 113, 121, 122, and 123 are shown.

[0086] The spectral filter 1100 may include a first filter array 110 and a second filter array 120 arranged on a plane. While the first filter array 110 and the second filter array 120 may be arranged on substantially the same plane, the embodiment is not limited thereto. The first filter array 110 may include at least one unit filter having a center wavelength in a first wavelength range. The first wavelength range may be, for example, a range from about 250 nm to about 600 nm. However, this is merely exemplary, and the first wavelength range may also be various wavelength ranges depending on design conditions. Figure 2 An example of a first filter array 110 including a first unit filter 111, a second unit filter 112, and a third unit filter 113 is shown.

[0087] The second filter array 120 may include at least one unit filter having a center wavelength in a second wavelength range. The second wavelength range may be larger than the first wavelength range. For example, the second wavelength range may be from about 600 nm to about 1100 nm. However, this is merely exemplary, and the second wavelength range may also be various wavelength ranges depending on design conditions. Figure 2 The second filter array 120 is shown to include a fourth unit filter 121, a fifth unit filter 122, and a sixth unit filter 123.

[0088] Figure 2 The illustration shows each of the first filter array 110 and the second filter array 120 comprising three unit filters 111, 112 and 113, and 121, 122 and 123. However, the embodiments are not limited to this, and the number of unit filters constituting each of the first filter array 110 and the second filter array 120 may be varied.

[0089] Each of the first unit filter 111, the second unit filter 112, and the third unit filter 113 constituting the first filter array 110 can transmit light having a specific center wavelength in a first wavelength range, and has a Fabry-Perot structure in which cavities 141, 142, and 143 are arranged to be adjacent to each other in the horizontal direction and between two first metal reflective layers 131 and 132 that are spaced apart from each other in the vertical direction.

[0090] When light passes through the first metal reflective layers 131 and 132 and enters cavities 141, 142, and 143, the light can reciprocate between the first metal reflective layers 131 and 132 within cavities 141, 142, and 143, resulting in constructive and destructive interference. Light with a specific center wavelength and satisfying the constructive interference condition can exit to the outside of each of the first unit filter 111, the second unit filter 112, and the third unit filter 113. The wavelength band and center wavelength of the light passing through the first unit filter 111, the second unit filter 112, and the third unit filter 113 can be determined based on the reflection bands of the first metal reflective layers 131 and 132 and the characteristics (e.g., thickness and refractive index) of each of cavities 141, 142, and 143.

[0091] The first metal reflective layers 131 and 132 may comprise a first metal capable of reflecting light within a first wavelength range. For example, the first metal may comprise aluminum (Al), silver (Ag), gold (Au), titanium nitride (TiN), etc. However, the embodiments are not limited thereto. The first metal reflective layers 131 and 132 may have a thickness of, for example, tens of nanometers, but the embodiments are not limited thereto. For example, the first metal reflective layers 131 and 132 may have a thickness of about 10 nm to about 30 nm.

[0092] Cavities 141, 142, and 143, positioned as resonant layers between the first metallic reflective layers 131 and 132, may comprise dielectric materials with specific refractive indices. For example, the average refractive index of a cavity with a single transmission peak can range from 1.4 to 3.5, and the thickness can range from approximately 20 nm to 500 nm. For instance, when the center wavelength ranges from approximately 350 nm to 600 nm, the cavity thickness can range from approximately 20 nm to 150 nm, and the refractive index is between 1.4 and 3.5. When the center wavelength ranges from approximately 600 nm to 1000 nm, the cavity thickness can range from approximately 80 nm to 250 nm, and the refractive index is between 1.4 and 3.5. In multimode cavities, the cavity thickness can be increased.

[0093] For example, cavities 141, 142, and 143 may comprise silicon, silicon oxide, silicon nitride, hafnium oxide, or titanium oxide, or combinations thereof. For example, cavities 141, 142, and 143 may comprise a TiO2 / SiN multilayer or a patterned TiO2 / SiO2 structure. However, the embodiments are not limited thereto.

[0094] The first unit filter 111, the second unit filter 112, and the third unit filter 113 may have different center wavelengths within a first wavelength range. Therefore, the first unit filter 111, the second unit filter 112, and the third unit filter 113 may each include a first cavity 141, a second cavity 142, and a third cavity 143 with different thicknesses. Figure 2 An example is shown where the second cavity 142 is thicker than the first cavity 141 and the third cavity 143 is thicker than the second cavity 142. In this case, among the first unit filter 111, the second unit filter 112, and the third unit filter 113, the third unit filter 113 may have the longest center wavelength, and the first unit filter 111 may have the shortest center wavelength. Furthermore, some unit filters may have multiple center wavelengths corresponding to the thickness of the cavities.

[0095] Each of the fourth unit filter 121, the fifth unit filter 122, and the sixth unit filter 123 constituting the second filter array 120 can transmit light with a specific center wavelength in a second wavelength range, and can have a Fabry-Perot structure in which cavities 161, 162, and 163 are disposed between two second metallic reflective layers 151 and 152 spaced apart from each other. The band and center wavelength of the light passing through the fourth unit filter 121, the fifth unit filter 122, and the sixth unit filter 123 can be determined based on the reflection bands of the second metallic reflective layers 151 and 152 and the characteristics of cavities 161, 162, and 163.

[0096] The second metal reflective layers 151 and 152 may comprise a second metal capable of reflecting light in a second wavelength range. For example, the second metal may comprise copper (Cu), Ag, Au, TiN, etc. However, the embodiments are not limited thereto. The second metal reflective layers may have a thickness of, for example, tens of nanometers, but the embodiments are not limited thereto. For example, the second metal reflective layers 151 and 152 may have a thickness of about 40 nm to about 50 nm.

[0097] The second metal constituting the second metal reflective layers 151 and 152 can be a different metal than the first metal constituting the first metal reflective layers 131 and 132. For example, when the first metal reflective layers 131 and 132 comprise Al, the second metal reflective layers 151 and 152 can comprise Cu. Furthermore, for example, when the first metal reflective layers 131 and 132 comprise Al, the second metal reflective layers 151 and 152 can comprise Ag. Furthermore, for example, when the first metal reflective layers 131 and 132 comprise Ag, the second metal reflective layers 151 and 152 can comprise Cu.

[0098] Cavities 161, 162, and 163, which serve as resonant layers and are disposed between the second metal reflective layers 151 and 152, may comprise a dielectric material having a specific refractive index. For example, cavities 161, 162, and 163 may comprise silicon, silicon oxide, silicon nitride, hafnium oxide, or titanium oxide.

[0099] Cavities 161, 162, and 163 disposed between the second metal reflective layers 151 and 152 may comprise the same material as cavities 141, 142, and 143 disposed between the first metal reflective layers 131 and 132. In this case, the thickness of cavities 161, 162, and 163 disposed between the second metal reflective layers 151 and 152 may differ from the thickness of cavities 141, 142, and 143 disposed between the first metal reflective layers 131 and 132. Cavities 161, 162, and 163 disposed between the second metal reflective layers 151 and 152 may comprise the same material as cavities 141, 142, and 143 disposed between the first metal reflective layers 131 and 132. The thickness of the cavities may vary depending on the material of the metal reflective layers disposed on the cavities. The thickness of the cavities may correspond to the thickness of the skin depth of the metal reflective layer material. For example, for unit filters having the same center wavelength, the thickness of the cavity disposed between Al metal reflectors may be greater than that of the cavity disposed between Cu metal reflectors.

[0100] The fourth unit filter 121, the fifth unit filter 122, and the sixth unit filter 123 may have different center wavelengths in the second wavelength range. For this purpose, the fourth unit filter 121, the fifth unit filter 122, and the sixth unit filter 123 may include a fourth cavity 161, a fifth cavity 162, and a sixth cavity 163 with different thicknesses. Figure 2 The diagram illustrates a case where the fifth cavity 162 is thicker than the fourth cavity 161, and the sixth cavity 163 is thicker than the fifth cavity 162. In this case, among the fourth unit filter 121, the fifth unit filter 122, and the sixth unit filter 123, the sixth unit filter 123 can have the longest center wavelength, and the fourth unit filter 121 can have the shortest center wavelength. Furthermore, some unit filters can have multiple center wavelengths depending on the cavity thickness.

[0101] As described above, since the first filter array 110, in which cavities 141, 142 and 143 are disposed between the first metal reflective layers 131 and 132, and the second filter array 120, in which cavities 161, 162 and 163 are disposed between the second metal reflective layers 151 and 152, are arranged on a plane, a spectral filter with broadband characteristics including a first wavelength range and a second wavelength range (e.g., a wavelength range from ultraviolet to near-infrared) can be realized.

[0102] Figure 3A This is a cross-sectional view of a unit filter 11 with a TiO2 cavity between Cu reflective layers. Figure 3B Is Figure 3A A cross-sectional view of the unit filter 21 with a TiO2 dielectric layer in each of the upper and lower parts of the structure.

[0103] Figure 4 yes Figure 3A Unit filter 11 and Figure 3B The transmission spectrum curve of unit filter 21. Figure 4 In the text, "A" represents... Figure 3A The transmission spectrum of unit filter 11, and "B" indicates Figure 3B The transmission spectrum of unit filter 21. Reference Figure 4 It can be seen that Figure 3B The unit filter 21 is compared to Figure 3A The unit filter 11 has higher transmittance.

[0104] Therefore, a unit filter 21 with improved transmittance can be achieved by further providing a TiO2 dielectric layer in each of the upper and lower portions of the structure having a TiO2 cavity between the Cu reflective layers. The thickness of the TiO2 dielectric layer can be adjusted according to the center wavelength of the unit filter 21.

[0105] Figure 5 This is a schematic cross-sectional view of a spectral filter 1200 according to another example embodiment.

[0106] refer to Figure 5 The first filter array 210 may include a first unit filter 211, a second unit filter 212, and a third unit filter 213 having a center wavelength in a first wavelength range. The second filter array 220 may include a fourth unit filter 221, a fifth unit filter 222, and a sixth unit filter 223 having a center wavelength in a second wavelength range.

[0107] Each of the first unit filter 211, the second unit filter 212, and the third unit filter 213 constituting the first filter array 210 may include: two first metal reflective layers 131 and 132 arranged spaced apart from each other; cavities 141, 142, and 143 disposed between the first metal reflective layers 131 and 132; and a first dielectric layer 171 and a second dielectric layer 172 disposed below and above each of the cavities 141, 142, and 143, respectively. The first unit filter 211, the second unit filter 212, and the third unit filter 213 may include first cavities 141, second cavities 142, and third cavities 143 with different thicknesses to have different center wavelengths in a first wavelength range. The first metal reflective layers 131 and 132 and the first cavities 141, second cavities 142, and third cavities 143 are related to the above-mentioned... Figure 2 The descriptions are similar.

[0108] The first dielectric layer 171 may be disposed below the first metal reflective layer 131, and the second dielectric layer 172 may be disposed above the first metal reflective layer 132. The first dielectric layer 171 and the second dielectric layer 172 can improve the transmittance of the first unit filter 211, the second unit filter 212, and the third unit filter 213. The first dielectric layer 171 and the second dielectric layer 172 may have a single-layer structure. Each of the first dielectric layer 171 and the second dielectric layer 172 may include, for example, titanium oxide, silicon nitride, hafnium oxide, silicon oxide, high refractive index polymers, etc. However, the embodiments are not limited thereto.

[0109] The thicknesses of the first dielectric layer 171 and the second dielectric layer 172 can be varied according to the center wavelengths of the first unit filter 211, the second unit filter 212 and the third unit filter 213. Figure 5 The diagram illustrates how the thicknesses of the first dielectric layer 171 and the second dielectric layer 172 increase with the center wavelengths of the first unit filter 211, the second unit filter 212, and the third unit filter 213. While the thickness of each of the first dielectric layer 171 and the second dielectric layer 172 can range from approximately 10 nm to approximately 20,000 nm, the embodiment is not limited to this. For example, the thickness of each of the first dielectric layer 171 and the second dielectric layer 172 can range from approximately 10 nm to 2,000 nm.

[0110] Each of the fourth unit filter 221, the fifth unit filter 222, and the sixth unit filter 223 constituting the second filter array 220 may include: two second metal reflective layers 151 and 152 arranged spaced apart from each other; cavities 161, 162, and 163 disposed between the second metal reflective layers 151 and 152; and a third dielectric layer 181 and a fourth dielectric layer 182 disposed below and above each of cavities 161, 162, and 163, respectively. The fourth unit filter 221, the fifth unit filter 222, and the sixth unit filter 223 may include fourth cavities 161, fifth cavities 162, and sixth cavities 163 with different thicknesses to have different center wavelengths in a second wavelength range. The second metal reflective layers 151 and 152 and the fourth cavities 161, fifth cavities 162, and sixth cavities 163 are as described above.

[0111] The third dielectric layer 181 can be disposed below the second metal reflective layer 151, and the fourth dielectric layer 182 can be disposed above the second metal reflective layer 152. The third dielectric layer 181 and the fourth dielectric layer 182 can improve the transmittance of the fourth unit filter 221, the fifth unit filter 222, and the sixth unit filter 223. The third dielectric layer 181 and the fourth dielectric layer 182 can have a single-layer structure. Similar to the first dielectric layer 171 and the second dielectric layer 172 described above, each of the third dielectric layer 181 and the fourth dielectric layer 182 may include, for example, titanium oxide, silicon nitride, hafnium oxide, silicon oxide, high refractive index polymers, etc., but the embodiments are not limited thereto.

[0112] The thicknesses of the third dielectric layer 181 and the fourth dielectric layer 182 can be varied according to the center wavelengths of the fourth unit filter 221, the fifth unit filter 222, and the sixth unit filter 223. Figure 5 The diagram illustrates how the thicknesses of the third dielectric layer 181 and the fourth dielectric layer 182 increase with the center wavelengths of the fourth unit filter 221, the fifth unit filter 222, and the sixth unit filter 223. While the thickness of each of the third dielectric layer 181 and the fourth dielectric layer 182 can range from approximately 10 nm to approximately 20,000 nm, the embodiment is not limited to this. For example, the thickness of each of the third dielectric layer 181 and the fourth dielectric layer 182 can range from approximately 10 nm to 2,000 nm.

[0113] Figure 6 yes Figure 5 A graph showing the transmission spectrum of the spectral filter 1200. The first metal reflective layers 131 and 132 comprise Al, the second metal reflective layers 151 and 152 comprise Cu, and the first to sixth cavities 141, 142, 143, 161, 162, and 163 comprise TiO2. The first dielectric layer 171, the second dielectric layer 172, the third dielectric layer 181, and the fourth dielectric layer 182 all comprise TiO2. Figure 6 In the diagram, "C1" represents the transmission spectrum of the first filter array 210, and "C2" represents the transmission spectrum of the second filter array 220.

[0114] Figure 7 This is a schematic cross-sectional view of a spectral filter 1300 according to another example embodiment.

[0115] refer to Figure 7 The first filter array 310 may include at least one unit filter having a center wavelength in a first wavelength range. The second filter array 320 may include at least one unit filter having a center wavelength in a second wavelength range.

[0116] For ease of explanation, Figure 7The illustration shows a scenario where the first filter array 310 includes a single unit filter (first unit filter 315) and the second filter array 320 includes a single unit filter (second unit filter 325). When each of the first filter array 310 and the second filter array 320 includes multiple unit filters, these unit filters may include cavities of different thicknesses.

[0117] The first unit filter 315 constituting the first filter array 310 may include: two first metal reflective layers 131 and 132 arranged spaced apart from each other; a first cavity 145 disposed between the first metal reflective layers 131 and 132; and a first dielectric layer 371 and a second dielectric layer 372 disposed below and above the first cavity 145, respectively.

[0118] The first dielectric layer 371 may be disposed below the first metal reflective layer 131, and the second dielectric layer 372 may be disposed above the first metal reflective layer 132. Each of the first dielectric layer 371 and the second dielectric layer 372 may include titanium oxide, silicon nitride, hafnium oxide, silicon oxide, high refractive index polymer, etc., but the embodiments are not limited thereto.

[0119] The first dielectric layer 371 may have a single-layer structure. However, the embodiments are not limited to this, and the first dielectric layer 371 may have a multi-layer structure. The second dielectric layer 372 may have a multi-layer structure. For example, the second dielectric layer 372 may have a structure in which first material layers 372a and second material layers 372b, which are different from each other, are stacked alternately. The thickness and number of material layers constituting the second dielectric layer 372 may be adjusted according to the center wavelength of the first unit filter 315. The second dielectric layer 372 may include three or more material layers that are different from each other.

[0120] The second unit filter 325 constituting the second filter array 320 may include: second metal reflective layers 151 and 152 arranged spaced apart from each other; a second cavity 165 disposed between the second metal reflective layers 151 and 152; and a third dielectric layer 381 and a fourth dielectric layer 382 disposed below and above the second cavity 165, respectively.

[0121] The third dielectric layer 381 may be disposed below the second metal reflective layer 151, and the fourth dielectric layer 382 may be disposed above the second metal reflective layer 152. Similar to the first dielectric layer 371 and the second dielectric layer 372, the third dielectric layer 381 and the fourth dielectric layer 382 may include titanium oxide, silicon nitride, hafnium oxide, silicon oxide, high refractive index polymers, etc., but the embodiments are not limited thereto.

[0122] The third dielectric layer 381 can have a single-layer or multi-layer structure. The fourth dielectric layer 382 can have a multi-layer structure. For example, the fourth dielectric layer 382 can have a structure in which first material layers 382a and second material layers 382b, which are different from each other, are stacked alternately. The thickness and number of material layers constituting the fourth dielectric layer 382 can be adjusted according to the center wavelength of the second unit filter 325. The fourth dielectric layer 382 may include three or more material layers that are different from each other.

[0123] Figure 8 yes Figure 7 The transmission spectrum curve of the spectral filter 1300. Figure 8 The transmission spectrum is shown in the following case: Figure 7 In the spectral filter 1300, the first filter array 310 includes seven unit filters with different center wavelengths, and the second filter array 320 includes nine unit filters with different center wavelengths.

[0124] The first metal reflective layers 131 and 132 comprise Al, the second metal reflective layers 151 and 152 comprise Cu, and each of the first cavity 145 and the second cavity 165 comprises a multilayer film of TiO2 and SiN. Each of the first dielectric layer 371 and the third dielectric layer 381 comprises SiN, and each of the second dielectric layer 372 and the fourth dielectric layer 382 may comprise a multilayer film of TiO2 and SiN. Figure 8 In this diagram, "D1" represents the transmission spectrum of the first filter array 310, and "D2" represents the transmission spectrum of the second filter array 320. (Reference) Figure 8 As can be seen, the spectral filter 1300 achieves broadband characteristics and high transmittance.

[0125] Figure 9 This is a schematic cross-sectional view of a spectral filter 1400 according to another example embodiment. For ease of illustration, Figure 9 An example is shown where the first filter array 410 includes a single unit filter (first unit filter 415) and the second filter array 420 includes a single unit filter (second unit filter 425).

[0126] The first unit filter 415 constituting the first filter array 410 may include: three first metal reflective layers 431, 432 and 433 arranged at intervals from each other; and two first cavities 441 and 442 disposed between the first metal reflective layers 431, 432 and 433.

[0127] Each of the first metal reflective layers 431, 432, and 433 may include a first metal capable of reflecting light in a first wavelength range. Each of the first cavities 441 and 442 may include, for example, a dielectric material such as silicon, silicon oxide, silicon nitride, hafnium oxide, titanium oxide, etc.

[0128] The second unit filter 425 constituting the second filter array 420 may include: three second metal reflective layers 451, 452 and 453 arranged at intervals from each other; and two second cavities 461 and 462 disposed between the second metal reflective layers 451, 452 and 453.

[0129] Each of the second metal reflective layers 451, 452, and 453 may include a second metal capable of reflecting light in a second wavelength range. Each of the second cavities 461 and 462 may include, for example, a dielectric material such as silicon, silicon oxide, silicon nitride, hafnium oxide, titanium oxide, etc.

[0130] Although each of the first unit filter 415 and the second unit filter 425 is described above as including two cavities (441 and 442, and 461 and 462), each of the first unit filter 415 and the second unit filter 425 may include three or more cavities. Furthermore, although both the first unit filter 415 and the second unit filter 425 are described above as including multi-cavity structures, one of the first unit filter 415 and the second unit filter 425 may have a single-cavity structure and the other may have a multi-cavity structure.

[0131] Figure 10 This is a schematic cross-sectional view of a spectral filter 1500 according to another example embodiment. For ease of illustration, Figure 10 An example is shown where the first filter array 510 includes a single unit filter (first unit filter 515) and the second filter array 520 includes a single unit filter (second unit filter 525).

[0132] refer to Figure 10 The first unit filter 515 constituting the first filter array 510 may include: first metal reflective layers 431, 432, and 433 arranged spaced apart from each other; first cavities 441 and 442 disposed between the first metal reflective layers 431, 432, and 433; and a first dielectric layer 571 and a second dielectric layer 572 disposed below and above the first cavities 441 and 442, respectively. The first metal reflective layers 431, 432, and 433 and the first cavities 441 and 442 are as described above.

[0133] The first dielectric layer 571 may be disposed below the first metal reflective layer 431, and the second dielectric layer 572 may be disposed above the first metal reflective layer 433. The first dielectric layer 571 and the second dielectric layer 572 are used to improve transmittance and may have a single-layer or multi-layer structure. Although each of the first dielectric layer 571 and the second dielectric layer 572 may include, for example, titanium oxide, silicon nitride, hafnium oxide, silicon oxide, high refractive index polymers, etc., the embodiments are not limited thereto.

[0134] The second unit filter 525 constituting the second filter array 520 may include: second metal reflective layers 451, 452, and 453 arranged spaced apart from each other; second cavities 461 and 462 disposed between the second metal reflective layers 451, 452, and 453; and a third dielectric layer 581 and a fourth dielectric layer 582 disposed below and above the second cavities 461 and 462, respectively. The second metal reflective layers 451, 452, and 453 and the second cavities 461 and 462 are as described above.

[0135] The third dielectric layer 581 may be disposed below the second metal reflective layer 451, and the fourth dielectric layer 582 may be disposed above the second metal reflective layer 453. Although each of the third dielectric layer 581 and the fourth dielectric layer 582 may have a single-layer or multi-layer structure and includes, for example, titanium oxide, silicon nitride, hafnium oxide, silicon oxide, high refractive index polymers, etc., the embodiments are not limited thereto.

[0136] Figure 11 This is a schematic cross-sectional view of a spectral filter 1600 according to another example embodiment.

[0137] refer to Figure 11 The first filter array 610 may include at least one unit filter having a center wavelength in a first wavelength range, and the second filter array 620 may include at least one unit filter having a center wavelength in a second wavelength range. Figure 11 An example is shown where the first filter array 610 includes a first unit filter 611, a second unit filter 612, and a third unit filter 613, and the second filter array 620 includes a fourth unit filter 621, a fifth unit filter 622, and a sixth unit filter 623.

[0138] Each of the first unit filter 611, the second unit filter 612, and the third unit filter 613 constituting the first filter array 610 may include: two first metal reflective layers 631 and 632 arranged spaced apart from each other; and a first cavity 641, a second cavity 642, and a third cavity 643 disposed between the first metal reflective layers 631 and 632. Since the first metal reflective layers 631 and 632 are as described above, their description is omitted.

[0139] The first unit filter 611, the second unit filter 612, and the third unit filter 613 may have different center wavelengths within a first wavelength range. Therefore, the first unit filter 611, the second unit filter 612, and the third unit filter 613 may each include a first cavity 641, a second cavity 642, and a third cavity 643 with different effective refractive indices. Each of the first cavity 641, the second cavity 642, and the third cavity 643 may include: a first material layer; and at least one second material layer disposed within the first material layer and having a different refractive index than the first material layer.

[0140] Figure 11 The illustration shows each of the first cavity 641, the second cavity 642, and the third cavity 643 comprising a first material layer and a plurality of second material layers arranged parallel to each other and perpendicular to the first metal reflective layer 631 within the first material layer. Each of the first and second material layers may comprise, for example, silicon, silicon oxide, silicon nitride, or titanium oxide. The first and second material layers may have a high contrast to control the effective refractive index of the cavity. For example, the first material layer may comprise silicon oxide, and the second material layer may comprise titanium oxide. However, the embodiments are not limited thereto.

[0141] In the first cavity 641, the second cavity 642 and the third cavity 643, the effective refractive index can be changed by adjusting the width of the second material layer. Figure 11 The illustration shows a second material layer with a width that gradually increases from the first cavity 641 to the third cavity 643. For example, the spacing between the second material layers can range from approximately 100 nm to 300 nm, and the width of the second material layer can be approximately 0%, 20%, 40%, 60%, 80%, and 100% of the spacing, depending on the center wavelength of the unit filter. In this case, among the first cavity 641, second cavity 642, and third cavity 643, the third cavity 643 can have the highest effective refractive index, and the first cavity 641 can have the lowest effective refractive index. Among the first unit filter 611, second unit filter 612, and third unit filter 613, the third unit filter 613 can have the longest center wavelength, and the first unit filter 611 can have the shortest center wavelength. Furthermore, some unit filters can have multiple center wavelengths depending on the cavity thickness or effective refractive index.

[0142] Although examples of multiple second material layers arranged perpendicular to the first metal reflective layer 631 have been described above, the embodiments are not limited thereto, and the second material layers may be arranged parallel to the first metal reflective layer 631.

[0143] Each of the fourth unit filter 621, the fifth unit filter 622, and the sixth unit filter 623 constituting the second filter array 620 may include: second metal reflective layers 651 and 652 arranged spaced apart from each other; and a fourth cavity 661, a fifth cavity 662, and a sixth cavity 663 disposed between the second metal reflective layers 651 and 652. Since the second metal reflective layers 651 and 652 are as described above, their description is omitted.

[0144] The fourth unit filter 621, the fifth unit filter 622, and the sixth unit filter 623 may have different center wavelengths within the second wavelength range. Therefore, the fourth unit filter 621, the fifth unit filter 622, and the sixth unit filter 623 may each include a fourth cavity 661, a fifth cavity 662, and a sixth cavity 663 with different effective refractive indices. Each of the fourth cavity 661, the fifth cavity 662, and the sixth cavity 663 may include: a first material layer; and at least one second material layer disposed within the first material layer and having a different refractive index than the first material layer.

[0145] Figure 11 The illustration shows each of the fourth cavity 661, the fifth cavity 662, and the sixth cavity 663 comprising a first material layer and a plurality of second material layers arranged parallel to each other and perpendicular to the second metal reflective layer 651 within the first material layer. Each of the first and second material layers may comprise, for example, silicon, silicon oxide, silicon nitride, or titanium oxide.

[0146] In the fourth cavity 661, the fifth cavity 662 and the sixth cavity 663, the effective refractive index can be changed by adjusting the width of the second material layer. Figure 11 The diagram illustrates a second material layer with a gradually increasing width from the fourth cavity 661 to the sixth cavity 663. In this case, among the fourth cavity 661, fifth cavity 662, and sixth cavity 663, the sixth cavity 663 can have the highest effective refractive index, and the fourth cavity 661 can have the lowest effective refractive index. Among the fourth unit filter 621, fifth unit filter 622, and sixth unit filter 623, the sixth unit filter 623 can have the longest center wavelength, and the fourth unit filter 621 can have the shortest center wavelength. Furthermore, some unit filters can have multiple center wavelengths depending on the cavity thickness or effective refractive index.

[0147] The example described illustrates the case where both the first filter array 610 and the second filter array 620 have a single-cavity structure. However, both the first filter array 610 and the second filter array 620 can have a multi-cavity structure. Furthermore, one of the first filter array 610 and the second filter array 620 can have a single-cavity structure, and the other can have a multi-cavity structure.

[0148] Figure 12 This is a schematic cross-sectional view of a spectral filter 1700 according to another example embodiment. In addition to the cavity, it also includes an etch stop layer. Figure 12 Spectral filter 1700 and Figure 11 The spectral filter is the same as that of the 1600.

[0149] The first unit filter 711, the second unit filter 712, and the third unit filter 713 constituting the first filter array 710 may include a first cavity 741, a second cavity 742, and a third cavity 743 with different effective refractive indices. Each of the first cavity 741, the second cavity 742, and the third cavity 743 may include: an etch stop layer 740a disposed on the first metal reflective layer 631; a first material layer disposed on the etch stop layer 740a; and at least one second material layer disposed within the first material layer. The etch stop layer 740a can facilitate a patterning process for forming the cavity. Although the etch stop layer 740a may include, for example, silicon oxide, titanium oxide, or hafnium oxide, the embodiments are not limited thereto.

[0150] The fourth unit filter 721, the fifth unit filter 722, and the sixth unit filter 723 constituting the second filter array 720 may each include a fourth cavity 761, a fifth cavity 762, and a sixth cavity 763 with different effective refractive indices. Each of the fourth cavity 761, the fifth cavity 762, and the sixth cavity 763 may include: an etch stop layer 760a disposed on the second metal reflective layer 651; a first material layer disposed on the etch stop layer 760a; and at least one second material layer disposed inside the first material layer.

[0151] Figure 13 This is a schematic cross-sectional view of a spectral filter 1800 according to another example embodiment. Figure 13 The spectral filter 1800 can be used with Figure 12 The spectral filter 1700 is basically the same, except that the first dielectric layer 871 and the second dielectric layer 872 are respectively disposed below and above the first filter array 810, and the third dielectric layer 881 and the fourth dielectric layer 882 are respectively disposed below and above the second filter array 820.

[0152] refer to Figure 13The first unit filter 811, the second unit filter 812, and the third unit filter 813 constituting the first filter array 810 may include: first metal reflective layers 631 and 632 arranged spaced apart from each other; a first cavity 841, a second cavity 842, and a third cavity 843 disposed between the first metal reflective layers 631 and 632; and a first dielectric layer 871 and a second dielectric layer 872 respectively disposed below and above the first cavity 841, the second cavity 842, and the third cavity 843. The first unit filter 811, the second unit filter 812, and the third unit filter 813 may each include a first cavity 841, a second cavity 842, and a third cavity 843 with different effective refractive indices to have different center wavelengths in a first wavelength range.

[0153] The first dielectric layer 871 may be disposed below the first metal reflective layer 631, and the second dielectric layer 872 may be disposed above the first metal reflective layer 632. The first dielectric layer 871 and the second dielectric layer 872 improve the transmittance of the first unit filter 811, the second unit filter 812, and the third unit filter 813.

[0154] Each of the first dielectric layer 871 and the second dielectric layer 872 may include: a first material layer; and at least one second material layer disposed within the first material layer and having a different refractive index than the first material layer. Each of the first and second material layers may include, for example, titanium oxide, silicon nitride, hafnium oxide, silicon oxide, high refractive index polymers, etc., but the embodiments are not limited thereto. The effective refractive index of the first dielectric layer 871 and the second dielectric layer 872 can be adjusted by changing the width of the second material layer according to the center wavelength of the first unit filter 811, the second unit filter 812, and the third unit filter 813. Each of the first dielectric layer 871 and the second dielectric layer 872 may also include an etch stop layer.

[0155] Each of the fourth unit filter 821, fifth unit filter 822, and sixth unit filter 823 constituting the second filter array 820 may include: second metal reflective layers 651 and 652 arranged spaced apart from each other; a fourth cavity 861, a fifth cavity 862, and a sixth cavity 863 disposed between the second metal reflective layers 651 and 652; and a third dielectric layer 881 and a fourth dielectric layer 882 disposed below and above the fourth cavity 861, the fifth cavity 862, and the sixth cavity 863, respectively. The fourth unit filter 821, the fifth unit filter 822, and the sixth unit filter 823 may each include a fourth cavity 861, a fifth cavity 862, and a sixth cavity 863 with different effective refractive indices to have different center wavelengths in a second wavelength range.

[0156] The third dielectric layer 881 may be disposed below the second metal reflective layer 651, and the fourth dielectric layer 882 may be disposed above the second metal reflective layer 652. Each of the third dielectric layer 881 and the fourth dielectric layer 882 may include: a first material layer; and at least one second material layer disposed within the first material layer and having a different refractive index than the first material layer. The effective refractive index of the third dielectric layer 881 and the fourth dielectric layer 882 can be adjusted by changing the width of the second material layer according to the center wavelength of the fourth unit filter 821, the fifth unit filter 822, and the sixth unit filter 823. Each of the third dielectric layer 881 and the fourth dielectric layer 882 may also include an etch stop layer.

[0157] Figure 14 This is a schematic cross-sectional view of a spectral filter 1900 according to another example embodiment.

[0158] refer to Figure 14 The first filter array 910 may include at least one unit filter having a center wavelength in a first wavelength range, and the second filter array 920 may include at least one unit filter having a center wavelength in a second wavelength range. Figure 14 The diagram illustrates a scenario where the first filter array 910 includes a first unit filter 911, a second unit filter 912, and a third unit filter 913, and the second filter array 920 may include a fourth unit filter 921, a fifth unit filter 922, and a sixth unit filter 923.

[0159] The first wavelength range can be shorter than the second wavelength range. For example, the first wavelength range can be from about 250 nm to about 600 nm, and the second wavelength range can be from about 600 nm to about 1100 nm. However, this is only an example, and the first and second wavelength ranges can be varied depending on design conditions. For example, the first wavelength range can be longer than the second wavelength range.

[0160] Each of the first unit filter 911, the second unit filter 912, and the third unit filter 913 constituting the first filter array 910 that transmits light having a specific center wavelength in the first wavelength range may have a Fabry-Perot structure in which cavities 941, 942, and 943 are disposed between two metal reflective layers 931 and 932 spaced apart from each other.

[0161] When light passes through metal reflective layers 931 and 932 and is incident on the first cavity 941, the second cavity 942, and the third cavity 943, the light can reciprocate between the metal reflective layers 931 and 932 within the first cavity 941, the second cavity 942, and the third cavity 943, resulting in constructive and destructive interference. Light with a specific center wavelength and satisfying the constructive interference condition can exit to the outside of each of the first unit filter 911, the second unit filter 912, and the third unit filter 913. The wavelength band and center wavelength of the light passing through the first unit filter 911, the second unit filter 912, and the third unit filter 913 can be determined based on the reflection bands of the metal reflective layers 931 and 932 and the characteristics of the first cavity 941, the second cavity 942, and the third cavity 943.

[0162] Metal reflective layers 931 and 932 may comprise a specific metal capable of reflecting light within a first wavelength range. When the first wavelength range is shorter than the second wavelength range, each of metal reflective layers 931 and 932 may comprise, for example, Al, Ag, Au, TiN, etc. When the first wavelength range is longer than the second wavelength range, metal reflective layers 931 and 932 may comprise, for example, Cu, Ag, Au, TiN, etc. However, this is merely exemplary. While metal reflective layers 931 and 932 may have a thickness of tens of nanometers, the embodiments are not limited thereto.

[0163] Although the first cavity 941, second cavity 942, and third cavity 943 disposed between the metal reflective layers 931 and 932 may comprise, for example, silicon, silicon oxide, silicon nitride, or titanium oxide, the embodiments are not limited thereto. The first unit filter 911, second unit filter 912, and third unit filter 913 may have different center wavelengths within a first wavelength range. For this purpose, the first unit filter 911, second unit filter 912, and third unit filter 913 may each comprise a first cavity 941, a second cavity 942, and a third cavity 943 with different thicknesses. Although not shown, because the first unit filter 911, second unit filter 912, and third unit filter 913 comprise cavities with different effective refractive indices, they can have different center wavelengths.

[0164] Each of the fourth unit filter 921, the fifth unit filter 922, and the sixth unit filter 923 constituting the second filter array 920 that transmits light having a specific center wavelength in the second wavelength range may have a Fabry-Perot structure, in which the fourth cavity 961, the fifth cavity 962, and the sixth cavity 963 are disposed between two Bragg reflector layers 951 and 952 spaced apart from each other.

[0165] When light passes through Bragg reflectors 951 and 952 and is incident on cavities 961, 962, and 963, the light can reciprocate between Bragg reflectors 951 and 952 within cavities 961, 962, and 963, resulting in constructive and destructive interference. Light with a specific center wavelength and satisfying the constructive interference condition can exit to the outside of each of the fourth unit filter 921, fifth unit filter 922, and sixth unit filter 923. The wavelength band and center wavelength of the light passing through the fourth unit filter 921, fifth unit filter 922, and sixth unit filter 923 can be determined based on the reflection bands of Bragg reflectors 951 and 952 and the characteristics of cavities 961, 962, and 963.

[0166] Bragg reflector layers 951 and 952 may include distributed Bragg reflectors (DBRs). Each of Bragg reflector layers 951 and 952 may have a structure in which at least one first material layer 951a and 952a and at least one second material layer 951b and 952b with different refractive indices are alternately stacked. The first material layer 951a and 952a or the second material layer 951b and 952b may include, for example, silicon oxide, titanium oxide, silicon nitride, or silicon. However, the embodiments are not limited thereto.

[0167] When any one of the first material layers 951a and 952a and the second material layers 951b and 952b constituting the Bragg reflector layers 951 and 952 includes a material (such as silicon) capable of absorbing light in the first wavelength range (i.e., short wavelength light), light in the first wavelength range can be prevented from passing through the fourth unit filter 921, the fifth unit filter 922 and the sixth unit filter 923.

[0168] Although the fourth cavity 961, the fifth cavity 962, and the sixth cavity 963 disposed between the Bragg reflector layers 951 and 952 may include, for example, silicon, silicon oxide, silicon nitride, hafnium oxide, or titanium oxide, the embodiments are not limited thereto.

[0169] The fourth unit filter 921, the fifth unit filter 922, and the sixth unit filter 923 can have different center wavelengths within the second wavelength range. Therefore, the fourth unit filter 921, the fifth unit filter 922, and the sixth unit filter 923 can include fourth cavities 961, fifth cavities 962, and sixth cavities 963 with different thicknesses. Because the fourth unit filter 921, the fifth unit filter 922, and the sixth unit filter 923 include cavities with different effective refractive indices, they can have different center wavelengths.

[0170] As described above, since the first filter array 910, in which a first cavity 941, a second cavity 942, and a third cavity 943 are disposed between the metal reflective layers 931 and 932, and the second filter array 920, in which a fourth cavity 961, a fifth cavity 962, and a sixth cavity 963 are disposed between the Bragg reflective layers 951 and 952, are arranged on a plane, a spectral filter with broadband characteristics including a first wavelength range and a second wavelength range can be realized.

[0171] Figure 15 This is a schematic cross-sectional view of a spectral filter 2000 according to another example embodiment. For ease of illustration, Figure 15 The diagram illustrates a case where the first filter array 1010 includes a single unit filter (first unit filter 1015) and the second filter array 1020 includes a single unit filter (second unit filter 1025).

[0172] refer to Figure 15 The first unit filter 1015 constituting the first filter array 1010 may include: two metal reflective layers 1031 and 1032 arranged spaced apart from each other; and a first cavity 1045 disposed between the metal reflective layers 1031 and 1032. The metal reflective layers 1031 and 1032 and the first cavity 1045 are as described above.

[0173] The second unit filter 1025 constituting the second filter array 1020 may have a multi-cavity structure. For example, the second unit filter 1025 may include: three Bragg reflector layers 1051, 1052, and 1053 arranged spaced apart from each other; and two second cavities 1061 and 1062 disposed between the Bragg reflector layers 1051, 1052, and 1053. The Bragg reflector layers 1051, 1052, and 1053 and the second cavities 1061 and 1062 are as described above. The number of first and second material layers constituting each of the Bragg reflector layers 1051, 1052, and 1053 can be varied. Although Figure 15 The illustration shows a second unit filter 1025 including second cavities 1061 and 1062, but the embodiments are not limited thereto, and the second unit filter 1025 may include three or more cavities.

[0174] Figure 16 yes Figure 15 The transmission spectrum curve of the 2000 spectral filter. Figure 16 The transmission spectrum is shown in the following case: Figure 15 In the spectral filter 2000, the first filter array 1010 includes four unit filters with different center wavelengths and the second filter array 1020 includes four unit filters with different center wavelengths.

[0175] In the first filter array 1010, the metal reflective layers 1031 and 1032 comprise Al, and the first cavity 1045 comprises a multilayer film of TiO2 and SiN. In the second filter array 1020, each of the Bragg reflective layers 1051, 1052, and 1053 may comprise Si and SiO2, and the second cavities 1061 and 1062 comprise SiO2. Figure 16 In the diagram, "S1" represents the transmission spectrum of the first filter array 1010, and "S2" represents the transmission spectrum of the second filter array 1020.

[0176] The above description depicts a scenario where the first unit filter 1015 has a single-cavity structure and the second unit filter 1025 has a multi-cavity structure. However, the first unit filter 1015 can have a multi-cavity structure and the second unit filter 1025 can have a single-cavity structure. Furthermore, both the first unit filter 1015 and the second unit filter 1025 can have a multi-cavity structure.

[0177] Figure 17 This is a schematic cross-sectional view of a spectral filter 2100 according to another example embodiment.

[0178] refer to Figure 17 The spectral filter 2100 may include: a first filter array 1110 and a second filter array 1120; and a microlens array 1150 disposed above the first filter array 1110 and the second filter array 1120. The first filter array 1110 may include a first unit filter 1111, a second unit filter 1112 and a third unit filter 1113 having a center wavelength in a first wavelength range, and the second filter array 1120 may include a fourth unit filter 1121, a fifth unit filter 1122 and a sixth unit filter 1123 having a center wavelength in a second wavelength range.

[0179] The first filter array 1110 may include any one of the first filter arrays 110 to 1010 described above, and the second filter array 1120 may include any one of the second filter arrays 120 to 1020 described above. Descriptions of the first filter array 1110 and the second filter array 1120 are omitted.

[0180] A microlens array 1150 having multiple microlenses 1150a can be disposed above a first filter array 1110 and a second filter array 1120. The microlenses 1150a can be used to focus external light so that it is incident on appropriate unit filters 1111, 1112, 1113, 1121, 1122 and 1123.

[0181] Figure 17The illustration shows a configuration where microlens 1150a is arranged in a one-to-one correspondence with unit filters 1111, 1112, 1113, 1121, 1122, and 1123. However, this is merely exemplary, and at least two of unit filters 1111, 1112, 1113, 1121, 1122, and 1123 may be configured to correspond to one microlens 1150a.

[0182] Figure 18 This is a schematic cross-sectional view of a spectral filter 2200 according to another example embodiment.

[0183] refer to Figure 18 The spectral filter 2200 may include: a first filter array 1210 and a second filter array 1220; and a color filter array 1230. The first filter array 1210, the second filter array 1220, and the color filter array 1230 may be arranged on substantially the same plane.

[0184] The first filter array 1210 may include a first unit filter 1211, a second unit filter 1212, and a third unit filter 1213 having a center wavelength in a first wavelength range, and the second filter array 1220 may include a fourth unit filter 1221, a fifth unit filter 1222, and a sixth unit filter 1223 having a center wavelength in a second wavelength range. The first filter array 1210 may include any one of the first filter arrays 110 to 1010 described above, and the second filter array 1220 may include any one of the second filter arrays 120 to 1020 described above. Descriptions of the first filter array 1210 and the second filter array 1220 are omitted.

[0185] The color filter array 1230 may include, for example, a red color filter 1231, a green color filter 1232, and a blue color filter 1233. The red color filter 1231 can transmit red light with a wavelength of about 600 nm to about 700 nm, the green color filter 1232 can transmit green light with a wavelength of about 500 nm to about 600 nm, and the blue color filter 1233 can transmit blue light with a wavelength of about 400 nm to about 500 nm. For example, typical color filters used in color display devices such as liquid crystal display devices and organic light-emitting display devices can be used as red color filter 1231, green color filter 1232, and blue color filter 1233. A microlens array 1250 including a plurality of microlenses 1250a may be further disposed above the first filter array 1210, the second filter array 1220, and the color filter array 1230.

[0186] According to the example embodiment, information related to the center wavelengths of unit filters 1211, 1212, 1213, 1221, 1222, and 1223 can be obtained not only by using the first filter array 1210 and the second filter array 1220, but also by using the color filter array 1230, information related to the wavelengths of red, green, and blue light can be obtained. The color filter array 1230 can have a wider band than the first filter array 1210 and the second filter array 1220, and can improve the spectral resolution of the image.

[0187] Figure 19 This is a schematic cross-sectional view of a spectral filter 2300 according to another example embodiment.

[0188] refer to Figure 19 The spectral filter 2300 may include: a first filter array 1310 and a second filter array 1320; and an additional filter array 2500 disposed on the first filter array 1310 and the second filter array 1320. The first filter array 1310 may include a first unit filter 1311, a second unit filter 1312 and a third unit filter 1313 having a center wavelength in a first wavelength range, and the second filter array 1320 may include a fourth unit filter 1321, a fifth unit filter 1322 and a sixth unit filter 1323 having a center wavelength in a second wavelength range.

[0189] The first filter array 1310 may include any one of the first filter arrays 110 to 1010 described above, and the second filter array 1320 may include any one of the second filter arrays 120 to 1020 described above. Descriptions of the first filter array 1310 and the second filter array 1320 are omitted.

[0190] The additional filter array 2500 may include multiple first to third additional filters 2501, 2502 and 2503. Figure 19The following configuration is illustrated: a first additional filter 2501 is configured to correspond to a first unit filter 1311 and a second unit filter 1312; a second additional filter 2502 is configured to correspond to a third unit filter 1313 and a fourth unit filter 1321; and a third additional filter 2503 is configured to correspond to a fifth unit filter 1322 and a sixth unit filter 1323. However, this is merely exemplary, and each of the first additional filter 2501, the second additional filter 2502, and the third additional filter 2503 may be configured to correspond to one unit filter (1311, 1312, 1313, 1321, 1322, or 1323) or three or more unit filters (1311, 1312, 1313, 1321, 1322, and 1323).

[0191] Each of the first supplementary filter 2501, the second supplementary filter 2502, and the third supplementary filter 2503 can block light in an undesirable wavelength band for the corresponding unit filter (1311, 1312, 1313, 1321, 1322, and 1323). For example, when the first unit filter 1311 and the second unit filter 1312 have a center wavelength in the band of about 400 nm to about 500 nm, the first supplementary filter 2501 may include a blue filter that transmits blue light. Furthermore, when the third unit filter 1313 and the fourth unit filter 1321 have a center wavelength in the band of about 500 nm to about 600 nm, the second supplementary filter 2502 may include a green filter that transmits green light. When the fifth unit filter 1322 and the sixth unit filter 1323 have a center wavelength in the band of about 600 nm to about 700 nm, the third supplementary filter 2503 may include a red filter that transmits red light.

[0192] The additional filter array 2500 may include a color filter array. In this case, the first additional filter 2501, the second additional filter 2502, and the third additional filter 2503 may each include a blue color filter, a green color filter, and a red color filter, respectively. For example, typical color filters used in color display devices such as liquid crystal display devices and organic light-emitting display devices can be used as blue, green, and red color filters.

[0193] The additional filter array 2500 may include a broadband filter array. In this case, the first additional filter 2501, the second additional filter 2502, and the third additional filter 2503 may each include a first broadband filter, a second broadband filter, and a third broadband filter, respectively. Each of the first broadband filter, the second broadband filter, and the third broadband filter may have, for example, a multi-cavity structure or a metal mirror structure.

[0194] Figure 20 It is available for use according to the example embodiment. Figure 19 A schematic cross-sectional view of the broadband filter 2510 with additional filters.

[0195] refer to Figure 20 The broadband filter 2510 may include: a plurality of reflective layers 2513, 2514, and 2515 arranged spaced apart from each other; and a plurality of cavities 2511 and 2512 disposed between the reflective layers 2513, 2514, and 2515. Although Figure 20 An example of three reflective layers 2513, 2514 and 2515 and two cavities 2511 and 2512 is shown, but the number of reflective layers 2513, 2514 and 2515 and cavities 2511 and 2512 can be varied.

[0196] Each of reflective layers 2513, 2514, and 2515 may include a DBR. Each of reflective layers 2513, 2514, and 2515 may have a structure in which multiple material layers with different refractive indices are stacked alternately. Each of cavities 2511 and 2512 may include a material with a specific refractive index or two or more materials with different refractive indices.

[0197] Figure 21 It is available as a possible embodiment according to another example. Figure 19 A schematic cross-sectional view of the broadband filter 2520 of the first to third additional filters 2501, 2502 and 2503.

[0198] refer to Figure 21 The broadband filter 2520 may include: two metal mirror layers 2522 and 2523 arranged spaced apart from each other; and a cavity 2521 disposed between the metal mirror layers 2522 and 2523.

[0199] Figure 22 This is a schematic cross-sectional view of a spectral filter 3000 according to another example embodiment.

[0200] refer to Figure 22 The spectral filter 3000 may include: a first filter array 1410 and a second filter array 1420; and a short-wavelength absorption filter 1610 and a long-wavelength cutoff filter 1620 disposed on the first filter array 1410 and the second filter array 1420.

[0201] The first filter array 1410 may include a first unit filter 1411, a second unit filter 1412 and a third unit filter 1413 having a center wavelength in a first wavelength range, and the second filter array 1420 may include a fourth unit filter 1421, a fifth unit filter 1422 and a sixth unit filter 1423 having a center wavelength in a second wavelength range.

[0202] The first filter array 1410 may include any one of the first filter arrays 110 to 1010 described above, and the second filter array 1420 may include any one of the second filter arrays 120 to 1020 described above. Descriptions of the first filter array 1410 and the second filter array 1420 are omitted.

[0203] The short-wavelength absorption filter 1610 can be disposed in some of the unit filters (1411, 1413, and 1422) among the first to sixth unit filters 1411, 1412, 1413, 1421, 1422, and 1423, and the long-wavelength cutoff filter 1620 can be disposed in the other unit filters (1412, 1421, and 1423) among the first to sixth unit filters 1411, 1412, 1413, 1421, 1422, and 1423. Although Figure 22 The illustration shows each of the short-wavelength absorption filter 1610 and the long-wavelength cutoff filter 1620 configured to correspond to one unit filter (1411, 1412, 1413, 1421, 1422, or 1423), but the embodiments are not limited thereto, and each of the short-wavelength absorption filter 1610 and the long-wavelength cutoff filter 1620 may be configured to correspond to two or more unit filters (1411, 1412, 1413, 1421, 1422, and 1423).

[0204] The short-wavelength absorption filter 1610 can, for example, block short-wavelength light such as visible light. The short-wavelength absorption filter 1610 can be fabricated by depositing silicon, for example, as a material for absorbing visible light, onto some of the unit filters (1411, 1413, and 1422) from the first to the sixth unit filters 1411, 1412, 1413, 1421, 1422, and 1423. The unit filters (1411, 1413, and 1422) with the short-wavelength absorption filter 1610 can transmit near-infrared (NIR) light with wavelengths longer than visible light.

[0205] The long-wavelength cutoff filter 1620 can, for example, cut off light with a long wavelength such as NIR light. The long-wavelength cutoff filter 1620 may include an NIR light cutoff filter. Unit filters (1412, 1421, and 1423) provided with the long-wavelength cutoff filter 1620 can transmit visible light with a wavelength shorter than that of NIR light.

[0206] According to the example embodiment, since the short-wavelength absorption filter 1610 and the long-wavelength cutoff filter 1620 are disposed on the first filter array 1410 and the second filter array 1420, a spectral filter 3000 with broadband characteristics capable of achieving the range from the visible light band to the NIR band can be manufactured.

[0207] Figure 23 It is applicable Figure 1 A plan view of an example of the spectral filter 9100 of the image sensor 1000.

[0208] refer to Figure 23 The spectral filter 9100 may include multiple filter banks 9110 arranged in a two-dimensional manner. Each of the filter banks 9110 may include sixteen unit filters F1 to F16 arranged in a 4×4 array.

[0209] The first unit filter F1 and the second unit filter F2 can have center wavelengths UV1 and UV2 in the ultraviolet range, and the third unit filters F3 to the fifth unit filters F5 can have center wavelengths B1 to B3 in the blue light range. The sixth unit filters F6 to the eleventh unit filters F11 can have center wavelengths G1 to G6 in the green light range, and the twelfth unit filters F12 to the fourteenth unit filters F14 can have center wavelengths R1 to R3 in the red light range. The fifteenth unit filter F15 and the sixteenth unit filter F16 can have center wavelengths NIR1 and NIR2 in the near-infrared range.

[0210] Figure 24 It is applicable Figure 1 A plan view of another example of the spectral filter 9100 of the image sensor 1000. For ease of illustration, Figure 24 This is a planar diagram of a 9120 filter bank.

[0211] refer to Figure 24Each filter bank 9120 may include nine unit filters F1 to F9 arranged in a 3×3 array. The first unit filter F1 and the second unit filter F2 may have center wavelengths UV1 and UV2 in the ultraviolet range, and the fourth unit filter F4, the fifth unit filter F5, and the seventh unit filter F7 may have center wavelengths B1 to B3 in the blue light range. The third unit filter F3 and the sixth unit filter F6 may have center wavelengths G1 and G2 in the green light range, and the eighth unit filter F8 and the ninth unit filter F9 may have center wavelengths R1 and R2 in the red light range.

[0212] Figure 25 It is applicable Figure 1 A plan view of another example of the spectral filter 9100 of the image sensor 1000. For ease of illustration, Figure 25 This is a planar diagram of a 9130 filter bank.

[0213] refer to Figure 25 Each filter bank 9130 may include twenty-five unit filters F1 to F25 arranged in a 5×5 array. The first unit filters F1 to the third unit filters F3 may have center wavelengths UV1 to UV3 in the ultraviolet range, and the sixth unit filter F6, the seventh unit filter F7, the eighth unit filter F8, the eleventh unit filter F11, and the twelfth unit filter F12 may have center wavelengths B1 to B5 in the blue light range. The fourth unit filter F4, the fifth unit filter F5, the ninth unit filter F9, the sixteenth unit filter F16, the seventeenth unit filter F17, the twenty-first unit filter F21, and the twenty-second unit filter F22 may have center wavelengths G1 to G7 in the green light range, and the tenth unit filter F10, the thirteenth unit filter F13, the fourteenth unit filter F14, the fifteenth unit filter F15, the eighteenth unit filter F18, and the nineteenth unit filter F19 may have center wavelengths R1 to R6 in the red light range. The twentieth unit filter F20, the twenty-third unit filter F23, the twenty-fourth unit filter F24, and the twenty-fifth unit filter F25 can have center wavelengths NIR1 to NIR4 in the near-infrared range.

[0214] The image sensor 1000 with the aforementioned spectral filter can be used in various high-performance optical devices or high-performance electronic devices. Electronic devices may include, for example, smartphones, mobile phones, cellular phones, personal digital assistants (PDAs), laptops, personal computers (PCs), various portable devices, home appliances, security cameras, medical cameras, automobiles, Internet of Things (IoT) devices, and other mobile or non-mobile computing devices, but the embodiments are not limited thereto.

[0215] In addition to the image sensor 1000, the electronic device may also include a processor (e.g., an application processor (AP)) for controlling the image sensor, controlling multiple hardware or software components by driving an operating system or application via the processor, and performing various data processing and calculations. The processor may also include a graphics processing unit (GPU) and / or an image signal processor. When the processor includes an image signal processor, images (or videos) acquired by the image sensor can be stored and / or output using the processor.

[0216] Figure 26 This is a schematic block diagram of an electronic device ED01 including an image sensor 1000 according to an embodiment. (See reference) Figure 26 In the network environment ED00, electronic device ED01 can communicate with another electronic device ED02 via a first network ED98 (short-range wireless communication network, etc.) or with another electronic device ED04 and / or server ED08 via a second network ED99 (long-range wireless communication network, etc.). Electronic device ED01 can communicate with electronic device ED04 via server ED08. Electronic device ED01 may include a processor ED20, a memory ED30, an input device ED50, an audio output device ED55, a display device ED60, an audio module ED70, a sensor module ED76, an interface ED77, a haptic module ED79, a camera module ED80, a power management module ED88, a battery ED89, a communication module ED90, a user identification module ED96, and / or an antenna module ED97. In electronic device ED01, some components (such as the display device ED60) may be omitted or other components may be added. Some components may be implemented by an integrated circuit. For example, the sensor module ED76 (fingerprint sensor, iris sensor, illuminance sensor, etc.) can be implemented by embedding it in the display device ED60 (display, etc.). Furthermore, when the image sensor 1000 includes spectral functionality, some functions of the sensor module ED76 (color sensor and illuminance sensor) can be implemented by the image sensor 1000 instead of a separate sensor module.

[0217] Processor ED20 can control one or more other components (hardware and software components, etc.) of electronic device ED01 connected to processor ED20 by executing software (program ED40, etc.) and perform various data processing or calculations. As part of the data processing or calculation, processor ED20 can load commands and / or data received from other components (sensor module ED76, communication module ED90, etc.) into volatile memory ED32, process the commands and / or data stored in volatile memory ED32, and store the result data in non-volatile memory ED34. Processor ED20 may include a main processor ED21 (central processing unit, application processor, etc.) and an auxiliary processor ED23 (graphics processing unit, image signal processor, sensor hub processor, communication processor, etc.) that can operate independently of or with the main processor ED21. Auxiliary processor ED23 can use less power than main processor ED21 and can perform specialized functions.

[0218] The auxiliary processor ED23 can replace the main processor ED21 when the main processor ED21 is inactive (sleep state) or, when the main processor ED21 is active (application execution state), work with the main processor ED21 to control the functions and / or states related to some components of the electronic device ED01 (display device ED60, sensor module ED76, communication module ED90, etc.). The auxiliary processor ED23 (image signal processor, communication processor, etc.) can be implemented as part of other functionally related components (camera module ED80, communication module ED90, etc.).

[0219] The memory ED30 can store various data required by the constituent elements of the electronic device ED01 (processor ED20, sensor module ED76, etc.). The data may include, for example, software (program ED40, etc.) and input and / or output data related to commands associated with it. The memory ED30 may include volatile memory ED32 and / or non-volatile memory ED34. The non-volatile memory ED34 may include internal memory ED36 fixedly installed in the electronic device ED01 and removable external memory ED38.

[0220] The program ED40 can be stored as software in the memory ED30 and may include the operating system ED42, middleware ED44 and / or application ED46.

[0221] Input device ED50 can receive commands and / or data from outside the electronic device ED01 (such as from a user) for use by the constituent elements (such as processor ED20) of the electronic device ED01. Input device ED50 may include a microphone, mouse, keyboard, and / or digital pen (such as a stylus pen).

[0222] Audio output device ED55 can output audio signals to the external device ED01. Audio output device ED55 may include a speaker and / or a handset. The speaker can be used for general purposes such as multimedia playback or recording playback, and the handset can be used to receive incoming calls. The handset can be implemented by being coupled as part of the speaker or by using a separate, independent device.

[0223] Display device ED60 can visually provide information to the outside of electronic device ED01. Display device ED60 may include a display, holographic device or projector, and control circuitry for controlling the corresponding device. Display device ED60 may include touch circuitry configured to detect touch and / or sensor circuitry configured to measure the intensity of the force generated by the touch (pressure sensor, etc.).

[0224] The audio module ED70 can convert sound into electrical signals or vice versa. The audio module ED70 can obtain sound through the input device ED50, or output sound through the speakers and / or headphones of another electronic device (such as electronic device ED02) connected to the audio output device ED55 and / or electronic device ED01 via wired or wireless means.

[0225] The sensor module ED76 can detect the operating status (power, temperature, etc.) or external environmental status (user status, etc.) of the electronic device ED01, and generate electrical signals and / or data values ​​corresponding to the detected status. The sensor module ED76 may include gesture sensors, gyroscope sensors, barometric pressure sensors, magnetic sensors, accelerometers, grip sensors, proximity sensors, color sensors, IR sensors, biometric sensors, temperature sensors, humidity sensors, and / or illuminance sensors.

[0226] Interface ED77 can support one or more specified protocols used by electronic device ED01 to connect to another electronic device (electronic device ED02, etc.) via wired or wireless means. Interface ED77 may include High Definition Multimedia Interface (HDMI), Universal Serial Bus (USB) interface, SD card interface and / or audio interface.

[0227] The connection terminal ED78 may include a connector that facilitates the physical connection of electronic device ED01 to another electronic device (electronic device ED02, etc.). The connection terminal ED78 may include an HDMI connector, a USB connector, an SD card connector, and / or an audio connector (headphone connector, etc.).

[0228] The ED79 haptic module can convert electrical signals into mechanical stimuli (vibration, movement, etc.) or electrical stimuli that can be perceived by the user through touch or motion. The ED79 haptic module may include a motor, piezoelectric devices, and / or electrical stimulation devices.

[0229] The ED80 camera module can capture still images and video. The ED80 camera module may include: a lens assembly comprising one or more lenses; Figure 1 The camera module ED80 includes an image sensor 1000, an image signal processor, and / or a flash. The lens assembly within the camera module can capture light emitted from the subject for image capture.

[0230] The power management module ED88 manages the power supplied to the electronic device ED01. The power management module ED88 can be implemented as part of a power management integrated circuit (PMIC).

[0231] Battery ED89 can supply power to the constituent components of electronic device ED01. Battery ED89 may include non-rechargeable primary batteries, rechargeable secondary batteries, and / or fuel cells.

[0232] Communication module ED90 can establish a wired and / or wireless communication channel between electronic device ED01 and another electronic device (electronic device ED02, electronic device ED04, or server ED08, etc.), and support communication through the established communication channel. Communication module ED90 can operate independently of processor ED20 (application processor, etc.) and may include one or more communication processors supporting wired and / or wireless communication. Communication module ED90 may include wireless communication module ED92 (cellular communication module, short-range wireless communication module, Global Navigation Satellite System (GNSS) communication module, etc.) and / or wired communication module ED94 (local area network (LAN) communication module, power line communication module, etc.). In the above communication modules, the corresponding communication module can communicate with another electronic device through a first network ED98 (a short-range communication network such as Bluetooth, Wi-Fi Direct, or Infrared Data Association (IrDA)) or a second network ED99 (a long-range communication network such as a cellular network, the Internet, or computer network (LAN, WAN, etc.). These various types of communication modules can be integrated into a single component (a single chip, etc.) or implemented as multiple separate components (multiple chips). The wireless communication module ED92 can verify and authenticate the electronic device ED01 in a communication network (e.g., the first network ED98 and / or the second network ED99) by using user information (International Mobile Subscriber Identity (IMSI), etc.) stored in the user identification module ED96.

[0233] Antenna module ED97 can transmit signals and / or power to or from an external device (such as another electronic device). The antenna may include a transmitter formed in a conductive pattern on a substrate (such as a printed circuit board (PCB)). Antenna module ED97 may include one or more antennas. When antenna module ED97 includes multiple antennas, communication module ED90 can select from the multiple antennas an appropriate antenna for a communication method used in a communication network such as first network ED98 and / or second network ED99. Signals and / or power can be transmitted or received between communication module ED90 and another electronic device via the selected antenna. Other components besides the antenna (such as an RFIC) may be included as part of antenna module ED97.

[0234] Some of these components can be connected to each other through communication methods between peripheral devices (bus, general purpose input and output (GPIO), serial peripheral interface (SPI), mobile industry processor interface (MIPI), etc.) and can exchange signals (commands, data, etc.).

[0235] Commands or data can be sent or received between electronic device ED01 and external electronic device ED04 via server ED08 connected to the second network ED99. Electronic devices ED02 and ED04 can be of the same or different type as electronic device ED01. All or part of the operations performed in electronic device ED01 can be performed in one or more electronic devices (ED02, ED04, and ED08). For example, when electronic device ED01 needs to perform a function or service, it can request one or more electronic devices to perform a part of the entire function or service, rather than performing the function or service itself. The one or more electronic devices receiving the request can perform additional functions or services related to the request and send the results of the execution back to electronic device ED01. Cloud computing, distributed computing, and / or client-server computing technologies can be used for this purpose.

[0236] Figure 27 yes Figure 26 A schematic block diagram of the ED80 camera module. (Reference) Figure 27 The camera module ED80 may include a lens assembly CM10, a flash CM20, and an image sensor 1000. Figure 1 The camera module ED80 may include an image sensor 1000, an image stabilizer CM40, a memory CM50 (buffer memory, etc.), and / or an image signal processor CM60. The lens assembly CM10 can collect light emitted from the subject for image capture. The camera module ED80 may include multiple lens assemblies CM10, and in this case, the camera module ED80 may include a dual-camera system, a 360-degree camera, or a spherical camera. Some of the lens assemblies CM10 may have the same lens properties (angle of view, focal length, autofocus, f-number, optical zoom, etc.) or different lens properties. The lens assembly CM10 may include a wide-angle lens or a telephoto lens.

[0237] The flash CM20 can emit light to enhance light emitted or reflected from the subject. The flash CM20 may include one or more light-emitting diodes (red-green-blue (RGB) LEDs, white LEDs, infrared LEDs, ultraviolet LEDs, etc.) and / or a xenon lamp. The image sensor 1000 may include... Figure 1 The image sensor 1000 converts light emitted or reflected from the subject and transmitted through the lens assembly CM10 into electrical signals, thereby obtaining an image corresponding to the subject. The image sensor 1000 may include one or more sensors selected from image sensors with different properties (e.g., RGB sensor, black-and-white (BW) sensor, IR sensor, or UV sensor). Each sensor included in the image sensor 1000 may be implemented as a charge-coupled device (CCD) sensor and / or a complementary metal-oxide-semiconductor (CMOS) sensor.

[0238] Image stabilizer CM40 can move one or more lenses or image sensors 1000 included in lens assembly CM10 in a specific direction in response to movement of camera module ED80 or electronics ED01 including camera module ED80, or can compensate for the negative effects caused by movement by controlling the movement characteristics of image sensor 1000 (adjusting readout timing, etc.). Image stabilizer CM40 can detect movement of camera module ED80 or electronics ED01 using a gyroscope sensor (not shown) or accelerometer sensor (not shown) arranged inside or outside camera module ED80. Image stabilizer CM40 can be implemented in an optical form.

[0239] The memory CM50 can store part or all of the image data acquired by the image sensor 1000 for subsequent image processing operations. For example, when multiple images are acquired at high speed, only the low-resolution image is displayed, while the acquired raw data (Bayer pattern data, high-resolution data, etc.) is stored in the memory CM50. The memory CM50 can then be used to send the raw data of the selected (user-selected, etc.) image to the image signal processor CM60. The memory CM50 can be incorporated into the memory ED30 of the electronic device ED01 or configured as a separate memory for independent operation.

[0240] The image signal processor CM60 can perform image processing on images acquired by the image sensor 1000 or image data stored in the memory CM50. Image processing may include depth map generation, 3D modeling, panorama generation, feature point extraction, image compositing, and / or image compensation (noise reduction, resolution adjustment, brightness adjustment, blurring, sharpening, softening, etc.). The image signal processor CM60 can perform control (exposure time control or readout timing control, etc.) on components included in the camera module ED80 (image sensor 1000, etc.). Images processed by the image signal processor CM60 can be stored again in the memory CM50 for additional processing or provided to external components of the camera module ED80 (memory ED30, display device ED60, electronic device ED02, electronic device ED04, server ED08, etc.). The image signal processor CM60 can be incorporated into the processor ED20 or configured as a separate processor operating independently of the processor ED20. When the image signal processor CM60 is configured as a separate processor from the processor ED20, the image processed by the image signal processor CM60 can undergo additional image processing by the processor ED20 and then be displayed by the display device ED60.

[0241] Electronic device ED01 may include multiple camera modules ED80 with different attributes or functions. In this case, one of the camera modules ED80 may be a wide-angle camera and another may be a telephoto camera. Similarly, one of the camera modules ED80 may be a front-facing camera and another may be a rear-facing camera.

[0242] The image sensor 1000 according to the embodiment can be applied to Figure 28 The mobile phone or smartphone shown is 5100m. Figure 29 The tablet computer or smart tablet computer 5200 shown is... Figure 30 The digital camera or video recorder 5300 shown Figure 31 The laptop computer shown is 5400. Figure 32 The television or smart TV 5500 shown is an example. For instance, a smartphone 5100m or a smart tablet computer 5200 may include multiple high-resolution cameras, each equipped with a high-resolution image sensor. By using the high-resolution cameras, depth information of the subject in the image can be extracted, the image can be adjusted for focus, or the subject in the image can be automatically identified.

[0243] Furthermore, the image sensor 1000 can be applied to Figure 33 The smart refrigerator 5600 shown Figure 34 The security camera 5700 shown Figure 35 The robot 5800 shown Figure 36 Examples include the medical camera 5900. For instance, the smart refrigerator 5600 can automatically identify food in the refrigerator using an image sensor and notify the user of the presence of specific food items, the type of food placed or removed, etc., via a smartphone. The security camera 5700 can provide ultra-high-resolution images and can identify objects or people in images even in dark environments using high sensitivity. The robot 5800 can be deployed in disaster sites or industrial sites where people cannot directly access them, and the robot 5800 can provide high-resolution images. The medical camera 5900 can provide high-resolution images for diagnosis or surgery, and therefore the field of view can be dynamically adjusted.

[0244] Furthermore, the image sensor 1000 can be applied to Figure 37The vehicle 6000 is shown. The vehicle 6000 may include a plurality of vehicle cameras 6010, 6020, 6030, and 6040 arranged in various locations. Each of the vehicle cameras 6010, 6020, 6030, and 6040 may include an image sensor according to an embodiment. The vehicle 6000 can provide the driver with various information relating to the interior or surroundings of the vehicle 6000 by using the vehicle cameras 6010, 6020, 6030, and 6040, thus enabling automatic identification of objects or people in the images and providing the information required for autonomous driving.

[0245] It should be understood that the embodiments described herein should be considered in a descriptive sense rather than for limiting purposes. The description of features or aspects in each example embodiment should generally be regarded as other similar features or aspects that can be used in other embodiments.

[0246] Although exemplary embodiments have been described with reference to the accompanying drawings, those skilled in the art will understand that various changes in form and detail may be made without departing from the spirit and scope defined by the appended claims and their equivalents.

Claims

1. A spectral filter, comprising: Multiple first-unit filters, each having a different center wavelength within a first wavelength range; as well as Multiple second-unit filters, each having a different center wavelength within a second wavelength range. Each of the plurality of first unit filters includes: Two first metallic reflective layers, spaced apart from each other and comprising a first metal; and The first cavity is disposed between the two first metal reflective layers, and Each of the plurality of second unit filters includes: Two second metallic reflective layers, spaced apart from each other and comprising a second metal different from the first metal; and The second cavity is disposed between the two second metal reflective layers, and Each of the first cavity and the second cavity includes: a first material layer; and a plurality of second material layers, arranged perpendicularly to and parallel to each other within the first material layer, and the plurality of second material layers having a refractive index different from that of the first material layer. The effective refractive index of the multiple first cavities of the multiple first unit filters is changed by adjusting the width of the multiple second material layers, so that the multiple first cavities have different effective refractive indices. Similarly, the effective refractive index of the multiple second cavities of the multiple second unit filters is changed by adjusting the width of the multiple second material layers, so that the multiple second cavities have different effective refractive indices.

2. The spectral filter according to claim 1, wherein, The plurality of first unit filters and the plurality of second unit filters are arranged on a plane in a one-dimensional or two-dimensional manner.

3. The spectral filter according to claim 1, wherein, The different center wavelengths in the first wavelength range are shorter than the different center wavelengths in the second wavelength range.

4. The spectral filter according to claim 3, wherein the two first metal reflective layers comprise one of aluminum (Al), silver (Ag), gold (Au), or titanium nitride (TiN), and in, The two second metal reflective layers include one of copper (Cu), Ag, Au, or TiN, which is different from the two first metal reflective layers.

5. The spectral filter according to claim 1, wherein, The plurality of first unit filters are included in a first filter array, and the plurality of second unit filters are included in a second filter array.

6. The spectral filter according to claim 1, wherein, The center wavelength of each of the plurality of first unit filters is configured to be adjusted based on changing the thickness or effective refractive index of the first cavity, and The center wavelength of each of the plurality of second unit filters is configured to be adjusted based on changing the thickness or effective refractive index of the second cavity.

7. The spectral filter according to claim 1, wherein, Each of the plurality of first unit filters further includes a first dielectric layer disposed above the first cavity and a second dielectric layer disposed below the first cavity, and Each of the plurality of second unit filters further includes a third dielectric layer disposed below the second cavity and a fourth dielectric layer disposed above the second cavity.

8. The spectral filter according to claim 7, wherein, Each of the first dielectric layer, the second dielectric layer, the third dielectric layer, and the fourth dielectric layer comprises a single layer or multiple layers.

9. The spectral filter according to claim 7, wherein, Each of the first dielectric layer, the second dielectric layer, the third dielectric layer, and the fourth dielectric layer has a thickness ranging from 10 nm to 20,000 nm.

10. The spectral filter according to claim 7, wherein, At least one of the thickness or effective refractive index of each of the first dielectric layer and the second dielectric layer is adjusted based on the center wavelength of each of the plurality of first unit filters, and The thickness or effective refractive index of each of the third and fourth dielectric layers is adjusted based on the center wavelength of each of the plurality of second unit filters.

11. The spectral filter according to claim 1, further comprising: Multiple microlenses are disposed on the multiple first unit filters and the multiple second unit filters.

12. The spectral filter according to claim 1, further comprising: The color filter is disposed on the same plane as the plurality of first unit filters and the plurality of second unit filters.

13. The spectral filter according to claim 1, further comprising: An additional filter is disposed on the plurality of first unit filters and the plurality of second unit filters, and the additional filter is configured to transmit a preset band.

14. The spectral filter according to claim 13, wherein, The additional filters include color filters or broadband filters.

15. The spectral filter according to claim 1, wherein, A short-wavelength absorption filter is provided in some of the plurality of first unit filters and the plurality of second unit filters, and a long-wavelength cutoff filter is provided in the other filters of the plurality of first unit filters and the plurality of second unit filters.

16. The spectral filter according to claim 1, wherein, Each of the plurality of first unit filters further includes a first dielectric layer disposed above the first cavity and a second dielectric layer disposed below the first cavity, and each of the plurality of second unit filters further includes a third dielectric layer disposed below the second cavity and a fourth dielectric layer disposed above the second cavity. Each of the first dielectric layer and the second dielectric layer includes: a third material layer; and at least one fourth material layer disposed perpendicularly to the first metal reflective layer within the third material layer and having a different refractive index than the third material layer. Each of the third dielectric layer and the fourth dielectric layer includes: a fifth material layer; and at least one sixth material layer disposed perpendicularly to the second metal reflective layer within the fifth material layer and having a different refractive index than the fifth material layer.

17. The spectral filter according to claim 16, wherein, The effective refractive index of each of the first and second dielectric layers is adjusted by changing the width of the fourth material layer according to the center wavelength of each of the plurality of first unit filters, and The effective refractive index of each of the third and fourth dielectric layers is adjusted by changing the width of the sixth material layer according to the center wavelength of each of the plurality of second unit filters.

18. The spectral filter according to claim 1, wherein, Each of the first cavity and the second cavity further includes: an etch stop layer disposed on the first metal reflective layer or the second metal reflective layer, and the first material layer disposed on the etch stop layer.

19. A spectral filter, comprising: At least one first unit filter has a first center wavelength in a first wavelength range; as well as At least one second unit filter has a second center wavelength in a second wavelength range. Wherein, the at least one first unit filter includes: Multiple metallic reflective layers are spaced apart from each other; and At least one first cavity is disposed between the plurality of metal reflective layers, and Wherein, the at least one second unit filter includes: Multiple Bragg reflector layers, spaced apart from each other; and At least one second cavity is disposed between the plurality of Bragg reflector layers, and Each of the at least one first cavity includes: a first material layer; and at least one second material layer disposed perpendicularly to the metal reflective layer within the first material layer and having a refractive index different from that of the first material layer. The effective refractive index of the at least one first cavity of the at least one first unit filter is changed by adjusting the width of the at least one second material layer, so that the at least one first cavity has different effective refractive indices.

20. The spectral filter according to claim 19, wherein, The at least one first unit filter and the at least one second unit filter are arranged on a plane in a one-dimensional or two-dimensional manner.

21. The spectral filter according to claim 19, wherein, The first center wavelength of the at least one first unit filter is configured to be adjusted based on changing the thickness or effective refractive index of the at least one first cavity, and The second center wavelength of the at least one second unit filter is configured to be adjusted based on changing the thickness or effective refractive index of the at least one second cavity.

22. The spectral filter according to claim 19, further comprising: Multiple microlenses are disposed on the at least one first unit filter and the at least one second unit filter.

23. The spectral filter according to claim 20 further includes a color filter disposed on the plane.

24. The spectral filter according to claim 19, further comprising: An additional filter is disposed on the at least one first unit filter and the at least one second unit filter, the additional filter being configured to transmit a preset band.

25. An image sensor, comprising: Spectral filter; as well as A pixel array is configured to receive light transmitted through the spectral filter. The spectral filter includes: At least one first unit filter having a first center wavelength in a first wavelength range; and At least one second unit filter has a second center wavelength in a second wavelength range. Wherein, the at least one first unit filter includes: Multiple first metal reflective layers, spaced apart from each other and comprising a first metal; and At least one first cavity is disposed between the plurality of first metal reflective layers, and Wherein, the at least one second unit filter includes: Multiple second metal reflective layers, spaced apart from each other and comprising a second metal different from the first metal; and At least one second cavity is disposed between the plurality of second metallic reflective layers, and Each of the at least one first cavity and the at least one second cavity includes: a first material layer; and at least one second material layer disposed perpendicularly to the first metal reflective layer or the second metal reflective layer within the first material layer and having a refractive index different from that of the first material layer. Wherein, the effective refractive index of the at least one first cavity of the at least one first unit filter is changed by adjusting the width of the at least one second material layer, so that the at least one first cavity has a different effective refractive index, and the effective refractive index of the at least one second cavity of the at least one second unit filter is changed by adjusting the width of the at least one second material layer, so that the at least one second cavity has a different effective refractive index.

26. The image sensor according to claim 25, wherein, The at least one first unit filter further includes a first dielectric layer disposed below the at least one first cavity and a second dielectric layer disposed above the at least one first cavity, and The at least one second unit filter further includes a third dielectric layer disposed below the at least one second cavity and a fourth dielectric layer disposed above the at least one second cavity.

27. The image sensor according to claim 25, wherein, The spectral filter further includes: a plurality of microlenses disposed on the at least one first unit filter and the at least one second unit filter.

28. The image sensor according to claim 25, wherein, The spectral filter also includes a color filter, and The at least one first unit filter, the at least one second unit filter, and the color filter are disposed on the same plane.

29. The image sensor according to claim 25, wherein, The spectral filter further includes an additional filter disposed on the at least one first unit filter and the at least one second unit filter, the additional filter being configured to transmit a preset wavelength band.

30. The image sensor according to claim 25, wherein, The image sensor also includes a timing controller, a line decoder, and an output circuit.

31. An electronic device comprising the image sensor according to claim 25.

32. The electronic device according to claim 31, wherein, The electronic device is one of the following: mobile phone, smartphone, tablet computer, smart tablet computer, digital camera, video recorder, laptop computer, television, smart TV, smart refrigerator, security camera, robot, or medical camera.

33. An image sensor, comprising: Spectral filter; as well as A pixel array is configured to receive light transmitted through the spectral filter. The spectral filter includes: At least one first unit filter having a first center wavelength in a first wavelength range; and At least one second unit filter has a second center wavelength in a second wavelength range. Wherein, the at least one first unit filter includes: Multiple metallic reflective layers are spaced apart from each other; and At least one first cavity is disposed between the plurality of metal reflective layers, and Wherein, the at least one second unit filter includes: Multiple Bragg reflector layers, spaced apart from each other; and At least one second cavity is disposed between the plurality of Bragg reflector layers, and Each of the at least one first cavity includes: a first material layer; and at least one second material layer disposed perpendicularly to the metal reflective layer within the first material layer and having a refractive index different from that of the first material layer. The effective refractive index of the at least one first cavity of the at least one first unit filter is changed by adjusting the width of the at least one second material layer, so that the at least one first cavity has different effective refractive indices.

34. The image sensor according to claim 33, wherein, The spectral filter further includes: a plurality of microlenses disposed on the at least one first unit filter and the at least one second unit filter.

35. The image sensor according to claim 33, wherein, The spectral filter also includes a color filter, and The at least one first unit filter, the at least one second unit filter, and the color filter are disposed on the same plane.

36. The image sensor according to claim 33, wherein, The spectral filter further includes an additional filter disposed on the at least one first unit filter and the at least one second unit filter, the additional filter being configured to transmit a preset wavelength band.

37. The image sensor according to claim 33, wherein, The image sensor also includes a timing controller, a line decoder, and an output circuit.

38. An electronic device comprising the image sensor according to claim 33.

39. The electronic device according to claim 38, wherein, The electronic device is one of the following: mobile phone, smartphone, tablet computer, smart tablet computer, digital camera, video recorder, laptop computer, television, smart TV, smart refrigerator, security camera, robot, or medical camera.

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