基板处理系统、基板处理系统的控制装置以及基板处理系统的运转方法
By using different combinations of substrate processing equipment in stages, the control device can start actual operation immediately after the trial run is completed, which solves the problem of long startup time of the substrate processing system and improves processing efficiency and productivity.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- EBARA CORP
- Filing Date
- 2021-06-01
- Publication Date
- 2026-07-17
AI Technical Summary
In a substrate processing system, a long trial run is required before the actual operation of the substrate processing element group, which leads to an extension of the start-up time for actual operation.
A phased substrate processing method is adopted, which involves using different equipment combinations in multiple actual operations, including the first substrate processing element and the second substrate processing element. The control device starts actual operation immediately after the trial operation is completed, and the trial operation of the second equipment group is started in advance during the actual operation.
This enabled the substrate processing system to start up in a short time, reducing downtime and improving substrate processing capacity and productivity.
Smart Images
Figure CN114068350B_ABST