用于半导体装置的引线键合

By employing non-circular spherical bonding and capillary distal openings in semiconductor devices, the problems of contact instability and insufficient strength of fine-pitch and ultra-fine-pitch bonding pads are solved, achieving higher bonding strength and current transmission capability.

CN114078797BActive Publication Date: 2026-07-17SANDISK TECHNOLOGIES LLC

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SANDISK TECHNOLOGIES LLC
Filing Date
2021-05-13
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

As the capacity of semiconductor devices increases, the size and spacing of fine-pitch and ultra-fine-pitch bonding pads decrease, leading to increased defect risks and weakened bond strength in existing wire bonding processes. This is especially true when irregular spherical bonding can cause short circuits or reduced current.

Method used

The design employs a non-circular spherical bonding and a capillary distal opening. The non-circular distal opening of the capillary forms a spherical bonding with a symmetry axis, increasing the contact area and improving the bonding strength. The non-circular capillary tip is used to mold the spherical bonding into a specific geometry.

Benefits of technology

It improves bonding strength and current transport capability, reduces bonding defects, meets the connection requirements of fine-pitch and ultra-fine-pitch semiconductor devices, and maintains the compactness of the package.

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Abstract

半导体装置包含集成电路裸片,所述集成电路裸片具有键合垫和键合线。所述键合线通过球形键合连接到所述键合垫中的相应键合垫。所述球形键合与所述键合垫之间的接触区域具有非圆形的预定形状并且所述预定形状包含至少一个对称轴。球形键合长度与球形键合宽度的比率可以等于键合垫长度与键合垫宽度的比率。
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