Nozzle clogging removal device for deposition apparatus and nozzle clogging removal method thereof

Abstract

A nozzle clogging removal device of a deposition apparatus and a nozzle clogging removal method using the same are disclosed. The nozzle clogging removal device of the deposition apparatus can include a carrier, a nozzle clogging removal portion, a nozzle clogging removal portion moving member, and a carrier moving member, wherein the nozzle clogging removal portion is located below the carrier and includes at least one nozzle clogging removal member; the nozzle clogging removal portion moving member moves the nozzle clogging removal portion below the carrier; and the carrier moving member moves the carrier to the inside and outside of a deposition chamber.

Description

Technical Field

[0001] This invention relates to an apparatus for resolving clogging of nozzles that spray deposited material in a deposition apparatus, and a method for resolving nozzle clogging using the apparatus. Background Technology

[0002] When performing a deposition process using deposition equipment, organic matter evaporated from an evaporation source inside the deposition chamber can be sprayed through nozzles. If organic matter accumulates inside the nozzle, nozzle clogging may occur.

[0003] In the past, nozzle blockage was cleared by installing a nozzle blockage removal device in the deposition chamber. When problems such as nozzle blockage or nozzle diameter reduction occurred, the nozzle blockage removal device was used to clear the nozzle blockage.

[0004] However, when using a nozzle clogging removal device within the deposition chamber, the size of the deposition chamber increases. Furthermore, because the nozzle clogging removal device is located within the deposition chamber, it becomes difficult to replace or clean it. Summary of the Invention

[0005] Technical problems to be solved

[0006] One object of the present invention is to provide a nozzle clogging removal device for a deposition apparatus that can be stored separately from the deposition chamber, and a nozzle clogging removal method using the device.

[0007] However, the purpose of this invention is not limited to the purpose described above, and various extensions can be made without departing from the spirit and scope of this invention.

[0008] Solution

[0009] To achieve the aforementioned objective of the present invention, the nozzle clogging removal device of the deposition apparatus according to the embodiment may include a carrier, a nozzle clogging removal section, a nozzle clogging removal section moving member, and a carrier moving member, wherein the nozzle clogging removal section is located below the carrier and includes at least one nozzle clogging removal member, the nozzle clogging removal section moving member moves the nozzle clogging removal section below the carrier, and the carrier moving member moves the carrier to the interior and exterior of the deposition chamber.

[0010] In one embodiment, the nozzle clogging removal component may include a halogen lamp.

[0011] In one embodiment, the nozzle clogging removal component may further include at least one lens arranged below the halogen lamp and used to compress the light emitted from the halogen lamp.

[0012] In one embodiment, the nozzle clogging removal component may further include a tube and a flange, wherein the tube surrounds the halogen lamp and the flange is connected to the lower end of the tube, wherein the lens can be engaged to the tube through the flange.

[0013] In one embodiment, the nozzle clogging removal component may further include a plurality of condenser lenses arranged symmetrically around the halogen lamp.

[0014] In one embodiment, the nozzle clogging removal device may further include a protective cover located at the lower end of the nozzle clogging removal section.

[0015] In one embodiment, the protective cover may include aluminum.

[0016] In one embodiment, the nozzle clogging removal device of the deposition apparatus may further include a wireless module that receives location information of the clogged nozzles present inside the deposition chamber.

[0017] To achieve the aforementioned objective of the present invention, a nozzle clogging removal device for a deposition apparatus according to an embodiment may include a carrier, a nozzle clogging removal moving part, a nozzle clogging removal moving part holder, a nozzle clogging removal moving part moving member, and a carrier moving member. The nozzle clogging removal moving part is located below the carrier and includes at least one nozzle clogging removal member. The nozzle clogging removal moving part holder is located below the carrier and has an internal space capable of moving the nozzle clogging removal moving part in a direction perpendicular to the moving direction of the carrier. The nozzle clogging removal moving part moving member moves the nozzle clogging removal moving part holder below the carrier, and the carrier moving member moves the carrier to the interior and exterior of the deposition chamber.

[0018] In one embodiment, the nozzle clogging removal component may include a halogen lamp.

[0019] In one embodiment, the nozzle clogging removal component may further include at least one lens arranged below the halogen lamp and used to compress the light emitted from the halogen lamp.

[0020] In one embodiment, the nozzle clogging removal component may further include a tube and a flange, wherein the tube surrounds the halogen lamp and the flange is connected to the lower end of the tube, wherein the lens can be engaged to the tube through the flange.

[0021] In one embodiment, the nozzle clogging removal component may further include a plurality of condenser lenses arranged symmetrically around the halogen lamp.

[0022] In one embodiment, the nozzle clogging removal device may further include a protective cover located at the lower end of the nozzle clogging removal moving part and covering the joint between the nozzle clogging removal member and the nozzle clogging removal member holder.

[0023] In one embodiment, the protective cover may include aluminum.

[0024] In one embodiment, the nozzle clogging removal device of the deposition apparatus may further include a wireless module that receives location information of the clogged nozzles present inside the deposition chamber.

[0025] To achieve one of the aforementioned objectives of the present invention, a nozzle clogging removal method for a deposition apparatus according to an embodiment may include: a step of moving a carrier from outside the deposition chamber to inside the deposition chamber; a step of moving at least one nozzle clogging removal member located below the carrier to above a clogged nozzle inside the deposition chamber; a step of removing the clogging from the nozzle using the nozzle clogging removal member; and a step of moving the carrier to outside the deposition chamber.

[0026] In one embodiment, the nozzle clogging removal method of the above-mentioned deposition equipment may further include: receiving the position information of the clogged nozzle via wireless communication; and correcting the position of the nozzle clogging removal component via the wireless communication.

[0027] In one embodiment, the nozzle clogging removal component may include a halogen lamp.

[0028] In one embodiment, the nozzle clogging removal method of the above-mentioned deposition equipment may further include the step of driving the halogen lamp via the above-mentioned wireless communication.

[0029] Beneficial effects

[0030] In the nozzle clogging removal device and the nozzle clogging removal method of the deposition apparatus according to an embodiment of the present invention, since a carrier component separately provided from the deposition chamber is used, it is not necessary to separately provide a nozzle clogging removal device within the deposition chamber. Therefore, the carrier component can be flexibly applied to the removal of nozzle clogging in various types of deposition chambers, and in continuous processes employing one or more types of deposition chambers, the carrier component can be added to remove nozzle clogging without interfering with the continuity of the process, thereby allowing for free arrangement of each chamber when laying out the deposition process.

[0031] In addition, the following effects are provided: Since the above-mentioned carrier and the deposition chamber are stored separately, the nozzle clogging removal device installed on the carrier can be cleaned freely, and the nozzle clogging removal method can be easily changed and modified. Therefore, the nozzle clogging removal device is easy to manage.

[0032] However, the effects of the present invention are not limited to those described above, and various extensions can be made without departing from the spirit and scope of the present invention. Attached Figure Description

[0033] Figure 1 This is a plan view showing a nozzle clogging removal device for a deposition apparatus according to an embodiment of the present invention.

[0034] Figure 2 It is shown that it includes Figure 1 A cross-sectional view of an example nozzle clogging removal component in a nozzle clogging removal device of a deposition equipment.

[0035] Figure 3 It is shown that it includes Figure 1 A cross-sectional view of an example nozzle clogging removal component in a nozzle clogging removal device of a deposition equipment.

[0036] Figure 4 This is a plan view showing a nozzle clogging removal device for a deposition apparatus according to an embodiment of the present invention.

[0037] Figure 5 It is shown Figure 4 Plan view of area A4.

[0038] Figure 6 This is a flowchart illustrating a nozzle clogging removal method using a nozzle clogging removal device for a deposition apparatus according to an embodiment of the present invention.

[0039] Figure 7 This is a cross-sectional view illustrating a nozzle clogging removal method using a nozzle clogging removal apparatus for a deposition device according to an embodiment of the present invention.

[0040] Figure 8 This is a diagram illustrating a nozzle clogging removal method using a nozzle clogging removal device for a deposition apparatus according to an embodiment of the present invention.

[0041] Figure 9 This is a diagram illustrating a nozzle clogging removal method using a nozzle clogging removal device for a deposition apparatus according to an embodiment of the present invention.

[0042] Explanation of reference numerals in the attached figures

[0043] 100: Transport component; 110: Nozzle blockage removal unit

[0044] 111: Nozzle clogging removal component; 113: Protective cover

[0045] 120: Nozzle clogging removal unit moving component; 130: Carrier moving component

[0046] 150: Wireless module; 210: Halogen lamp

[0047] 230: Lens 240: Flange

[0048] 250: Tube; 260: Condenser.

[0049] 410: Nozzle clogging removal moving part 420: Nozzle clogging removal moving part retainer Detailed Implementation

[0050] Hereinafter, a nozzle clogging removal apparatus for a deposition device according to an embodiment of the present invention and a nozzle clogging removal method using the apparatus will be described in more detail with reference to the accompanying drawings. The same or similar reference numerals are used for the same components in the drawings.

[0051] Figure 1 This is a plan view showing a nozzle clogging removal device for a deposition apparatus according to an embodiment of the present invention.

[0052] refer to Figure 1 According to one embodiment of the present invention, a nozzle clogging removal device for a deposition apparatus may include a carrier 100, a nozzle clogging removal section 110, a nozzle clogging removal section moving member 120, and a carrier moving member 130.

[0053] The carrier 100 can enter the deposition chamber. A device for clearing nozzle blockages can be installed below the carrier 100.

[0054] The nozzle clogging removal unit 110 may be located below the carrier 100. The nozzle clogging removal unit 110 may include a nozzle clogging removal member 111 and a nozzle clogging removal member holder 112.

[0055] The nozzle clogging removal component 111 can apply energy to the organic matter clogging the nozzles in the deposition chamber, causing it to decompose and thus clearing the clogging. The nozzle clogging removal component 111 can be arranged at intervals that are substantially the same as the arrangement intervals of the nozzles in the deposition chamber.

[0056] The nozzle clogging removal component holder 112 serves to secure the nozzle clogging removal component 111. The nozzle clogging removal component holder 112 can withstand impacts that may occur during process execution and can be made of lightweight materials. For example, the nozzle clogging removal component holder 112 may include aluminum.

[0057] The nozzle clogging removal unit moving member 120 can be located below the carrier 100. The nozzle clogging removal unit moving member 120 can move the nozzle clogging removal unit 110 inside the carrier 100.

[0058] The nozzle clogging removal unit moving member 120 may include a motor 121, a coupling gear 122, a shaft 123, and a ball screw 124. Energy generated by the operation of the motor 121 can be transmitted to the shaft 123 via the coupling gear 122. The energy transmitted to the shaft 123 can be transmitted to the ball screw 124, causing the ball screw 124 to rotate. Through the rotation of the ball screw 124, the nozzle clogging removal unit 110 connected to the ball screw 124 can move within the carrier 100.

[0059] The carrier moving member 130 can be located on both sides of the carrier 100. The carrier moving member 130 can move the carrier 100 to the inside and outside of the aforementioned deposition chamber.

[0060] In one embodiment, the nozzle clogging removal device of the deposition apparatus may further include an energy supply source 140. The energy supply source 140 may supply energy to the nozzle clogging removal member 111.

[0061] The energy supply source 140 may further include a battery 141 and a power source 142. The battery 141 may be located at each corner of the carrier 100. The battery 141 may supply energy to the power source 142. The power source 142 may be located on both sides of the nozzle clogging removal component holder 112. The power source 142 may supply energy to the nozzle clogging removal component 111.

[0062] In one embodiment, the nozzle clogging removal unit 110 may further include a protective cover 113. The protective cover 113 may cover the joint between the nozzle clogging removal member 111 and the nozzle clogging removal member holder 112, and may prevent contamination of the nozzle clogging removal member 111 within the deposition chamber caused by organic matter ejected from the nozzle. The protective cover 113 may comprise aluminum (a lightweight material) and may be manufactured with a thickness of approximately 1.5 mm to approximately 2.0 mm.

[0063] In one embodiment, the nozzle clogging removal device of the deposition apparatus may further include a wireless module 150. The wireless module 150 can receive location information of the clogged nozzles present inside the deposition chamber.

[0064] The following is for reference. Figure 2 and Figure 3 To describe a nozzle clogging removal component 111 according to an embodiment of the present invention.

[0065] Figure 2 and Figure 3 This is a cross-sectional view showing an example of the nozzle clogging removal component 111.

[0066] refer to Figure 2 According to one embodiment of the invention, the nozzle clogging removal component 111 may include a halogen lamp 210 and a power cord 220. The halogen lamp 210 emits light, and the light can decompose organic matter clogging the nozzle. The power cord 220 may be connected to a power source 142 to supply energy to the halogen lamp 210.

[0067] In one embodiment, the nozzle clogging removal component 111 may further include a lens 230. The lens 230 may be located below the halogen lamp 210. The lens 230 may compress the light.

[0068] In one embodiment, the nozzle clogging removal component 111 may further include a flange 240 and a tube 250. The tube 250 may surround the halogen lamp 210. The lower end of the tube 250 may be connected to the flange 240. The flange 240 may create a vacuum inside the tube 250 to prevent the halogen lamp 210 from being contaminated by the aforementioned organic substances.

[0069] In one embodiment, the nozzle clogging removal component 111 may further include a condenser lens 260. The condenser lens 260 is arranged symmetrically around the halogen lamp 210. The condenser lens 260 can prevent the light mentioned above from being absorbed into the nozzle clogging removal component 111.

[0070] refer to Figure 3 According to one embodiment of the invention, the nozzle clogging removal member 111 may include a plurality of lenses. In one embodiment, the nozzle clogging removal member 111 may include a first lens 310 and a second lens 320. The first lens 310 may be located between the halogen lamp 210 and the flange 240, and the second lens 320 may be located below the flange 240. Compared with the focal diameter D2 and focal distance L2 when only one lens 230 is used, when using the first lens 310 and the second lens 320, the focal diameter D3 can be further reduced, and the focal distance L3 can be further increased.

[0071] The following is for reference. Figure 4 and Figure 5 This invention describes a nozzle clogging removal device for a deposition apparatus according to an embodiment of the present invention.

[0072] Figure 4 This is a plan view showing a nozzle clogging removal device for a deposition apparatus according to an embodiment of the present invention.

[0073] refer to Figure 4According to one embodiment of the present invention, a nozzle clogging removal device for a deposition apparatus may include a carrier 100, a nozzle clogging removal moving member 120, a carrier moving member 130, a nozzle clogging removal moving part 410, and a nozzle clogging removal moving part holder 420. The nozzle clogging removal moving member 120 can move the nozzle clogging removal moving part holder 420 within the carrier 100. The nozzle clogging removal moving part 410 may include a nozzle clogging removal member 111 and a protective cover 113. The nozzle clogging removal moving part holder 420 may have an internal space capable of allowing the nozzle clogging removal moving part 410 to move in a direction perpendicular to the moving direction of the carrier 100.

[0074] Figure 5 It is shown Figure 4 Plan view of area A4.

[0075] refer to Figure 5 The nozzle clogging removal moving part 410 may include a motor 510 and a shaft 520. The nozzle clogging removal moving part holder 420 may include an LM guide rail 530 (linear motion guide rail). The driving energy provided by the motor 510 is transmitted to the LM guide rail 530 through the shaft 520, and thus, the nozzle clogging removal moving part 410 can be moved along the LM guide rail 530.

[0076] The following is for reference. Figure 6 and Figure 7 This invention describes a nozzle clogging removal method using a nozzle clogging removal device for a deposition apparatus according to an embodiment of the present invention.

[0077] Figure 6 This is a flowchart illustrating a nozzle clogging removal method using a nozzle clogging removal device for a deposition apparatus according to an embodiment of the present invention. Figure 7 This is a cross-sectional view illustrating a nozzle clogging removal method using a nozzle clogging removal apparatus for a deposition device according to an embodiment of the present invention.

[0078] refer to Figure 6 and Figure 7 According to an embodiment of the present invention, a nozzle clogging removal method using a nozzle clogging removal device for a deposition apparatus may include: a step of moving a carrier 100 from outside the deposition chamber to inside the deposition chamber (S610); a step of moving at least one nozzle clogging removal member 111 located below the carrier 100 above the clogged nozzle inside the deposition chamber (S620); a step of removing the clogging of the nozzle using the nozzle clogging removal member 111 (S630); and a step of moving the carrier 100 to outside the deposition chamber (S640).

[0079] Specifically, the carrier 100 can be moved into the deposition chamber using the carrier moving member 130 (S610). After the movement of the carrier 100 is completed (S610), the nozzle clogging removal member 110 can be moved using the nozzle clogging removal member moving member 120 (S620). By moving the nozzle clogging removal member 110 (S620), the nozzle clogging removal member 111 can be adjusted to be located directly above the nozzle 710 where the nozzle clogging has occurred. After the movement of the nozzle clogging removal member 110 is completed (S620), the nozzle clogging removal member 111 can be used to remove the clogging from the nozzle 710 where the nozzle clogging has occurred (S630). After the removal is completed (S630), the carrier 100 can be moved out of the deposition chamber using the carrier moving member 130 (S640).

[0080] In one embodiment, the nozzle clogging removal device of the deposition equipment may include a wireless module ( Figure 1 The nozzle clogging removal method using the nozzle clogging removal device of the deposition equipment may further include: receiving position information of the nozzle 710 that is clogging via wireless communication (S650); and correcting the position of the nozzle clogging removal member 111 via the aforementioned wireless communication (S660). The position information of the nozzle 710 that is clogging, confirmed by the QCM (quartz crystal microbalance sensor) inside the deposition chamber, can be received via the wireless module 150. The position information can be used to determine whether the nozzle clogging removal member 111 is located above the nozzle 710 that is clogging. When the nozzle clogging removal member 111 is not located above the nozzle 710 that is clogging, the position of the nozzle clogging removal member 120 can be used to correct the position of the nozzle clogging removal member 111 so that it is located above the nozzle clogging 710 (S660).

[0081] In one embodiment, the nozzle clogging removal component 111 may include a halogen lamp ( Figure 2 (210). In this case, the power supply of the halogen lamp 210 can be adjusted wirelessly via the wireless module 150.

[0082] Figure 8 This is a diagram illustrating a nozzle clogging removal method using a nozzle clogging removal device for a deposition apparatus according to an embodiment of the present invention.

[0083] refer to Figure 8The carrier 100 can move in one direction F8 through the initial deposition chamber 800 and can pass through a series of consecutive deposition chambers. Moving in one direction F8, the carrier 100 can reach the deposition chamber 810 where nozzle blockage occurs. After the carrier 100 enters the deposition chamber 810 where nozzle blockage occurs, the position of the nozzle blockage removal part 110 can be adjusted by the nozzle blockage removal part moving member 120. The position of the nozzle blockage removal part 110 can be adjusted by the nozzle blockage removal part moving member 120 so that the nozzle blockage removal member 111 is positioned above the blocked nozzle 820. When the nozzle blockage removal member 111 is positioned above the blocked nozzle 820, it can be driven to remove the nozzle blockage. After the nozzle blockage is removed, the carrier 100 can be moved in one direction F8 to leave the series of consecutive deposition chambers. The carrier 100 leaving the deposition chambers can be stored separately. Therefore, in the process consisting of the above series of continuous deposition chambers, the blockage of the blocked nozzle 820 can be cleared while maintaining the continuity of the process.

[0084] Figure 9 This is a diagram illustrating a nozzle clogging removal method using a nozzle clogging removal device for a deposition apparatus according to an embodiment of the present invention.

[0085] A nozzle clogging removal method using a nozzle clogging removal device for a deposition apparatus according to an embodiment of the present invention may include: connecting a loading interlock chamber 910 and a cluster deposition chamber 930 via a gate valve 920; placing a carrier 100 into the loading interlock chamber 910 with the gate valve 920 closed; creating a vacuum state inside the loading interlock chamber 910; opening the gate valve 920 and moving the carrier 100 into the cluster deposition chamber 930; removing nozzle clogging from the cluster deposition chamber 930 after closing the gate valve 920; moving the carrier 100 into the loading interlock chamber 910 after opening the gate valve 920; and separating the loading interlock chamber 910 from the cluster deposition chamber 930 after removing nozzle clogging after closing the gate valve 920. Therefore, nozzle clogging within the cluster deposition chamber 930 can be removed while maintaining a vacuum state in the cluster deposition chamber 930.

[0086] Industrial applicability

[0087] The nozzle clogging removal device for deposition equipment and the nozzle clogging removal method using the device according to an exemplary embodiment of the present invention can be applied to clear nozzle clogging in various deposition equipment used for OLED deposition processes.

[0088] The nozzle clogging removal apparatus for a deposition device and the nozzle clogging removal method using the apparatus according to an exemplary embodiment of the present invention have been described above with reference to the accompanying drawings. However, the embodiments described are exemplary and can be modified and altered by those skilled in the art without departing from the technical concept of the present invention as set forth in the appended claims.

Claims

1. A nozzle clogging removal device for a deposition equipment, comprising: Transport components; A nozzle clogging removal moving part is located below the carrier and includes at least one nozzle clogging removal component; A nozzle clogging removal moving part holder is located below the carrier and has an internal space that allows the nozzle clogging removal moving part to move in a direction perpendicular to the moving direction of the carrier; The nozzle blockage removal moving member moves the nozzle blockage removal moving member holder below the carrier; as well as The carrier moving component moves the carrier to the inside and outside of the deposition chamber. In the event of nozzle blockage, the carrier is introduced from the outside of the deposition chamber into the inside of the deposition chamber.

2. The nozzle clogging removal device for the deposition equipment according to claim 1, wherein, The nozzle clogging removal component includes a halogen lamp.

3. The nozzle clogging removal device for the deposition equipment according to claim 2, wherein, The nozzle clogging removal component also includes at least one lens arranged below the halogen lamp and used to compress the light emitted from the halogen lamp.

4. The nozzle clogging removal device for the deposition equipment according to claim 3, wherein, The nozzle blockage removal component further includes: Tubes surrounding the halogen lamp; and A flange is attached to the lower end of the tube. The lens is attached to the tube via the flange.

5. The nozzle clogging removal device for the deposition equipment according to claim 2, wherein, The nozzle clogging removal component also includes a plurality of focusing lenses arranged symmetrically around the halogen lamp.

6. The nozzle clogging removal device for the deposition equipment according to claim 1, further comprising: A wireless module that receives position information of a blocked nozzle located inside the deposition chamber.

7. A method for clearing nozzle blockage in a deposition apparatus using the nozzle blockage clearing device for a deposition apparatus according to any one of claims 1 to 6, comprising: The step of moving the carrier from outside the deposition chamber to inside the deposition chamber; The step of moving at least one nozzle blockage removal component located below the carrier to above the blocked nozzle within the deposition chamber; The step of using the nozzle clogging removal component to remove the clogging of the nozzle; as well as The step of moving the carrier to the outside of the deposition chamber. In the event of nozzle blockage, the carrier is introduced from the outside of the deposition chamber into the inside of the deposition chamber.

8. The nozzle clogging removal method for the deposition equipment according to claim 7 further includes: The step of receiving the location information of the blocked nozzle via wireless communication; as well as The step of correcting the position of the nozzle clogging removal component via the wireless communication.

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