Scanning element and inductive position measuring device with such a scanning element
By employing a multi-layer circuit board design and shielding optimization in the inductive position measurement device, the issues of accuracy and cost of scanning elements have been resolved, enabling high-precision position measurement and low-cost manufacturing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- DR JOHANNES HEIDENHAIN GMBH
- Filing Date
- 2021-07-19
- Publication Date
- 2026-06-19
AI Technical Summary
Existing inductive position measuring devices suffer from insufficient accuracy and high manufacturing costs in their scanning elements.
A multi-layer circuit board design is adopted, with first and second detection units arranged on both sides of the circuit board respectively. The special arrangement and size design of the shielding layer ensures the independence and accuracy of the excitation and reception lines, and signal processing is performed in conjunction with electronic components.
It achieves high-precision position measurement, reduces manufacturing costs, improves the quality and accuracy of measurement signals, and reduces crosstalk and electromagnetic interference.
Smart Images
Figure CN114111545B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a scanning element for use in a sensing position measuring device according to claim 1, the position measuring device being used to determine the position of the scanning element relative to two movable scale elements having different speeds. Background Technology
[0002] Inductive position measuring devices, such as angle measuring devices, are used to determine the angular position of machine parts that can rotate relative to each other. In an inductive position measuring device, excitation leads and receiving lines are often applied, for example, in the form of printed wires, on a common circuit board that is typically multi-layered and fixedly connected to a fixture of the angle measuring device. A scale element is located opposite the circuit board, on which a graduation structure is applied, and the graduation structure is torsionally connected to the rotating part of the angle measuring device. When a time-varying excitation current is applied to the excitation leads, a signal related to the angular orientation is generated in the receiving coil during the relative rotation between the rotating part and the fixture. These signals are then further processed in an evaluation electronics device.
[0003] Especially in driving robots, inductive position measuring devices are frequently used as measuring instruments to determine the angular position of the drive shaft and simultaneously to accurately determine the angular position of the driven shaft, where the motion of the drive shaft is introduced into the driven shaft via a reduction gear. In this case, the angular orientation or position is measured by means of a scanning element, which includes a circuit board with corresponding detection units on both sides, thereby enabling the determination of the angular positions of scale elements rotatably arranged on both sides of the circuit board.
[0004] The inductive position measuring device also functions as a length measuring device for determining the position of two machine parts that are linearly movable relative to each other. In this application, the scanning element according to the invention can also be used in conjunction with detection units arranged on both sides.
[0005] WO 2019 / 185336 A1 describes a scanning element having a transmitting coil and a sensor coil, the scanning element being arranged on a multilayer circuit board having a layer configured to be shielded. Summary of the Invention
[0006] Therefore, the objective of this invention is to provide a scanning element for an inductive position measuring device that operates with relatively high precision and can be manufactured at low cost, through which the position of two scale elements can be determined.
[0007] According to the present invention, this task is achieved by the features of claim 1.
[0008] A suitable scanning element for an inductive position measuring device includes a multilayer circuit board with a first detection unit and a second detection unit, as well as electronic components. Specifically, the first detection unit is arranged on a first side of the circuit board, and the second detection unit is arranged on a second side of the circuit board. The first detection unit has a first excitation line and a first receiving line. The second detection unit has a second excitation line and a second receiving line. Additionally, the circuit board has a first shielding layer, a second shielding layer, and a geometrical central plane, which is specifically arranged at the center between the first and second sides of the circuit board, wherein the central plane is located between the detection unit and the shielding layer. Furthermore, the multilayer circuit board is constructed such that the first detection unit is arranged in the first and second layers, and furthermore, the second detection unit is arranged in the third and fourth layers. The dimensions of the shielding layer are determined or measured such that an imaginary geometric first straight line passes through or intersects the first detection unit and the first shielding layer, while the first straight line does not pass through the second shielding layer. Here, the first shielding layer is arranged on the other side of the central plane, originating from the first detection unit. Furthermore, an imaginary geometric second straight line passes through or intersects the second detection unit and the second shielding layer, while the second straight line does not pass through the first shielding layer. Starting from the second detection unit, the second shielding layer is arranged on the other side of the central plane. The first and second straight lines are orthogonal to the central plane.
[0009] The first straight line can pass through or intersect the first detection unit within the range of the first excitation line or the first receiving line. The second straight line can pass through or intersect the second detection unit within the range of the second excitation line or the second receiving line. The first and second excitation lines include excitation printed conductors that extend in different layers of the circuit board (i.e., in the first, second, third, and fourth layers). Similarly, the first and second receiving lines include receiving printed conductors that extend in the first, second, third, and fourth layers of the circuit board.
[0010] Regarding the determination of the spatial arrangement of the subject matter of this invention, a first direction x can first be defined. The first direction x describes the direction in which the position (measurement direction) of the search is measured. The first direction x can be, for example, a circumferential direction or a tangential direction. In this case, the angular position of the scale element in the first direction can be measured by position measurement of the rotation or circumduction motion of the scanning element reference around the (rotational) axis. In the case of linear position measurement, the first direction x extends along a linear measurement distance.
[0011] Furthermore, the second direction can be defined such that it extends orthogonally to the first direction x.
[0012] The third direction z is oriented orthogonal to the first direction x and simultaneously orthogonal to the second direction y. The third direction z can, for example, extend parallel to the (rotational) axis, around which the scale unit is rotatable relative to the scanning element. Furthermore, the third direction z is orthogonally aligned with the center plane. The various layers of the circuit board are arranged offset from each other along the third direction z.
[0013] The central plane, about a third direction z, is located between the first detection unit and the first shielding layer, or the first detection unit and the first shielding layer are arranged on both sides of the central plane. Therefore, it is equally applicable that the central plane, about a third direction z, is located between the second detection unit and the second shielding layer, or that the second detection unit and the second shielding layer are arranged on both sides of the central plane.
[0014] Advantageously, the first shielding layer is disposed in the fifth layer of the circuit board and the second shielding layer is disposed in the sixth layer of the circuit board. Alternatively, the first shielding layer can be disposed in the first or second layer, and the second shielding layer can be disposed in the third or fourth layer.
[0015] In another embodiment of the invention, the first excitation line and the second excitation line extend along a first direction x. The first shielding layer is arranged to be offset by a first distance relative to the second excitation line in a second direction y. Alternatively or supplementarily, the second shielding layer is arranged to be offset by a second distance relative to the first excitation line in a second direction.
[0016] In an advantageous manner, in a third direction orthogonal to the central plane orientation, the first detection unit is arranged offset by a spacing relative to the first shielding layer, wherein a second distance is greater than or equal to 25% and less than or equal to 100% of the spacing. Alternatively or supplementarily, the second detection unit is arranged offset by a spacing relative to the second shielding layer, wherein a first distance is greater than or equal to 25% and less than or equal to 100% of the spacing. Preferably, the second distance is greater than or equal to 33% and less than or equal to 75% of the spacing, and / or the first distance is greater than or equal to 33% and less than or equal to 75% of the spacing.
[0017] Advantageously, the first receiving line and the second receiving line extend along a first direction x. The first receiving line is arranged to be offset relative to the second receiving line in a second direction y.
[0018] In another embodiment of the invention, the scanning element is designed such that the first and second straight lines pass through at least one of the electronic components. Alternatively, the first and second straight lines can pass through one or more electronic components, especially when the circuit board is equipped with electronic components on both sides.
[0019] In an advantageous manner, the circuit board is configured such that a first straight line passes through a first receiving line of a first detection unit and / or a second straight line passes through a second receiving line of a second detection unit.
[0020] Advantageously, the first excitation line and the second excitation line extend along a first direction x, wherein the first excitation line is arranged on the circuit board overlapping the second excitation line with respect to a second direction y. In other words, the extents of the first excitation line and the second excitation line overlap in the second direction y. In particular, this overlap can reach almost 100%, such that the first excitation line is arranged with virtually no offset relative to the second excitation line in the second direction.
[0021] In another embodiment of the invention, the first detection unit has a third excitation line and the second detection unit has a fourth excitation line. The third excitation line is arranged to be offset relative to the fourth excitation line in a second direction.
[0022] In an advantageous manner, the scanning element is configured such that the first excitation line and the second excitation line are electrically connected in series.
[0023] Advantageously, both the first and second excitation circuits can be fed with an excitation current (bestrombar), which typically has a time-varying current intensity (alternating current or mixed current). The excitation current can be generated electronically; that is, its curve can be shaped electronically. Given the physical relationship between current intensity and voltage intensity, the excitation voltage can also be observed in the same way.
[0024] In another embodiment of the invention, the signals generated by the first and second receiving lines can be further processed by means of electronic components, which in particular form an evaluation circuit.
[0025] Electronic components can be elements of different electronic circuits, or associated with different circuits. For example, a specific electronic component can be an element of a circuit used to generate excitation current, or other electronic components can be elements of other circuits used to evaluate or further process signals.
[0026] According to another aspect, the invention also includes an inductive position measuring device having a scanning element and a first and a second scale element. The scale elements are arranged at intervals on both sides of a circuit board in a third direction z (orthogonal to the central plane). Furthermore, the scale elements can be arranged to be rotatable relative to the scanning element about a common axis.
[0027] Advantageous designs of the invention are derived from the dependent claims. Attached Figure Description
[0028] Further details and advantages of the scanning element according to the invention will emerge from the following description of several embodiments, based on the accompanying drawings.
[0029] Figure 1 A perspective view of a position measuring device including a scanning element, a first scale element, and a second scale element is shown.
[0030] Figure 2 A top view of the first side of the scanning element is shown;
[0031] Figure 3 A top view of the second side of the scanning element is shown;
[0032] Figure 4 A detailed cross-sectional view of the scanning element according to the first embodiment is shown;
[0033] Figure 5 A top view of the first scale element is shown;
[0034] Figure 6 A top view of the second scale element is shown;
[0035] Figure 7 A detailed cross-sectional view of the scanning element according to the second embodiment is shown. Detailed Implementation
[0036] according to Figure 1 The invention is described using a position measuring device having a scanning element 1, which can be used to detect the angular position of both a first scale element 2 and a second scale element 3. The two scale elements 2 and 3 are arranged to rotate about an axis R relative to the scanning element 1. Such a position measuring device can be applied, for example, in a robot drive mechanism. The second scale element 3 is then torsionally connected, for example, to the drive shaft of a motor. The drive shaft is in turn connected to a reduction gear with a driven shaft. The first scale element 2 rotates with this driven shaft. In this way, angle adjustment can be performed, for example, by means of the second scale element 3 to reverse the motor, and a higher precision angle adjustment can be performed by means of the first scale element 2 to position the robot.
[0037] exist Figure 2 and Figure 3 The scanning element 1 is shown in top view. The scanning element includes a multi-layered circuit board 1.1 and electronic components 1.2 mounted on the circuit board 1.1. Figure 3 Scanning element 1 is used to scan the first scale element 2 and simultaneously to scan the second scale element 3. For this reason, according to... Figure 2 A first detection unit 1.11 is arranged on the first side of the circuit board 1.1, and according to... Figure 3A second detection unit 1.12 is arranged on the second side of the circuit board 1.1. In this embodiment, the electronic component 1.2 is only mounted on the second side. Alternatively or supplementarily, the first side of the circuit board 1.1 can also be equipped with an electronic component.
[0038] The first detection unit 1.11 includes a first excitation line 1.111, a first receiving line 1.112, a third excitation line 1.113, a third receiving line 1.114, and a fifth excitation line 1.115. The second detection unit 1.12 includes a second excitation line 1.121, a second receiving line 1.122, a fourth excitation line 1.123, and a fourth receiving line 1.124.
[0039] Figure 4 A schematic partial cross-sectional view through the scanning element 1 or through the circuit board 1.1 is shown, wherein, for clarity, the electrical insulating material on the circuit board is not shaded. Furthermore, to better explain the scanning element 1 according to the invention, Figure 4 Implemented non-proportionally. As described above, circuit board 1.1 is constructed in multiple layers. Geometrically, a so-called central plane M can be defined for circuit board 1.1, which is arranged parallel to either the first or second side of circuit board 1.1, and midway between the first and second sides. Furthermore, the geometric relationships between the various components can be defined by means of a coordinate system. Here, the first direction x is the direction along which position or angle measurement should generally be possible. In the described embodiment, the first direction x corresponds to the circumferential direction. The axis R is parallel to the third direction z, which can therefore also be defined here as an axial direction, in which scale elements 2 and 3 can rotate about the axis. The second direction y is oriented orthogonal to the third direction z and the first direction x, and can also be described as a radial direction in the described embodiment (angle measurement). Therefore, the plane formed by the x-axis and y-axis is oriented parallel to the central plane M, and the third direction z and the axis R extend orthogonally to the central plane M.
[0040] The first detection unit 1.11 is arranged in the first layer A and the second layer B of the circuit board 1.1, while the second detection unit 1.12 is arranged in the third layer E and the fourth layer F. The first layer A is closest to the first side of the circuit board 1.1, and the second layer B is next closest to the first side of the circuit board 1.1. Similarly, the third layer E and the fourth layer F are related to the second side of the circuit board 1.1.
[0041] The excitation lines 1.111, 1.113, and 1.115 of the first detection unit 1.11 include excitation printed wires 1.1111, 1.1131, and 1.1151 extending in the first layer A and the second layer B. Similarly, the excitation lines 1.121 and 1.123 of the second detection unit 1.12 include excitation printed wires 1.1211 and 1.1231 extending in the third layer E and the fourth layer F.
[0042] The excitation lines 1.111, 1.113, and 1.115 of the first detection unit 1.11 surround the first receiving line 1.112 and the third receiving line 1.114. The second excitation line 1.121 and the fourth excitation line 1.123 of the second detection unit 1.12 surround the second receiving line 1.122 of the second detection unit 1.12. Similarly, one side of the fourth receiving line 1.124 associated with the second detection unit 1.12 is surrounded by the fourth excitation line 1.123. The excitation lines 1.111, 1.121, 1.113, 1.115, and 1.123, as well as the receiving lines 1.112, 1.114, 1.122, and 1.124, extend along the first direction x.
[0043] Each of the receiving lines 1.112, 1.114, 1.122, and 1.124 includes at least two receiving printed conductors 1.1121, 1.1141, 1.1221, and 1.1241, respectively. Furthermore, the receiving printed conductors 1.1121 and 1.1141 of the first detection unit 1.11 extend in different layers of the circuit board 1.11 using pressure contacts, specifically in layer A and layer B, to avoid unwanted short circuits at the intersection. The same applies to the receiving printed conductors 1.1221 and 1.1241 of the second detection unit 1.12, which extend in layer E and layer F, respectively. The receiving printed conductors 1.1121, 1.1141, 1.1221, and 1.1241 have spatially periodic curves, which are designed to be essentially sinusoidal. In the described embodiment, the receiving printed conductors 1.1121, 1.1141, 1.1221, and 1.1241 in one or more of the same receiving lines 1.112, 1.114, 1.122, and 1.124 are arranged to be offset from each other by 1 / 4 of the entire sine cycle (an offset of π / 2 or 90° along the first direction x). The receiving printed conductors 1.1121, 1.1141, 1.1221, and 1.1241 are electrically connected such that they can ultimately provide a signal with a 90° phase offset by determining their position with respect to the first direction x.
[0044] In the described embodiment, the circuit board 1.1 further includes a fifth layer C and a sixth layer D. A first shielding layer 1.13 is located in the sixth layer D, and a second shielding layer 1.14 is located in the fifth layer C. Here, shielding layers 1.13 and 1.14 are relatively large copper layers, which are partially interrupted or partially removed.
[0045] The dimensions of the first shielding layer 1.13 are determined such that a first straight line g1 can be generated. This first straight line is oriented orthogonal to the central plane M and parallel to a third direction z. The first straight line passes through or intersects with the first detection unit 1.11 and the first shielding layer 1.13. Furthermore, the first straight line g1 also passes through the electronic component 1.2. However, the first straight line g1 does not pass through the second shielding layer 1.14. Moreover, the first shielding layer 1.13 is positioned on the other side of the central plane M, i.e., from the perspective of the first detection unit 1.11, on the other side of the central plane M.
[0046] Furthermore, the dimensions of the second shielding layer 1.14 are determined such that a second straight line g2 can be generated. This second straight line is oriented orthogonal to the central plane M, passing through both the second detection unit 1.12 and the second shielding layer 1.14. The second straight line g2 does not pass through the first shielding layer 1.13. Starting from the second detection unit 1.12, the second shielding layer 1.14 is arranged on the other side of the central plane M.
[0047] The circuit board 1.1 is specifically configured such that a first straight line g1 passes through the first receiving line 1.112 of the first detection unit 1.11, and a second straight line g2 passes through the second receiving line 1.122 of the second detection unit 1.12.
[0048] In the described arrangement, the first shielding layer 1.13 is located behind the first detection unit 1.11 with a distance t about a third direction z (or offset from the first detection unit 1.11 by a distance t in the third direction z). Here, the distance t is greater than half the thickness of the circuit board 1. The same applies to the relative arrangement of the second shielding layer 1.14 with respect to the second detection unit 1.12. In the described embodiment, the distance t is 2 mm, which extends in the third direction z.
[0049] The first receiving line 1.112 is arranged with an offset of Y relative to the second receiving line 1.122 in the second direction y. Conversely, in the described embodiment, the first excitation line 1.111 is not offset from the second excitation line 1.121 in the second direction y, thus making the first excitation line 1.111 arranged with no offset relative to the second excitation line 1.121 in the second direction y on the circuit board 1.1.
[0050] The first shielding layer 1.13 does not reach the second excitation line 1.121 in the second direction y, but rather there is a first distance a1 (radially) between the first shielding layer 1.13 and the second excitation line 1.121 in the second direction y. Similarly, there is a second distance a2 between the second shielding layer 1.14 and the first excitation line 1.111 in the second direction y. Therefore, the first shielding layer 1.13 is arranged to be offset by the first distance a1 relative to the second excitation line 1.121, and furthermore, the second shielding layer 1.14 is arranged to be offset by the second distance a2 relative to the first excitation line 1.111. It is shown that when the first distance a1 and / or the second distance a2 are between 25%t and 100%t (0.25t ≤ a1 ≤ 1t; 0.25t ≤ a2 ≤ 1t), high quality of the measurement signal and therefore high measurement accuracy can be obtained together. In the described embodiment, a1 = a2 is applied.
[0051] Figure 5 A top view of the first scale element 2 is shown. Similarly, Figure 6 A top view of the second scale element 3 is shown. Scale elements 2 and 3 are each composed of a base, which in this embodiment is made of epoxy resin, and on which two indexing lines 2.1, 2.2; 3.1, 3.2 are respectively arranged. The indexing lines 2.1, 2.2; 3.1, 3.2 are constructed in a ring shape and arranged concentrically about the axis R with different diameters on the base. The indexing lines 2.1, 2.2; 3.1, 3.2 are respectively composed of a periodic sequence of alternating conductive indexing regions 2.11, 2.21; 3.11, 3.21 and non-conductive indexing regions 2.12, 2.22; 3.12, 3.22. In the illustrated embodiment, copper is applied to the base as the material for the conductive indexing regions 2.11, 2.21; 3.11, 3.21. Conversely, the base is not plated in the non-conductive graduation regions 2.12, 2.22; 3.12, 3.22. The angular positions of the scale elements 2 and 3 can be determined entirely by the arrangement of two graduation lines 2.1, 2.2; 3.1, 3.2, respectively. The outermost graduation line 2.2 of the first scale element 2 has the maximum number of graduation regions 2.11, 2.21 along the circumference, enabling the highest resolution measurement of angular position to be achieved through these graduation regions.
[0052] according to Figure 1In the assembled state, the scanning element 1 and the scale elements 2 and 3 have an axial distance or air gap, respectively, so that when the scale elements 2 and 3 rotate relative to the scanning element 1, signals related to the corresponding angular orientation can be generated in the receiving printed conductors 1.1121, 1.1141, 1.1221, and 1.1241 through induction. The prerequisite for forming the corresponding signals is that the excitation printed conductors 1.1111, 1.1131, 1.1151, 1.1211, and 1.1231 generate time-varying electromagnetic excitation fields in their respective scanned indexing structures. In the embodiment described, the excitation printed conductors 1.1111, 1.1131, 1.1151, 1.1211, and 1.1231 are constructed as multiple planar parallel current-carrying individual printed conductors. The scanning element 1 has an electronic circuit, which has electronic components 1.2, and the electronic components are electrically connected to each other via layers E and F. The electronic circuitry may also include, for example, an application-specific integrated circuit (ASIC-Baustein) module. The electronic circuitry of scanning element 1 functions not only as an evaluation element but also as an excitation control element, generating or producing an excitation current under the control of the excitation control element. This excitation current then flows through the excitation printed conductors 1.1111, 1.1131, 1.1151, 1.1211, and 1.1231. Therefore, the excitation printed conductors 1.1111, 1.1131, 1.1151, 1.1211, and 1.1231 are fed with excitation through one or more identical excitation control elements. Here, the first excitation line 1.111 and the second excitation line 1.121 are electrically connected in series.
[0053] Excitation lines 1.111, 1.121, 1.113, 1.115, 1.121, and 1.123 are fed with current, thus constructing a tubular or cylindrical directional electromagnetic field around the excitation printed conductors 1.1111, 1.1131, 1.1151, 1.1211, and 1.1231. The field force lines of the generated electromagnetic field extend around the excitation lines 1.111, 1.121, 1.113, 1.115, 1.121, and 1.123, wherein the direction of the field force lines depends, in a known manner and type, on the direction of the current in the excitation printed conductors 1.1111, 1.1131, 1.1151, 1.1211, and 1.1231. Eddy currents are induced in the conduction index regions 2.11, 2.21; 3.11, 3.21, thereby modulating the field accordingly based on the angular position. Accordingly, the relative angular position can be measured via receiving lines 1.112, 1.114, 1.122, and 1.124, respectively. The receiving printed conductor pairs 1.1121, 1.1141, 1.1221, and 1.1241 are arranged within their receiving lines 1.112, 1.114, 1.122, and 1.124 such that the receiving lines each provide a signal with a 90° phase shift, thereby enabling the determination of the rotation direction. The signals generated by receiving lines 1.112, 1.114, 1.122, and 1.124 are further processed by means of some of the electronic components 1.2 forming the evaluation circuit.
[0054] The special dimensions and arrangement of the first shielding layer 1.13 and the second shielding layer 1.14 can largely prevent the negative impact of the two detection units 1.11 and 1.12 on the measurement accuracy.
[0055] Specifically, it prevents unacceptably high values of crosstalk signals while avoiding excessive attenuation of the excitation field. Furthermore, electromagnetic interference from the detection units 1.11 and 1.12 is suppressed via electronic component 1.2 or by an external power supply.
[0056] Figure 7 A design scheme for the scanning element 1' according to a second embodiment is shown. The circuit board 1.1' of the second embodiment has only four layers A, B, E, and F. In this embodiment, the first shielding layer 1.13 is located in the third layer E, and the second shielding layer 1.14 is located in the second layer B. Here, the spacing t' is also substantially greater than half the thickness of the circuit board 1'.
[0057] Alternatively, the first shielding layer 1.13 can also be arranged in the first layer A and / or the second shielding layer 1.14 can be arranged in the fourth layer F.
Claims
1. A scanning element (1; 1') for an inductive position measuring device, the scanning element comprising a multilayer circuit board (1.1; 1.1') and electronic components (1.2), wherein The circuit board (1.1; 1.1') includes a first detection unit (1.11) and a second detection unit (1.12), wherein, The first detection unit (1.11) has a first excitation line (1.111) and a first receiving line (1.112), and The second detection unit (1.12) has a second excitation line (1.121) and a second receiving line (1.122), wherein, The circuit board (1.1; 1.1') has a first shielding layer (1.13) and a second shielding layer (1.14) and a geometric center plane (M), the geometric center plane being located between the detection units (1.11, 1.12) and the shielding layers (1.13, 1.14), and the circuit board (1.1; 1.1') is further configured such that... The first detection unit (1.11) is arranged in the first layer (A) and the second layer (B). The second detection unit (1.12) is arranged in the third layer (E) and the fourth layer (F), and The dimensions of the shielding layers (1.13, 1.14) were determined such that... A first straight line (g1) passes through the first detection unit (1.11) and the first shielding layer (1.13), but does not pass through the second shielding layer (1.14). The first shielding layer (1.13) is located on the other side of the central plane (M), originating from the first detection unit (1.11). The second straight line (g2) passes through the second detection unit (1.12) and the second shielding layer (1.14), while the second straight line (g2) does not pass through the first shielding layer (1.13). The second shielding layer (1.14) is located on the other side of the central plane (M), originating from the second detection unit (1.12). The first straight line (g1) and the second straight line (g2) are orthogonal to the central plane (M).
2. The scanning element (1) according to claim 1, wherein, The first shielding layer (1.13) is arranged in the fifth layer (C), and the second shielding layer (1.14) is arranged in the sixth layer (D).
3. The scanning element (1') according to claim 1, wherein The first shielding layer (1.13) is disposed in the first layer (A) or the second layer (B), and the second shielding layer (1.14) is disposed in the third layer (E) or the fourth layer (F).
4. The scanning element (1; 1') according to any one of claims 1 to 3, wherein, The first excitation line (1.111) and the second excitation line (1.121) extend along a first direction (x) and in a second direction (y) orthogonal to the first direction (x). The first shielding layer (1.13) is arranged to be offset by a first distance a1 relative to the second excitation line (1.121), and / or The second shielding layer (1.14) is arranged to be offset by a second distance a2 relative to the first excitation line (1.111).
5. The scanning element (1; 1') according to claim 4, wherein On a third direction (z) orthogonal to the central plane The first detection unit (1.11) is arranged offset from the first shielding layer (1.13) by a distance (t; t'), wherein the second distance a2 is greater than or equal to 25% of the distance (t; t') and less than or equal to 100% of the distance (t; t'), thereby being applicable 0.25t≤a2≤1t or 0.25t'≤a2≤1t' and / or The second detection unit (1.12) is arranged offset from the second shielding layer (1.14) by a distance (t; t'), wherein the first distance a1 is greater than or equal to 25% of the distance (t; t') and less than or equal to 100% of the distance (t; t'), thereby making it suitable for... 0.25t≤a1≤1t or 0.25t'≤a1≤1t'.
6. The scanning element (1; 1') according to any one of claims 1 to 3, wherein, The first receiving line (1.112) and the second receiving line (1.122) extend along a first direction (x), and the first receiving line (1.112) is arranged to have an offset (Y) relative to the second receiving line (1.122) in a second direction (y).
7. The scanning element (1; 1') according to any one of claims 1 to 3, wherein, The scanning element (1; 1') is designed such that the first straight line (g1) and / or the second straight line (g2) pass through one of the electronic components (1.2).
8. The scanning element (1; 1') according to any one of claims 1 to 3, wherein, The circuit board (1.1; 1.1') is configured such that the first straight line (g1) passes through the first receiving line (1.112) and / or the second straight line (g2) passes through the second receiving line (1.122).
9. The scanning element (1; 1') according to any one of claims 1 to 3, wherein, The first excitation line (1.111) and the second excitation line (1.121) extend along a first direction (x), and the first excitation line (1.111) is arranged on the circuit board (1.1; 1.1') with reference to a second direction (y) overlapping the second excitation line (1.121).
10. The scanning element (1; 1') according to any one of claims 1 to 3, wherein, The first detection unit (1.11) has a third excitation line (1.113), and the second detection unit (1.12) has a fourth excitation line (1.123).
11. The scanning element (1; 1') according to any one of claims 1 to 3, wherein The scanning element (1; 1') is designed such that the first excitation line (1.111) and the second excitation line (1.121) are electrically connected in series.
12. The scanning element (1; 1') according to any one of claims 1 to 3, wherein The first excitation line (1.111) and the second excitation line (1.121) can be fed with an excitation current that varies with time, wherein the excitation current can be generated by means of the electronic component (1.2).
13. The scanning element (1; 1') according to any one of claims 1 to 3, wherein The signals generated by the first receiving line (1.112) and the second receiving line (1.122) can be further processed by means of the electronic component (1.2).
14. An inductive position measuring device, comprising a scanning element (1; 1') according to any one of the preceding claims and a first scale element (2) and a second scale element (3), wherein, The scale elements (2, 3) are arranged at intervals on both sides of the circuit board (1.1, 1.1') in a third direction (z), which is orthogonal to the central plane.
15. An inductive position measuring device according to claim 14, wherein, The scale elements (2, 3) are arranged to be rotatable relative to the scanning elements (1; 1') about a common axis (R).