A six-mass MEMS dual-axis gyroscope for suppressing common-mode interference signals

By designing a six-mass MEMS biaxial gyro based on out-of-plane vibration, the amplification of differential mode signals and the suppression of common mode signals is achieved by using electrostatic driving and capacitive detection, the problem of inability to effectively suppress common mode signals in the prior art is solved, and detection accuracy and anti-interference ability are improved.

CN114195089BActive Publication Date: 2025-04-11QUANZHOU YUNJIAN MEASUREMENT CONTROL & SENSING TECH INNOVATION RES INST
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Patent Information

Application Number
CN202111513398.5
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-12-13
Publication Date
2025-04-11
Estimated Expiration
2041-12-13

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Abstract

The invention discloses a six-mass-block MEMS dual-axis gyroscope for suppressing common-mode interference signals. The MEMS dual-axis gyroscope can simultaneously detect angular velocities in two directions of the X-axis and the Y-axis. The gyroscope structure includes two triangular mass blocks, two X-axis mass blocks, two Y-axis mass blocks, mass block connecting beams, comb tooth structures, anchor point structures, support beam structures and frame structures. Its working principle is that the two triangular mass blocks of the gyroscope perform reverse simple harmonic vibrations along the out-of-plane (i.e., the Z-axis) under the drive of electrostatic force, and the simple harmonic vibrations are transmitted to the mass blocks in the X-axis and Y-axis directions through the mass block connecting beams. When there is an angular velocity along the X-axis or Y-axis, due to the Coriolis effect, a pair of mass blocks in the X-axis or Y-axis will be caused to vibrate in the opposite direction, generating a differential-mode capacitance signal. When the back-end processing circuit adopts a differential circuit, the differential-mode capacitance signal is amplified and the common-mode interference signal is suppressed, thereby improving the anti-interference ability of the gyroscope.
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Citation Information

Patent Citations

  • Vibration-resistant rotation rate sensor

    CN104634338A

  • High-precision measuring method based on difference MEMS gyroscopes

    CN106289207A

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