Gas dissolving liquid supply device and method performed by gas dissolving liquid supply device

Abstract

Provided is a gas-dissolved liquid supply device and method that can achieve high concentration of a gas-dissolved liquid and can suppress variation in delivery pressure of the gas-dissolved liquid. The gas-dissolved liquid supply device (1) includes a first gas-liquid separator (8) that stores a gas-dissolved liquid, a second gas-liquid separator (16) that is disposed at a rear stage of the first gas-liquid separator and stores a gas-dissolved liquid to be supplied to a use point, an intermediate line (17) that is disposed between the first gas-liquid separator and the second gas-liquid separator, a pressure increasing pump (18) that is disposed in the intermediate line and increases the pressure of the gas-dissolved liquid supplied from the first gas-liquid separator to the second gas-liquid separator, a gas supply line (2) that supplies a gas that is a raw material of the gas-dissolved liquid, and a gas-dissolving portion (20) that is disposed in the intermediate line and dissolves the gas supplied from the gas supply line in the gas-dissolved liquid supplied from the first gas-liquid separator.

Description

Technical Field

[0001] This invention relates to a gas solution supply device for supplying gas solutions, and more particularly to a technique for increasing the concentration of gas solutions. Background Technology

[0002] Previously, ozone water was used for cleaning electronic components such as semiconductor devices and liquid crystal displays. Ozone water is produced by dissolving ozone gas in ultrapure water and is supplied to the point of use (semiconductor device factories, electronic component factories, etc.).

[0003] In conventional ozone water manufacturing apparatus, ozone water produced by dissolving ozone gas in ultrapure water is stored in a gas-liquid separator and then pumped from the gas-liquid separator to the point of use via a pump located at the downstream end of the gas-liquid separator (for example, see Patent Document 1).

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 2019-155221

[0007] However, in conventional devices, only a gas-liquid separator was installed, and a pump (for delivering ozone water to the point of use) was installed downstream of this separator. Therefore, it was difficult to increase the pressure of the gas-liquid separator, making it challenging to achieve a high concentration of ozone water. Furthermore, when the pump was an air-driven pump, fluctuations in the ozone water delivery pressure were difficult to suppress due to pump pulsation. Summary of the Invention

[0008] The present invention was made in view of the above-mentioned technical problems, and its object is to provide a gas solution supply device that can achieve a high concentration of gas solution and suppress fluctuations in the delivery pressure of gas solution.

[0009] Technical means for solving technical problems

[0010] The gas-dissolved liquid supply device of the present invention comprises: a first gas-liquid separator that stores gas-dissolved liquid; a second gas-liquid separator disposed downstream of the first gas-liquid separator and storing gas-dissolved liquid supplied to a point of use; an intermediate line disposed between the first gas-liquid separator and the second gas-liquid separator; a booster pump disposed in the intermediate line that increases the pressure of the gas-dissolved liquid supplied from the first gas-liquid separator to the second gas-liquid separator; a gas supply line that supplies gas that becomes the raw material for the gas-dissolved liquid; and a gas dissolving section disposed in the intermediate line that dissolves the gas supplied from the gas supply line in the gas-dissolved liquid supplied from the first gas-liquid separator.

[0011] According to this structure, since the booster pump is located upstream of the second gas-liquid separator, the pressure of the second gas-liquid separator can be increased, enabling the high concentration of the gas-liquid solution. Furthermore, since the second gas-liquid separator is located downstream of the booster pump, a damper effect is achieved, suppressing fluctuations in the pressure of the gas-liquid solution supplied from the second gas-liquid separator to the point of use.

[0012] Alternatively, in the gas solution supply device of the present invention, a circulation supply line may be provided in the first gas-liquid separator, which circulates and supplies the gas solution that is not used at the point of use.

[0013] According to this structure, unused gaseous liquid at the point of use can be reused, thereby reducing the amount of gas used as a raw material for the gaseous liquid. In this case, since the first gas-liquid separator supplied with the unused gaseous liquid at the point of use is located upstream of the booster pump, a pump for increasing the pressure of the unused gaseous liquid is not required.

[0014] Alternatively, in the gas dissolving liquid supply device of the present invention, a liquid supply line may be provided in the first gas-liquid separator, which supplies liquid that becomes the raw material of the gas dissolving liquid, and a second gas dissolving section may be provided in the liquid supply line, which dissolves the undissolved residual gas discharged from the second gas-liquid separator into the liquid that becomes the raw material of the gas dissolving liquid.

[0015] According to this structure, the undissolved residual gas discharged from the second gas-liquid separator can be reused, thereby reducing the amount of gas used as a raw material for the gas solution.

[0016] Alternatively, the gas dissolved liquid supply device of the present invention may include: a first valve provided in a liquid supply line for supplying liquid that becomes the raw material of the gas dissolved liquid; a second valve provided in a gas dissolved liquid supply line for supplying the gas dissolved liquid to a point of use; a third valve provided in an exhaust line from the first gas-liquid separator to an exhaust port; a fourth valve provided in a drainage line branching from the exhaust line; and a control unit that controls the opening and closing of the first valve, the second valve, the third valve, and the fourth valve. When supplying the gas dissolved liquid to the point of use, the control unit controls the opening of the first valve, the second valve, and the third valve and the closing of the fourth valve. When cleaning the first gas-liquid separator and the second gas-liquid separator, the control unit controls the closing of the second valve and the third valve and the opening of the first valve and the fourth valve.

[0017] According to this structure, by opening the first valve, the second valve, and the third valve and closing the fourth valve, the gas-liquid solution can be supplied to the point of use. By closing the second valve and the third valve and opening the first valve and the fourth valve, the first gas-liquid separator and the second gas-liquid separator can be cleaned.

[0018] The method of the present invention is performed by a gas-dissolving liquid supply device comprising: a first gas-liquid separator for storing gas-dissolving liquid; a second gas-liquid separator disposed downstream of the first gas-liquid separator and storing gas-dissolving liquid supplied to a point of use; an intermediate line disposed between the first gas-liquid separator and the second gas-liquid separator; and a booster pump disposed in the intermediate line for increasing the pressure of the gas-dissolving liquid supplied from the first gas-liquid separator to the second gas-liquid separator. The method includes: supplying a gas, which is a raw material for the gas-dissolving liquid, to the intermediate line; and dissolving the supplied gas in the gas-dissolving liquid supplied from the first gas-liquid separator.

[0019] Similar to the aforementioned apparatus, this method, by placing the booster pump upstream of the second gas-liquid separator, also increases the pressure of the second gas-liquid separator, enabling the high concentration of the gas-liquid solution. Furthermore, since the second gas-liquid separator is located downstream of the booster pump, a damping effect is achieved, suppressing fluctuations in the pressure of the gas-liquid solution supplied from the second gas-liquid separator to the point of use.

[0020] Alternatively, in the method of the present invention, the gas solution supply device may include: a first valve provided in a liquid supply line for supplying liquid that becomes the raw material of the gas solution; a second valve provided in a gas solution supply line for supplying the gas solution to a point of use; a third valve provided in an exhaust line from the first gas-liquid separator to an exhaust port; and a fourth valve provided in a drainage line branching from the exhaust line. In the method, when supplying the gas solution to the point of use, the first valve, the second valve, and the third valve are opened and the fourth valve is closed. When cleaning the first gas-liquid separator and the second gas-liquid separator, the second valve and the third valve are closed and the first valve and the fourth valve are opened.

[0021] According to this method, by opening the first valve, the second valve, and the third valve and closing the fourth valve, gas-liquid solution can be supplied to the point of use; by closing the second valve and the third valve and opening the first valve and the fourth valve, the first gas-liquid separator and the second gas-liquid separator can be cleaned.

[0022] The effects of the invention

[0023] According to the present invention, it is possible to achieve a high concentration of gaseous solution and suppress fluctuations in the delivery pressure of gaseous solution. Attached Figure Description

[0024] Figure 1 This is an explanatory diagram showing the structure of the gas dissolving liquid supply device (ozone water supply device) in the first embodiment of the present invention.

[0025] Figure 2 This is an explanatory diagram showing the structure of the gas dissolving liquid supply device (ozone water supply device) in the second embodiment of the present invention.

[0026] Figure 3 This is an explanatory diagram showing the structure of the gas dissolving liquid supply device (ozone water supply device) in the third embodiment of the present invention.

[0027] Figure 4 This is an explanatory diagram showing the structure of the gas dissolving liquid supply device (ozone water supply device) in the fourth embodiment of the present invention.

[0028] Figure 5 This is a diagram showing the structure of a modified example of the gas dissolving liquid supply device (ozone water supply device) of the first embodiment.

[0029] Figure 6 This is a diagram showing the structure of a modified example of the gas dissolving liquid supply device (ozone water supply device) of the second embodiment.

[0030] Figure 7 This is a diagram showing the structure of a modified example of the gas dissolving liquid supply device (ozone water supply device) according to the third embodiment.

[0031] Figure 8 This is a diagram showing the structure of a modified example of the gas dissolving liquid supply device (ozone water supply device) according to the fourth embodiment.

[0032] Figure 9 The diagram shows another example of a gas-dissolving liquid supply device (ozone water supply device).

[0033] Symbol Explanation

[0034] 1. Ozone water supply device

[0035] 2. Gas supply line

[0036] 3. Liquid supply line

[0037] 4. Gas flow regulator

[0038] 5. Ozone generator

[0039] 6. Flow regulating valve

[0040] 7 Flow Sensor

[0041] 8 First gas-liquid separator

[0042] 9. Circulating supply line

[0043] 10 Flow Sensors

[0044] 11 Pressure regulating valve

[0045] 12 Water level sensors

[0046] 13 Exhaust Line

[0047] 14 Ozone Gas Decomposer

[0048] 15 Pressure regulating valve

[0049] 16 Second gas-liquid separator

[0050] 17. Middle route

[0051] 18 booster pumps

[0052] 19 Flow Sensor

[0053] 20 Gas dissolution nozzle

[0054] 21 Water level sensor

[0055] 22. Drainage circuit

[0056] 23 Pressure regulating valve

[0057] 24 Ozone Water Supply Line

[0058] 25 Flow Sensor

[0059] 26 Pressure Sensors

[0060] 27 outgoing lines

[0061] 28 Ozone Water Concentration Meter

[0062] 29 Second Gas Dissolution Nozzle

[0063] 30 Ozone Water Supply Lines

[0064] Valves 31-37

[0065] 38 Supply Lines

[0066] 39 valve

[0067] 40 valve Detailed Implementation

[0068] Hereinafter, a gas dissolving liquid supply device according to an embodiment of the present invention will be described using the accompanying drawings. In this embodiment, an ozone water supply device for the production of ozone water and the like is illustrated.

[0069] (First Implementation)

[0070] The structure of the ozone water supply device according to the first embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 This is an explanatory diagram showing the structure of the ozone water supply device according to this embodiment. (See diagram below.) Figure 1 As shown, the ozone water supply device 1 includes: a gas supply line 2 for supplying ozone gas, which is the raw material for ozone water, and a liquid supply line 3 for supplying pure water (DIW), which is the raw material for ozone water.

[0071] A first gas (e.g., oxygen) and a second gas (e.g., carbon dioxide, nitrogen, or a mixture of carbon dioxide and nitrogen) are supplied as raw materials to become ozone gas via gas supply line 2. A gas flow regulator 4 and an ozone generator 5 are provided in gas supply line 2. The gas flow regulator 4 adjusts the flow rates of the first and second gases, respectively. The ozone generator 5 generates ozone gas from the raw material gas (the mixture of the first and second gases) through discharge.

[0072] Pure water is supplied through liquid supply line 3, and the flow rate of the pure water is adjusted by flow regulating valve 6 and measured by flow sensor 7. Liquid supply line 3 is connected to the first gas-liquid separator 8. Circulation supply line 9 is connected to the first gas-liquid separator 8, and this circulation supply line 9 circulates unused ozone water at the point of use and supplies it to the first gas-liquid separator 8.

[0073] A flow sensor 10 and a pressure regulating valve 11 are installed in the circulating supply line 9. The flow sensor 10 measures the flow rate of ozone water that is not used at the point of use, and the pressure regulating valve 11 adjusts the pressure of the ozone water that is not used at the point of use.

[0074] Unused ozone water accumulates in a first gas-liquid separator 8, which is equipped with a water level sensor 12 for measuring the water level of the ozone water. An exhaust line 13 for discharging undissolved ozone gas is provided in the first gas-liquid separator 8. An ozone gas decomposer 14 for decomposing ozone gas and a pressure regulating valve 15 for adjusting the pressure of the discharged ozone gas are provided in the exhaust line 13.

[0075] A second gas-liquid separator 16 is provided at the downstream end of the first gas-liquid separator 8 to store ozone water supplied to the point of use. The first gas-liquid separator 8 and the second gas-liquid separator 16 are connected by an intermediate line 17.

[0076] The intermediate line 17 includes: a booster pump 18 for increasing the pressure of ozone water supplied from the first gas-liquid separator 8 to the second gas-liquid separator 16; a flow sensor 19 for measuring the flow rate of ozone water supplied to the second gas-liquid separator 16; and a gas dissolving nozzle 20 for dissolving ozone gas supplied from the gas supply line 2 in the ozone water supplied from the first gas-liquid separator 8. Furthermore, ozone water from the gas dissolving nozzle 20 can also enter from the upper part of the second gas-liquid separator 16. Alternatively, ozone water from the gas dissolving nozzle 20 can also enter from the lower part of the second gas-liquid separator 16. In this case, it is preferable that the gas dissolving nozzle 20 is located at the lower part of the second gas-liquid separator 16.

[0077] As the booster pump 18, a centrifugal pump, bellows pump, diaphragm pump, etc., can be used. The part of the booster pump 18 that comes into contact with ozone water and ozone gas is made of a material resistant to ozone water and ozone gas (e.g., fluororesin). As the gas dissolution nozzle 20, an injector or inhaler can be used. The injector or inhaler can dissolve ozone gas in pure water using the Venturi effect. When using an injector or inhaler, compared with an ozone dissolution tank using a hollow fiber membrane, regular replacement is not required, and the dissolution rate is improved. Furthermore, the gas dissolution nozzle 20 is preferably located at the downstream end of the booster pump 18. When the gas dissolution nozzle 20 is located at the upstream end of the booster pump 18, by supplying gas-liquid mixed water to the booster pump 18, the water delivery / pressure boosting performance of the booster pump 18 is reduced, thereby reducing the flow rate / pressure of the supplied ozone water.

[0078] A water level sensor 21 for measuring the water level of the ozone water is provided in the second gas-liquid separator 16. Additionally, a discharge line 22 for discharging undissolved ozone gas is provided in the second gas-liquid separator 16. A pressure regulating valve 23 for adjusting the pressure of the ozone gas discharged from the second gas-liquid separator 16 is provided in the discharge line 22. In this embodiment, the discharge line 22 from the second gas-liquid separator 16 is connected to the exhaust line 13 from the first gas-liquid separator 8.

[0079] The second gas-liquid separator 16 is provided with an ozone water supply line 24 for supplying ozone water to the point of use. The ozone water supply line 24 is provided with a flow sensor 25 and a pressure sensor 26. The flow sensor 25 measures the flow rate of the ozone water supplied to the point of use, and the pressure sensor 26 measures the pressure of the ozone water supplied to the point of use.

[0080] Each of the ozone water supply line 24 and the liquid supply line 3 has a branch line 27, which is connected to the circulation supply line 9. An ozone water concentration meter 28 for measuring the concentration of ozone water is installed on the branch line 27. The ozone water concentration meter 28 has a switching valve to accommodate both the zero point measurement of the DIW (distillation water volume) and the concentration of ozone water.

[0081] In the ozone water supply device 1 of this embodiment, pressure control is performed by the pressure regulating valve 11 of the circulation supply line 9 to keep the value of the pressure sensor 26 of the ozone water supply line 24 constant. Additionally, pressure control is performed by the booster pump 18 of the intermediate line 17 to make the value of the flow sensor 25 of the ozone water supply line 24 the same as the value of the flow sensor 19 of the intermediate line 17. Alternatively, flow control is performed by the flow regulating valve 6 of the liquid supply line 3 to make the difference between the value of the flow sensor 25 of the ozone water supply line 24 and the value of the flow sensor 10 of the circulation supply line 9 the same as the value of the flow sensor 7 of the liquid supply line 3. Furthermore, based on the value of the ozone water concentration meter 28 of the output line 27, the gas flow rate of the gas supply line 2 is adjusted by the regulator 4, and the gas concentration of the gas supply line 2 is adjusted by the ozone generator 5 (adjusting the power discharged by the ozone generator 5), thereby controlling the gas flow rate and gas concentration (ozone gas supply amount).

[0082] According to this first embodiment of the ozone water supply device 1, since the booster pump 18 is located upstream of the second gas-liquid separator 16, the pressure of the second gas-liquid separator 16 can be increased, thereby achieving a high concentration of ozone water. Furthermore, since the second gas-liquid separator 16 is located downstream of the booster pump 18, a damping effect is achieved, suppressing fluctuations in the delivery pressure of the ozone water supplied from the second gas-liquid separator 16 to the point of use.

[0083] Furthermore, in this embodiment, unused ozone water at the point of use can be reused, reducing the amount of ozone gas and DIW used as raw materials for ozone water. In this case, the first gas-liquid separator 8, which supplies unused ozone water at the point of use, is located upstream of the booster pump 18, thus eliminating the need for a pump to increase the pressure of the unused ozone water.

[0084] (Second Implementation)

[0085] Next, the ozone water supply device 1 according to the second embodiment of the present invention will be described. Here, the description will focus on the differences between the ozone water supply device 1 of the second embodiment and the first embodiment. Unless otherwise specified, the structure and operation of this embodiment are the same as those of the first embodiment.

[0086] Figure 2 This is an explanatory diagram showing the structure of the ozone water supply device 1 according to this embodiment. Figure 2As shown, in this embodiment, a second gas dissolving nozzle 29 is provided in the liquid supply line 3, and the second gas dissolving nozzle 29 is connected to a discharge line 22 from the second gas-liquid separator 16. The second gas dissolving nozzle 29 dissolves undissolved residual ozone gas discharged from the second gas-liquid separator 16 in the pure water supplied to the liquid supply line 3. Ozone water is supplied from the liquid supply line 3 to the first gas-liquid separator 8. Furthermore, ozone water from the gas dissolving nozzle 29 can also enter from the upper part of the first gas-liquid separator 8. Alternatively, ozone water from the gas dissolving nozzle 29 can also enter from the lower part of the first gas-liquid separator 8. In this case, it is preferable that the gas dissolving nozzle 29 is located at the lower part of the first gas-liquid separator 8.

[0087] In the ozone water supply device 1 of this embodiment, similar to the first embodiment, pressure control is performed by the pressure regulating valve 11 of the circulation supply line 9 to keep the value of the pressure sensor 26 of the ozone water supply line 24 constant. Additionally, flow control is performed by the booster pump 18 of the intermediate line 17 to make the value of the flow sensor 25 of the ozone water supply line 24 the same as the value of the flow sensor 19 of the intermediate line 17. Alternatively, flow control is performed by the flow regulating valve 6 of the liquid supply line 3 to make the difference between the value of the flow sensor 25 of the ozone water supply line 24 and the value of the flow sensor 10 of the circulation supply line 9 the same as the value of the flow sensor 7 of the liquid supply line 3. Furthermore, based on the value of the ozone water concentration meter 28 of the output line 27, the gas flow rate of the gas supply line 2 is adjusted by the regulator 4, and the gas concentration of the gas supply line 2 is adjusted by the ozone generator 5 (adjusting the power discharged by the ozone generator 5), thereby controlling the gas flow rate and gas concentration (ozone gas supply amount).

[0088] The ozone water supply device 1 of this second embodiment can also achieve the same effect as the first embodiment.

[0089] In addition, in this embodiment, the undissolved residual ozone gas discharged from the second gas-liquid separator 16 can be reused, thereby further reducing the amount of ozone gas used as a raw material for ozonated water. Furthermore, in this embodiment, compared to the first embodiment, a higher concentration of ozonated water can be achieved.

[0090] (Third Implementation)

[0091] Next, the ozone water supply device 1 according to the third embodiment of the present invention will be described. Here, the description will focus on the differences between the ozone water supply device 1 of the third embodiment and the second embodiment. Unless otherwise specified, the structure and operation of this embodiment are the same as those of the second embodiment.

[0092] Figure 3 This is an explanatory diagram showing the structure of the ozone water supply device 1 according to this embodiment. Figure 3 As shown, in this embodiment, there is no circulation supply line 9 for circulating unused ozone water at the point of use and supplying it to the first gas-liquid separator 8. Therefore, compared with the first and second embodiments, the pressure of the first gas-liquid separator 8 can be increased, and the concentration of ozone water can be made high.

[0093] In the ozone water supply device 1 of this embodiment, pressure control is performed by the pressure regulating valve 11 of the circulation supply line 9 to keep the value of the flow sensor 25 or pressure sensor 26 of the ozone water supply line 24 constant. Furthermore, flow control is performed by the booster pump 18 of the intermediate line 17 to make the value of the flow sensor 25 of the ozone water supply line 24 the same as the value of the flow sensor 19 of the intermediate line 17. Also, flow control is performed by the flow regulating valve 6 of the liquid supply line 3 to make the value of the flow sensor 7 of the liquid supply line 3 the same. Moreover, based on the value of the ozone water concentration meter 28 of the output line 27, the gas flow rate of the gas supply line 2 is adjusted by the regulator 4, and the gas concentration of the gas supply line 2 is adjusted by the ozone generator 5 (adjusting the power discharged by the ozone generator 5), thereby controlling the gas flow rate and gas concentration (ozone gas supply amount).

[0094] The ozone water supply device 1 of this third embodiment can also achieve the same effect as the second embodiment.

[0095] In this embodiment, since there is no circulating supply line 9, although the ozone water that is not used at the point of use cannot be reused, it is possible to achieve a higher concentration compared to the second embodiment.

[0096] (Fourth Implementation)

[0097] Next, the ozone water supply device 1 according to the fourth embodiment of the present invention will be described. Here, the description will focus on the differences between the ozone water supply device 1 of the fourth embodiment and the first embodiment. Unless otherwise specified, the structure and operation of this embodiment are the same as those of the first embodiment.

[0098] Figure 4 This is an explanatory diagram showing the structure of the ozone water supply device 1 according to this embodiment. Figure 4As shown, in this embodiment, the liquid supply line 3 is not connected to the first gas-liquid separator 8, but to the booster pump 18. Furthermore, the ozone water supply line 30 merges with the liquid supply line 3, supplying ozone water from the first gas-liquid separator 8. Moreover, the discharge line 22 from the second gas-liquid separator 16 is not connected to the exhaust line 13, but to the recirculation supply line 9.

[0099] The ozone water supply device 1 of this fourth embodiment can also achieve the same effect as the first embodiment.

[0100] (Internal cleaning of the gas-liquid separator)

[0101] The ozone water supply device 1 is capable of internal cleaning functions for the gas-liquid separators 8 and 16. Hereinafter, an example (modified example) of the ozone water supply device 1 with the gas-liquid separator cleaning function will be described.

[0102] (Variation Example 1)

[0103] Figure 5 This is a diagram showing the structure of a modified example (Modification 1) of the ozone water supply device 1 according to the first embodiment. Figure 5 As shown, in this modified example 1, a valve 31 is provided on the liquid supply line 3 supplying pure water, and a valve 32 is provided on the ozone water supply line 24 supplying ozone water to the point of use. Additionally, a valve 33 is provided on the circulation supply line 9, which returns unused ozone water from the point of use to the ozone water supply device 1. Furthermore, a valve 34 is provided on the exhaust line 13 from the first gas-liquid separator 8 to the exhaust port, and a valve 35 is provided on the drainage line 130 branching from the exhaust line 13. A valve 36 with a function to further adjust the opening degree is provided on the exhaust line 13. These valves 31 to 36 can be opened and closed by a control unit (not shown) provided in the ozone water supply device 1.

[0104] In this modified example 1, when ozone water is supplied to the point of use, the opening and closing control is performed by opening valves 32, 33, 34, and 36, and closing valve 35. Valve 31 is opened and closed based on the water level of the first gas-liquid separator 8 detected by the water level sensor 12. Specifically, valve 31 is closed when the water level of the first gas-liquid separator 8 is high, and opened when the water level of the first gas-liquid separator 8 is low.

[0105] On the other hand, when the supply of ozone water to the point of use is stopped and the gas-liquid separators 8 and 16 are cleaned, the opening and closing control is performed by opening valves 31 and 35, adjusting the opening of throttle valve 36, and closing valves 32, 33, and 34. At this time, water level sensors 12 and 21 are set to a state where the high water level alarm function is deactivated. In addition, the supply of ozone gas from gas supply line 2 is also set to a state of being stopped.

[0106] When pure water is supplied from the liquid supply line 3, the gas inside the first gas-liquid separator 8 is gradually released by opening valve 31 and adjusting the opening of the throttle valve 36, allowing pure water to fill the first gas-liquid separator 8. Since valve 32 is closed, valve 40 inside the ozone water concentration meter 28 is also closed, causing the water level in the second gas-liquid separator 16 to gradually rise until it is finally filled with pure water. This allows the interiors of both the first and second gas-liquid separators 8 and 16 to be cleaned with pure water.

[0107] Additionally, since valve 32 is closed, pure water from the second gas-liquid separator 16 is sent from discharge line 22 to exhaust line 13. It is then discharged from drain line 130, which branches off from exhaust line 13, into a drain pipe.

[0108] In this case, by closing valve 34 and opening valve 35, pure water from the first gas-liquid separator 8 is discharged from the drain line 130 to the drain pipe, which branches off from the exhaust line 13. Furthermore, if an ozone decomposer (not shown) is installed in the drain line 130, the interior of the gas-liquid separators 8 and 16 can be cleaned using ozone water (which has a higher cleaning capacity than pure water) without stopping the supply of ozone gas.

[0109] According to Modification 1, by controlling the opening and closing of valves 31 to 36 as described above, ozone water can be supplied to the point of use, and the interior of the first gas-liquid separator 8 and the second gas-liquid separator 16 can be cleaned with pure water.

[0110] (Variation Example 2)

[0111] Next, a modification (Modification 2) of the ozone water supply device 1 according to the second embodiment will be described. Here, the description will focus on the differences between Modification 2 and Modification 1. Unless otherwise specified, the structure and operation of Modification 2 are the same as those of Modification 1.

[0112] Figure 6This is a diagram showing the structure of the ozone water supply device 1 in Modified Example 2. Pure water from the second gas-liquid separator 16 is sent from the discharge line 22 to the first gas-liquid separator 8 via the nozzle 29. When the valve 36 is opened, pure water from the first gas-liquid separator 8 is discharged from the drain line 130 to the drain pipe, which branches off from the exhaust line 13.

[0113] With this modified example 2, the opening and closing control of valves 31 to 36 can be performed in the same way as in modified example 1. As a result, ozone water can be supplied to the point of use, and the interior of the first gas-liquid separator 8 and the second gas-liquid separator 16 can be cleaned with pure water.

[0114] (Variation Example 3)

[0115] Next, a modification (Modification 3) of the ozone water supply device 1 according to the third embodiment will be described. Here, the description will focus on the differences between Modification 3 and Modification 1. Unless otherwise specified, the structure and operation of Modification 3 are the same as those of Modification 1.

[0116] Figure 7 This is a diagram showing the structure of the ozone water supply device 1 in Modified Example 3. Since the ozone water supply device 1 in Modified Example 3 does not have a circulation supply line 9, the valve 33 installed on the circulation supply line 9 is also not provided. Pure water from the second gas-liquid separator 16 is sent from the discharge line 22 to the first gas-liquid separator 8 via the nozzle 29. When the valve 36 is opened, pure water from the first gas-liquid separator 8 is discharged from the drain line 130 to the drain pipe, which branches off from the exhaust line 13.

[0117] With this modified example 3, the opening and closing control of valves 31, 32, 34, 35, and 36 can be performed in the same way as in modified example 1. As a result, ozone water can be supplied to the point of use, and the interior of the first gas-liquid separator 8 and the second gas-liquid separator 16 can be cleaned with pure water.

[0118] (Variation Example 4)

[0119] Next, a modification (Modification 4) of the ozone water supply device 1 according to the fourth embodiment will be described. Here, the description will focus on the differences between Modification 4 and Modification 1. Unless otherwise specified, the structure and operation of Modification 4 are the same as those of Modification 1.

[0120] Figure 8 This is a diagram showing the structure of the ozone water supply device 1 in Modified Example 4. (See diagram for example.) Figure 8 As shown, in Modification 4, the exhaust line 13 does not have a valve 36 with an adjustable opening function. On the other hand, in Modification 4, the ozone water supply line 30 from the first gas-liquid separator 8 is equipped with a valve 37.

[0121] In this modified example 4, when ozone water is supplied to the point of use, the opening and closing control is performed by opening valves 32, 33, 34, and 37, and closing valve 35. Valve 31 is opened and closed based on the water level of the first gas-liquid separator 8 detected by the water level sensor 12. Specifically, the opening and closing control is performed by closing valve 31 when the water level of the first gas-liquid separator 8 is high, and opening valve 31 when the water level of the first gas-liquid separator 8 is low.

[0122] On the other hand, when the supply of ozone water to the point of use is stopped and the gas-liquid separators 8 and 16 are cleaned, the opening and closing control is performed by opening valves 31 and 35 and closing valves 32, 33, 34, and 37. At this time, the water level sensors 12 and 21 are set to a state where the high water level alarm function is deactivated. In addition, the supply of ozone gas from the gas supply line 2 is also set to a state of being stopped.

[0123] When pure water is supplied from the liquid supply line 3, the water level in the second gas-liquid separator 16 gradually rises because valves 32 and 37 are closed, eventually filling the second gas-liquid separator 16 with pure water. This allows the interior of the second gas-liquid separator 16 to be cleaned with pure water.

[0124] Furthermore, since valves 32 and 37 are closed, pure water from the second gas-liquid separator 16 is sent from the discharge line 22 to the circulation supply line 9. At this time, since valve 33 is closed, the pure water sent to the circulation supply line 9 is supplied to the first gas-liquid separator 8. Also, since valve 37 is closed, the water level in the first gas-liquid separator 8 gradually rises until it is finally filled with pure water. In this way, the interior of the first gas-liquid separator 8 can be cleaned with pure water.

[0125] In this case, since valve 34 is closed and valve 35 is open, pure water from the first gas-liquid separator 8 is discharged from the drain line 130 to the drain pipe, which branches off from the exhaust line 13.

[0126] With variation 4, the opening and closing of valves 31-35 and 37 can also be controlled as described above, thereby supplying ozone water to the point of use and cleaning the interior of the first gas-liquid separator 8 and the second gas-liquid separator 16 with pure water.

[0127] (Other examples)

[0128] Figure 9 Other examples of the ozone water supply device 1 are shown. Figure 9In this example, the first gas-liquid separator 8 is not provided, and a valve 39 is provided on the supply line 38 that supplies ozone water generated by the gas dissolution nozzle 20 to the second gas-liquid separator 16. In addition, an exhaust line 13 is provided on the second gas-liquid separator 16.

[0129] In Figure 9 In the example, when ozone water is supplied to the point of use, the opening and closing control is performed by opening valves 32, 34, and 39 and closing valve 35. Valve 31 is opened and closed based on the water level of the second gas-liquid separator 16 detected by the water level sensor 21. Specifically, the opening and closing control is performed by closing valve 31 when the water level of the second gas-liquid separator 16 is high and opening valve 31 when the water level of the second gas-liquid separator 16 is low.

[0130] On the other hand, when the supply of ozone water to the point of use is stopped and the second gas-liquid separator 16 is cleaned, the opening and closing control is performed by opening valves 31, 35, and 39, and closing valves 32 and 34. At this time, the water level sensor 21 is set to a state where the high water level alarm function is deactivated. In addition, the supply of ozone gas from the gas supply line 2 is also set to a state of stop.

[0131] When pure water is supplied from the liquid supply line 3, the water level in the second gas-liquid separator 16 gradually rises because valve 32 is closed, eventually filling the second gas-liquid separator 16 with pure water. In this way, the interior of the second gas-liquid separator 16 can be cleaned with pure water.

[0132] In this case, since valve 34 is closed and valve 35 is open, pure water from the second gas-liquid separator 16 is discharged from the drain line 130 to the drain pipe, which branches off from the exhaust line 13.

[0133] Through this Figure 9 For example, valves 31, 32, 34, 35, and 39 can be opened and closed as described above, thereby supplying ozone water to the point of use and cleaning the interior of the second gas-liquid separator 16 with pure water.

[0134] The embodiments of the present invention have been described above by way of examples, but the scope of the present invention is not limited thereto, and modifications / variations can be made according to the purpose within the scope of the claimed protection.

[0135] Industrial utilization potential

[0136] As described above, the gas solution supply device of the present invention has the effect of achieving a high concentration of gas solution and suppressing fluctuations in the delivery pressure of gas solution, and is useful in the production of ozone water and the like.

Claims

1. A gas-dissolving liquid supply device, characterized in that, have: A first gas-liquid separator, which stores gas dissolved in liquid; A second gas-liquid separator is disposed at the downstream end of the first gas-liquid separator and accumulates the dissolved gas supplied to the point of use. An intermediate line is provided between the first gas-liquid separator and the second gas-liquid separator; A booster pump is provided in the intermediate line to increase the pressure of the gas-liquid solution supplied from the first gas-liquid separator to the second gas-liquid separator; A gas supply line that supplies gas that becomes the raw material for the gas solution; A gas dissolving section is provided in the intermediate line, and dissolves the gas supplied from the gas supply line in the gas dissolving liquid supplied from the first gas-liquid separator. A first valve is provided in the liquid supply line that supplies the liquid that becomes the raw material for the gas solution; A second valve is provided in the gas solution supply line that supplies the gas solution to the point of use; A third valve is provided on the exhaust line from the first gas-liquid separator to the exhaust port; A fourth valve is provided in the drainage line, which branches off from the exhaust line; as well as The control unit controls the opening and closing of the first valve, the second valve, the third valve, and the fourth valve. When the gas solution is supplied to the point of use, the control unit opens the first valve, the second valve, and the third valve, and closes the fourth valve. When cleaning the first gas-liquid separator and the second gas-liquid separator, the control unit controls the closing of the second valve and the third valve and the opening of the first valve and the fourth valve.

2. The gas dissolving liquid supply device according to claim 1, characterized in that, The first gas-liquid separator is provided with a circulation supply line, which circulates and supplies the gas solution that is not used at the point of use.

3. The gas dissolving liquid supply device according to claim 1, characterized in that, The first gas-liquid separator is equipped with a liquid supply line, which supplies liquid that becomes the raw material for the gas solution. A second gas dissolving section is provided in the liquid supply line, which dissolves the undissolved residual gas discharged from the second gas-liquid separator into the liquid that becomes the raw material for the gas dissolving liquid.

4. A method performed by a gas-dissolving liquid supply device, characterized in that, The gas-dissolving liquid supply device includes: A first gas-liquid separator, which stores gas dissolved in liquid; A second gas-liquid separator is disposed at the downstream end of the first gas-liquid separator and accumulates the dissolved gas supplied to the point of use. An intermediate line is provided between the first gas-liquid separator and the second gas-liquid separator; A booster pump is provided in the intermediate line to increase the pressure of the gas-liquid solution supplied from the first gas-liquid separator to the second gas-liquid separator; A first valve is provided in the liquid supply line that supplies the liquid that becomes the raw material for the gas solution; A second valve is provided in the gas solution supply line that supplies the gas solution to the point of use; A third valve is provided on the exhaust line from the first gas-liquid separator to the exhaust port; as well as A fourth valve is provided in the drainage line, which branches off from the exhaust line. The method includes: The step of supplying the gas, which becomes the raw material for the gas solution, to the intermediate line; and The step of dissolving the supplied gas in a gas solution supplied from the first gas-liquid separator. In the method, When the gas solution is supplied to the point of use, the first valve, the second valve, and the third valve are opened, and the fourth valve is closed. While cleaning the first gas-liquid separator and the second gas-liquid separator, close the second valve and the third valve and open the first valve and the fourth valve.

Images